-
1.发明授权Discrete nano-textured structures in biomolecular arrays, and method of use 失效生物分子阵列中的离散纳米纹理结构及其使用方法公开(公告)号：US07651872B2
公开(公告)日：2010-01-26
申请号：US12028767
申请日：2008-02-08
IPC分类号： H01L21/00
CPC分类号： B01L3/5085 , B01J2219/00619 , B01J2219/00621 , B01J2219/00644 , B01L2200/12 , B01L2300/0609 , B01L2300/069 , B01L2300/0829 , B01L2300/0851 , B01L2300/165 , B01L2300/168 , C40B60/08
摘要： A biomolecular array includes a substrate across which is distributed an array of discrete regions of a porous substance formed from a porogen-containing organosilicate material. The porous substance is designed to bind chemical targets useful in biotechnology applications, such as gene expression, protein, antibody, and antigen experiments. The regions are preferably optically isolated from each other and may be shaped to enhance detection of optical radiation emanating from the porous substance, e.g., as a result of irradiation of the regions with ultraviolet light. The discrete regions may be configured as microscopic wells within the substrate, or they may reside on top of the substrate in the form of microscopic mesas.
摘要翻译： 生物分子阵列包括基底，其上分布有由含致孔剂的有机硅酸盐材料形成的多孔物质的离散区域的阵列。 多孔物质被设计用于结合可用于生物技术应用的化学靶，例如基因表达，蛋白质，抗体和抗原实验。 这些区域优选地彼此光学隔离，并且可以被成形为增强从多孔物质发出的光辐射的检测，例如，作为由紫外线照射该区域的结果。 离散区域可以被配置为衬底内的微观阱，或者它们可以以微观台面的形式驻留在衬底的顶部上。
-
2.发明申请公开(公告)号：US20080132426A1
公开(公告)日：2008-06-05
申请号：US12028767
申请日：2008-02-08
IPC分类号： C40B40/00
CPC分类号： B01L3/5085 , B01J2219/00619 , B01J2219/00621 , B01J2219/00644 , B01L2200/12 , B01L2300/0609 , B01L2300/069 , B01L2300/0829 , B01L2300/0851 , B01L2300/165 , B01L2300/168 , C40B60/08
摘要： A biomolecular array includes a substrate across which is distributed an array of discrete regions of a porous substance formed from a porogen-containing organosilicate material. The porous substance is designed to bind chemical targets useful in biotechnology applications, such as gene expression, protein, antibody, and antigen experiments. The regions are preferably optically isolated from each other and may be shaped to enhance detection of optical radiation emanating from the porous substance, e.g., as a result of irradiation of the regions with ultraviolet light. The discrete regions may be configured as microscopic wells within the substrate, or they may reside on top of the substrate in the form of microscopic mesas.
摘要翻译： 生物分子阵列包括基底，其上分布有由含致孔剂的有机硅酸盐材料形成的多孔物质的离散区域的阵列。 多孔物质被设计用于结合可用于生物技术应用的化学靶，例如基因表达，蛋白质，抗体和抗原实验。 这些区域优选地彼此光学隔离，并且可以被成形为增强从多孔物质发出的光辐射的检测，例如，作为由紫外线照射该区域的结果。 离散区域可以被配置为衬底内的微观阱，或者它们可以以微观台面的形式驻留在衬底的顶部上。
-
3.发明授权Discrete nano-textured structures in biomolecular arrays, and method of use 有权生物分子阵列中的离散纳米纹理结构及其使用方法公开(公告)号：US06962822B2
公开(公告)日：2005-11-08
申请号：US10214951
申请日：2002-08-07
CPC分类号： B01L3/5085 , B01J2219/00619 , B01J2219/00621 , B01J2219/00644 , B01L2200/12 , B01L2300/0609 , B01L2300/069 , B01L2300/0829 , B01L2300/0851 , B01L2300/165 , B01L2300/168 , C40B60/08
摘要： A biomolecular array includes a substrate across which is distributed an array of discrete regions of a porous substance. The porous substance is designed to bind chemical targets useful in biotechnology applications, such as gene expression, protein, antibody, and antigen experiments. The regions are preferably optically isolated from each other and may be shaped to enhance detection of optical radiation emanating from the porous substance, e.g., as a result of irradiation of the regions with ultraviolet light. The discrete regions may be configured as microscopic wells within the substrate, or they may reside on top of the substrate in the form of microscopic mesas.
摘要翻译： 生物分子阵列包括分布有多孔物质的离散区域的阵列的基底。 多孔物质被设计用于结合可用于生物技术应用的化学靶，例如基因表达，蛋白质，抗体和抗原实验。 这些区域优选地彼此光学隔离，并且可以被成形为增强从多孔物质发出的光辐射的检测，例如，作为由紫外线照射该区域的结果。 离散区域可以被配置为衬底内的微观阱，或者它们可以以微观台面的形式驻留在衬底的顶部上。
-
4.发明授权Discrete nano-textured structures in biomolecular arrays, and method of use 有权生物分子阵列中的离散纳米纹理结构及其使用方法公开(公告)号：US07354777B2
公开(公告)日：2008-04-08
申请号：US11184702
申请日：2005-07-19
IPC分类号： H01L21/00
CPC分类号： B01L3/5085 , B01J2219/00619 , B01J2219/00621 , B01J2219/00644 , B01L2200/12 , B01L2300/0609 , B01L2300/069 , B01L2300/0829 , B01L2300/0851 , B01L2300/165 , B01L2300/168 , C40B60/08
摘要： A biomolecular array includes a substrate across which is distributed an array of discrete regions of a porous substance formed from a porogen-containing organosilicate material. The porous substance is designed to bind chemical targets useful in biotechnology applications, such as gene expression, protein, antibody, and antigen experiments. The regions are preferably optically isolated from each other and may be shaped to enhance detection of optical radiation emanating from the porous substance, e.g., as a result of irradiation of the regions with ultraviolet light. The discrete regions may be configured as microscopic wells within the substrate, or they may reside on top of the substrate in the form of microscopic mesas.
摘要翻译： 生物分子阵列包括基底，其上分布有由含致孔剂的有机硅酸盐材料形成的多孔物质的离散区域的阵列。 多孔物质被设计用于结合可用于生物技术应用的化学靶，例如基因表达，蛋白质，抗体和抗原实验。 这些区域优选地彼此光学隔离，并且可以被成形为增强从多孔物质发出的光辐射的检测，例如，作为由紫外线照射该区域的结果。 离散区域可以被配置为衬底内的微观阱，或者它们可以以微观台面的形式驻留在衬底的顶部上。
-
5.发明申请METAL PEROXO COMPOUNDS WITH ORGANIC CO-LIGANDS FOR ELECTRON BEAM, DEEP UV AND EXTREME UV PHOTORESIST APPLICATIONS 有权具有电子束有机配体的金属过氧化合物，深紫外线和超紫外线光刻胶应用公开(公告)号：US20130224652A1
公开(公告)日：2013-08-29
申请号：US13405587
申请日：2012-02-27
申请人： John David Bass , Ho-Cheol Kim , Robert Dennis Miller , Qing Song , Linda Karin Sundberg , Gregory Michael Wallraff
发明人： John David Bass , Ho-Cheol Kim , Robert Dennis Miller , Qing Song , Linda Karin Sundberg , Gregory Michael Wallraff
CPC分类号： G03F7/0042
摘要： Compositions are disclosed having the formula (3): [C′]k[Ta(O2)x(L′)y] (3), wherein x is an integer of 1 to 4, y is an integer of 1 to 4, Ta(O2)x(L′)y has a charge of 0 to −3, C′ is a counterion having a charge of +1 to +3, k is an integer of 0 to 3, L′ is an oxidatively stable organic ligand having a charge of 0 to −4, and L′ comprises an electron donating functional group selected from the group consisting of carboxylates, alkoxides, amines, amine oxides, phosphines, phosphine oxides, arsine oxides, and combinations thereof. The compositions have utility as high resolution photoresists.
摘要翻译： 公开了具有式（3）的组合物：[C'] k [Ta（O 2）x（L'）y]（3）其中x是1至4的整数，y是1至4的整数， Ta（O 2）x（L'）y具有0至-3的电荷，C'是具有+1至+3的电荷的抗衡离子，k是0至3的整数，L'是氧化稳定的有机物 具有0至-4电荷的配体，L'包括选自羧酸盐，醇盐，胺，氧化胺，膦，氧化膦，胂氧化物及其组合的给电子官能团。 该组合物具有作为高分辨率光致抗蚀剂的作用。
-
6.发明授权Metal peroxo compounds with organic co-ligands for electron beam, deep UV and extreme UV photoresist applications 有权金属过氧化合物与电子束，深UV和极紫外光致抗蚀剂应用的有机共配体公开(公告)号：US08703386B2
公开(公告)日：2014-04-22
申请号：US13405587
申请日：2012-02-27
申请人： John David Bass , Ho-Cheol Kim , Robert Dennis Miller , Qing Song , Linda Karin Sundberg , Gregory Michael Wallraff
发明人： John David Bass , Ho-Cheol Kim , Robert Dennis Miller , Qing Song , Linda Karin Sundberg , Gregory Michael Wallraff
CPC分类号： G03F7/0042
摘要： Compositions are disclosed having the formula (3): [C′]k[Ta(O2)x(L′)y] (3), wherein x is an integer of 1 to 4, y is an integer of 1 to 4, Ta(O2)x(L′)y has a charge of 0 to −3, C′ is a counterion having a charge of +1 to +3, k is an integer of 0 to 3, L′ is an oxidatively stable organic ligand having a charge of 0 to −4, and L′ comprises an electron donating functional group selected from the group consisting of carboxylates, alkoxides, amines, amine oxides, phosphines, phosphine oxides, arsine oxides, and combinations thereof. The compositions have utility as high resolution photoresists.
摘要翻译： 公开了具有式（3）的组合物：[C'] k [Ta（O 2）x（L'）y]（3）其中x是1至4的整数，y是1至4的整数， Ta（O 2）x（L'）y具有0至-3的电荷，C'是具有+1至+3的电荷的抗衡离子，k是0至3的整数，L'是氧化稳定的有机物 配体的电荷为0至-4，L'包括选自羧酸盐，醇盐，胺，氧化胺，膦，氧化膦，胂氧化物及其组合的给电子官能团。 该组合物具有作为高分辨率光致抗蚀剂的作用。
-
7.发明授权公开(公告)号：US07056840B2
公开(公告)日：2006-06-06
申请号：US10676422
申请日：2003-09-30
申请人： Robert Dennis Miller , Ho-Cheol Kim , Eric Connor , Victor Yee-Way Lee , Gregory Michael Wallraff , Willi Volksen
发明人： Robert Dennis Miller , Ho-Cheol Kim , Eric Connor , Victor Yee-Way Lee , Gregory Michael Wallraff , Willi Volksen
IPC分类号： H01L21/31 , H01L21/469
CPC分类号： H01L21/02126 , G03F7/0757 , G03F7/40 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/02348 , H01L21/3122 , H01L21/31695
摘要： A low dielectric constant, patterned, nanoporous material and a method of forming the material. The material is formed by depositing a layer onto a substrate, said layer comprising a reactive organosilicate material, a porogen, an initiator, and a solvent; exposing portions of the layer to energy (e.g., thermal energy or electromagnetic radiation) to change the solubility of portions of the organosilicate material with respect to the solvent; selectively removing more soluble portions of the layer to generate a relief pattern; and decomposing the porogen to thereby generate a nanoporous organosilicate layer.
摘要翻译： 低介电常数，图案化，纳米多孔材料和形成材料的方法。 该材料通过在基底上沉积一层而形成，所述层包含反应性有机硅酸盐材料，致孔剂，引发剂和溶剂; 将层的部分暴露于能量（例如，热能或电磁辐射）以改变部分有机硅酸盐材料相对于溶剂的溶解度; 选择性地去除层的更多可溶部分以产生浮雕图案; 并分解致孔剂从而产生纳米多孔有机硅酸盐层。
-
8.发明授权公开(公告)号：US08821978B2
公开(公告)日：2014-09-02
申请号：US12641959
申请日：2009-12-18
申请人： Joy Cheng , William D. Hinsberg , Ho-Cheol Kim , Young-Hye Na , Daniel Paul Sanders , Linda Karin Sundberg , Hoa D. Truong , Gregory Michael Wallraff , Atsuko Ito
发明人： Joy Cheng , William D. Hinsberg , Hiroshi Ito , Ho-Cheol Kim , Young-Hye Na , Daniel Paul Sanders , Linda Karin Sundberg , Hoa D. Truong , Gregory Michael Wallraff
CPC分类号： B82Y40/00 , B81C1/00031 , B81C2201/0149 , G03F7/0392 , G03F7/09 , G03F7/091 , G03F7/165 , G03F7/325 , G03F7/327 , G03F7/40
摘要： A method of forming a layered structure comprising a domain pattern of a self-assembled material utilizes a negative-tone patterned photoresist layer comprising non-crosslinked developed photoresist. The developed photoresist is not soluble in an organic casting solvent for a material capable of self-assembly. The developed photoresist is soluble in an aqueous alkaline developer and/or a second organic solvent. A solution comprising the material capable of self-assembly and the organic casting solvent is casted on the patterned photoresist layer. Upon removal of the organic casting solvent, the material self-assembles, thereby forming the layered structure.
摘要翻译： 形成包括自组装材料的畴图案的分层结构的方法利用包含非交联显影光致抗蚀剂的负色调图案化光致抗蚀剂层。 显影的光致抗蚀剂不溶于用于能够自组装的材料的有机浇铸溶剂中。 显影的光致抗蚀剂可溶于含水碱性显影剂和/或第二有机溶剂。 将包含能够自组装的材料和有机浇铸溶剂的溶液浇铸在图案化的光致抗蚀剂层上。 在去除有机浇注溶剂时，材料自组装，从而形成层状结构。
-
公开(公告)号：US5866306A
公开(公告)日：1999-02-02
申请号：US78808
申请日：1993-06-17
IPC分类号： G03F7/039 , C08G77/60 , G03F7/075 , H01L21/027
CPC分类号： C08G77/60 , G03F7/0754
摘要： The present invention relates to the use of certain polyalkylphenyl silanes in photoresists to generate positive tone resist images. The polyalkylphenyl silanes have the formula: ##STR1## where R is C2-C12 alkyl and n is about 150 to 7000.
摘要翻译： 本发明涉及在光致抗蚀剂中使用某些聚烷基苯基硅烷来生成正性抗蚀剂图像。 聚烷基苯基硅烷具有下式：其中R为C 2 -C 12烷基，n为约150至7000。
-
公开(公告)号：US07354692B2
公开(公告)日：2008-04-08
申请号：US11125971
申请日：2005-05-09
CPC分类号： G03F7/0392 , G03F7/001 , G03F7/031 , G03F7/2004 , Y10S430/115 , Y10S430/127
摘要： A class of lithographic photoresist combinations is disclosed which is suitable for use with visible light and does not require a post-exposure bake step. The disclosed photoresists are preferably chemical amplification photoresists and contain a photosensitizer having the structure of formula (I): where Ar1 and Ar2 are independently selected from monocyclic aryl and monocyclic heteroaryl, R1 and R2 may be the same or different, and have the structure —X—R3 where X is O or S and R3 is C1-C6 hydrocarbyl or heteroatom-containing C1-C6 hydrocarbyl, and R4 and R5 are independently selected from the group consisting of hydrogen and —X—R3, or, if ortho to each other, may be taken together to form a five- or six-membered aromatic ring, with the proviso that any heteroatom contained within Ar1, Ar2, or R3 is O or S. The use of the disclosed photoresists, particularly for the manufacture of holographic diffraction gratings, is also disclosed.
摘要翻译： 公开了一类光刻抗蚀剂组合物，其适用于可见光并且不需要曝光后烘烤步骤。 所公开的光致抗蚀剂优选是化学放大光致抗蚀剂，并含有具有式（I）结构的光敏剂：其中Ar 1和Ar 2独立地选自单环芳基和单环杂芳基 R 1和R 2可以相同或不同，并且具有结构-XR 3，其中X是O或S，R“ SUP> 3是C 1 -C 6烃基或含杂原子的C 1 -C 6 N >烃基，R 4和R 5独立地选自氢和-XR 3 O 3，或者如果各自的邻位 另一个可以一起形成五元或六元芳环，条件是含有Ar 1，Ar 2或R 0的任何杂原子 > 3 是O或S.还公开了所公开的光致抗蚀剂的使用，特别是用于制造全息衍射光栅。
-
-
-
-
-
-
-
-
-
搜索结果
38 条记录 (耗时 0.034 秒)