摘要:
A new and improved method for growing a p-type nitride III-V compound semiconductor is provided which can produce a p-type nitride compound semiconductors having a high carrier concentration, without the need for annealing to activate impurities after growth. In a preferred embodiment, a p-type nitride compound semiconductor, such as p-type GaN, is grown by metal organic chemical vapor deposition methods using a nitrogen source material which does not release hydrogen during release of nitrogen and the semiconductor is grown in an inactive gas. The nitrogen source materials may be selected from nitrogen compounds that contain hydrogen radicals groups and alkyl radicals groups and/or phenyl radicals groups provided that the total amount of hydrogen radicals groups is less than or equal to the sum total of alkyl radicals groups and phenyl radicals groups present in the nitrogen compound used as the nitrogen source material.
摘要:
A new and improved method for growing a p-type nitride III-V compound semiconductor is provided which can produce a p-type nitride compound semiconductors having a high carrier concentration, without the need for annealing to activate impurities after growth. In a preferred embodiment, a p-type nitride compound semiconductor, such as p-type GaN, is grown by metal organic chemical vapor deposition methods using a nitrogen source material which does not release hydrogen during release of nitrogen and the semiconductor is grown in an inactive gas. The nitrogen source materials may be selected from nitrogen compounds that contain hydrogen radicals and alkyl radicals and/or phenyl radicals provided that the total amount of hydrogen radicals is less than or equal to the sum total of alkyl radicals and phenyl radicals present in the nitrogen compound used as the nitrogen source material.
摘要:
A new and improved method for growing a p-type nitride III-V compound semiconductor is provided which can produce a p-type nitride compound semiconductors having a high carrier concentration, without the need for annealing to activate impurities after growth. In a preferred embodiment, a p-type nitride compound semiconductor, such as p-type GaN, is grown by metal organic chemical vapor deposition methods using a nitrogen source material which does not release hydrogen during release of nitrogen and the semiconductor is grown in an inactive gas. The nitrogen source materials may be selected from nitrogen compounds that contain hydrogen radicals and alkyl radicals and/or phenyl radicals provided that the total amount of hydrogen radicals is less than or equal to the sum total of alkyl radicals and phenyl radicals present in the nitrogen compound used as the nitrogen source material.
摘要:
Disclosed herein is an insulating nitride layer suitable for group III-V nitride semiconductor devices. It has a high resistance and good insulating properties and hence it electrically isolates elements, without the active layer decreasing in conductivity. Disclosed also herein is a process for forming said nitride layer and a semiconductor device having said nitride layer for improved characteristic properties. The semiconductor device is an AlGaN/GaN HEMT or the like which has a GaN active layer and an insulating nitride layer formed thereon from a group III-V nitride compound semiconductor heavily doped mostly with a group IIB element (particularly Zn) in an amount not less than 1×1017/cm3.
摘要翻译:本文公开了适用于III-V族氮化物半导体器件的绝缘氮化物层。 它具有高电阻和良好的绝缘性能,因此电气隔离元件,而电导率不会降低活性层。 此处还公开了用于形成所述氮化物层的方法和具有用于改善特性的所述氮化物层的半导体器件。 半导体器件是AlGaN / GaN HEMT等,其具有由主要以IIB族元素(特别是Zn)重量掺杂的III-V族氮化物化合物半导体形成的GaN有源层和绝缘氮化物层, 小于1×10 17 / cm 3。
摘要:
A judging device comprises a catalyst, an upstream air/fuel ratio sensor having an air/fuel ratio sensing element covered with a diffusion resistance layer, and a downstream air/fuel ratio sensor. The judging device performs main feedback control to equalize the air/fuel ratio indicated by the output value of the upstream air/fuel ratio sensor to an upstream target air/fuel ratio and sub-feedback control to equalize the output value of the downstream air/fuel ratio sensor to a downstream target value. The judging device acquires “an imbalance judging parameter” which increases with “the increase of the difference between the amount of hydrogen contained in the exhaust gas before the exhaust gas passes through the catalyst and that after the exhaust gas passes through the catalyst” according to the sub-feedback amount. When the imbalance judging parameter is larger than an abnormality judgment threshold, the judging device judges that an air/fuel ratio imbalance among the cylinders has occurred. The judging device does not make judgment on air/fuel ratio imbalance among the cylinders if a predetermined judgment prohibition condition is satisfied, for example, if the flow of the exhaust gas is a predetermined value or more.
摘要:
An air-fuel ratio imbalance among cylinders determining apparatus according to the present invention comprises an air-fuel ratio sensor having a protective cover and an air-fuel ratio detection element accommodated in the protective cover, and imbalance determining means. The imbalance determining means obtains a detected air-fuel ratio abyfs based on an output Vabyfs of the air-fuel ratio sensor every elapse of a constant sampling time ts, and obtains, as an indicating amount of air-fuel ratio change rate, a difference (detected air-fuel ratio change rate ΔAF) between a present detected air-fuel ratio abyfs which is newly detected and a previous air-fuel ratio abyfsold which was detected the sampling time ts ago, an average of the detected air-fuel ratio change rate ΔAF, and the like. The imbalance determining means determines that the air-fuel ratio imbalance among cylinders state is occurring, when a magnitude of the indicating amount of air-fuel ratio change rate is larger than an imbalance determination threshold.
摘要:
An apparatus for determining an air-fuel ratio imbalance among cylinders based on an output value of an air-fuel ratio sensor, an imbalance determination parameter which becomes larger or smaller as a difference among air-fuel ratios becomes larger, and performs determining an air-fuel ratio imbalance among cylinders based on a result of a comparison between the imbalance determination parameter and a imbalance determination threshold. The determining apparatus calculates a purge correction coefficient which compensates for a change in the air-fuel ratio due to an evaporated fuel gas which is generated in a fuel tank, while the evaporated fuel gas is being introduced into an intake passage, and corrects a fuel injection amount with the purge correction coefficient FPG.
摘要:
An apparatus for determining an air-fuel ratio imbalance among cylinders including an upstream air-fuel ratio sensor, a catalytic converter, and a downstream air-fuel ratio sensor disposed at positions downstream of an exhaust gas aggregated portion, calculates a sub feedback amount to have an output value of the downstream air-fuel ratio sensor coincides with a value corresponding to the stoichiometric air-fuel ratio, and performs an air-fuel ratio feedback control to have an air-fuel ratio of a mixture supplied to an engine based on the sub feedback amount and the output value of the upstream air-fuel ratio sensor.
摘要:
A monitoring apparatus including a catalytic converter, an upstream air-fuel ratio sensor, and a downstream air-fuel ratio sensor; calculates a sub feedback amount to have an air-fuel ratio represented based on an output value of the downstream air-fuel ratio sensor coincide with a stoichiometric air-fuel ratio; and controls an fuel injection amount based on an output value of the upstream air-fuel ratio sensor and the sub feedback amount, in such a manner that an air-fuel ratio of a mixture supplied to an engine coincides with the stoichiometric air-fuel ratio.
摘要:
An apparatus or a method for detecting an abnormality of inter-cylinder air-fuel ratio dispersion in a multi-cylinder internal combustion engine according to the invention is equipped with a catalytic element that purifies exhaust gas of hydrogen, a first air-fuel ratio sensor that detects an air-fuel ratio of exhaust gas that has not passed through the catalytic element, a second air-fuel ratio sensor that detects an air-fuel ratio of exhaust gas that has passed through the catalytic element, a device that detects an abnormality of inter-cylinder air-fuel ratio dispersion on the basis of a divergence state of a detected value of a second air-fuel ratio to a lean side from a detected value of a first air-fuel ratio, and a device that forcibly reduces fuel injection amounts in cylinders individually when an abnormality on dispersion is detected by the abnormality detector, detects a divergence state of the detected value of the second air-fuel ratio to the lean side from the detected value of the first air-fuel ratio at this time, and specifies as an abnormal cylinder that one of the cylinders in which a value indicating this divergence state has become smaller than at a time of detection of the abnormality of dispersion.