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公开(公告)号：US20130183837A1
公开(公告)日：2013-07-18
申请号：US13714896
申请日：2012-12-14
Applicant: IMRA America, Inc.
Inventor： Alan Y. Arai , Gyu Cheon Cho , Jingzhou Xu
IPC: H01L21/268
CPC classification number: H01L21/67092 , B23K26/0006 , B23K26/40 , B23K26/53 , B23K2103/16 , B23K2103/172 , H01L21/2686 , H01L21/78 , H01L33/0095 , Y10S438/94
Abstract: Examples of methods and systems for laser processing of materials are disclosed. Methods and systems for singulation of a wafer comprising a coated substrate can utilize a laser outputting light that has a wavelength that is transparent to the wafer substrate but which may not be transparent to the coating layer(s). Using techniques for managing fluence and focal condition of the laser beam, the coating layer(s) and the substrate material can be processed through ablation and internal modification, respectively. The internal modification can result in die separation.
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公开(公告)号：US20150136744A1
公开(公告)日：2015-05-21
申请号：US14607991
申请日：2015-01-28
Applicant: IMRA America, Inc.
Inventor： Alan Y. Arai , Gyu Cheon Cho , Jingzhou Xu
CPC classification number: H01L21/67092 , B23K26/0006 , B23K26/40 , B23K26/53 , B23K2103/16 , B23K2103/172 , H01L21/2686 , H01L21/78 , H01L33/0095 , Y10S438/94
Abstract: Examples of methods and systems for laser processing of materials are disclosed. Methods and systems for singulation of a wafer comprising a coated substrate can utilize a laser outputting light that has a wavelength that is transparent to the wafer substrate but which may not be transparent to the coating layer(s). Using techniques for managing fluence and focal condition of the laser beam, the coating layer(s) and the substrate material can be processed through ablation and internal modification, respectively. The internal modification can result in die separation.
Abstract translation: 公开了激光加工材料的方法和系统的实例。 用于单片化包括涂覆的基底的晶片的方法和系统可以利用激光输出具有对于晶片衬底是透明的但对涂层不透明的波长的光。 使用技术来管理激光束的注量和聚焦条件，涂层和基底材料可以分别通过消融和内部修饰进行处理。 内部修改可导致管芯分离。
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公开(公告)号：US11201447B2
公开(公告)日：2021-12-14
申请号：US16717979
申请日：2019-12-17
Applicant: IMRA AMERICA, INC.
Inventor： Jingzhou Xu , Takashi Hori , Shigeru Suzuki , Gyu Cheon Cho
Abstract: Chirped pulse amplification (CPA) systems configured to generate and amplify multi-pulses are described. The nonlinear interaction of pulses can generate a multiple pulse pack with a dense time separation between pulses. Reducing or eliminating the nonlinear interaction can be provided by spectrally and/or temporally splitting pulses in the chirped amplification system.
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公开(公告)号：US20140312469A1
公开(公告)日：2014-10-23
申请号：US14319845
申请日：2014-06-30
Applicant: IMRA America, Inc.
Inventor： Lawrence Shah , Gyu Cheon Cho , Jingzhou Xu
IPC: B23K26/36 , H01L21/268 , B23K26/08
CPC classification number: H01L21/268 , B23K26/0624 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/082 , B23K26/083 , B23K26/364 , B23K26/38 , B23K26/40 , B23K2101/40 , B23K2103/50
Abstract: Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse repetition rate sufficiently high so that material is efficiently removed from the region and a quantity of unwanted material within the region, proximate to the region, or both is reduced relative to a quantity obtainable at a lower repetition rate. Embodiments of an ultrashort pulse laser system may include a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a semiconductor substrate. Workpiece materials may include metals, inorganic or organic dielectrics, or any material to be micromachined with femtosecond, picosecond, and/or nanosecond pulses.
Abstract translation: 各种实施例可以用于对工件的目标材料进行基于激光的修改，同时有利地实现处理生产量和/或质量的改善。 处理方法的实施例可以包括将激光脉冲聚焦并以足够高的脉冲重复频率将激光脉冲引导到工件的区域，使得材料有效地从该区域移除并且在该区域内靠近该区域的一些不想要的材料， 或者两者相对于以较低的重复率可获得的量减少。 超短脉冲激光系统的实施例可以包括光纤放大器或光纤激光器。 各种实施例适合于在半导体衬底上或半导体衬底内的切割，切割，划线和形成特征中的至少一个。 工件材料可以包括金属，无机或有机电介质，或任何要用飞秒，皮秒和/或纳秒脉冲微加工的材料。
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Patent Agency Ranking
公开(公告)号：US20150085885A1
公开(公告)日：2015-03-26
申请号：US14012508
申请日：2013-08-28
Applicant: IMRA America, Inc.
Inventor： Xinhua Gu , Mark Bendett , Gyu Cheon Cho , Martin E. Fermann
CPC classification number: H01S3/1115 , H01S3/0057 , H01S3/0064 , H01S3/0078 , H01S3/06712 , H01S3/06741 , H01S3/06754 , H01S3/094003 , H01S3/094042 , H01S3/0941 , H01S3/1028 , H01S3/1305 , H01S3/1618 , H01S3/1698
Abstract: A pulsed laser comprises an oscillator and amplifier. An attenuator and/or pre-compressor may be disposed between the oscillator and amplifier to improve performance and possibly the quality of pulses output from the laser. Such pre-compression may be implemented with spectral filters and/or dispersive elements between the oscillator and amplifier. The pulsed laser may have a modular design comprising modular devices that may have Telcordia-graded quality and reliability. Fiber pigtails extending from the device modules can be spliced together to form laser system. In one embodiment, a laser system operating at approximately 1050 nm comprises an oscillator having a spectral bandwidth of approximately 19 nm. This oscillator signal can be manipulated to generate a pulse having a width below approximately 90 fs. A modelocked linear fiber laser cavity with enhanced pulse-width control includes concatenated sections of both polarization-maintaining and non-polarization-maintaining fibers. Apodized fiber Bragg gratings and integrated fiber polarizers are included in the cavity to assist in linearly polarizing the output of the cavity. Very short pulses with a large optical bandwidth are obtained by matching the dispersion value of the fiber Bragg grating to the inverse of the dispersion of the intra-cavity fiber.
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公开(公告)号：US08969220B2
公开(公告)日：2015-03-03
申请号：US13714896
申请日：2012-12-14
Applicant: IMRA America, Inc.
Inventor： Alan Y. Arai , Gyu Cheon Cho , Jingzhou Xu
IPC: H01L21/268 , B23K26/00 , H01L21/78 , H01L33/00
CPC classification number: H01L21/67092 , B23K26/0006 , B23K26/40 , B23K26/53 , B23K2103/16 , B23K2103/172 , H01L21/2686 , H01L21/78 , H01L33/0095 , Y10S438/94
Abstract: Examples of methods and systems for laser processing of materials are disclosed. Methods and systems for singulation of a wafer comprising a coated substrate can utilize a laser outputting light that has a wavelength that is transparent to the wafer substrate but which may not be transparent to the coating layer(s). Using techniques for managing fluence and focal condition of the laser beam, the coating layer(s) and the substrate material can be processed through ablation and internal modification, respectively. The internal modification can result in die separation.
Abstract translation: 公开了激光加工材料的方法和系统的实例。 用于单片化包括涂覆的基底的晶片的方法和系统可以利用激光输出具有对于晶片衬底是透明的但对涂层不透明的波长的光。 使用技术来管理激光束的注量和聚焦条件，涂层和基底材料可以分别通过消融和内部修饰进行处理。 内部修改可导致管芯分离。
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公开(公告)号：US09640940B2
公开(公告)日：2017-05-02
申请号：US14685320
申请日：2015-04-13
Applicant: IMRA America, Inc.
Inventor： Xinhua Gu , Mark Bendett , Gyu Cheon Cho , Martin E. Fermann
IPC: H01S3/098 , H01S3/11 , H01S3/094 , H01S3/16 , H01S3/00 , H01S3/0941 , H01S3/102 , H01S3/067 , H01S3/13
CPC classification number: H01S3/1115 , H01S3/0057 , H01S3/0064 , H01S3/0078 , H01S3/06712 , H01S3/06741 , H01S3/06754 , H01S3/094003 , H01S3/094042 , H01S3/0941 , H01S3/1028 , H01S3/1305 , H01S3/1618 , H01S3/1698
Abstract: A pulsed laser comprises an oscillator and amplifier. An attenuator and/or pre-compressor may be disposed between the oscillator and amplifier to improve performance and possibly the quality of pulses output from the laser. Such pre-compression may be implemented with spectral filters and/or dispersive elements between the oscillator and amplifier. The pulsed laser may have a modular design comprising modular devices that may have Telcordia-graded quality and reliability. Fiber pigtails extending from the device modules can be spliced together to form laser system. In one embodiment, a laser system operating at approximately 1050 nm comprises an oscillator having a spectral bandwidth of approximately 19 nm. This oscillator signal can be manipulated to generate a pulse having a width below approximately 90 fs. A modelocked linear fiber laser cavity with enhanced pulse-width control includes concatenated sections of both polarization-maintaining and non-polarization-maintaining fibers. Apodized fiber Bragg gratings and integrated fiber polarizers are included in the cavity to assist in linearly polarizing the output of the cavity. Very short pulses with a large optical bandwidth are obtained by matching the dispersion value of the fiber Bragg grating to the inverse of the dispersion of the intra-cavity fiber.
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公开(公告)号：US20150325977A1
公开(公告)日：2015-11-12
申请号：US14685320
申请日：2015-04-13
Applicant: IMRA America, Inc.
Inventor： Xinhua Gu , Mark Bendett , Gyu Cheon Cho , Martin E. Fermann
CPC classification number: H01S3/1115 , H01S3/0057 , H01S3/0064 , H01S3/0078 , H01S3/06712 , H01S3/06741 , H01S3/06754 , H01S3/094003 , H01S3/094042 , H01S3/0941 , H01S3/1028 , H01S3/1305 , H01S3/1618 , H01S3/1698
Abstract: A pulsed laser comprises an oscillator and amplifier. An attenuator and/or pre-compressor may be disposed between the oscillator and amplifier to improve performance and possibly the quality of pulses output from the laser. Such pre-compression may be implemented with spectral filters and/or dispersive elements between the oscillator and amplifier. The pulsed laser may have a modular design comprising modular devices that may have Telcordia-graded quality and reliability. Fiber pigtails extending from the device modules can be spliced together to form laser system. In one embodiment, a laser system operating at approximately 1050 nm comprises an oscillator having a spectral bandwidth of approximately 19 nm. This oscillator signal can be manipulated to generate a pulse having a width below approximately 90 fs. A modelocked linear fiber laser cavity with enhanced pulse-width control includes concatenated sections of both polarization-maintaining and non-polarization-maintaining fibers. Apodized fiber Bragg gratings and integrated fiber polarizers are included in the cavity to assist in linearly polarizing the output of the cavity. Very short pulses with a large optical bandwidth are obtained by matching the dispersion value of the fiber Bragg grating to the inverse of the dispersion of the intra-cavity fiber.
Abstract translation: 脉冲激光器包括振荡器和放大器。 衰减器和/或预压缩器可以设置在振荡器和放大器之间以提高性能以及可能的从激光器输出的脉冲的质量。 这种预压缩可以用振荡器和放大器之间的频谱滤波器和/或分散元件来实现。 脉冲激光器可以具有包括可能具有Telcordia分级质量和可靠性的模块化设备的模块化设计。 从设备模块延伸的光纤尾纤可以拼接在一起形成激光系统。 在一个实施例中，在大约1050nm操作的激光系统包括具有约19nm的光谱带宽的振荡器。 该振荡器信号可被操纵以产生宽度低于大约90fs的脉冲。 具有增强的脉冲宽度控制的锁模线性光纤激光腔包括两个偏振保持和非偏振保持光纤的级联部分。 变形纤维布拉格光栅和集成光纤偏振器被包括在空腔中，以帮助线性偏振空腔的输出。 通过将光纤布拉格光栅的色散值与腔内光纤的色散相反来获得具有大光学带宽的非常短的脉冲。
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公开(公告)号：US09071037B2
公开(公告)日：2015-06-30
申请号：US14012508
申请日：2013-08-28
Applicant: IMRA America, Inc.
Inventor： Xinhua Gu , Mark Bendett , Gyu Cheon Cho , Martin E. Fermann
CPC classification number: H01S3/1115 , H01S3/0057 , H01S3/0064 , H01S3/0078 , H01S3/06712 , H01S3/06741 , H01S3/06754 , H01S3/094003 , H01S3/094042 , H01S3/0941 , H01S3/1028 , H01S3/1305 , H01S3/1618 , H01S3/1698
Abstract: A pulsed laser comprises an oscillator and amplifier. An attenuator and/or pre-compressor may be disposed between the oscillator and amplifier to improve performance and possibly the quality of pulses output from the laser. Such pre-compression may be implemented with spectral filters and/or dispersive elements between the oscillator and amplifier. The pulsed laser may have a modular design comprising modular devices that may have Telcordia-graded quality and reliability. Fiber pigtails extending from the device modules can be spliced together to form laser system. In one embodiment, a laser system operating at approximately 1050 nm comprises an oscillator having a spectral bandwidth of approximately 19 nm. This oscillator signal can be manipulated to generate a pulse having a width below approximately 90 fs. A modelocked linear fiber laser cavity with enhanced pulse-width control includes concatenated sections of both polarization-maintaining and non-polarization-maintaining fibers. Apodized fiber Bragg gratings and integrated fiber polarizers are included in the cavity to assist in linearly polarizing the output of the cavity. Very short pulses with a large optical bandwidth are obtained by matching the dispersion value of the fiber Bragg grating to the inverse of the dispersion of the intra-cavity fiber.
Abstract translation: 脉冲激光器包括振荡器和放大器。 衰减器和/或预压缩器可以设置在振荡器和放大器之间以提高性能以及可能的从激光器输出的脉冲的质量。 这种预压缩可以用振荡器和放大器之间的频谱滤波器和/或分散元件来实现。 脉冲激光器可以具有包括可能具有Telcordia分级质量和可靠性的模块化设备的模块化设计。 从设备模块延伸的光纤尾纤可以拼接在一起形成激光系统。 在一个实施例中，在大约1050nm操作的激光系统包括具有约19nm的光谱带宽的振荡器。 该振荡器信号可被操纵以产生宽度低于大约90fs的脉冲。 具有增强的脉冲宽度控制的锁模线性光纤激光腔包括两个偏振保持和非偏振保持光纤的级联部分。 变形纤维布拉格光栅和集成光纤偏振器被包括在空腔中，以帮助线性偏振空腔的输出。 通过将光纤布拉格光栅的色散值与腔内光纤的色散相反来获得具有大光学带宽的非常短的脉冲。
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