公开(公告)号：US20250006434A1

公开(公告)日：2025-01-02

申请号：US18883126

申请日：2024-09-12

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sou-Chi Chang ,  Ashish Verma Penumatcha ,  Nazila Haratipour ,  Seung Hoon Sung ,  Owen Y. Loh ,  Jack Kavalieros ,  Uygar E. Avci ,  Ian A. Young

IPC: H01G7/06 ,  H10B12/00

Abstract: Described is a ferroelectric-based capacitor that improves reliability of a ferroelectric memory by using low-leakage insulating thin film. In one example, the low-leakage insulating thin film is positioned between a bottom electrode and a ferroelectric oxide. In another example, the low-leakage insulating thin film is positioned between a top electrode and ferroelectric oxide. In yet another example, the low-leakage insulating thin film is positioned in the middle of ferroelectric oxide to reduce the leakage current and improve reliability of the ferroelectric oxide.

公开(公告)号：US20240373644A1

公开(公告)日：2024-11-07

申请号：US18778857

申请日：2024-07-19

Applicant: Intel Corporation

Inventor： Nazila Haratipour ,  Sou-Chi Chang ,  Shriram Shivaraman ,  I-Cheng Tung ,  Tobias Brown-Heft ,  Devin R. Merrill ,  Che-Yun Lin ,  Seung Hoon Sung ,  Jack Kavalieros ,  Uygar Avci ,  Matthew V. Metz

IPC: H10B53/00 ,  G11C11/22 ,  H01G4/008 ,  H01L27/08 ,  H10B53/10

Abstract: An integrated circuit capacitor structure, includes a first electrode includes a cylindrical column, a ferroelectric layer around an exterior sidewall of the cylindrical column and a plurality of outer electrodes. The plurality of outer electrodes include a first outer electrode laterally adjacent to a first portion of an exterior of the ferroelectric layer and a second outer electrode laterally adjacent to a second portion of the exterior of the ferroelectric layer, wherein the second outer electrode is above the first outer electrode.

公开(公告)号：US11769789B2

公开(公告)日：2023-09-26

申请号：US16368450

申请日：2019-03-28

Applicant: Intel Corporation

Inventor： Nazila Haratipour ,  Chia-Ching Lin ,  Sou-Chi Chang ,  Ashish Verma Penumatcha ,  Owen Loh ,  Mengcheng Lu ,  Seung Hoon Sung ,  Ian A. Young ,  Uygar Avci ,  Jack T. Kavalieros

IPC: H01G4/30 ,  H10B51/00 ,  H01L23/522 ,  H01L49/02 ,  H01G4/012

CPC classification number: H01L28/56 ,  H01G4/012 ,  H01G4/30 ,  H01L23/5226 ,  H10B51/00

Abstract: A capacitor is disclosed. The capacitor includes a first metal layer, a second metal layer on the first metal layer, a ferroelectric layer on the second metal layer, and a third metal layer on the ferroelectric layer. The second metal layer includes a first non-reactive barrier metal and the third metal layer includes a second non-reactive barrier metal. A fourth metal layer is on the third metal layer.

公开(公告)号：US20230253444A1

公开(公告)日：2023-08-10

申请号：US17666745

申请日：2022-02-08

Applicant: Intel Corporation

Inventor： Arnab Sen Gupta ,  Kaan Oguz ,  Chia-Ching Lin ,  I-Cheng Tung ,  Sudarat Lee ,  Sou-Chi Chang ,  Matthew V. Metz ,  Scott B. Clendenning ,  Uygar E. Avci ,  Ian A. Young ,  Jason C. Retasket ,  Edward O. Johnson, JR.

IPC: H01L49/02 ,  H01L27/108

CPC classification number: H01L28/65 ,  H01L28/75 ,  H01L27/10829

Abstract: Described herein are capacitor devices formed using perovskite insulators. In one example, a perovskite templating material is formed over an electrode, and a perovskite insulator layer is grown over the templating material. The templating material improves the crystal structure and electrical properties in the perovskite insulator layer. One or both electrodes may be ruthenium. In another example, a perovskite insulator layer is formed between two layers of indium tin oxide (ITO), with the ITO layers forming the capacitor electrodes.

公开(公告)号：US11626475B2

公开(公告)日：2023-04-11

申请号：US16441905

申请日：2019-06-14

Applicant: INTEL CORPORATION

Inventor： Nazila Haratipour ,  Chia-Ching Lin ,  Sou-Chi Chang ,  Ian A. Young ,  Uygar E. Avci ,  Jack T. Kavalieros

IPC: H01L21/02 ,  H01L49/02 ,  H01G4/018 ,  H01L23/64

Abstract: An improved trench capacitor structure is disclosed that allows for the formation of narrower capacitors. An example capacitor structure includes a first conductive layer on the sidewalls of an opening through a thickness of a dielectric layer, a capacitor dielectric layer on the first conductive layer, a second conductive layer on the capacitor dielectric layer, and a conductive fill material on the second conductive layer. The capacitor dielectric layer laterally extends above the opening and along a top surface of the dielectric layer, and the conductive fill material fills a remaining portion of the opening.

公开(公告)号：US11581417B2

公开(公告)日：2023-02-14

申请号：US16130903

申请日：2018-09-13

Applicant: Intel Corporation

Inventor： Sasikanth Manipatruni ,  Uygar Avci ,  Sou-Chi Chang ,  Ian Young

IPC: G11C11/22 ,  H01L29/51 ,  H01L29/78 ,  H01L27/11585 ,  H01L27/11502

Abstract: A capacitor is provided which comprises: a first structure comprising metal; a second structure comprising metal; and a third structure between the first and second structures, wherein the third structure comprises an improper ferroelectric material. In some embodiments, a field effect transistor (FET) is provided which comprises: a substrate; a source and drain adjacent to the substrate; and a gate stack between the source and drain, wherein the gate stack includes: a dielectric; a first structure comprising improper ferroelectric material, wherein the first structure is adjacent to the dielectric; and a second structure comprising metal, wherein the second structure is adjacent to the first structure.

公开(公告)号：US20210408018A1

公开(公告)日：2021-12-30

申请号：US16914140

申请日：2020-06-26

Applicant: Intel Corporation

Inventor： Nazila Haratipour ,  Sou-Chi Chang ,  Shriram Shivaraman ,  I-Cheng Tung ,  Tobias Brown-Heft ,  Devin R. Merrill ,  Che-Yun Lin ,  Seung Hoon Sung ,  Jack Kavalieros ,  Uygar Avci ,  Matthew V. Metz

IPC: H01L27/11502 ,  H01L49/02 ,  H01L27/08 ,  H01G4/008 ,  G11C11/22

Abstract: An integrated circuit capacitor structure, includes a first electrode includes a cylindrical column, a ferroelectric layer around an exterior sidewall of the cylindrical column and a plurality of outer electrodes. The plurality of outer electrodes include a first outer electrode laterally adjacent to a first portion of an exterior of the ferroelectric layer and a second outer electrode laterally adjacent to a second portion of the exterior of the ferroelectric layer, wherein the second outer electrode is above the first outer electrode.

公开(公告)号：US20200286686A1

公开(公告)日：2020-09-10

申请号：US16296082

申请日：2019-03-07

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sou-Chi Chang ,  Ashish Verma Penumatcha ,  Nazila Haratipour ,  Seung Hoon Sung ,  Owen Y. Loh ,  Jack Kavalieros ,  Uygar E. Avci ,  Ian A. Young

IPC: H01G7/06 ,  H01L49/02 ,  H01L27/108

Abstract: Described is a ferroelectric-based capacitor that improves reliability of a ferroelectric memory by using low-leakage insulating thin film. In one example, the low-leakage insulating thin film is positioned between a bottom electrode and a ferroelectric oxide. In another example, the low-leakage insulating thin film is positioned between a top electrode and ferroelectric oxide. In yet another example, the low-leakage insulating thin film is positioned in the middle of ferroelectric oxide to reduce the leakage current and improve reliability of the ferroelectric oxide.

公开(公告)号：US20250006433A1

公开(公告)日：2025-01-02

申请号：US18216479

申请日：2023-06-29

Applicant: Intel Corporation

Inventor： Sarah Atanasov ,  Elijah Karpov ,  Nazila Haratipour ,  Sou-Chi Chang ,  Tristan Tronic

IPC: H01G7/06 ,  H10B53/00

Abstract: Apparatuses, memory systems, capacitor structures, and techniques related to ferroelectric capacitors having a hafnium-zirconium oxide film between the electrodes of the capacitor are discussed. The hafnium-zirconium oxide film is thin and has large crystallite grains. The thin large grain hafnium-zirconium oxide film having large grains is formed by depositing a thick hafnium-zirconium oxide film and annealing the thick hafnium-zirconium oxide film to establish the large grain size, and etching back the hafnium-zirconium oxide film to the desired thickness for deployment in the ferroelectric capacitor.

公开(公告)号：US12040378B2

公开(公告)日：2024-07-16

申请号：US17336149

申请日：2021-06-01

Applicant: Intel Corporation

Inventor： Nazila Haratipour ,  Sou-Chi Chang ,  Chia-Ching Lin ,  Jack Kavalieros ,  Uygar Avci ,  Ian Young

IPC: H01L29/51 ,  H01L29/15 ,  H01L29/221 ,  H01L29/94

CPC classification number: H01L29/516 ,  H01L29/151 ,  H01L29/221 ,  H01L29/945

Abstract: Described is a ferroelectric-based capacitor that improves reliability of a ferroelectric memory by providing tensile stress along a plane (e.g., x-axis) of a ferroelectric or anti-ferroelectric material of the ferroelectric/anti-ferroelectric based capacitor. Tensile stress is provided by a spacer comprising metal, semimetal, or oxide (e.g., metal or oxide of one or more of: Al, Ti, Hf, Si, Ir, or N). The tensile stress provides polar orthorhombic phase to the ferroelectric material and tetragonal phase to the anti-ferroelectric material. As such, memory window and reliability of the ferroelectric/anti-ferroelectric oxide thin film improves.