METAL OXIDE MULTI-LAYERED STRUCTURE FOR INFRARED BLOCKING
    2.
    发明申请
    METAL OXIDE MULTI-LAYERED STRUCTURE FOR INFRARED BLOCKING 审中-公开
    用于红外线阻塞的金属氧化物多层结构

    公开(公告)号:US20150055213A1

    公开(公告)日:2015-02-26

    申请号:US14080799

    申请日:2013-11-15

    CPC classification number: G02B5/206 G02B5/208 G02B5/282 G02B5/286

    Abstract: Provided is a metal oxide multi-layered structure for infrared blocking, which includes a first metal oxide film, a second metal oxide film, a third metal oxide film, and a metal nanoparticle layer. The third metal oxide film is disposed between the first metal oxide film and the second metal oxide film. The metal nanoparticle layer is disposed between the second metal oxide film and the third metal oxide film.

    Abstract translation: 提供了一种用于红外阻挡的金属氧化物多层结构,其包括第一金属氧化物膜,第二金属氧化物膜,第三金属氧化物膜和金属纳米颗粒层。 第三金属氧化物膜设置在第一金属氧化物膜和第二金属氧化物膜之间。 金属纳米颗粒层设置在第二金属氧化物膜和第三金属氧化物膜之间。

    Patterning process for oxide film
    4.
    发明授权
    Patterning process for oxide film 有权
    氧化膜图案化工艺

    公开(公告)号:US08906247B2

    公开(公告)日:2014-12-09

    申请号:US13942162

    申请日:2013-07-15

    CPC classification number: B44C1/227 C23C24/082 C23C24/085 H01L21/0272

    Abstract: The present disclosure provides a patterning process for an oxide film, including: covering a barrier layer composition on a substrate to form a patterned barrier layer, wherein the barrier layer composition includes an inorganic component and an organic binder with a weight ratio of 50-98:2-50; forming an oxide film on the patterned barrier layer and the substrate, wherein a thickness ratio (D1/D2) of the barrier layer (D1) to the oxide film (D2) is about 5-2000; and lifting off the barrier layer and the oxide film thereon, while leaving portions of the oxide film on the substrate.

    Abstract translation: 本公开提供了一种用于氧化物膜的图案化工艺,包括:在基板上覆盖阻挡层组合物以形成图案化阻挡层,其中阻挡层组合物包含无机组分和重量比为50-98的有机粘合剂 :2-50; 在图案化的阻挡层和基板上形成氧化膜,其中阻挡层(D1)与氧化膜(D2)的厚度比(D1 / D2)约为5〜2000; 并且在其上放置阻挡层和氧化膜,同时将氧化膜的一部分留在基板上。

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