公开(公告)号：US4347441A

公开(公告)日：1982-08-31

申请号：US193972

申请日：1980-10-06

申请人： Jan G. Dil ,  Johannes C. Driessen ,  Wichert Mesman

发明人： Jan G. Dil ,  Johannes C. Driessen ,  Wichert Mesman

IPC分类号： G01B9/02 ,  G01B11/24 ,  G01B11/30 ,  G01B21/20 ,  G01N21/86

CPC分类号： G01B11/303 ,  G01B11/2408 ,  G01B21/20

摘要： An apparatus is described for accurately measuring the profile on an object. The apparatus comprises two probes for simultaneously scanning the object to be measured and the reference object, the objects being rotatable about the same axis. Each of the probes is provided with a reflecting element, which are respectively incorporated in the measuring arm and reference arm of an interferometer.

摘要翻译： 描述了用于精确测量物体上的轮廓的装置。 该装置包括用于同时扫描被测量物体和参考物体的两个探针，物体可绕同一轴线旋转。 每个探针设置有分别结合在干涉仪的测量臂和参考臂中的反射元件。

公开(公告)号：US06445440B1

公开(公告)日：2002-09-03

申请号：US09551229

申请日：2000-04-17

申请人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

发明人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

IPC分类号： G03B2742

CPC分类号： G03F7/70766 ,  G03F7/70716 ,  G03F7/70758 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/70991

摘要： A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.

摘要翻译： 通过在真空室壁中的孔上提供滑动密封将长行程运动馈送到真空室中。 要移动的物体（其可以是光刻设备中的掩模或晶片台）在真空室内连接或安装在滑动密封件上并通过滑动密封的移动而移动。 滑动密封件可以是板，碗或镶嵌板的迷宫。

公开(公告)号：US5878495A

公开(公告)日：1999-03-09

申请号：US627619

申请日：1996-04-04

申请人： Peter Martens ,  Johannes C. Driessen

发明人： Peter Martens ,  Johannes C. Driessen

IPC分类号： B23B5/00 ,  B23P15/00 ,  B23Q27/00 ,  F16C17/04 ,  F16C17/10 ,  F16C33/10 ,  F16C33/14 ,  G11B19/20 ,  G11B33/12 ,  B23P13/04

CPC分类号： F16C17/107 ,  B23Q27/00 ,  F16C17/105 ,  F16C33/107 ,  F16C33/14 ,  G11B19/2009 ,  F16C2370/12 ,  Y10T29/49673 ,  Y10T29/49707

摘要： A method of manufacturing a dynamic groove bearing having parts rotatable relative to one another. The bearing parts include cooperating bearing surfaces and a pattern of grooves by means of a metal-removing tool. A first bearing part is fastened to a rotatable support of a machine tool, which is rotated in a constant direction. The tool is periodically displaced relative to the first bearing part parallel to a direction transverse to the bearing surface of the first bearing part by a positioning device with a frequency which is determined by a product of a rotation frequency of the support and a number of grooves on the bearing surface of the first bearing part. The tool is periodically displaced in a sinusoidal movement and the positioning device may include a piezoelectric actuator (95). A data storage unit including dynamic groove bearings is also provided.

摘要翻译： 一种制造具有可相对于彼此旋转的部件的动力槽轴承的方法。 轴承部件包括通过金属去除工具的配合的支承表面和凹槽的图案。 第一轴承部件被紧固到机床的可旋转支撑件，该机床沿恒定方向旋转。 该工具相对于第一轴承部分周期地移动，该第一轴承部分平行于与第一轴承部件的轴承表面横向的方向，该定位装置的频率由定位装置确定，该频率由支撑件的旋转频率和多个槽 在第一轴承部件的轴承表面上。 该工具以正弦运动周期性地移位，定位装置可包括压电致动器（95）。 还提供了包括动态槽轴承的数据存储单元。

公开(公告)号：US06618122B2

公开(公告)日：2003-09-09

申请号：US10171638

申请日：2002-06-17

申请人： Theodorus H. J. Bisschops ,  Hermanus M. J. R. Soemers ,  Jakob Vijfvinkel ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

发明人： Theodorus H. J. Bisschops ,  Hermanus M. J. R. Soemers ,  Jakob Vijfvinkel ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

IPC分类号： G03B2758

CPC分类号： G03F7/70841 ,  F16C32/0603 ,  F16C33/748 ,  F16C2300/62 ,  G03F7/70716 ,  G03F7/70758

摘要： An object table is supported in a vacuum chamber by an elongate beam or beams extending through elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.

摘要翻译： 物体台通过细长的梁或梁支撑在真空室中，细长的梁或梁延伸穿过真空室的相对的壁中的细长槽。 通过横向和纵向地移动梁来实现横梁在两个正交方向的位移。 细长的槽由由气体轴承支撑的滑动板密封。 光束由平衡质量与光束之间的线性电机纵向驱动。 该梁由平衡质量块和滑板之间的直线电动机横向驱动。 两个平衡块可以是分开的或组合的。

公开(公告)号：US5216737A

公开(公告)日：1993-06-01

申请号：US834417

申请日：1992-02-12

申请人： Johannes C. Driessen ,  Jan W. Kokkelink ,  Hendricus F. J. J. Van Tongeren

发明人： Johannes C. Driessen ,  Jan W. Kokkelink ,  Hendricus F. J. J. Van Tongeren

IPC分类号： G02B6/42 ,  G02B27/28 ,  G02F1/095

CPC分类号： G02B6/4208 ,  G02F1/0955

摘要： The invention relates to an optoelectronic device comprising a semiconductor laser enclosed in an envelope, an optical fibre coupled to the semiconductor laser, and further coupled to at least one optical isolator and an outgoing optical fibre (pigtail). According to the invention, the semiconductor laser and the optical isolator are each enclosed in a separate module. The laser module mainly provides space to the semiconductor laser and to an optical fibre coupled thereto and ending in a ferrule in a tubular projection of the laser module. The module for the optical isolator is tubular in shape and contains in that order a first graded index lens, an optical isolator, a second graded index lens, and an outgoing optical fibre (pigtail) coupled to this second graded index lens through a ferrule. The tubular projection of the laser module and an end portion of the tubular optical module are so shaped in relation to one another that a mechanical coupling of the two modules can be obtained whereby the optical coupling between the modules is achieved simultaneously.

公开(公告)号：US06597433B1

公开(公告)日：2003-07-22

申请号：US09551232

申请日：2000-04-17

申请人： Michael J. M. Renkens ,  Adrianus G. Bouwer ,  Johannes C. Driessen ,  Theodorus H. J. Bisschops ,  Hermanus M. J. R. Soemers ,  Jakob Vijfvinkel

发明人： Michael J. M. Renkens ,  Adrianus G. Bouwer ,  Johannes C. Driessen ,  Theodorus H. J. Bisschops ,  Hermanus M. J. R. Soemers ,  Jakob Vijfvinkel

IPC分类号： G03B2762

CPC分类号： G03F7/70358 ,  G03F7/70716 ,  G03F7/70725

摘要： A lithographic apparatus for step-and-scan operation has a three stage structure for the wafer stage. During step-and-scan operation, the long-stroke stage is moved steadily along the row or column of dies to be exposed sequentially. An intermediate scanning stage moves in a figure-of-eight motion relative to the long-stroke stage so that the net movement of the fine stage, which is carried by the scanning stage, is a meander path.

摘要翻译： 用于步进扫描操作的光刻设备具有用于晶片台的三级结构。 在扫描扫描期间，长行程段沿模具行或列逐渐移动，以顺序曝光。 中间扫描台以相对于长行程级的八位运动移动，使得由扫描台携带的细台的净移动是曲折路径。

公开(公告)号：US5726526A

公开(公告)日：1998-03-10

申请号：US530501

申请日：1995-09-19

申请人： Peter Martens ,  Johannes C. Driessen ,  Antonius J. J. Rademakers ,  Petrus H. F. Trompenaars ,  Theunis S. Baller ,  Gerardus G. P. Van Gorkom ,  Nicolaas Lambert ,  Siebe T. De Zwart ,  Edwin A. Montie

发明人： Peter Martens ,  Johannes C. Driessen ,  Antonius J. J. Rademakers ,  Petrus H. F. Trompenaars ,  Theunis S. Baller ,  Gerardus G. P. Van Gorkom ,  Nicolaas Lambert ,  Siebe T. De Zwart ,  Edwin A. Montie

IPC分类号： H01J1/18 ,  H01J19/12 ,  H01J31/12

CPC分类号： H01J31/126 ,  H01J1/18

摘要： A flat display device is provided with a wire cathode or wire cathodes and with apertures which allow passage of electrons emitted by the wire cathode. The wire cathode is stretched in a wire-cathode support having positioning grooves for the wire cathode. This support engages the element in which the passages are made. The support and the element are provided with corresponding contacting surfaces.

摘要翻译： 平面显示装置设有线阴极或线阴极，并且具有允许电线阴极发射的电子通过的孔。 线阴极在具有用于线阴极的定位槽的线阴极支撑件中拉伸。 该支撑件与通道所在的元件接合。 支撑件和元件设置有相应的接触表面。

公开(公告)号：US06844922B2

公开(公告)日：2005-01-18

申请号：US10613094

申请日：2003-07-07

申请人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

发明人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

IPC分类号： F16C32/06 ,  G03F7/20 ,  H01L21/027 ,  G03B27/62 ,  G03B27/58 ,  G21G5/00

CPC分类号： F16C29/025 ,  F16C32/0614 ,  F16C33/748 ,  F16C2300/62 ,  G03F7/70716 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841

摘要： A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing

摘要翻译： 用于真空室的轴承包括将加压气体排放到两个构件之间的间隙中的气体轴承，以在这些构件之间保持预定的间隔。 为了避免形成气体轴承的气体是真空室中的不可接受的泄漏，在真空室和气体轴承之间提供真空泵

公开(公告)号：US06816238B2

公开(公告)日：2004-11-09

申请号：US10196712

申请日：2002-07-17

申请人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

发明人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

IPC分类号： G03B2758

CPC分类号： G03F7/70766 ,  G03F7/70716 ,  G03F7/70758 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/70991

摘要： A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.

摘要翻译： 通过在真空室壁中的孔上提供滑动密封将长行程运动馈送到真空室中。 要移动的物体（其可以是光刻设备中的掩模或晶片台）在真空室内连接或安装在滑动密封件上并通过滑动密封件的移动而移动。 滑动密封件可以是板，碗或镶嵌板的迷宫。

公开(公告)号：US06603130B1

公开(公告)日：2003-08-05

申请号：US09551223

申请日：2000-04-17

申请人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

发明人： Theodorus H. J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M. J. R. Soemers ,  Johannes C. Driessen ,  Michael J. M. Renkens ,  Adrianus G. Bouwer

IPC分类号： H01J3720

CPC分类号： F16C29/025 ,  F16C32/0614 ,  F16C33/748 ,  F16C2300/62 ,  G03F7/70716 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841

摘要： A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing.

摘要翻译： 用于真空室的轴承包括将加压气体排放到两个构件之间的间隙中的气体轴承，以在这些构件之间保持预定的间隔。 为了避免形成气体轴承的气体是不可接受的泄漏到真空室中，真空泵设置在真空室和气体轴承之间。