公开(公告)号：US11287443B2

公开(公告)日：2022-03-29

申请号：US16794952

申请日：2020-02-19

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Vadim Tsinker ,  Matthew Julian Thompson

IPC: G01P15/13 ,  G01P15/08

Abstract: A MEMS accelerometer includes a suspended spring-mass system that has a frequency response to accelerations experienced over a range of frequencies. The components of the suspended spring-mass system such as the proof masses respond to acceleration in a substantially uniform manner at frequencies that fall within a designed bandwidth for the MEMS accelerometer. Digital compensation circuitry compensates for motion of the proof masses outside of the designed bandwidth, such that the functional bandwidth of the MEMS accelerometer is significantly greater than the designed bandwidth.

公开(公告)号：US11255876B2

公开(公告)日：2022-02-22

申请号：US16824161

申请日：2020-03-19

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Matthew Julian Thompson ,  Vadim Tsinker

IPC: G01P21/00 ,  G01P15/125 ,  G01P15/08

Abstract: A method of measuring noise of an accelerometer can comprise exposing the accelerometer comprising a micro-electro-mechanical system (MEMS) component coupled to an application specific integrated circuit component (ASIC), to an external environmental input, with the MEMS component being configured to provide a first output to the ASIC based on the external environmental input. The method can further comprise estimating a first noise generated by operation of the MEMS component, and replacing the first output provided to the ASIC from the MEMS component, with a second output generated by a MEMS emulator component, with the second output comprising the first noise. Further, the method can include generating an output of the accelerometer based on the second output processed by the ASIC.

公开(公告)号：US11821731B2

公开(公告)日：2023-11-21

申请号：US17400102

申请日：2021-08-11

Applicant: INVENSENSE, INC.

Inventor： Carlo Pinna ,  Sriraman Dakshinamurthy

IPC: H03M3/00 ,  G01C19/5712

CPC classification number: G01C19/5712 ,  H03M3/358 ,  H03M3/402 ,  H03M3/458

Abstract: Facilitating minimization of non-linearity effects of a delay of a capacitance-to-voltage (C2V) converter on an output of a gyroscope is presented herein. A sense output signal of a sense mass of the gyroscope and a drive output signal of a drive mass of the gyroscope are electronically coupled to respective analog-to-digital converter (ADC) inputs of bandpass sigma-delta ADCs of the gyroscope. The bandpass sigma-delta ADCs include respective C2V converters that are electronically coupled, via respective feedback loops, to the respective ADC inputs to facilitate reductions of respective propagation delays of the bandpass sigma-delta ADCs. Respective ADC outputs of the bandpass sigma-delta ADCs are electronically coupled to demodulator inputs of a demodulator of the gyroscope that transforms the sense output into an output of the MEMS gyroscope representing an external stimulus that has been applied to the sense mass.

公开(公告)号：US11754397B2

公开(公告)日：2023-09-12

申请号：US17317787

申请日：2021-05-11

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Carlo Pinna ,  Ronak Chetan Desai

IPC: G01C19/5776

CPC classification number: G01C19/5776

Abstract: Microelectromechanical systems (MEMS) gyroscopes and related sense frequency tracking techniques are described. Various embodiments facilitate sense frequency tracking and offset and/or sensitivity change compensation. Exemplary embodiments can comprise receiving a sense signal at an output of a MEMS gyroscope and determining a sense resonant frequency of the sense signal. In addition, exemplary methods can comprise generating an input sine wave with a frequency of the sense resonant frequency of the sense signal injecting the input sine wave into the MEMS gyroscope, to facilitate sense frequency tracking.

公开(公告)号：US10996075B2

公开(公告)日：2021-05-04

申请号：US16221409

申请日：2018-12-14

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Doruk Senkal ,  Ali Shirvani ,  Ronak Chetan Desai ,  Carlo Pinna

IPC: G01C25/00 ,  B81B3/00 ,  B81B7/02 ,  G01C19/56

Abstract: Microelectromechanical systems (MEMS) gyroscopes and related measurement and calibration techniques are described. Various embodiments facilitate phase estimation of an ideal phase for a demodulator mixer associated with an exemplary MEMS gyroscope using quadrature tuning, which can improve offset performance over life time for exemplary MEMS gyroscopes. Exemplary embodiments can comprise adjusting a quadrature component of an exemplary MEMS gyroscope sense signal, measuring a change in offset of the exemplary MEMS gyroscope at an output of a demodulator mixer associated with the exemplary MEMS gyroscope, estimating a phase error between the quadrature component and a demodulation phase angle of the demodulator mixer based on the change in the offset, and periodically adjusting the demodulation phase angle of the demodulator mixer based on the phase error.

公开(公告)号：US20200300887A1

公开(公告)日：2020-09-24

申请号：US16824161

申请日：2020-03-19

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Matthew Julian Thompson ,  Vadim Tsinker

IPC: G01P21/00 ,  G01P15/08 ,  G01P15/125

Abstract: A method of measuring noise of an accelerometer can comprise exposing the accelerometer comprising a micro-electro-mechanical system (MEMS) component coupled to an application specific integrated circuit component (ASIC), to an external environmental input, with the MEMS component being configured to provide a first output to the ASIC based on the external environmental input. The method can further comprise estimating a first noise generated by operation of the MEMS component, and replacing the first output provided to the ASIC from the MEMS component, with a second output generated by a MEMS emulator component, with the second output comprising the first noise. Further, the method can include generating an output of the accelerometer based on the second output processed by the ASIC.

公开(公告)号：US20220057207A1

公开(公告)日：2022-02-24

申请号：US17400102

申请日：2021-08-11

Applicant: INVENSENSE, INC.

Inventor： Carlo Pinna ,  Sriraman Dakshinamurthy

IPC: G01C19/5712 ,  H03M3/00

Abstract: Facilitating minimization of non-linearity effects of a delay of a capacitance-to-voltage (C2V) converter on an output of a gyroscope is presented herein. A sense output signal of a sense mass of the gyroscope and a drive output signal of a drive mass of the gyroscope are electronically coupled to respective analog-to-digital converter (ADC) inputs of bandpass sigma-delta ADCs of the gyroscope. The bandpass sigma-delta ADCs include respective C2V converters that are electronically coupled, via respective feedback loops, to the respective ADC inputs to facilitate reductions of respective propagation delays of the bandpass sigma-delta ADCs. Respective ADC outputs of the bandpass sigma-delta ADCs are electronically coupled to demodulator inputs of a demodulator of the gyroscope that transforms the sense output into an output of the MEMS gyroscope representing an external stimulus that has been applied to the sense mass.

公开(公告)号：US20190186950A1

公开(公告)日：2019-06-20

申请号：US16221409

申请日：2018-12-14

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Doruk Senkal ,  Ali Shirvani ,  Ronak Chetan Desai ,  Carlo Pinna

IPC: G01C25/00 ,  B81B7/02 ,  B81B3/00

CPC classification number: G01C25/005 ,  B81B3/0018 ,  B81B7/02 ,  B81B2201/0242

Abstract: Microelectromechanical systems (MEMS) gyroscopes and related measurement and calibration techniques are described. Various embodiments facilitate phase estimation of an ideal phase for a demodulator mixer associated with an exemplary MEMS gyroscope using quadrature tuning, which can improve offset performance over life time for exemplary MEMS gyroscopes. Exemplary embodiments can comprise adjusting a quadrature component of an exemplary MEMS gyroscope sense signal, measuring a change in offset of the exemplary MEMS gyroscope at an output of a demodulator mixer associated with the exemplary MEMS gyroscope, estimating a phase error between the quadrature component and a demodulation phase angle of the demodulator mixer based on the change in the offset, and periodically adjusting the demodulation phase angle of the demodulator mixer based on the phase error.

公开(公告)号：US20180152182A1

公开(公告)日：2018-05-31

申请号：US15365400

申请日：2016-11-30

Applicant: InvenSense, Inc.

Inventor： Sriraman Dakshinamurthy

IPC: H03K7/08 ,  H03K19/21 ,  G01C19/5776

CPC classification number: H03K7/08 ,  G01C19/5776 ,  H03K19/21

Abstract: A device includes a micro-electro-mechanical system (MEMS) sensor and a PWM modifier circuitry. The MEMS sensor may include a drive circuitry and a sense circuitry. The MEMS sensor is configured to sense motion. A carrier signal is used in the sense circuitry and the drive circuitry. The PWM modifier circuitry is configured to generate a PWM modifier signal for modifying a portion of a PWM signal and to form a modified PWM signal to compensate for changes in the carrier signal.

公开(公告)号：US20210262796A1

公开(公告)日：2021-08-26

申请号：US17317787

申请日：2021-05-11

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Carlo Pinna ,  Ronak Chetan Desai

IPC: G01C19/5776

Abstract: Microelectromechanical systems (MEMS) gyroscopes and related sense frequency tracking techniques are described. Various embodiments facilitate sense frequency tracking and offset and/or sensitivity change compensation. Exemplary embodiments can comprise receiving a sense signal at an output of a MEMS gyroscope and determining a sense resonant frequency of the sense signal. In addition, exemplary methods can comprise generating an input sine wave with a frequency of the sense resonant frequency of the sense signal injecting the input sine wave into the MEMS gyroscope, to facilitate sense frequency tracking.