公开(公告)号：US20090173887A1

公开(公告)日：2009-07-09

申请号：US12349708

申请日：2009-01-07

申请人： Hiroyuki ITO ,  Yuko Sasaki ,  Ryoichi Ishii ,  Takashi Doi

发明人： Hiroyuki ITO ,  Yuko Sasaki ,  Ryoichi Ishii ,  Takashi Doi

IPC分类号： H01J3/20

CPC分类号： H01J37/153 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/1534

摘要： The invention relates to a trajectory correction method for a charged particle beam, and provides a low-cost, high accuracy and high-resolution converging optical system for use with a charged particle beam to solve problems with conventional aberration correction systems. To this end, the present invention uses a configuration which forms electromagnetic field which is concentrated towards a center of a beam trajectory axis, causes oblique of the beam to make use of lens effects and bend the trajectory, and consequently, cancels out large external side non-linear effects such a spherical aberration of the electron lens. Specifically, the configuration generates an electric field concentration in a simple manner by providing electrodes above the axis and applying voltages to the electrodes. Further, the above configuration can be realized trough operations using lenses and deflectors with incident axes and image formation positions that are normal.

摘要翻译： 本发明涉及一种用于带电粒子束的轨迹校正方法，并且提供了一种用于带电粒子束的低成本，高精度和高分辨率会聚光学系统，以解决常规像差校正系统的问题。 为此，本发明使用形成朝向光束轨迹轴的中心集中的电磁场的结构，使得光束的倾斜利用透镜效果并弯曲轨迹，因此抵消了大的外侧 电子透镜的非线性效应如球面像差。 具体地说，该配置通过在轴上方设置电极并向电极施加电压，以简单的方式产生电场浓度。 此外，可以通过使用具有入射轴和成像位置的透镜和偏转器的槽操作来实现上述配置。

公开(公告)号：US07875858B2

公开(公告)日：2011-01-25

申请号：US12349708

申请日：2009-01-07

申请人： Hiroyuki Ito ,  Yuko Sasaki ,  Ryoichi Ishii ,  Takashi Doi

发明人： Hiroyuki Ito ,  Yuko Sasaki ,  Ryoichi Ishii ,  Takashi Doi

IPC分类号： H01J1/50 ,  G21K1/08 ,  G21K1/093

CPC分类号： H01J37/153 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/1534

摘要： The invention relates to a trajectory correction method for a charged particle beam, and provides a low-cost, high accuracy and high-resolution converging optical system for use with a charged particle beam to solve problems with conventional aberration correction systems. To this end, the present invention uses a configuration which forms electromagnetic field which is concentrated towards a center of a beam trajectory axis, causes oblique of the beam to make use of lens effects and bend the trajectory, and consequently, cancels out large external side non-linear effects such a spherical aberration of the electron lens. Specifically, the configuration generates an electric field concentration in a simple manner by providing electrodes above the axis and applying voltages to the electrodes. Further, the above configuration can be realized trough operations using lenses and deflectors with incident axes and image formation positions that are normal.

摘要翻译： 本发明涉及一种用于带电粒子束的轨迹校正方法，并且提供了一种用于带电粒子束的低成本，高精度和高分辨率会聚光学系统，以解决常规像差校正系统的问题。 为此，本发明使用形成朝向光束轨迹轴的中心集中的电磁场的结构，使得光束的倾斜利用透镜效果并弯曲轨迹，因此抵消了大的外侧 电子透镜的非线性效应如球面像差。 具体地说，该配置通过在轴上方设置电极并向电极施加电压，以简单的方式产生电场浓度。 此外，可以通过使用具有入射轴和成像位置的透镜和偏转器的槽操作来实现上述配置。

公开(公告)号：US20130200271A1

公开(公告)日：2013-08-08

申请号：US13812842

申请日：2011-06-08

申请人： Ryoichi Ishii ,  Takashi Doi ,  Osamu Sato ,  Yasushi Ebizuka

发明人： Ryoichi Ishii ,  Takashi Doi ,  Osamu Sato ,  Yasushi Ebizuka

IPC分类号： H01J37/18

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J2237/2001 ,  H01J2237/2802

摘要： The objective of the present invention is to provide a charged particle beam device such that a tip part can be effectually maintained in a clean state, while the frequency of valve body replacements is also reduced. To achieve the objective, a charged particle beam device is offered, comprising: a partition that is positioned between a charged particle source-side vacuum space and a specimen stage-side vacuum space, said partition further comprising an opening for a charged particle beam to pass through; a driver mechanism that moves a shutter member between a first location within the optical axis of the charged particle beam and a second location outside the optical axis of the charged particle beam; and a control device that controls the driver mechanism. The first location is a location wherein the shutter member is distanced from the partition, and the control device carries out a control that opens a valve between the specimen chamber and the exchange chamber when the shutter member is in a state of being located in the first location.

摘要翻译： 本发明的目的是提供一种带电粒子束装置，使得尖端部分可以有效地保持在清洁状态，同时阀体更换的频率也降低。 为了实现该目的，提供一种带电粒子束装置，包括：分隔件，位于带电粒子源侧真空空间和样品台侧真空空间之间，所述隔板还包括用于带电粒子束的开口 通过; 驱动器机构，其将快门部件移动到带电粒子束的光轴内的第一位置与带电粒子束的光轴外的第二位置; 以及控制驱动器机构的控制装置。 第一位置是其中挡板构件与分隔件隔开的位置，并且当挡板构件处于位于第一位置的状态时，控制装置执行在样本室和更换室之间打开阀的控制 位置。

公开(公告)号：US08933422B2

公开(公告)日：2015-01-13

申请号：US13812842

申请日：2011-06-08

申请人： Ryoichi Ishii ,  Takashi Doi ,  Osamu Sato ,  Yasushi Ebizuka

发明人： Ryoichi Ishii ,  Takashi Doi ,  Osamu Sato ,  Yasushi Ebizuka

IPC分类号： H01J37/18 ,  H01J37/16

CPC分类号： H01J37/18 ,  H01J37/16 ,  H01J37/185 ,  H01J2237/2001 ,  H01J2237/2802

摘要： The objective of the present invention is to provide a charged particle beam device such that a tip part can be effectually maintained in a clean state, while the frequency of valve body replacements is also reduced. To achieve the objective, a charged particle beam device is offered, comprising: a partition that is positioned between a charged particle source-side vacuum space and a specimen stage-side vacuum space, said partition further comprising an opening for a charged particle beam to pass through; a driver mechanism that moves a shutter member between a first location within the optical axis of the charged particle beam and a second location outside the optical axis of the charged particle beam; and a control device that controls the driver mechanism. The first location is a location wherein the shutter member is distanced from the partition, and the control device carries out a control that opens a valve between the specimen chamber and the exchange chamber when the shutter member is in a state of being located in the first location.

摘要翻译： 本发明的目的是提供一种带电粒子束装置，使得尖端部分可以有效地保持在清洁状态，同时阀体更换的频率也降低。 为了实现该目的，提供一种带电粒子束装置，包括：分隔件，位于带电粒子源侧真空空间和样品台侧真空空间之间，所述隔板还包括用于带电粒子束的开口 通过; 驱动器机构，其将快门部件移动到带电粒子束的光轴内的第一位置与带电粒子束的光轴外的第二位置; 以及控制驱动器机构的控制装置。 第一位置是其中挡板构件与分隔件隔开的位置，并且当挡板构件处于位于第一位置的状态时，控制装置执行在样本室和更换室之间打开阀的控制 位置。

公开(公告)号：US08334520B2

公开(公告)日：2012-12-18

申请号：US13124599

申请日：2009-10-22

申请人： Tadashi Otaka ,  Hiroyuki Ito ,  Ryoichi Ishii ,  Manabu Yano ,  Hajime Kawano

发明人： Tadashi Otaka ,  Hiroyuki Ito ,  Ryoichi Ishii ,  Manabu Yano ,  Hajime Kawano

IPC分类号： H01J37/26

CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/20214 ,  H01J2237/2811 ,  H01J2237/2817

摘要： An exemplary a charged particle beam apparatus converts an inspection position on a test sample (wafer coordinate system) to a setting position of an inspection mechanism (stage coordinate system (polar coordinate system)), a rotating arm and a rotating stage being rotated to be moved for the inspection position on the test sample. In this case, inspection devices are arranged over a locus that is drawn by the center of the rotating stage according to the rotation of the rotating arm. A function for calculating errors (e.g., center shift of the rotating stage) and compensating for the errors is provided, by which the precision of inspection is improved in a charged particle beam apparatus equipped with a biaxial rotating stage mechanism.

摘要翻译： 一种带电粒子束装置的示例将测试样品（晶片坐标系）上的检查位置转换成检查机构（载台坐标系（极坐标系））的设置位置，旋转臂和旋转台旋转为 移动到测试样品上的检查位置。 在这种情况下，检查装置设置在由旋转台的旋转中心旋转的轨迹上。 提供了一种用于计算误差（例如，旋转台的中心偏移）和补偿误差的功能，通过该功能，在装备有双轴旋转平台机构的带电粒子束装置中提高了检查精度。

公开(公告)号：US20110260057A1

公开(公告)日：2011-10-27

申请号：US13124599

申请日：2009-10-22

申请人： Tadashi Otaka ,  Hiroyuki Ito ,  Ryoichi Ishii ,  Manabu Yano ,  Hajime Kawano

发明人： Tadashi Otaka ,  Hiroyuki Ito ,  Ryoichi Ishii ,  Manabu Yano ,  Hajime Kawano

IPC分类号： H01J37/26

CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/20214 ,  H01J2237/2811 ,  H01J2237/2817

摘要： According to a charged particle beam apparatus of this invention, an inspection position on a test sample (wafer coordinate system) is converted to a setting position of an inspection mechanism (stage coordinate system (polar coordinate system)), a rotating arm (102,1012) and a rotating stage (103,1011) being rotated to be moved for the inspection position on the test sample.In this case, a plurality of inspection devices are arranged over a locus that is drawn by the center of the rotating stage according to the rotation of the rotating arm. A function for calculating errors (e.g., center shift of the rotating stage) and compensating for the errors is provided, by which the precision of inspection is improved in a charged particle beam apparatus equipped with a biaxial rotating stage mechanism. With this configuration, a charged particle beam apparatus which is small-sized and capable of easy stage control can be realized.

摘要翻译： 根据本发明的带电粒子束装置，将测试样品（晶片坐标系）上的检查位置转换为检查机构（载台坐标系（极坐标系））的设定位置，旋转臂（102， 1012）和旋转台（103,1011）旋转以移动以用于测试样品上的检查位置。 在这种情况下，根据旋转臂的旋转，将多个检查装置布置在由旋转台的中心拉伸的轨迹上。 提供了一种用于计算误差（例如，旋转台的中心偏移）和补偿误差的功能，通过该功能，在装备有双轴旋转平台机构的带电粒子束装置中提高了检查精度。 利用这种结构，可以实现小型化并且能够容易地进行阶段控制的带电粒子束装置。

公开(公告)号：US06250188B1

公开(公告)日：2001-06-26

申请号：US09489028

申请日：2000-01-21

申请人： Shigeru Sato ,  Ryoichi Ishii

发明人： Shigeru Sato ,  Ryoichi Ishii

IPC分类号： B26D100

CPC分类号： B26D7/086 ,  Y10S83/956 ,  Y10T83/04 ,  Y10T83/0505 ,  Y10T83/364 ,  Y10T83/536 ,  Y10T83/538 ,  Y10T83/7793 ,  Y10T83/9379

摘要： An ultrasonic vibration cutting method comprising mounting and fixing a part to be cut on a mounting table, moving down an ultrasonic vibration rotation unit, stopping the downward movement of the ultrasonic vibration rotation unit when the cutting blade of the ultrasonic vibration rotation unit reaches a position for cutting the part, moving the ultrasonic vibration rotation unit linearly for cutting, and turning and vibrating the cutting blade with ultrasonic waves to cut the part.

摘要翻译： 一种超声波振动切断方法，其特征在于，在所述超声波振动旋转单元的切割刀片达到位置时，将安装台上的被切割部件安装固定在所述超声波振动旋转单元的下方，停止所述超声波振动旋转单元的向下移动， 用于切割部分，使超声波振动旋转单元线性移动以进行切割，并且用超声波旋转和振动切割刀片以切割该部件。

公开(公告)号：US5884833A

公开(公告)日：1999-03-23

申请号：US839318

申请日：1997-04-17

申请人： Shigeru Sato ,  Mitsugu Katsumi ,  Ryoichi Ishii

发明人： Shigeru Sato ,  Mitsugu Katsumi ,  Ryoichi Ishii

IPC分类号： B23K1/08 ,  B06B1/02 ,  B23K3/06 ,  B23K3/00

CPC分类号： B23K3/0653

摘要： A support portion for attaching a horn main body to a solder tank is provided on the horn main body at a nodal point f2 and ultrasonic vibration from an external transducer is transmitted to solder in the solder tank through the horn main body.

摘要翻译： 在喇叭主体上，在节点f2处设置用于将喇叭主体连接到焊料槽的支撑部分，并且来自外部换能器的超声波振动通过喇叭主体传递到焊料槽中的焊料。

公开(公告)号：US20080197282A1

公开(公告)日：2008-08-21

申请号：US12031754

申请日：2008-02-15

申请人： Yoshihiko Nakayama ,  Isao Nagaoki ,  Ryoichi Ishii

发明人： Yoshihiko Nakayama ,  Isao Nagaoki ,  Ryoichi Ishii

IPC分类号： G01N23/00

CPC分类号： H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/24475 ,  H01J2237/2804

摘要： There is provided a scanning transmission charged particle beam device by which charged particles of a bright-field image and charged particles of a dark-field image may be clearly separated, and bright-field images and dark-field images with high accuracy may be obtained even in a state in which the scanning range of a charged particle beams on a sample is changed.A deflecting coil is provided below a sample, and a charged particle detector for a dark-field image with an opening is provided below the deflecting coil. A charged particle detector for a bright-field image is provided below the above opening. By the deflecting coil below the sample, a charged particle beam for a bright-field image is configured to be synchronized with the scanning of a particle beam, and to be deflected in an opposite direction to the deflected direction of the particle beam. Thereby, a charged particles beam of a bright-field image passes through the opening of the charged particle detector for a dark-field image, and is detected by the charged particle detector for a bright-field image.

摘要翻译： 提供了一种扫描透射带电粒子束装置，通过该扫描透射带电粒子束装置可以清晰地分离亮场图像的带电粒子和暗场图像的带电粒子，并且可以获得高精度的亮场图像和暗视场图像 即使在样品上的带电粒子束的扫描范围发生变化的状态。 在样品下方设置偏转线圈，并且在偏转线圈的下方设置用于具有开口的暗场图像的带电粒子检测器。 在上述开口的下方设置用于明场图像的带电粒子检测器。 通过样品下方的偏转线圈，用于亮场图像的带电粒子束被配置为与粒子束的扫描同步，并且在与粒子束的偏转方向相反的方向上偏转。 因此，亮场图像的带电粒子束通过带电粒子检测器的开口进行暗场图像，并且由带电粒子检测器检测到用于亮场图像。

公开(公告)号：US07365323B2

公开(公告)日：2008-04-29

申请号：US11354067

申请日：2006-02-15

申请人： Tomohisa Ohtaki ,  Kenichi Hirane ,  Ryoichi Ishii ,  Haruhisa Takahata

发明人： Tomohisa Ohtaki ,  Kenichi Hirane ,  Ryoichi Ishii ,  Haruhisa Takahata

IPC分类号： H01J37/28

CPC分类号： H01J37/265 ,  G01N23/04 ,  H01J37/09 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2608

摘要： In an environmental scanning electron microscope in which differential pumping for maintaining the pressure ratio between an electron optical system and a specimen chamber at a predetermined value is effected and a probe electric current is conditioned to meet a predetermined or more value so as to permit observation of uncooked food and moist specimens in low vacuum, there are provided three stages of objective apertures used as apertures for an objective lens for an electron beam in the electron optical system and used also as orifices for differential pumping for maintaining the pressure ratio between the electron optical system and the specimen chamber at a predetermined value. Then, a deflection fulcrum of the electron beam in the electron optical system is set at a mid stage of the three-stage objective aperture.

摘要翻译： 在环境扫描电子显微镜中，其中实现将电子光学系统和样品室之间的压力比保持在预定值的差分泵浦，并且调节探针电流以满足预定值或更大的值，以便能够观察 在低真空中的未煮过的食物和潮湿样品中，提供了三级物镜孔，用作电子光学系统中用于电子束的物镜的孔，并且还用作差分泵浦的孔，用于保持电子光学 系统和样本室处于预定值。 然后，将电子光学系统中的电子束的偏转支点设置在三级物镜孔的中间阶段。