-
1.发明申请METAL PEROXO COMPOUNDS WITH ORGANIC CO-LIGANDS FOR ELECTRON BEAM, DEEP UV AND EXTREME UV PHOTORESIST APPLICATIONS 有权具有电子束有机配体的金属过氧化合物，深紫外线和超紫外线光刻胶应用公开(公告)号：US20130224652A1
公开(公告)日：2013-08-29
申请号：US13405587
申请日：2012-02-27
申请人： John David Bass , Ho-Cheol Kim , Robert Dennis Miller , Qing Song , Linda Karin Sundberg , Gregory Michael Wallraff
发明人： John David Bass , Ho-Cheol Kim , Robert Dennis Miller , Qing Song , Linda Karin Sundberg , Gregory Michael Wallraff
CPC分类号： G03F7/0042
摘要： Compositions are disclosed having the formula (3): [C′]k[Ta(O2)x(L′)y] (3), wherein x is an integer of 1 to 4, y is an integer of 1 to 4, Ta(O2)x(L′)y has a charge of 0 to −3, C′ is a counterion having a charge of +1 to +3, k is an integer of 0 to 3, L′ is an oxidatively stable organic ligand having a charge of 0 to −4, and L′ comprises an electron donating functional group selected from the group consisting of carboxylates, alkoxides, amines, amine oxides, phosphines, phosphine oxides, arsine oxides, and combinations thereof. The compositions have utility as high resolution photoresists.
摘要翻译： 公开了具有式（3）的组合物：[C'] k [Ta（O 2）x（L'）y]（3）其中x是1至4的整数，y是1至4的整数， Ta（O 2）x（L'）y具有0至-3的电荷，C'是具有+1至+3的电荷的抗衡离子，k是0至3的整数，L'是氧化稳定的有机物 具有0至-4电荷的配体，L'包括选自羧酸盐，醇盐，胺，氧化胺，膦，氧化膦，胂氧化物及其组合的给电子官能团。 该组合物具有作为高分辨率光致抗蚀剂的作用。
-
2.发明授权Metal peroxo compounds with organic co-ligands for electron beam, deep UV and extreme UV photoresist applications 有权金属过氧化合物与电子束，深UV和极紫外光致抗蚀剂应用的有机共配体公开(公告)号：US08703386B2
公开(公告)日：2014-04-22
申请号：US13405587
申请日：2012-02-27
申请人： John David Bass , Ho-Cheol Kim , Robert Dennis Miller , Qing Song , Linda Karin Sundberg , Gregory Michael Wallraff
发明人： John David Bass , Ho-Cheol Kim , Robert Dennis Miller , Qing Song , Linda Karin Sundberg , Gregory Michael Wallraff
CPC分类号： G03F7/0042
摘要： Compositions are disclosed having the formula (3): [C′]k[Ta(O2)x(L′)y] (3), wherein x is an integer of 1 to 4, y is an integer of 1 to 4, Ta(O2)x(L′)y has a charge of 0 to −3, C′ is a counterion having a charge of +1 to +3, k is an integer of 0 to 3, L′ is an oxidatively stable organic ligand having a charge of 0 to −4, and L′ comprises an electron donating functional group selected from the group consisting of carboxylates, alkoxides, amines, amine oxides, phosphines, phosphine oxides, arsine oxides, and combinations thereof. The compositions have utility as high resolution photoresists.
摘要翻译： 公开了具有式（3）的组合物：[C'] k [Ta（O 2）x（L'）y]（3）其中x是1至4的整数，y是1至4的整数， Ta（O 2）x（L'）y具有0至-3的电荷，C'是具有+1至+3的电荷的抗衡离子，k是0至3的整数，L'是氧化稳定的有机物 配体的电荷为0至-4，L'包括选自羧酸盐，醇盐，胺，氧化胺，膦，氧化膦，胂氧化物及其组合的给电子官能团。 该组合物具有作为高分辨率光致抗蚀剂的作用。
-
公开(公告)号：US08491768B2
公开(公告)日：2013-07-23
申请号：US12821953
申请日：2010-06-23
申请人： Xin Ai , John David Bass , Ho-Cheol Kim , Robert Dennis Miller , John Campbell Scott , Qing Song
发明人： Xin Ai , John David Bass , Ho-Cheol Kim , Robert Dennis Miller , John Campbell Scott , Qing Song
IPC分类号： B01D57/02
CPC分类号： B03C5/026
摘要： Nanoparticles in a colloid are purified, with the colloid including a fluid, unwanted matter, and the nanoparticles to be purified. An electric field is applied that is substantially spatially uniform over a distance that is at least equal to a characteristic dimension of the nanoparticles, so that at least some of the nanoparticles move towards at least one collection surface as a result of the force arising between their electrical charge and the electric field, whereupon nanoparticles are collected on said at least one collection surface. The collection surface(s) may be one or more electrodes to which a voltage potential is applied. The collected nanoparticles are then removed from the collection surface, e.g., by dispersing them into another fluid.
摘要翻译： 胶体中的纳米颗粒被纯化，胶体包括流体，不想要的物质和待纯化的纳米颗粒。 施加的电场在至少等于纳米颗粒的特征尺寸的距离上基本上在空间上均匀，使得至少一些纳米颗粒由于在它们之间产生的力而朝向至少一个收集表面移动 电荷和电场，由此将纳米颗粒收集在所述至少一个收集表面上。 收集表面可以是施加电压电位的一个或多个电极。 然后将收集的纳米颗粒从收集表面中除去，例如通过将其分散到另一种流体中。
-
公开(公告)号：US07459183B2
公开(公告)日：2008-12-02
申请号：US11190644
申请日：2005-07-27
申请人： Geraud Jean-Michel Dubois , James Lupton Hedrick , Ho-Cheol Kim , Victor Yee-Way Lee , Teddie Peregrino Magbitang , Robert Dennis Miller , Muthumanickam Sankarapandian , Linda Karin Sundberg , Willi Volksen
发明人： Geraud Jean-Michel Dubois , James Lupton Hedrick , Ho-Cheol Kim , Victor Yee-Way Lee , Teddie Peregrino Magbitang , Robert Dennis Miller , Muthumanickam Sankarapandian , Linda Karin Sundberg , Willi Volksen
CPC分类号： C08L101/12 , H01L21/02118 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/31695 , H01L21/76807 , H01L21/7682 , H01L2221/1047
摘要： A method of forming a structure. The method including: forming a precursor layer on a substarte, the precursor layer including a resin and, polymeric nano-particles dispersed in the resin, and a solvent, each the polymeric nano-particle comprising a multi-arm core polymer and pendent polymers attached to the milti-arm core polymer and pendent polymers attached to the multi-arm core polymer, the multi-arm core polymer immiscible with the resin and the pendent polymers miscuble with the resin; heating the precursor layer to cross-link at least about 90% of the resin thereby converting the pre-baked precursor layer to a dielectric layer; forming trenches in the dielectric layer and filling the trenches with an electrical conductor; heating the dielectric layer to thermally decompose at least acout 99.5% of the polymeric nano-particles into decomposition products and to drive the decomposition products out of the dielectric layer.
摘要翻译： 一种形成结构的方法。 该方法包括：在基体上形成前体层，前体层包括树脂和分散在树脂中的聚合物纳米颗粒和溶剂，每个聚合物纳米颗粒包含多臂核聚合物和附着的悬置聚合物 连接到多臂芯聚合物的多芯聚合物和附着的聚合物，与树脂不混溶的多臂芯聚合物和与该树脂不相容的侧链聚合物; 加热前体层以交联至少约90％的树脂，从而将预烘烤的前体层转化为电介质层; 在电介质层中形成沟槽并用电导体填充沟槽; 加热电介质层以将至少99.5％的聚合物纳米颗粒的热量分解成分解产物并将分解产物驱出电介质层。
-
5.发明授权Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures 有权低K层间电介质材料和低K层间介电层和结构的形成方法公开(公告)号：US07820242B2
公开(公告)日：2010-10-26
申请号：US12053721
申请日：2008-03-24
申请人： Geraud Jean-Michel Dubois , James Lupton Hedrick , Ho-Cheol Kim , Victor Yee-Way Lee , Teddie Peregrino Magbitang , Robert Dennis Miller , Muthumanickam Sankarapandian , Linda Karin Sundberg , Willi Volksen
发明人： Geraud Jean-Michel Dubois , James Lupton Hedrick , Ho-Cheol Kim , Victor Yee-Way Lee , Teddie Peregrino Magbitang , Robert Dennis Miller , Muthumanickam Sankarapandian , Linda Karin Sundberg , Willi Volksen
IPC分类号： B05D3/02
CPC分类号： C08L101/12 , H01L21/02118 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/31695 , H01L21/76807 , H01L21/7682 , H01L2221/1047
摘要： A composition of matter and a structure fabricated using the composition. The composition comprising: a resin; polymeric nano-particles dispersed in the resin, each of the polymeric nano-particle comprising a multi-arm core polymer and pendent polymers attached to the multi-arm core polymer, the multi-arm core polymer immiscible with the resin and the pendent polymers miscible with the resin; and a solvent, the solvent volatile at a first temperature, the resin cross-linkable at a second temperature, the polymeric nano-particle decomposable at a third temperature, the third temperature higher than the second temperature, the second temperature higher than the first temperature, wherein a thickness of a layer of the composition shrinks by less than about 3.5% between heating the layer from the second temperature to the third temperature.
摘要翻译： 使用该组合物制造的物质组成和结构。 所述组合物包含：树脂; 分散在树脂中的聚合物纳米颗粒，每个聚合纳米颗粒包含多臂芯聚合物和连接到多臂芯聚合物的悬置聚合物，与树脂不混溶的多臂芯聚合物和可混溶的侧链聚合物 与树脂; 和溶剂，所述溶剂在第一温度下挥发，所述树脂在第二温度下可交联，所述聚合物纳米颗粒在第三温度下可分解，所述第三温度高于所述第二温度，所述第二温度高于所述第一温度 ，其中在从第二温度到第三温度的层之间加热组合物的层的厚度收缩小于约3.5％。
-
6.发明申请公开(公告)号：US20080171136A1
公开(公告)日：2008-07-17
申请号：US12053721
申请日：2008-03-24
申请人： Geraud Jean-Michel Dubois , James Lupton Hedrick , Ho-Cheol Kim , Victor Yee-Way Lee , Teddie Peregrino Magbitang , Robert Dennis Miller , Muthumanickam Sankarapandian , Linda Karin Sundberg , Willi Volksen
发明人： Geraud Jean-Michel Dubois , James Lupton Hedrick , Ho-Cheol Kim , Victor Yee-Way Lee , Teddie Peregrino Magbitang , Robert Dennis Miller , Muthumanickam Sankarapandian , Linda Karin Sundberg , Willi Volksen
CPC分类号： C08L101/12 , H01L21/02118 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/31695 , H01L21/76807 , H01L21/7682 , H01L2221/1047
摘要： A composition of matter and a structure fabricated using the composition. The composition comprising: a resin; polymeric nano-particles dispersed in the resin, each of the polymeric nano-particle comprising a multi-arm core polymer and pendent polymers attached to the multi-arm core polymer, the multi-arm core polymer immiscible with the resin and the pendent polymers miscible with the resin; and a solvent, the solvent volatile at a first temperature, the resin cross-linkable at a second temperature, the polymeric nano-particle decomposable at a third temperature, the third temperature higher than the second temperature, the second temperature higher than the first temperature, wherein a thickness of a layer of the composition shrinks by less than about 3.5% between heating the layer from the second temperature to the third temperature.
摘要翻译： 使用该组合物制造的物质组成和结构。 所述组合物包含：树脂; 分散在树脂中的聚合物纳米颗粒，每个聚合纳米颗粒包含多臂芯聚合物和连接到多臂芯聚合物的悬置聚合物，与树脂不混溶的多臂芯聚合物和可混溶的侧链聚合物 与树脂; 和溶剂，所述溶剂在第一温度下挥发，所述树脂在第二温度下可交联，所述聚合物纳米颗粒在第三温度下可分解，所述第三温度高于所述第二温度，所述第二温度高于所述第一温度 ，其中在从第二温度到第三温度的层之间加热组合物的层的厚度收缩小于约3.5％。
-
7.发明授权Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures 有权低K层间电介质材料和低K层间介电层和结构的形成方法公开(公告)号：US07931829B2
公开(公告)日：2011-04-26
申请号：US12857633
申请日：2010-08-17
申请人： Geraud Jean-Michel Dubois , James Lupton Hedrick , Ho-Cheol Kim , Victor Yee-Way Lee , Teddie Peregrino Magbitang , Robert Dennis Miller , Muthumanickam Sankarapandian , Linda Karin Sundberg , Willi Volksen
发明人： Geraud Jean-Michel Dubois , James Lupton Hedrick , Ho-Cheol Kim , Victor Yee-Way Lee , Teddie Peregrino Magbitang , Robert Dennis Miller , Muthumanickam Sankarapandian , Linda Karin Sundberg , Willi Volksen
IPC分类号： H01B1/12
CPC分类号： C08L101/12 , H01L21/02118 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/31695 , H01L21/76807 , H01L21/7682 , H01L2221/1047
摘要： A composition of matter and a structure fabricated using the composition. The composition comprising: a resin; polymeric nano-particles dispersed in the resin, each of the polymeric nano-particle comprising a multi-arm core polymer and pendent polymers attached to the multi-arm core polymer, the multi-arm core polymer immiscible with the resin and the pendent polymers miscible with the resin; and a solvent, the solvent volatile at a first temperature, the resin cross-linkable at a second temperature, the polymeric nano-particle decomposable at a third temperature, the third temperature higher than the second temperature, the second temperature higher than the first temperature, wherein a thickness of a layer of the composition shrinks by less than about 3.5% between heating the layer from the second temperature to the third temperature.
摘要翻译： 使用该组合物制造的物质组成和结构。 所述组合物包含：树脂; 分散在树脂中的聚合物纳米颗粒，每个聚合纳米颗粒包含多臂芯聚合物和连接到多臂芯聚合物的悬置聚合物，与树脂不混溶的多臂芯聚合物和可混溶的侧链聚合物 与树脂; 和溶剂，所述溶剂在第一温度下挥发，所述树脂在第二温度下可交联，所述聚合物纳米颗粒在第三温度下可分解，所述第三温度高于所述第二温度，所述第二温度高于所述第一温度 ，其中在从第二温度到第三温度的层之间加热组合物的层的厚度收缩小于约3.5％。
-
8.发明申请公开(公告)号：US20100311895A1
公开(公告)日：2010-12-09
申请号：US12857633
申请日：2010-08-17
申请人： Geraud Jean-Michel Dubois , James Lupton Hedrick , Ho-Cheol Kim , Victor Yee-Way Lee , Teddie Peregrino Magbitang , Robert Dennis Miller , Muthumanickam Sankarapandian , Linda Karin Sundberg , Willi Volksen
发明人： Geraud Jean-Michel Dubois , James Lupton Hedrick , Ho-Cheol Kim , Victor Yee-Way Lee , Teddie Peregrino Magbitang , Robert Dennis Miller , Muthumanickam Sankarapandian , Linda Karin Sundberg , Willi Volksen
CPC分类号： C08L101/12 , H01L21/02118 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/31695 , H01L21/76807 , H01L21/7682 , H01L2221/1047
摘要： A composition of matter and a structure fabricated using the composition. The composition comprising: a resin; polymeric nano-particles dispersed in the resin, each of the polymeric nano-particle comprising a multi-arm core polymer and pendent polymers attached to the multi-arm core polymer, the multi-arm core polymer immiscible with the resin and the pendent polymers miscible with the resin; and a solvent, the solvent volatile at a first temperature, the resin cross-linkable at a second temperature, the polymeric nano-particle decomposable at a third temperature, the third temperature higher than the second temperature, the second temperature higher than the first temperature, wherein a thickness of a layer of the composition shrinks by less than about 3.5% between heating the layer from the second temperature to the third temperature.
摘要翻译： 使用该组合物制造的物质组成和结构。 所述组合物包含：树脂; 分散在树脂中的聚合物纳米颗粒，每个聚合纳米颗粒包含多臂芯聚合物和连接到多臂芯聚合物的悬置聚合物，与树脂不混溶的多臂芯聚合物和可混溶的侧链聚合物 与树脂; 和溶剂，所述溶剂在第一温度下挥发，所述树脂在第二温度下可交联，所述聚合物纳米颗粒在第三温度下可分解，所述第三温度高于所述第二温度，所述第二温度高于所述第一温度 ，其中在从第二温度到第三温度的层之间加热组合物的层的厚度收缩小于约3.5％。
-
9.发明授权Discrete nano-textured structures in biomolecular arrays, and method of use 有权生物分子阵列中的离散纳米纹理结构及其使用方法公开(公告)号：US07354777B2
公开(公告)日：2008-04-08
申请号：US11184702
申请日：2005-07-19
IPC分类号： H01L21/00
CPC分类号： B01L3/5085 , B01J2219/00619 , B01J2219/00621 , B01J2219/00644 , B01L2200/12 , B01L2300/0609 , B01L2300/069 , B01L2300/0829 , B01L2300/0851 , B01L2300/165 , B01L2300/168 , C40B60/08
摘要： A biomolecular array includes a substrate across which is distributed an array of discrete regions of a porous substance formed from a porogen-containing organosilicate material. The porous substance is designed to bind chemical targets useful in biotechnology applications, such as gene expression, protein, antibody, and antigen experiments. The regions are preferably optically isolated from each other and may be shaped to enhance detection of optical radiation emanating from the porous substance, e.g., as a result of irradiation of the regions with ultraviolet light. The discrete regions may be configured as microscopic wells within the substrate, or they may reside on top of the substrate in the form of microscopic mesas.
摘要翻译： 生物分子阵列包括基底，其上分布有由含致孔剂的有机硅酸盐材料形成的多孔物质的离散区域的阵列。 多孔物质被设计用于结合可用于生物技术应用的化学靶，例如基因表达，蛋白质，抗体和抗原实验。 这些区域优选地彼此光学隔离，并且可以被成形为增强从多孔物质发出的光辐射的检测，例如，作为由紫外线照射该区域的结果。 离散区域可以被配置为衬底内的微观阱，或者它们可以以微观台面的形式驻留在衬底的顶部上。
-
10.发明授权Discrete nano-textured structures in biomolecular arrays, and method of use 失效生物分子阵列中的离散纳米纹理结构及其使用方法公开(公告)号：US07651872B2
公开(公告)日：2010-01-26
申请号：US12028767
申请日：2008-02-08
IPC分类号： H01L21/00
CPC分类号： B01L3/5085 , B01J2219/00619 , B01J2219/00621 , B01J2219/00644 , B01L2200/12 , B01L2300/0609 , B01L2300/069 , B01L2300/0829 , B01L2300/0851 , B01L2300/165 , B01L2300/168 , C40B60/08
摘要： A biomolecular array includes a substrate across which is distributed an array of discrete regions of a porous substance formed from a porogen-containing organosilicate material. The porous substance is designed to bind chemical targets useful in biotechnology applications, such as gene expression, protein, antibody, and antigen experiments. The regions are preferably optically isolated from each other and may be shaped to enhance detection of optical radiation emanating from the porous substance, e.g., as a result of irradiation of the regions with ultraviolet light. The discrete regions may be configured as microscopic wells within the substrate, or they may reside on top of the substrate in the form of microscopic mesas.
摘要翻译： 生物分子阵列包括基底，其上分布有由含致孔剂的有机硅酸盐材料形成的多孔物质的离散区域的阵列。 多孔物质被设计用于结合可用于生物技术应用的化学靶，例如基因表达，蛋白质，抗体和抗原实验。 这些区域优选地彼此光学隔离，并且可以被成形为增强从多孔物质发出的光辐射的检测，例如，作为由紫外线照射该区域的结果。 离散区域可以被配置为衬底内的微观阱，或者它们可以以微观台面的形式驻留在衬底的顶部上。
-
-
-
-
-
-
-
-
-
搜索结果
131 条记录 (耗时 0.032 秒)
