公开(公告)号：US06422088B1

公开(公告)日：2002-07-23

申请号：US09666085

申请日：2000-09-21

申请人： Nobukazu Oba ,  Yoshifumi Murakami ,  Yukihiko Tanizawa ,  Hiroaki Tanaka ,  Seiichiro Ishio ,  Inao Toyoda ,  Yasutoshi Suzuki

发明人： Nobukazu Oba ,  Yoshifumi Murakami ,  Yukihiko Tanizawa ,  Hiroaki Tanaka ,  Seiichiro Ishio ,  Inao Toyoda ,  Yasutoshi Suzuki

IPC分类号： G01L900

CPC分类号： G01L27/007 ,  G01D3/08 ,  G01L9/0054 ,  G01L9/02 ,  G01R17/10

摘要： A reference voltage generating circuit is constituted by resistors RE and RF each having a resistance not influenced by an application of pressure. The reference voltage generating circuit is connected between one and the other ends of a bridge circuit. A failure judgement of the bridge circuit is performed based on a comparison of a voltage difference VBC between two midpoints B and C of the bridge circuit and voltage differences VCE and VBE between a reference voltage level of the reference voltage generating circuit and the voltage levels of two midpoints B and C.

摘要翻译： 参考电压发生电路由电阻器RE和RF构成，每个电阻器不受施加压力的影响。 参考电压产生电路连接在桥接电路的一端和另一端之间。 基于桥电路的两个中点B和C之间的电压差VBC与参考电压产生电路的参考电压电平之间的电压差VCE和VBE的比较，执行桥电路的故障判断， 两个中点B和C.

公开(公告)号：US5986316A

公开(公告)日：1999-11-16

申请号：US979705

申请日：1997-11-26

申请人： Inao Toyoda ,  Yasutoshi Suzuki ,  Nobukazu Oba ,  Hiroaki Tanaka

发明人： Inao Toyoda ,  Yasutoshi Suzuki ,  Nobukazu Oba ,  Hiroaki Tanaka

IPC分类号： G01L9/00 ,  H01L29/06 ,  G01L9/06 ,  H01L41/00

CPC分类号： G01L19/141 ,  G01L19/0084 ,  G01L19/146 ,  G01L19/147

摘要： A diffusion gauge is formed in a surface of a silicon substrate which has a plane orientation of (110). The diffusion gauge is disposed so that a main current thereof flows along a direction perpendicular to a direction in which large stress biased in one direction generates in the surface of the silicon substrate due to distortion of a base for fixing the silicon substrate. Therefore, even when the large biased stress generates in the surface of the silicon substrate, because the direction in which the main current of the diffusion gauge flows is perpendicular to the direction in which the biased stress generates, there is a little change in a resistance value of the diffusion gauge. As a result, a detection error caused by the distortion of the base can be reduced.

摘要翻译： 在硅衬底的具有平面取向为（110）的表面中形成扩散计。 扩散计量器被设置为使得其主电流沿着与硅衬底的表面中由于基底的变形而在一个方向上产生大的应力的方向垂直的<110>方向流动。 因此，即使在硅衬底的表面产生大的偏压应力的情况下，由于扩散计的主电流流动的<110>方向与偏压应力的方向垂直，所以有一点变化 在扩散计的电阻值中。 结果，可以减少由基座的失真引起的检测误差。

公开(公告)号：US5761957A

公开(公告)日：1998-06-09

申请号：US796117

申请日：1997-02-06

申请人： Nobukazu Oba ,  Yasutoshi Suzuki ,  Inao Toyoda ,  Masaki Onoue

发明人： Nobukazu Oba ,  Yasutoshi Suzuki ,  Inao Toyoda ,  Masaki Onoue

IPC分类号： B81C1/00 ,  G01L9/00 ,  G01L19/04 ,  G01L9/06 ,  H01C17/28

CPC分类号： B81C1/00404 ,  G01L19/04 ,  G01L9/0042 ,  Y10T29/49103

摘要： A semiconductor pressure sensor includes a diaphragm of an octagonal shape formed on a (110) silicon substrate by anisotropic etching. When a distance between two sides of the diaphragm, which are defined by intersecting lines of a (110) face and a (111) face of the silicon substrate, is represented as L1 and a length of a side of the diaphragm, which is defined by an intersecting line of the (110) face and a (100) face, is represented as L2, the diaphragm is formed so as to satisfy the following relationship: 0.65

摘要翻译： 半导体压力传感器包括通过各向异性蚀刻形成在（110）硅衬底上的八边形形状的膜片。 当由膜的（110）面和（111）面的交叉线限定的隔膜的两侧之间的距离被表示为L1和限定的隔膜的一侧的长度 通过（110）面和（100）面的交线表示为L2，膜片形成为满足以下关系：0.65

公开(公告)号：US5932921A

公开(公告)日：1999-08-03

申请号：US958319

申请日：1997-10-27

申请人： Minekazu Sakai ,  Inao Toyoda ,  Nobukazu Oba

发明人： Minekazu Sakai ,  Inao Toyoda ,  Nobukazu Oba

IPC分类号： G01L9/00 ,  H01L21/3063 ,  H01L29/84 ,  H01L29/82

CPC分类号： G01L9/0042 ,  H01L29/84

摘要： When a diaphragm portion of the pressure sensor or the like is fabricated, anisotropic etching is needed. This etching is carried out by electrochemically stopped etching. During this process, a voltage is applied to the diaphragm portion. A diode is connected between said diaphragm portion and an integrated circuit to prevent the voltage from being applied to the integrated circuit connected with the diaphragm portion. The diode is obtained by shorting the base and collector of a lateral p-n-p transistor to each other. A collector region is formed offset from immediately under a conductor pattern to prevent a parasitic MOS effect from producing a channel serving as a leakage current path. Further, a heavily doped n-type diffused region acting as a channel stopper is formed along the outer periphery of the collector region.

摘要翻译： 当制造压力传感器等的隔膜部分时，需要进行各向异性蚀刻。 该蚀刻通过电化学停止蚀刻进行。 在该过程中，向隔膜部分施加电压。 二极管连接在所述隔膜部分和集成电路之间，以防止电压施加到与隔膜部分连接的集成电路。 二极管通过将侧面p-n-p晶体管的基极和集电极彼此短接而获得。 集电极区域形成为从导体图案的正下方偏移，以防止寄生MOS效应产生用作漏电流路径的通道。 此外，沿集电区域的外周形成充当通道阻挡件的重掺杂n型扩散区域。

公开(公告)号：US5920106A

公开(公告)日：1999-07-06

申请号：US987500

申请日：1997-12-09

申请人： Nobukazu Oba ,  Toshio Ikuta ,  Minekazu Sakai ,  Tsuyoshi Fukada ,  Yasutoshi Suzuki

发明人： Nobukazu Oba ,  Toshio Ikuta ,  Minekazu Sakai ,  Tsuyoshi Fukada ,  Yasutoshi Suzuki

IPC分类号： G01L9/04 ,  B81B3/00 ,  G01L9/00 ,  H01L29/84

CPC分类号： G01L9/0042

摘要： A semiconductor pressure detection device includes a diaphragm formed at a portion of a P- conductivity type semiconductor substrate having a reduced thickness. Gauge resistors are formed on the surface of an N- conductivity type semiconductor layer formed on the substrate. An N+ conductivity type diffusion layer is formed in the N- conductivity type semiconductor layer to fix the electric potential of the N- conductivity type layer. The first conductivity type area surrounds the diaphragm. Therefore, when the N- conductivity type area is supplied with electric potential, the potential gradient in the N- conductivity type layer is small. Thus, the leakage current which flows to a pn junction between the gauge resistors and the N- conductivity type area is reduced.

摘要翻译： 半导体压力检测装置包括形成在具有减小的厚度的P-导电型半导体衬底的部分处的膜片。 在基板上形成的N-导电型半导体层的表面上形成有规格电阻。 在N导电型半导体层中形成N +导电型扩散层，以固定N-导电型层的电位。 第一导电类型区域围绕隔膜。 因此，当N-导电类型区域被提供电位时，N-导电类型层中的电位梯度小。 因此，流向量规电阻器与N-导电型区域之间的pn结的漏电流减小。

公开(公告)号：US08130115B2

公开(公告)日：2012-03-06

申请号：US12507916

申请日：2009-07-23

申请人： Norihiro Kurumado ,  Hiroshi Okada ,  Nobukazu Oba ,  Hirofumi Uenoyama

发明人： Norihiro Kurumado ,  Hiroshi Okada ,  Nobukazu Oba ,  Hirofumi Uenoyama

IPC分类号： G08B21/00

CPC分类号： G01P13/045 ,  G01D5/24428 ,  G01D5/2451

摘要： In the normal rotation direction, a change in the main sensing signal caused by a front edge is defined as a signal change caused by an effective edge, and a change in the main sensing signal caused by a back edge is defined as a signal change caused by an ineffective edge. In the reverse direction, a change in the main sensing signal caused by the back edge is defined as a signal change caused by an effective edge, and a change caused by a front edge is defined as a signal change caused by an ineffective edge. Regardless of the rotation direction, a detection signal generating circuit generates a detection signal including falling-edge changes and rising edge changes caused by the effective edge and ineffective edge respectively. When the direction is changed, the signal change on the detection signal is prohibited. As a result, gear tooth detection discrepancies are prevented.

摘要翻译： 在正常旋转方向上，由前沿引起的主感测信号的变化被定义为由有效边缘引起的信号变化，并且由后沿引起的主感测信号的变化被定义为引起的信号变化 由无效的边缘。 在相反方向上，由后沿引起的主感测信号的变化被定义为由有效边缘引起的信号变化，并且由前沿引起的变化被定义为由无效边缘引起的信号变化。 不管旋转方向如何，检测信号发生电路分别产生包括下降沿变化和由有效边缘和无效边缘引起的上升沿变化的检测信号。 当方向改变时，检测信号上的信号变化被禁止。 结果，防止齿轮齿检测差异。

公开(公告)号：US20100019917A1

公开(公告)日：2010-01-28

申请号：US12507916

申请日：2009-07-23

申请人： Norihiro Kurumado ,  Hiroshi Okada ,  Nobukazu Oba ,  Hirofumi Uenoyama

发明人： Norihiro Kurumado ,  Hiroshi Okada ,  Nobukazu Oba ,  Hirofumi Uenoyama

IPC分类号： G08B21/00

CPC分类号： G01P13/045 ,  G01D5/24428 ,  G01D5/2451

摘要： In the normal rotation direction, a change in the main sensing signal caused by a front edge is defined as a signal change caused by an effective edge, and a change in the main sensing signal caused by a back edge is defined as a signal change caused by an ineffective edge. In the reverse direction, a change in the main sensing signal caused by the back edge is defined as a signal change caused by an effective edge, and a change caused by a front edge is defined as a signal change caused by an ineffective edge. Regardless of the rotation direction, a detection signal generating circuit generates a detection signal including falling-edge changes and rising edge changes caused by the effective edge and ineffective edge respectively. When the direction is changed, the signal change on the detection signal is prohibited. As a result, gear tooth detection discrepancies are prevented.

摘要翻译： 在正常旋转方向上，由前沿引起的主感测信号的变化被定义为由有效边缘引起的信号变化，并且由后沿引起的主感测信号的变化被定义为引起的信号变化 由无效的边缘。 在相反方向上，由后沿引起的主感测信号的变化被定义为由有效边缘引起的信号变化，并且由前沿引起的变化被定义为由无效边缘引起的信号变化。 不管旋转方向如何，检测信号发生电路分别产生包括下降沿变化和由有效边缘和无效边缘引起的上升沿变化的检测信号。 当方向改变时，检测信号上的信号变化被禁止。 结果，防止齿轮齿检测差异。

公开(公告)号：US08008948B2

公开(公告)日：2011-08-30

申请号：US12000304

申请日：2007-12-11

申请人： Yasuaki Makino ,  Hiroshi Okada ,  Reiji Iwamoto ,  Nobukazu Oba ,  Shinji Nakatani ,  Norikazu Ohta ,  Hideki Hosokawa

发明人： Yasuaki Makino ,  Hiroshi Okada ,  Reiji Iwamoto ,  Nobukazu Oba ,  Shinji Nakatani ,  Norikazu Ohta ,  Hideki Hosokawa

IPC分类号： G01R19/00 ,  G06M1/10

CPC分类号： G01R19/04

摘要： A peak voltage detector circuit detects a peak voltage of an input voltage. The input voltage is input into a first input terminal of a comparator. A counter circuit counts up a counter value in synchronization with a first clock signal, when a signal output from the comparator is in a first state. The counter circuit counts down the counter value in synchronization with a second clock signal. A digital-analog conversion circuit outputs an output voltage corresponding to the counter value, and the output voltage is input into a second input terminal of the comparator. The first clock signal has a wave period shorter than that of the second clock signal.

摘要翻译： 峰值电压检测电路检测输入电压的峰值电压。 输入电压被输入到比较器的第一输入端。 当从比较器输出的信号处于第一状态时，计数器电路与第一时钟信号同步地计数计数器值。 计数器电路与第二个时钟信号同步地计数计数器值。 数字模拟转换电路输出对应于计数器值的输出电压，输出电压被输入到比较器的第二输入端。 第一时钟信号具有比第二时钟信号短的波周期。

公开(公告)号：US20090002033A1

公开(公告)日：2009-01-01

申请号：US12213893

申请日：2008-06-26

申请人： Shinji Nakatani ,  Nobukazu Oba ,  Norikazu Ohta ,  Hideki Hosokawa

发明人： Shinji Nakatani ,  Nobukazu Oba ,  Norikazu Ohta ,  Hideki Hosokawa

IPC分类号： H03K5/22

CPC分类号： H03K5/1252 ,  H03K5/086

摘要： The present invention reliably removes a signal change associated with a noise component from a comparison signal of a comparator. A comparator circuit includes a comparator and a timer circuit. After a reversal of the comparison signal, if the level of the comparator is sustained at least from a first time to a second time, an output signal is reversed and output. The timer circuit includes a memory unit that is shifted to a memory state in which the reversal of the comparison signal is stored at the first time if the reversal is verified. If the comparison signal is reversed during the interval between the first time and second time, the memory state is cleared.

摘要翻译： 本发明可以从比较器的比较信号可靠地去除与噪声分量相关联的信号变化。 比较器电路包括比较器和定时器电路。 在比较信号反转之后，如果比较器的电平至少从第一时间持续到第二时间，则输出信号被反转并输出。 定时器电路包括一个存储器单元，该存储器单元被转移到如果反转被验证则在第一时间存储比较信号的反转的存储器状态。 如果在第一次和第二次之间的间隔期间比较信号反转，则存储器状态被清除。

公开(公告)号：US06389903B1

公开(公告)日：2002-05-21

申请号：US09365757

申请日：1999-08-03

申请人： Nobukazu Oba ,  Makoto Hatanaka

发明人： Nobukazu Oba ,  Makoto Hatanaka

IPC分类号： G01L700

CPC分类号： G01L19/0084 ,  G01L19/142 ,  H01R13/6683

摘要： A pressure-detecting device in which a pressure sensor unit having the same specifications can be used even when there are numerous different forms of an outside member to which connection leads of the pressure sensor unit are to be electrically connected. A pressure sensor unit has four connection leads exiting a sensor housing. A coupling member has a terminal holding part and a connector part molded integrally from an insulating material and having insert-molded coupling leads. The coupling leads have terminal plates, all exposed on the same side, and terminal pieces projecting outwardly. Multiple versions of the coupling member are made by integrally joining connector parts of different shapes to terminal holding parts all having terminal plates disposed in the same state. The pressure sensor unit is assembled to a coupling member selected from among these and the connection leads are electrically connected to an outside member by way of this coupling member.

摘要翻译： 即使在压力传感器单元的连接引线与电气连接的外部构件存在多种不同形式的情况下，也可以使用具有相同规格的压力传感器单元的压力检测装置。 压力传感器单元具有离开传感器外壳的四个连接引线。 联接构件具有端子保持部和由绝缘材料一体地模制并具有插入成型的耦合引线的连接器部。 耦合引线具有端子板，全部暴露在同一侧，端子件向外突出。 通过将具有不同形状的连接器部件整体地连接到端子保持部件上而制成多个版本的连接部件，所述端子保持部件都具有处于相同状态的端子板。 压力传感器单元组装到从其中选择的联接构件，并且连接引线通过该联接构件电连接到外部构件。