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15 条记录 (耗时 0.035 秒)

    Workpiece carrier with segmented and floating retaining elements
    1.
    发明授权
    Workpiece carrier with segmented and floating retaining elements 失效
    具有分段和浮动保持元件的工件载体

    公开(公告)号：US06290584B1

    公开(公告)日：2001-09-18

    申请号：US09374722

    申请日：1999-08-13

    申请人： Inki Kim ,  Mark Meloni ,  Mike Park

    发明人： Inki Kim ,  Mark Meloni ,  Mike Park

    IPC分类号： B24B2900

    CPC分类号： B24B37/32 ,  B24B53/017

    摘要： An improved workpiece carrier assembly includes a workpiece retaining assembly having a plurality of distinct retaining elements rather than a one-piece retaining ring. In accordance with one embodiment, a plurality of retaining segments reside within a like plurality of channels. The retaining segments may be individually or collectively controlled by a pressurized fluid system. In accordance with an alternate embodiment, a plurality of retaining pins reside within a like plurality of guide sleeves. The retaining pins may be individually or collectively controlled by a pressurized fluid system.

    摘要翻译： 改进的工件载体组件包括具有多个不同保持元件而不是一体式保持环的工件保持组件。 根据一个实施例，多个保持段驻留在相同的多个通道内。 保持段可以由加压流体系统单独地或共同地控制。 根据替代实施例，多个保持销位于相同的多个导向套筒内。 保持销可以由加压流体系统单独地或共同地控制。

    Tunable and switchable multilayer optical devices
    2.
    发明授权
    Tunable and switchable multilayer optical devices 有权
    可调谐和可切换的多层光学器件

    公开(公告)号：US08582115B2

    公开(公告)日：2013-11-12

    申请号：US12900254

    申请日：2010-10-07

    申请人： Lu Gao ,  Paulo E. X. Silveira ,  Mark Meloni

    发明人： Lu Gao ,  Paulo E. X. Silveira ,  Mark Meloni

    IPC分类号： G01B9/02 ,  G02B5/18 ,  G01D5/36

    CPC分类号： H01L31/02165 ,  G02B26/001 ,  G02B26/005

    摘要： A multilayer optical device includes an arrangement, on a substrate, of a first layer, a second layer, and a space therebetween. The second layer is a thin-film. The arrangement of the first and second layers and the space therebetween produces transmitted, reflected, or dispersed spectrally modified electromagnetic energy from electromagnetic energy incident upon the arrangement. An optical function of the device is dependent at least in part on interference effects. An optical detector system includes a similar multilayer optical device. The space within the device is in fluid communication with structures for receiving a fluid such that the device operates in a first or second mode depending on absence or presence of the fluid within the space. The system includes a detector for receiving the modified electromagnetic energy, and a controller in fluid communication with the space that establishes the absence or presence of the fluid in the space.

    摘要翻译： 多层光学装置包括在基板上的第一层，第二层和它们之间的空间的布置。 第二层是薄膜。 第一层和第二层的布置以及它们之间的空间通过入射在该布置上的电磁能产生透射，反射或分散的光谱改良的电磁能。 该设备的光学功能至少部分依赖于干扰效应。 光学检测器系统包括类似的多层光学器件。 装置内的空间与用于接收流体的结构流体连通，使得装置以第一或第二模式操作，取决于空间内流体的不存在或存在。 该系统包括用于接收修改的电磁能的检测器，以及与空间流体连通的控制器，其建立空间中不存在或不存在流体。

    Disassembling an item by means of RF energy
    3.
    发明授权
    Disassembling an item by means of RF energy 有权
    通过RF能量拆卸物品

    公开(公告)号：US08572831B2

    公开(公告)日：2013-11-05

    申请号：US12995440

    申请日：2010-06-07

    申请人： Ezekiel Kruglick ,  Mark Meloni

    发明人： Ezekiel Kruglick ,  Mark Meloni

    IPC分类号： B23P19/00

    CPC分类号： B23P19/04 ,  F16B17/00 ,  H05B6/105 ,  Y10T29/49815 ,  Y10T29/49822 ,  Y10T29/53 ,  Y10T428/24521

    摘要： Technologies are generally described for providing inductively removable assembly bonding. Inductive elements may be placed strategically at bonding locations between two or more coupled components. At disassembly time, the elements may be heated through Radio Frequency (RF) energy causing the bonds to break and components to separate. For example, inductive elements placed near plastic stake bonds between dissimilar materials in an electronic device may be employed to separate the dissimilar materials during a recycling process. According to some examples, the elements may also be heated through a directly applied electric current via a network of connections designed into the assembly.

    摘要翻译： 通常描述技术来提供电感可拆卸的组装接合。 电感元件可以策略地放置在两个或更多个耦合部件之间的接合位置处。 在拆卸时，元件可能会通过射频（RF）能量加热，导致键断裂，并使元件分离。 例如，可以使用放置在电子设备中的不同材料之间的塑料桩附近的感应元件来在再循环过程中分离不同的材料。 根据一些示例，元件还可以经由设计到组件中的连接网络通过直接施加的电流加热。

    Heterodyne reflectomer for film thickness monitoring and method for implementing
    4.
    发明申请
    Heterodyne reflectomer for film thickness monitoring and method for implementing 有权
    用于膜厚监测的异步反射镜和实现方法

    公开(公告)号：US20060192973A1

    公开(公告)日：2006-08-31

    申请号：US11066933

    申请日：2005-02-25

    申请人： Arun Aiyer ,  Mark Meloni ,  Kenneth Harvey ,  Andrew Kueny

    发明人： Arun Aiyer ,  Mark Meloni ,  Kenneth Harvey ,  Andrew Kueny

    IPC分类号： G01B9/02

    CPC分类号： G01B11/0641

    摘要： The present invention is directed to a heterodyne reflectometer system and method for obtaining highly accurate phase shift information from heterodyned optical signals, from which extremely accurate film depths can be calculated. A linearly polarized light comprised of two linearly polarized components that are orthogonal to each other, with split optical frequencies, is directed toward a film causing one of the optical polarization components to lag behind the other due to an increase in the optical path in the film for that component. A pair of detectors receives the beam reflected from the film layer and produces a measurement signal, and the beam prior to incidence on the film layer and generates a reference signal, respectively. The measurement signal and reference signal are analyzed by a phase detector for phase shift. The detected phase shift is then fed into a thickness calculator for film thickness results. A grating interferometer may be included with the heterodyne reflectometer system with a grating, which diffracts the reflected beam into zeroth- and first-order bands, which are then detected by separate detectors. A detector receives the zeroth-order beam and generates another measurement signal. Another detector receives the first-order beam and generates a grating signal. The measurement signal from the grating and reference signal may be analyzed by a phase detector for phase shift, which is related to the thickness of the film. Conversely, either measurement signal may be analyzed with the grating signal by a phase detector for detecting a grating phase shift. The refractive index for the film may be calculated from grating phase shift and the heterodyne phase shift. The updated refractive index is then used for calculating thickness.

    摘要翻译： 本发明涉及一种外差反射计系统和方法，用于从外差光信号中获得高精度的相移信息，从而可以计算出非常精确的胶片深度。 由分裂的光学频率彼此正交的两个线性偏振分量组成的线性偏振光指向一个薄膜，导致光学偏振分量之一由于膜中光路的增加而落后于另一个 为该组件。 一对检测器接收从膜层反射的光束并产生测量信号，并且在入射到膜层之前分别产生参考信号。 测量信号和参考信号由相位检测器分析。 然后将检测到的相移馈送到用于膜厚度结果的厚度计算器中。 光栅干涉仪可以与带有光栅的外差反射计系统一起包含，该光栅将反射光束衍射成零级和一级带，然后由单独的检测器检测。 检测器接收零级光束并产生另一测量信号。 另一个检测器接收一阶光束并产生光栅信号。 来自光栅和参考信号的测量信号可以通过用于相移的相位检测器进行分析，这与膜的厚度有关。 相反，可以通过用于检测光栅相移的相位检测器用光栅信号来分析测量信号。 膜的折射率可以通过光栅相移和外差相移来计算。 然后更新的折射率用于计算厚度。

    System and method for detecting CMP endpoint via direct chemical monitoring of reactions
    10.
    发明授权
    System and method for detecting CMP endpoint via direct chemical monitoring of reactions 失效
    通过反应的直接化学监测来检测CMP端点的系统和方法

    公开(公告)号：US06287171B1

    公开(公告)日：2001-09-11

    申请号：US09504565

    申请日：2000-02-15

    申请人： Mark Meloni

    发明人： Mark Meloni

    IPC分类号： B24B100

    CPC分类号： B24B37/013 ,  B24B49/12

    摘要： A system and method for detecting process endpoint in CMP is presented which monitors the progression of chemical activities that take place from the chemical reaction that occurs at the wafer surface during polishing. In order to monitor the progression of chemical activities taking place from the chemical reaction, a surface plasmon resonance sensor acts as a conducting surface which supports surface plasmon resonance.

    摘要翻译： 提出了一种用于检测CMP中过程终点的系统和方法，该系统和方法用于监测在抛光期间从晶片表面发生的化学反应发生的化学活性的进展情况。 为了监测从化学反应发生的化学活性的进展，表面等离子体共振传感器用作支持表面等离子体共振的导电表面。