Photomagnetic memory medium having a non-columnar structure
    1.
    发明授权
    Photomagnetic memory medium having a non-columnar structure 失效
    具有非色谱结构的光学记忆介质

    公开(公告)号:US5135819A

    公开(公告)日:1992-08-04

    申请号:US264553

    申请日:1988-10-31

    IPC分类号: G11B11/10 G11B11/105

    CPC分类号: G11B11/10589 Y10S428/90

    摘要: A photomagnetic memory medium of an amorphous thin film of a rare-earth transition metal alloy of non-columnar structure deposited on a substrate. In order to achieve the non-columnar structure, the alloy is sputtered in the presence of a plasma but the plasma is confined by a magnetic field so as not to touch the substrate. The alloy is preferably TbFeCo.

    摘要翻译: 沉积在基板上的非柱状结构的稀土过渡金属合金的非晶薄膜的光磁记录介质。 为了实现非柱状结构,在等离子体的存在下溅射合金,但是等离子体被磁场约束以便不接触基板。 合金优选为TbFeCo。

    Method for producing a perpendicular magnetic recording medium
    2.
    发明授权
    Method for producing a perpendicular magnetic recording medium 失效
    用于制造垂直磁记录介质的方法

    公开(公告)号:US4407894A

    公开(公告)日:1983-10-04

    申请号:US329822

    申请日:1981-12-11

    摘要: Magnetic recording medium conventionally utilizes the in-plane magnetization mode, but, recently, the perpendicular magnetization mode utilizing the perpendicular anistropy of an hcp cobalt alloy layer, in which C axis is oriented normal to the layer surface, is proposed. The known perpendicular magnetic recording medium has been produced by an RF sputtering, but such medium is of too low flexibility to use it in the form of a magnetic tape. In addition, the production rate of the perpendicular magnetic recording medium by RF sputtering is very low.The perpendicular magnetic recording medium is very flexible due to particle pattern (FIGS. 10, 12 and 13) completely distinct from the conventional columnar pattern (FIGS. 8 and 11). In addition, the production rate is high, because the base (20) is located beside a space between the targets (T.sub.1, T.sub.2) of a sputtering device and further the magnetic field is generated perpendicularly to the sputtering surfaces (T.sub.1s, T.sub.2s) by a field coil (31) or magnets (32, 33). The present invention makes it possible to commercially produce the perpendicular magnetic recording medium, especially in the tape form.

    摘要翻译: 磁记录介质常规地利用了平面内磁化模式,但是最近,提出了利用h轴钴合金层的垂直磁场的垂直磁化模式,其中C轴垂直于层表面。 已知的垂直磁记录介质是通过RF溅射制造的,但这种介质的灵活性太低,无法以磁带的形式使用。 此外,通过RF溅射的垂直磁记录介质的生产速率非常低。 垂直磁记录介质由于与传统柱状图(图8和11)完全不同的颗粒图案(图10,12和13)而非常柔软。 此外,由于基极(20)位于溅射装置的靶(T1,T2)之间的空间旁边,所以生产率高,并且还通过垂直于溅射表面(T1s,T2)的溅射表面(T1s,T2)产生磁场 励磁线圈(31)或磁体(32,33)。 本发明使得可以商业上生产垂直磁记录介质,特别是带状形式。

    Mirrortron sputtering apparatus
    3.
    发明授权
    Mirrortron sputtering apparatus 失效
    Mirrortron溅射装置

    公开(公告)号:US06649036B2

    公开(公告)日:2003-11-18

    申请号:US09781102

    申请日:2001-02-08

    IPC分类号: C23C1435

    摘要: A mirrortron sputtering apparatus for sputtering on a substrate includes a vacuum chamber for placing therein a pair of targets spaced apart from each other with inner surfaces thereof facing each other and outer surfaces thereof positioned opposite to the inner surfaces, and magnets respectively disposed closer to the outer surfaces of the targets for forming a magnetic field between said pair of targets. The magnetic field has a magnetic field distribution with a peripheral region having a high magnetic flux density and a center region having a low magnetic flux density. In this arrangement, the substrate is set alongside a space between the pair of targets as facing said magnetic field.

    摘要翻译: 用于在基板上溅射的金刚石溅射装置包括:真空室,用于在其中放置一对彼此间隔的目标,其内表面彼此面对,并且其外表面与内表面相对,并且分别设置在更靠近 所述靶的外表面用于在所述一对靶之间形成磁场。 磁场具有具有磁通密度高的周边区域和具有低磁通密度的中心区域的磁场分布。 在这种布置中,将衬底与面对所述磁场的一对靶之间的空间设置。

    Method of ion beam generation and an apparatus based on such method
    4.
    发明授权
    Method of ion beam generation and an apparatus based on such method 失效
    离子束产生方法和基于这种方法的装置

    公开(公告)号:US4690744A

    公开(公告)日:1987-09-01

    申请号:US630514

    申请日:1984-07-13

    摘要: There is provided a method of ion beam generation wherein a plurality of opposing targets are sputtered by plasma generated in a space confined by these targets and ionized particles thereby generated are led outside of the above space in a given direction under presence of an electric field.In connection to this method, an ion beam generator is disclosed comprising a plurality of targets, a plasma generating means to generate plasma necessary to sputter these targets in a space confined by these targets and a control electrode to lead ionized particles generated by sputtering with the above plasma outside of such space under control of their energy.

    摘要翻译: 提供了一种离子束产生的方法,其中通过在这些靶所限制的空间中产生的等离子体溅射多个相对的靶子,由此产生的离子化粒子在电场存在下沿给定方向被引导到上述空间外部。 关于该方法,公开了一种离子束发生器,其包括多个靶,等离子体产生装置,用于产生在由这些靶限制的空间中溅射这些靶所需的等离子体,以及控制电极,以引导通过溅射产生的电离粒子 上述等离子体在这种空间之外,在其能量的控制下。

    Perpendicular magnetic recording medium method for producing the same,
and sputtering device
    5.
    发明授权
    Perpendicular magnetic recording medium method for producing the same, and sputtering device 失效
    垂直磁记录介质的制造方法及溅射装置

    公开(公告)号:US4576700A

    公开(公告)日:1986-03-18

    申请号:US466863

    申请日:1983-02-16

    CPC分类号: G11B5/851 G11B5/66

    摘要: A magnetic recording medium conventionally utilizes the in-plane magnetization mode, but recently the perpendicular magnetization mode utilizing the perpendicular anisotropy of an hcp cobalt alloy layer, in which the C axis is oriented perpendicular to the layer surface, has been proposed. The known perpendicular magnetic recording medium is produced by means of RF sputtering and comprises a Permalloy layer, as layer of a low coercive-force material, between the nonmagnetic base and the hcp cobalt alloy layer. The perpendicular anisotropy attained by the present invention in very excellent and is superior to that of a perpendicular recording medium having no Permalloy layer because a Co-Ta alloy is used as the layer of a low coercive-force material.

    摘要翻译: 磁记录介质通常使用平面内磁化模式,但是最近提出了利用垂直于层表面C轴定向的hcp钴合金层的垂直各向异性的垂直磁化模式。 已知的垂直磁记录介质通过RF溅射制造,并且在非磁性基底和hcp钴合金层之间包括作为低矫顽力材料层的坡莫合金层。 由于使用Co-Ta合金作为低矫顽力材料层,本发明获得的垂直各向异性非常优异并优于不具有坡莫合金层的垂直记录介质。

    Perpendicular magnetic recording medium, method for producing the same,
and sputtering device
    7.
    发明授权
    Perpendicular magnetic recording medium, method for producing the same, and sputtering device 失效
    垂直磁记录介质及其制造方法以及溅射装置

    公开(公告)号:US4842708A

    公开(公告)日:1989-06-27

    申请号:US22664

    申请日:1987-03-06

    IPC分类号: G11B5/66 G11B5/851

    摘要: A magnetic recording medium conventionally utilizes the in-plane magnetization mode, but recently the perpendicular magnetization mode utilizing the perpendicular anisotropy of an hcp cobalt alloy layer, in which the C axis is oriented perpendicular to the layer surface, has been proposed. The known perpendicular magnetic recording medium is produced by means of RF sputtering and comprises a Permalloy layer, as layer of a low coercive-force material, between the nonmagnetic base and the hcp cobalt alloy layer. The perpendicular anisotropy attained by the present invention in very excellent and is superior to that of a perpendicular recording medium having no Permalloy layer because a Co-Ta alloy is used as the layer of a low coercive-force material.

    摘要翻译: 磁记录介质通常使用平面内磁化模式,但是最近提出了利用垂直于层表面C轴定向的hcp钴合金层的垂直各向异性的垂直磁化模式。 已知的垂直磁记录介质通过RF溅射制造,并且在非磁性基底和hcp钴合金层之间包括作为低矫顽力材料层的坡莫合金层。 由于使用Co-Ta合金作为低矫顽力材料层,本发明获得的垂直各向异性非常优异并优于不具有坡莫合金层的垂直记录介质。

    Perpendicular magnetic recording medium, method for producing the same,
and sputtering device
    8.
    发明授权
    Perpendicular magnetic recording medium, method for producing the same, and sputtering device 失效
    垂直磁记录介质及其制造方法以及溅射装置

    公开(公告)号:US4666788A

    公开(公告)日:1987-05-19

    申请号:US819229

    申请日:1986-01-15

    IPC分类号: G11B5/66 G11B5/851 H01F1/00

    摘要: A magnetic recording medium conventionally utilizes the in-plane magnetization mode, but recently the perpendicular magnetization mode utilizing the perpendicular anisotropy of an hcp cobalt alloy layer, in which the C axis is oriented perpendicular to the layer surface, has been proposed. The known perpendicular magnetic recording medium is produced by means of RF sputtering and comprises a Permalloy layer, as layer of a low coercive-force material, between the nonmagnetic base and the hcp cobalt alloy layer. The perpendicular anisotropy attained by the present invention is very excellent and is superior to that of a perpendicular recording medium having no Permalloy layer because a Co-Ta alloy is used as the layer of a low coercive-force material.

    摘要翻译: 磁记录介质通常使用平面内磁化模式,但是最近提出了利用垂直于层表面C轴定向的hcp钴合金层的垂直各向异性的垂直磁化模式。 已知的垂直磁记录介质通过RF溅射制造,并且在非磁性基底和hcp钴合金层之间包括作为低矫顽力材料层的坡莫合金层。 由于使用Co-Ta合金作为低矫顽力材料的层,本发明获得的垂直各向异性非常优异,并且优于不具有坡莫合金层的垂直记录介质。

    Perpendicular magnetic recording medium
    9.
    发明授权
    Perpendicular magnetic recording medium 失效
    垂直磁记录介质

    公开(公告)号:US4507364A

    公开(公告)日:1985-03-26

    申请号:US502662

    申请日:1983-07-14

    摘要: Magnetic recording medium conventionally utilizes the in-plane magnetization mode, but, recently, the perpendicular magnetization mode utilizing the perpendicular anisotropy of an hcp cobalt alloy layer, in which C axis is oriented normal to the layer surface, is proposed. The known perpendicular magnetic recording medium has been produced by an RF sputtering, but such medium is of too low flexibility to use it in the form of a magnetic tape. In addition, the production rate of the perpendicular magnetic recording medium by RF sputtering is very low.The perpendicular magnetic recording medium is very flexible due to particle pattern (FIGS. 10, 12 and 13) completely distinct from the conventional columnar pattern (FIGS. 8 and 11). In addition, the production rate is high, because the base (20) is located beside a space between the targets (T.sub.1, T.sub.2) of a sputtering device and further the magnetic field is generated perpendicularly to the sputtering surfaces (T.sub.1s, T.sub.2s) by a field coil (32) or magnets (32, 33). The present invention makes it possible to commercially produce the perpendicular magnetic recording medium, especially in the tape form.