Apparatus for purification of electronic specialty gases by vapor phase transfilling
    1.
    发明授权
    Apparatus for purification of electronic specialty gases by vapor phase transfilling 失效
    通过气相转移净化电子专用气体的装置

    公开(公告)号:US06517686B2

    公开(公告)日:2003-02-11

    申请号:US09803953

    申请日:2001-03-13

    IPC分类号: B01D342

    摘要: A system and method for purifying liquefied corrosive gases of metallic impurities is described. The principle for this purification method relies on vapor-phase transfilling the vapor phase from a source container into a receiving container. This method has been observed to decrease metal concentrations by a factor of at least 1000 and, decreases the metallic impurity levels in the resulting condensate. The vapor transfer is accomplished by controlled differential pressure rather than mechanical pumping, thereby generating no particle or metal impurities.

    摘要翻译: 描述了用于净化金属杂质的液化腐蚀性气体的系统和方法。 该纯化方法的原理依赖于将来自容器的气相从蒸气相转移到接收容器中。 已经观察到这种方法将金属浓度降低至少1000倍,并降低所得冷凝物中的金属杂质水平。 蒸汽转移通过受控的压差而不是机械泵送来实现,从而不产生颗粒或金属杂质。

    Purification of electronic specialty gases by vapor phase transfilling
    2.
    发明授权
    Purification of electronic specialty gases by vapor phase transfilling 有权
    通过气相转移纯化电子专用气体

    公开(公告)号:US06277246B1

    公开(公告)日:2001-08-21

    申请号:US09238417

    申请日:1999-01-28

    IPC分类号: B01D300

    摘要: A system and method for purifying liquefied corrosive gases of metallic impurities is described. The principle for this purification method relies on vapor-phase transfilling the vapor phase from a source container into a receiving container. This method has been observed to decrease metal concentrations by a factor of at least 1000 and decreases the metallic impurity levels in the resulting condensate. The vapor transfer is accomplished by controlled differential pressure rather than mechanical pumping, thereby generating no particle or metal impurities.

    摘要翻译: 描述了用于净化金属杂质的液化腐蚀性气体的系统和方法。 该纯化方法的原理依赖于将来自容器的气相从蒸气相转移到接收容器中。 已经观察到该方法将金属浓度降低至少1000倍,并降低所得冷凝物中的金属杂质水平。 蒸汽转移通过受控的压差而不是机械泵送来实现,从而不产生颗粒或金属杂质。

    Purification of electronic specialty gases by vapor phase transfilling
    3.
    发明授权
    Purification of electronic specialty gases by vapor phase transfilling 失效
    通过气相转移纯化电子专用气体

    公开(公告)号:US6004433A

    公开(公告)日:1999-12-21

    申请号:US794346

    申请日:1997-02-03

    IPC分类号: B01D3/00 F25J3/08 B01D3/42

    摘要: A method for purifying liquefied corrosive gases of metallic impurities is described. The principle for this purification method relies on vapor-phase transfilling the vapor phase from a source container into a receiving container. This method has been observed to decrease metal concentrations by a factor of at least 1000 and decreases the metallic impurity levels in the resulting condensate. The vapor transfer is accomplished by controlled differential pressure rather than mechanical pumping, thereby generating no particle or metal impurities.

    摘要翻译: 描述了一种净化金属杂质液化腐蚀性气体的方法。 该纯化方法的原理依赖于将来自容器的气相从蒸气相转移到接收容器中。 已经观察到该方法将金属浓度降低至少1000倍,并降低所得冷凝物中的金属杂质水平。 蒸汽转移通过受控的压差而不是机械泵送来实现,从而不产生颗粒或金属杂质。

    Generation of metal-carbonyl standards for the calibration of spectroscopic systems
    6.
    发明授权
    Generation of metal-carbonyl standards for the calibration of spectroscopic systems 失效
    生成用于校准光谱系统的金属 - 羰基标准品

    公开(公告)号:US06468446B1

    公开(公告)日:2002-10-22

    申请号:US09657395

    申请日:2000-09-08

    IPC分类号: C09K300

    摘要: Methods and apparatus for preparing gaseous compositions comprising a metal carbonyl, preferably at ppm concentration, are disclosed. The methods comprise placing metal, preferably in the form of filings, of the metal carbonyl to be produced into a first test vessel at a first temperature, and then pressurizing the first test vessel with a gas comprising carbon monoxide from a carbon monoxide source vessel. The contents of the first vessel are then heated to a second temperature and at a rate sufficient to initiate metal carbonyl formation, thereby forming a gas composition comprising a metal carbonyl. The reaction is then quenched by transferring some of the gas composition comprising a metal carbonyl from the first test vessel to a second test vessel which is at a third temperature, the third temperature being lower than the second temperature. Finally, the gas composition is diluted in the second test vessel with an inert gas (preferably argon) from an inert gas source container.

    摘要翻译: 公开了用于制备包含金属羰基,优选以ppm浓度的气态组合物的方法和设备。 所述方法包括将待生产的金属羰基的金属(优选以填料形式)置于第一温度下的第一试验容器中,然后用包含一氧化碳源容器的一氧化碳的气体对第一试验容器加压。 然后将第一容器的内容物加热到第二温度并以足以引发金属羰基生成的速率,从而形成包含羰基金属的气体组合物。 然后通过将一些包含金属羰基的气体组合物从第一测试容器转移到处于第三温度,第三温度低于第二温度的第二测试容器来淬灭反应。 最后,将惰性气体(优选氩气)从惰性气体源容器中稀释到第二测试容器中。

    Use of a nebulizer to add gas to eliminate metal deposition on the sampling orifices of an inductively coupled plasma mass spectrometer
    8.
    发明授权
    Use of a nebulizer to add gas to eliminate metal deposition on the sampling orifices of an inductively coupled plasma mass spectrometer 失效
    使用雾化器添加气体以消除电感耦合等离子体质谱仪的采样孔上的金属沉积

    公开(公告)号:US06992282B2

    公开(公告)日:2006-01-31

    申请号:US10242954

    申请日:2002-09-13

    IPC分类号: B05D5/03 H01J49/26 B01D59/44

    CPC分类号: H01J49/105 Y10T436/25875

    摘要: Use of a nebulizer add-gas to reduce metal deposition on the sampling orifices of an inductively coupled plasma mass spectrometer (“ICP-MS”) is disclosed. Specifically, dilute mixtures of Sulfur Hexafluoride (SF6) in an inert gas have been used to reduce transition metal deposition on the sampling orifices of an ICP-MS, thereby greatly enhancing the stability of the ICP-MS sensitivity over time without corroding the internal parts and/or chemically attacking the cones of the ICP-MS.

    摘要翻译: 公开了使用雾化器附加气体来减少电感耦合等离子体质谱仪(“ICP-MS”)的采样孔上的金属沉积。 具体来说,已经使用惰性气体中的六氟化硫(SF 6 S 6)的稀释混合物来减少ICP-MS的取样孔上的过渡金属沉积,从而大大提高ICP-MS的稳定性 敏感性随时间而不腐蚀内部部件和/或化学侵蚀ICP-MS的锥体。

    Method and apparatus for dynamic gas mixture production

    公开(公告)号:US10058824B2

    公开(公告)日:2018-08-28

    申请号:US14344373

    申请日:2012-08-17

    IPC分类号: B01F3/02 B01F5/04 B01F15/02

    摘要: The present invention relates to a method for producing and delivering a gas mixture having a selected composition of a first gas and at least one second gas, comprising the following steps: (a) providing a main gas flow comprising the first gas in a main conduit, (b) separating the main gas flow into a first plurality of secondary gas flows, (c) guiding each secondary gas flow through a secondary conduit, (d) adding at least one second gas to at least one of the first plurality of secondary gas flows in the respective secondary conduit through a delivering conduit, said delivering conduit protruding into the secondary conduit, and (e) combining the first plurality of secondary gas flows to the gas mixture. With the technical teaching of the present invention a dynamic gas bottle filling is possible wherein the second gas components may have a concentration form some ppb to percent.