REFRACTORY METAL ALLOY TARGETS FOR PHYSICAL VAPOR DEPOSITION

    公开(公告)号:US20180327887A1

    公开(公告)日:2018-11-15

    申请号:US15777502

    申请日:2015-12-18

    Abstract: Refractory metal alloy targets for reducing particles in physical vapor deposition processing and refractory metal-based layer for integrated circuit applications (for example, crystallization barrier layers in non-volatile memory devices) are disclosed herein. An exemplary method for reducing particles in a PVD chamber include positioning a refractory metal alloy target in the PVD chamber, positioning a substrate in the PVD chamber a distance from the refractory metal alloy target, and sputtering material from the refractory metal alloy target to form a refractory metal-based layer over the substrate. The refractory metal alloy target includes a refractory metal (for example, tungsten or molybdenum) alloyed with a body-centered cubic (BCC) metal (for example, niobium, tantalum, vanadium, or a combination thereof). The BCC metal has a Young's modulus lower than a Young's modulus of the refractory metal.

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