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1.发明授权Method for preventing micromechanical structures from adhering to another object 失效防止微机械结构粘附到另一物体的方法
公开(公告)号：US5766367A
公开(公告)日：1998-06-16
申请号：US645976
申请日：1996-05-14
申请人： James H. Smith , Antonio J. Ricco
发明人： James H. Smith , Antonio J. Ricco
CPC分类号： B81C1/00928 , C23C22/68 , B81C2201/117
摘要： A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.
摘要翻译： 用于防止微机械结构粘附到另一物体的方法包括将微机械结构及其相关衬底浸入不粘附于其自身的化学物质的步骤。 该方法可以在微机械结构的制造过程中采用，以防止微机械部件彼此粘附或粘附，以及它们相关联的衬底表面。
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公开(公告)号：US5834627A
公开(公告)日：1998-11-10
申请号：US766142
申请日：1996-12-17
申请人： Antonio J. Ricco , Robert C. Hughes , James H. Smith , Daniel J. Moreno , Ronald P. Manginell , Stephen D. Senturia , Robert J. Huber
发明人： Antonio J. Ricco , Robert C. Hughes , James H. Smith , Daniel J. Moreno , Ronald P. Manginell , Stephen D. Senturia , Robert J. Huber
CPC分类号： G01N27/16
摘要： A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. The filaments tested to date are 2 .mu.m thick.times.10 .mu.m wide.times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500.degree. C.; Pt deposits only on the hot filament. Using a constant-resistance-mode feedback circuit, Pt-coated filaments operating at ca. 300.degree. C. (35 mW input power) respond linearly, in terms of the change in supply current required to maintain constant resistance (temperature), to H.sub.2 concentrations between 100 ppm and 1% in an 80/20 N.sub.2 /O.sub.2 mixture. Other catalytic materials can also be used.
摘要翻译： 一种可燃气体传感器，其使用电阻加热的贵金属涂覆的微加工多晶硅丝来量热检测可燃气体的存在和浓度。 到目前为止测试的长丝是2μm厚的10μm宽×100,250,500或1000μm长的多晶Si; 有些被外涂了0.25μm厚的保护性CVD Si 3 N 4层。 通过CVD将Pt催化Pt薄膜从前体Pt（acac）2沉积到电阻加热至约500℃的微丝上; Pt仅在热丝上沉积。 使用恒电阻模式反馈电路，Pt涂层长丝在约 在80/20 N2 / O2混合物中，在保持恒定电阻（温度）所需的电源电流变化为100 ppm和1％之间，300°C（35 mW输入功率）线性响应。 也可以使用其它催化剂。
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3.发明授权Optical apparatus for forming correlation spectrometers and optical processors 失效用于形成相关光谱仪和光学处理器的光学装置
公开(公告)号：US5905571A
公开(公告)日：1999-05-18
申请号：US522202
申请日：1995-08-30
CPC分类号： G06E3/005 , G01J3/18 , G01J3/457 , G02B26/0808
摘要： Optical apparatus for forming correlation spectrometers and optical processors. The optical apparatus comprises one or more diffractive optical elements formed on a substrate for receiving light from a source and processing the incident light. The optical apparatus includes an addressing element for alternately addressing each diffractive optical element thereof to produce for one unit of time a first correlation with the incident light, and to produce for a different unit of time a second correlation with the incident light that is different from the first correlation. In preferred embodiments of the invention, the optical apparatus is in the form of a correlation spectrometer; and in other embodiments, the apparatus is in the form of an optical processor. In some embodiments, the optical apparatus comprises a plurality of diffractive optical elements on a common substrate for forming first and second gratings that alternately intercept the incident light for different units of time. In other embodiments, the optical apparatus includes an electrically-programmable diffraction grating that may be alternately switched between a plurality of grating states thereof for processing the incident light. The optical apparatus may be formed, at least in part, by a micromachining process.
摘要翻译： 用于形成相关光谱仪和光学处理器的光学装置。 光学装置包括形成在基板上的一个或多个衍射光学元件，用于接收来自光源的光并处理入射光。 光学装置包括用于交替地寻址其每个衍射光学元件的寻址元件，以产生与入射光的第一相关的一个单位时间，并且产生与不同于入射光的入射光的第二相关性。 第一相关。 在本发明的优选实施例中，光学装置是相关光谱仪的形式; 并且在其他实施例中，该装置是光学处理器的形式。 在一些实施例中，光学装置包括在公共基板上的多个衍射光学元件，用于形成用于不同单位时间交替地截取入射光的第一和第二光栅。 在其他实施例中，光学装置包括电可编程衍射光栅，其可以在其多个光栅状态之间交替地切换以处理入射光。 光学装置可以至少部分地通过微加工工艺形成。
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4.发明授权
公开(公告)号：US5117146A
公开(公告)日：1992-05-26
申请号：US719654
申请日：1991-06-21
IPC分类号： G01N29/02
CPC分类号： G01N29/022 , G01N2291/014 , G01N2291/0255 , G01N2291/0256 , G01N2291/02809 , G01N2291/0427
摘要： Solid-state acoustic sensors for monitoring conditions at a surface immersed in a liquid and for monitoring concentrations of species in a liquid and for monitoring electrical properties of a liquid are formed by placing interdigital input and output transducers on a piezoelectric substrate and propagating acoustic plate modes therebetween. The deposition or removal of material on or from, respectively, a thin film in contact with the surface, or changes in the mechanical properties of a thin film in contact with the surface, or changes in the electrical characteristics of the solution, create perturbations in the velocity and attenuation of the acoustic plate modes as a function of these properties or changes in them.
摘要翻译： 用于监测浸在液体中的表面条件和用于监测液体中的物质浓度和用于监测液体的电性能的固态声学传感器是通过将叉指输入和输出换能器放置在压电基片上并传播声板模式 之间。 分别在与表面接触的薄膜上或从其分开的材料的沉积或去除，或与表面接触的薄膜的机械性能的变化或溶液的电特性的变化产生扰动 声板模式的速度和衰减作为这些属性或其变化的函数。
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公开(公告)号：US20140011285A1
公开(公告)日：2014-01-09
申请号：US13934347
申请日：2013-07-03
申请人： Fabien J. Josse , Florian Bender , Antonio J. Ricco , Rachel Mohler , Urmas Kelmser , Karen Synowiec , Robert Michael Lorenz
发明人： Fabien J. Josse , Florian Bender , Antonio J. Ricco , Rachel Mohler , Urmas Kelmser , Karen Synowiec , Robert Michael Lorenz
IPC分类号： G01N33/18
CPC分类号： G01N33/1826 , G01N1/405 , G01N29/022 , G01N2291/0255 , G01N2291/0256 , G01N2291/02809 , G01N2291/0422 , G01N2291/0423 , G01N2291/106 , Y10T436/21 , Y10T436/255
摘要： A process for a pre-concentration unit including: a sorbent material coated passage-way having an entrance for receiving a hydrocarbon-containing groundwater sample and for pre-concentrating the hydrocarbons in a hydrocarbon-containing groundwater sample by successive sorption/desorption cycles, and having an exit for discharging the pre-concentrated hydrocarbons; a heating unit for heating the sorbent material coated passage-way; and; an array of shear horizontal-surface acoustic wave sensors with coatings adapted for detecting and quantifying the pre-concentrated hydrocarbons, disposed at the exit of the sorbent material coated passage-way; and a housing for enclosing the pre-concentration unit and the array of shear horizontal-surface acoustic wave sensors, adapted for continuous use at a body of hydrocarbon-containing groundwater, and coupled to mathematical methods for generating concentrations of specific analytes from both transient and steady-state signals.
摘要翻译： 一种预浓缩单元的方法，包括：吸附材料涂覆的通道，其具有用于接收含烃地下水样品的入口并且用于通过连续的吸附/解吸循环将烃预先浓缩在含烃地下水样品中，以及 具有用于排出预浓缩烃的出口; 加热单元，用于加热吸附材料涂覆的通道; 和; 一组剪切的水平声表面波传感器，其具有适于检测和定量预先浓缩的碳氢化合物的涂层，其设置在吸附材料涂覆通道的出口处; 以及用于封闭预浓缩单元和剪切水平声表面波传感器阵列的壳体，适用于在含烃地下水的主体上连续使用，并且耦合到用于从瞬态和过渡时间两者产生特定分析物浓度的数学方法 稳态信号。
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公开(公告)号：US5380474A
公开(公告)日：1995-01-10
申请号：US65211
申请日：1993-05-20
IPC分类号： C23C16/02 , C23C16/04 , C23C16/18 , C23C18/16 , H05K1/03 , H05K3/14 , H05K3/18 , H05K3/38 , B05D3/06
CPC分类号： H05K3/185 , C23C16/0227 , C23C16/04 , C23C16/18 , C23C18/12 , C23C18/2006 , C23C18/204 , C23C18/24 , C23C18/285 , C23C18/30 , C23C18/405 , H05K1/034 , H05K3/146 , H05K3/381
摘要： A method is described for patterned depositions of a material onto a substrate. A surface of a polymeric substrate is first etched so as to form an etched layer having enhanced adhesions characteristics and then selected portions of the etched layer are removed so as to define a pattern having enhanced and diminished adhesion characteristics for the deposition of a conductor onto the remaining etched layer. In one embodiment, a surface of a PTFE substrate is chemically etched so as to improve the adhesion of copper thereto. Thereafter, selected portions of the etched surface are irradiated with a laser beam so as to remove the etched selected portions of the etched surface and form patterns of enhanced and diminished adhesion of copper thereto.
摘要翻译： 描述了将材料图案化沉积到衬底上的方法。 首先蚀刻聚合物基材的表面以形成具有增强的粘合特性的蚀刻层，然后去除蚀刻层的选定部分，以便限定具有增强和减小的粘合特性的图案，以将导体沉积到 剩余蚀刻层。 在一个实施例中，PTFE基板的表面被化学蚀刻，以便改善铜的粘附性。 此后，用激光束照射蚀刻表面的选定部分，以便去除蚀刻后的蚀刻表面的所选择的部分，并形成铜的附着力增强和减弱的图案。
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7.发明授权
公开(公告)号：US5235235A
公开(公告)日：1993-08-10
申请号：US705408
申请日：1991-05-24
CPC分类号： G01N29/022 , G01N29/348 , G01N2291/011 , G01N2291/014 , G01N2291/015 , G01N2291/0212 , G01N2291/0222 , G01N2291/0255 , G01N2291/0256 , G01N2291/02827 , G01N2291/02836 , G01N2291/0423 , G01N2291/0425 , G01N2291/106
摘要： A chemical sensor (1) includes two or more pairs of interdigital electrodes (10) having different periodicities. Each pair is comprised of a first electrode (10a) and a second electrode (10b). The electrodes are patterned on a surface of a piezoelectric substrate (12). Each pair of electrodes may launch and receive various acoustic waves (AW), including a surface acoustic wave (SAW), and may also launch and receive several acoustic plate modes (APMs). The frequencies associated with each are functions of the transducer periodicity as well as the velocity of the particular AW in the chosen substrate material. An AW interaction region (13) exists between each pair of electrodes. Circuitry (20, 40) is used to launch, receive, and monitor the propagation characteristics of the AWs and may be configured in an intermittent measurement fashion or in a continuous measurement fashion. Perturbations to the AW velocity and attenuation are recorded at several frequencies and provide the sensor response.
摘要翻译： 化学传感器（1）包括具有不同周期性的两对或多对交叉指状电极（10）。 每一对由第一电极（10a）和第二电极（10b）构成。 电极在压电基板（12）的表面上被图案化。 每对电极可以发射和接收包括表面声波（SAW）的各种声波（AW），并且还可以发射和接收多个声板模式（APM）。 与每个相关联的频率是换能器周期的函数以及所选衬底材料中特定AW的速度。 在每对电极之间存在AW相互作用区域（13）。 电路（20,40）用于发射，接收和监测AW的传播特性，并且可以以间歇测量方式或以连续的测量方式进行配置。 对AW速度和衰减的扰动以几个频率记录，并提供传感器响应。
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公开(公告)号：US09170138B2
公开(公告)日：2015-10-27
申请号：US13250605
申请日：2011-09-30
摘要： Techniques for enhanced microfluidic impedance spectroscopy include causing a core fluid to flow into a channel between two sheath flows of one or more sheath fluids different from the core fluid. Flow in the channel is laminar. A dielectric constant of a fluid constituting either sheath flow is much less than a dielectric constant of the core fluid. Electrical impedance is measured in the channel between at least a first pair of electrodes. In some embodiments, enhanced optical measurements include causing a core fluid to flow into a channel between two sheath flows of one or more sheath fluids different from the core fluid. An optical index of refraction of a fluid constituting either sheath flow is much less than an optical index of refraction of the core fluid. An optical property is measured in the channel.
摘要翻译： 用于增强的微流体阻抗光谱的技术包括使核心流体流入不同于核心流体的一种或多种鞘液的两个鞘流之间的通道中。 通道中的流动是层流。 构成鞘流的流体的介电常数远小于芯流体的介电常数。 在至少第一对电极之间的通道中测量电阻抗。 在一些实施例中，增强的光学测量包括使芯流体流入不同于芯流体的一种或多种护套流体的两个护套流之间的通道中。 构成鞘流的流体的光学折射率远小于芯流体的光学折射率。 在通道中测量光学性质。
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公开(公告)号：US07022287B2
公开(公告)日：2006-04-04
申请号：US10141806
申请日：2002-05-08
申请人： Joseph Schoeniger , Albert W. Flounders , Robert C. Hughes , Antonio J. Ricco , Karl Wally , Stanley H. Kravitz , Richard P. Janek
发明人： Joseph Schoeniger , Albert W. Flounders , Robert C. Hughes , Antonio J. Ricco , Karl Wally , Stanley H. Kravitz , Richard P. Janek
IPC分类号： G01N15/06
CPC分类号： G01N33/5438 , G01N27/22
摘要： The present invention discloses an electrochemical device for detecting single particles, and methods for using such a device to achieve high sensitivity for detecting particles such as bacteria, viruses, aggregates, immuno-complexes, molecules, or ionic species. The device provides for affinity-based electrochemical detection of particles with single-particle sensitivity. The disclosed device and methods are based on microelectrodes with surface-attached, affinity ligands (e.g., antibodies, combinatorial peptides, glycolipids) that bind selectively to some target particle species. The electrodes electrolyze chemical species present in the particle-containing solution, and particle interaction with a sensor element modulates its electrolytic activity. The devices may be used individually, employed as sensors, used in arrays for a single specific type of particle or for a range of particle types, or configured into arrays of sensors having both these attributes.
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10.发明授权Method and apparatus for acoustic plate mode liquid-solid phase transition detection 失效声板模式液 - 固相变检测方法与装置
公开(公告)号：US5187980A
公开(公告)日：1993-02-23
申请号：US531492
申请日：1990-05-31
CPC分类号： G01N29/11 , B64D15/20 , G01N29/022 , G01N2291/023 , G01N2291/0251 , G01N2291/0422 , G01N2291/0425
摘要： A method and apparatus for sensing a liquid-solid phase transition event is provided which comprises an acoustic plate mode detecting element placed in contact with a liquid or solid material which generates a high-frequency acoustic wave that is attenuated to an extent based on the physical state of the material is contact with the detecting element. The attenuation caused by the material in contact with the acoustic plate mode detecting element is used to determine the physical state of the material being detected. The method and device are particularly suited for detecting conditions such as the icing and deicing of wings of an aircraft. In another aspect of the present invention, a method is provided wherein the adhesion of a solid material to the detecting element can be measured using the apparatus of the invention.
摘要翻译： 提供了一种用于感测液 - 液相变事件的方法和装置，其包括与液体或固体材料接触放置的声板模式检测元件，所述声板模式检测元件产生基于物理的一定程度衰减的高频声波 材料的状态与检测元件接触。 由与声板模式检测元件接触的材料引起的衰减用于确定被检测材料的物理状态。 该方法和装置特别适用于检测诸如飞机机翼结冰和除冰等条件。 在本发明的另一方面，提供了一种方法，其中可以使用本发明的装置测量固体材料对检测元件的粘附。
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