Abstract:
The present invention relates to a thin film lamination to be used in a micro InSb thin film magnetic sensor which can directly detect a magnetic flux density with high sensitivity and has small power consumption and consumption current, and the InSb thin film magnetic sensor. The InSb thin film magnetic sensor uses an InSb thin film as a magnetic sensor section or a magnetic detecting section. The sensor includes an InSb layer that is an InSb thin film formed on a substrate, and an AlxGayIn1-x-ySb mixed crystal layer (0≦x, y≦1) which shows resistance higher than the InSb layer or insulation, or p-type conduction, and has a band gap larger than that of InSb. The mixed crystal layer is provided between the substrate and the InSb layer, and has a content of Al and Ga atoms (x+y) in the range of 5.0 to 17%.
Abstract translation:本发明涉及一种用于微型InSb薄膜磁传感器中的薄膜层压体,其可以高灵敏度地直接检测磁通密度并且具有小的功耗和消耗电流,以及InSb薄膜磁传感器。 InSb薄膜磁传感器使用InSb薄膜作为磁传感器部分或磁检测部分。 该传感器包括作为形成在基板上的InSb薄膜的InSb层和显示出高于InSb层或绝缘体的电阻的Al x Ga y In 1-x-y Sb混合晶体层(0& nlE; x,y≦̸ 1) 类型导通,并且具有比InSb大的带隙。 混合晶体层设置在基板和InSb层之间,Al和Ga原子的含量(x + y)在5.0〜17%的范围内。
Abstract:
The present invention relates to a thin film lamination to be used in a micro InSb thin film magnetic sensor which can directly detect a magnetic flux density with high sensitivity and has small power consumption and consumption current, and the InSb thin film magnetic sensor. The InSb thin film magnetic sensor uses an InSb thin film as a magnetic sensor section or a magnetic detecting section. The sensor includes an InSb layer that is an InSb thin film formed on a substrate, and an AlxGayIn1-x-ySb mixed crystal layer (0≦x, y≦1) which shows resistance higher than the InSb layer or insulation, or p-type conduction, and has a band gap larger than that of InSb. The mixed crystal layer is provided between the substrate and the InSb layer, and has a content of Al and Ga atoms (x+y) in the range of 5.0 to 17%.
Abstract translation:本发明涉及一种用于微型InSb薄膜磁传感器中的薄膜层压体,其可以高灵敏度地直接检测磁通密度并且具有小的功耗和消耗电流,以及InSb薄膜磁传感器。 InSb薄膜磁传感器使用InSb薄膜作为磁传感器部分或磁检测部分。 传感器包括作为形成在基板上的InSb薄膜的InSb层和表现出高于InSb层或绝缘体的电阻的Al x Ga y In 1-x-y Sb混合晶体层(0 <= x,y <= 1),或 p型导电,并且具有比InSb大的带隙。 混合晶体层设置在基板和InSb层之间,Al和Ga原子的含量(x + y)在5.0〜17%的范围内。
Abstract:
Relating to a thin film lamination and a thin film magnetic sensor using the thin film lamination and a method for manufacturing the thin film lamination that realizes a thin film conducting layer having high electron mobility and sheet resistance as an InAsSb operating layer. A thin film lamination is provided which is characterized by having an AlxIn1−xSb mixed crystal layer formed on a substrate, and an InAsxSb1−x (0
Abstract translation:关于使用该薄膜层叠体的薄膜层叠体和薄膜磁传感器以及实现作为InAsSb操作层的具有高电子迁移率和薄层电阻的薄膜导电层的薄膜层压体的制造方法。 提供了一种薄膜层压体,其特征在于在基板上形成Al x In 1-x Sb混合晶体层,以及直接形成在Al x In 1-x Sb层上的InAs x Sb 1-x(0
Abstract:
Relating to a thin film lamination and a thin film magnetic sensor using the thin film lamination and a method for manufacturing the thin film lamination that realizes a thin film conducting layer having high electron mobility and sheet resistance as an InAsSb operating layer. A thin film lamination is provided which is characterized by having an AlxIn1-xSb mixed crystal layer formed on a substrate, and an InAsxSb1-x (0
Abstract translation:关于使用该薄膜层叠体的薄膜层叠体和薄膜磁传感器以及实现作为InAsSb操作层的具有高电子迁移率和薄层电阻的薄膜导电层的薄膜层压体的制造方法。 提供了一种薄膜层压体,其特征在于在基板上形成Al x In 1-x Sb混合晶体层,以及直接形成在Al x In 1-x Sb层上的InAs x Sb 1-x(0
Abstract:
An article for electrical use such as insulative substrates, electrical circuit borads and electrical elements, wholly or partly consisting out of an aromatic polyamide-imide having a reduced viscosity of from about 0.3 to 1.5, which polyamide-imide may contain a granular material dispersed therein, and a composition comprising 100 parts by weight of said polyamide-imide and additional about 100 to 4,000 parts by weight of a granular material and optionally about 10 to 10,000 parts by weight of a polar organic solvent.
Abstract:
An organic polar solvent-soluble aromatic polyamide-imide having therein aromatic nuclei linked at their respective 1 - and 3 - positions and having therein amide linkages and terminal groups unsubstituted or partially substituted with acrylate or methacrylate groups is found to impart excellent heat resistance and insulating property to a photoresist composition produced therefrom.
Abstract:
An organic polar solvent-soluble aromatic polyamide-imide having therein aromatic nuclei linked at their respective 1 - and 3 -positions and having therein amide linkages and terminal groups partially substituted with cinnamate groups is found to impart excellent heat resistance and insulating property to a photoresist composition produced therefrom.