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    Method of Producing Silicon Blocks and Silicon Wafers
    1.
    发明申请
    Method of Producing Silicon Blocks and Silicon Wafers 失效
    生产硅块和硅晶片的方法

    公开(公告)号：US20080223351A1

    公开(公告)日：2008-09-18

    申请号：US11884121

    申请日：2005-05-11

    申请人： Hiroaki Morikawa ,  Shoichi Karakida ,  Takafumi Kawasaki

    发明人： Hiroaki Morikawa ,  Shoichi Karakida ,  Takafumi Kawasaki

    IPC分类号： B28D1/00

    CPC分类号： B28D5/007 ,  B28D5/045 ,  C09K3/1463 ,  Y02P70/179

    摘要： In a method of producing silicon blocks by cutting a silicon ingot by the use of a silicon ingot cutting slurry containing abrasive grains and an alkaline substance so as to provide the silicon blocks that can be produced into silicon wafers each having a thin thickness with reduced substrate damage at the time of producing a solar battery, the content of said alkaline substance is at least 3.5 mass % with respect to the mass of the entire liquid components of said slurry, and said slurry contains an organic amine of from 0.5 to 5.0 by a mass ratio with respect to water in the liquid components of said slurry. Said slurry is used at a pH of 12 or more and at a temperature of from 65 to 95 degrees C.

    摘要翻译： 在通过使用含有磨粒和碱性物质的硅锭切割浆料切割硅锭的方法来制造硅块的方法，以便将可生产的硅块提供到具有减薄衬底的薄厚度的硅片中 在制造太阳能电池时的损伤，所述碱性物质的含量相对于所述浆料的整个液体成分的质量为至少3.5质量％，所述浆料含有0.5〜5.0的有机胺， 相对于所述浆料的液体组分中的水的质量比。 所述浆液的pH为12以上，温度为65〜95℃。

    Method of producing silicon blocks and silicon wafers
    2.
    发明授权
    Method of producing silicon blocks and silicon wafers 失效
    生产硅块和硅晶片的方法

    公开(公告)号：US07591712B2

    公开(公告)日：2009-09-22

    申请号：US11884121

    申请日：2005-05-11

    申请人： Hiroaki Morikawa ,  Shoichi Karakida ,  Takafumi Kawasaki

    发明人： Hiroaki Morikawa ,  Shoichi Karakida ,  Takafumi Kawasaki

    IPC分类号： B24B1/00

    CPC分类号： B28D5/007 ,  B28D5/045 ,  C09K3/1463 ,  Y02P70/179

    摘要： A method of producing silicon blocks by cutting a silicon ingot is provided. The method uses a silicon ingot cutting slurry containing abrasive grains and an alkaline substance so as to provide the silicon blocks that can be produced into silicon wafers each having a thin thickness with reduced substrate damage at the time of producing a solar battery. The alkaline substance has a content mass that is at least 3.5% with respect to the mass of the entire liquid components of said slurry, and the slurry contains an organic amine having a mass ratio of 0.5 to 5.0 with respect to water in the liquid components of the slurry. The slurry is used at a pH of 12 or more and at a temperature of from 65 to 95 degrees C.

    摘要翻译： 提供了通过切割硅锭来生产硅块的方法。 该方法使用含有磨料颗粒和碱性物质的硅锭切割浆料，以便在生产太阳能电池时提供可以生产成硅晶片的硅块，每个硅片具有薄的厚度，并降低衬底损伤。 碱性物质的含量相对于所述浆料的整个液体组分的质量为至少3.5％，并且所述浆料包含相对于液体组分中的水的质量比为0.5至5.0的有机胺 的浆料。 该浆液的pH为12以上，温度为65〜95℃。

    Multi-wire saw and method for cutting ingot
    3.
    发明授权
    Multi-wire saw and method for cutting ingot 失效
    多线锯和切割方法

    公开(公告)号：US08256407B2

    公开(公告)日：2012-09-04

    申请号：US12666721

    申请日：2007-06-27

    申请人： Takafumi Kawasaki ,  Seiichi Mimura ,  Hirokazu Nishida

    发明人： Takafumi Kawasaki ,  Seiichi Mimura ,  Hirokazu Nishida

    IPC分类号： B28D1/06

    CPC分类号： B24B27/0633 ,  B23D57/0023 ,  B23D57/0061 ,  B28D5/045

    摘要： To provide a multi-wire saw that, at the start of cutting of an ingot, prevents a wire from being displaced in grooves of guide rollers due to the wire being lifted. A wire is wound around a plurality of wire guide rollers to be positioned in a feeding direction of an ingot, and in this state, a wire-lifting restraining member that is a body of rotation and restrains the wire from being lifted by being brought into contact with the wire is disposed near the wire guide rollers.

    摘要翻译： 为了提供一种多线锯，其在开始切割锭时，由于导线被提升而防止导线在导向辊的槽中移位。 电线缠绕在多个电线导向辊上以沿铸锭的进给方向定位，并且在该状态下，作为转动体的线材举升限制部件被限制，并且通过进入 与导丝线接触设置在导丝辊附近。

    System, apparatus, method and program for evaluating usability to content
    4.
    发明申请
    System, apparatus, method and program for evaluating usability to content 审中-公开
    用于评估内容可用性的系统，设备，方法和程序

    公开(公告)号：US20050268172A1

    公开(公告)日：2005-12-01

    申请号：US11100078

    申请日：2005-04-05

    申请人： Nozomi Uchinomiya ,  Katsumi Kawai ,  Yoshinobu Uchida ,  Ryota Mibe ,  Chiaki Hirai ,  Keiji Minamitanti ,  Takahiro Inada ,  Jun Shijo ,  Takafumi Kawasaki ,  Kaori Kashimura ,  Yuuki Hara

    发明人： Nozomi Uchinomiya ,  Katsumi Kawai ,  Yoshinobu Uchida ,  Ryota Mibe ,  Chiaki Hirai ,  Keiji Minamitanti ,  Takahiro Inada ,  Jun Shijo ,  Takafumi Kawasaki ,  Kaori Kashimura ,  Yuuki Hara

    IPC分类号： G06Q10/00 ,  G06F11/00 ,  G06Q50/00 ,  G06Q50/10

    CPC分类号： G06F11/3476 ,  G06F11/3438 ,  G06F11/3495 ,  G06F2201/86 ,  G06F2201/875

    摘要： In the present invention, a first information processing apparatus displays a window for the content on a display device depending on operations to an input device; the first information processing apparatus obtains feedback operation logs including assessment information for the window and date-time information when the assessment information has been input; the first information processing apparatus obtains operation logs including operation information to the input device and date-time information when the operation has been input; the first information processing apparatus obtains communication logs including date-time information when the window has been displayed and information for identifying the window; the first information processing apparatus sends to a second information processing apparatus the feedback operation logs, the operation logs and the communication logs; the second information processing apparatus receives from the first information processing apparatus the feedback operation logs, the operation logs and the communication logs; the second information processing apparatus correlates information included in at least two of the feedback operation logs, the operation logs and the communication logs in chronological order based on the date-time information included in each log; and usability assessment information is thus generated for the content.

    摘要翻译： 在本发明中，第一信息处理设备根据对输入设备的操作，在显示设备上显示内容的窗口; 当输入评估信息时，第一信息处理设备获得包括窗口评估信息和日期时间信息的反馈操作日志; 第一信息处理装置在输入操作时获得包括操作信息的操作日志和输入装置的日期时间信息; 第一信息处理设备获得包括窗口已经被显示的日期时间信息和用于识别窗口的信息的通信日志; 第一信息处理装置向第二信息处理装置发送反馈操作日志，操作日志和通信日志; 第二信息处理装置从第一信息处理装置接收反馈操作日志，操作日志和通信日志; 第二信息处理设备基于每个日志中包括的日期时间信息，按照时间顺序将包括在至少两个反馈操作日志，操作日志和通信日志中的信息相关联; 从而为内容生成可用性评估信息。

    ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
    7.
    发明申请
    ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
    照明光学系统，曝光装置和装置制造方法

    公开(公告)号：US20080212061A1

    公开(公告)日：2008-09-04

    申请号：US11962774

    申请日：2007-12-21

    申请人： Takafumi Kawasaki

    发明人： Takafumi Kawasaki

    IPC分类号： G03B27/72

    CPC分类号： G02B5/005 ,  G03F7/70183 ,  G03F7/70558

    摘要： An illumination optical system which illuminates a plane to be illuminated using light from a light source, includes a diaphragm having an aperture of constant area and disposed on a pupil plane of the illumination optical system and an irradiation range adjustment unit configured to adjust an irradiation range of the light from the light source on the pupil plane, the irradiation range includes the aperture, wherein the irradiation range adjustment unit changes the irradiation range to adjust a quantity of illumination light on the plane to be illuminated.

    摘要翻译： 使用来自光源的照明平面照明的照明光学系统包括具有恒定面积的孔径且设置在照明光学系统的光瞳面上的光阑，以及照射范围调整单元，被配置为调节照射范围 在光瞳平面上来自光源的光的照射范围包括孔径，其中照射范围调节单元改变照射范围以调节要照明的平面上的照明光量。

    Multi-wire saw
    8.
    发明授权
    Multi-wire saw 有权
    多线锯

    公开(公告)号：US07306508B2

    公开(公告)日：2007-12-11

    申请号：US10540020

    申请日：2004-10-22

    申请人： Takafumi Kawasaki ,  Hirozoh Tsuruta ,  Hirokazu Nishida ,  Seiichi Mimura ,  Masayuki Hamayasu ,  Hisashi Tominaga

    发明人： Takafumi Kawasaki ,  Hirozoh Tsuruta ,  Hirokazu Nishida ,  Seiichi Mimura ,  Masayuki Hamayasu ,  Hisashi Tominaga

    IPC分类号： B24B49/00 ,  B28D1/06

    CPC分类号： B28D5/007 ,  B24B27/0633 ,  B28D5/045 ,  H01L21/304 ,  Y02P70/179

    摘要： A multi-wire saw according to the present invention cuts a workpiece while supplying a slurry containing an alkali or mixed acid to a cutting interface between the workpiece and a wire, and includes: a storage tank with a heating mechanism for storing and heating the slurry; a thermal insulating pipe for transporting the slurry sent with a pump from the storage tank with a heating mechanism to a position before a position where the wire is incorporated into the workpiece, while keeping the slurry at a predetermined temperature; a thermostat for keeping a temperature in a vicinity of the workpiece fixed to a stage at the predetermined temperature; and a wire heating mechanism for heating the wire to the predetermined temperature. Consequently, the cutting resistance decreases during cutting machining of a silicon ingot, and the variation in the cutting resistance also decreases, whereby a high-quality wafer can be obtained at a high efficiency and a low cost.

    摘要翻译： 根据本发明的多线锯在将含有碱或混合酸的浆料供给到工件和线材之间的切割界面的同时切割工件，并且包括：具有用于储存和加热浆料的加热机构的储罐 ; 绝热管，用于将具有加热机构的从所述储存罐输送的浆料输送到所述线材并入所述工件的位置之前，同时将所述浆料保持在预定温度; 用于将工件附近的温度固定在预定温度的台上的恒温器; 以及用于将线材加热到预定温度的线材加热机构。 因此，在硅锭的切割加工期间切削阻力降低，并且切削阻力的变化也降低，从而可以以高效率和低成本获得高质量的晶片。

    Multi-wire saw
    10.
    发明申请
    Multi-wire saw 有权
    多线锯

    公开(公告)号：US20060249134A1

    公开(公告)日：2006-11-09

    申请号：US10540020

    申请日：2004-10-22

    申请人： Takafumi Kawasaki ,  Hirozoh Tsuruta ,  Hirokazu Nishida ,  Seiichi Mimura ,  Masayuki Hamayasu ,  Hisashi Tominaga

    发明人： Takafumi Kawasaki ,  Hirozoh Tsuruta ,  Hirokazu Nishida ,  Seiichi Mimura ,  Masayuki Hamayasu ,  Hisashi Tominaga

    IPC分类号： B28D1/08

    CPC分类号： B28D5/007 ,  B24B27/0633 ,  B28D5/045 ,  H01L21/304 ,  Y02P70/179

    摘要： A multi-wire saw according to the present invention cuts a workpiece while supplying a slurry containing an alkali or mixed acid to a cutting interface between the workpiece and a wire, and includes: a storage tank with a heating mechanism for storing and heating the slurry; a thermal insulating pipe for transporting the slurry sent with a pump from the storage tank with a heating mechanism to a position before a position where the wire is incorporated into the workpiece, while keeping the slurry at a predetermined temperature; a thermostat for keeping a temperature in a vicinity of the workpiece fixed to a stage at the predetermined temperature; and a wire heating mechanism for heating the wire to the predetermined temperature. Consequently, the cutting resistance decreases during cutting machining of a silicon ingot, and the variation in the cutting resistance also decreases, whereby a high-quality wafer can be obtained at a high efficiency and a low cost.

    摘要翻译： 根据本发明的多线锯在将含有碱或混合酸的浆料供给到工件和线材之间的切割界面的同时切割工件，并且包括：具有用于储存和加热浆料的加热机构的储罐 ; 绝热管，用于将具有加热机构的从所述储存罐输送的浆料输送到所述线材并入所述工件的位置之前，同时将所述浆料保持在预定温度; 用于将工件附近的温度固定在预定温度的台上的恒温器; 以及用于将线材加热到预定温度的线材加热机构。 因此，在硅锭的切割加工期间切削阻力降低，并且切削阻力的变化也降低，从而可以以高效率和低成本获得高质量的晶片。