FUEL CELL SYSTEMS AND METHODS FOR PROVIDING POWER AND COOLING TO AN ENERGY-CONSUMING DEVICE
    3.
    发明申请
    FUEL CELL SYSTEMS AND METHODS FOR PROVIDING POWER AND COOLING TO AN ENERGY-CONSUMING DEVICE 有权
    燃料电池系统和用于向能量消耗装置提供电力和冷却的方法

    公开(公告)号:US20110129745A1

    公开(公告)日:2011-06-02

    申请号:US12629348

    申请日:2009-12-02

    IPC分类号: H01M8/00 H01M8/04

    摘要: Fuel cell systems and methods for providing power to an energy-consuming device and cooling of the energy-consuming device utilizing the endothermic process of desorbing hydrogen gas from a hydride bed. Fuel cell systems include a fuel cell stack, a hydrogen storage device having a volume of a hydrogen storage material, and a heat exchange system operatively connected to the hydrogen storage device and configured to heat the hydrogen storage material to desorb hydrogen gas therefrom for delivery to the fuel cell stack. The heat exchange system is further configured to deliver a cooled fluid stream to the energy-consuming device for cooling thereof. The cooled fluid stream may be produced, or cooled, by the endothermic desorption of hydrogen gas from the hydrogen storage device. In some fuel cell systems, the heat exchange system utilizes heat from the energy-consuming device to heat the hydrogen storage material for desorption of hydrogen gas therefrom.

    摘要翻译: 燃料电池系统和用于向能量消耗装置提供电力的方法以及利用从氢化物床解吸氢气的吸热过程来冷却能量消耗装置。 燃料电池系统包括燃料电池堆,具有一定体积的储氢材料的氢存储装置和可操作地连接到氢存储装置的热交换系统,并被配置为加热储氢材料以从其中解吸氢气以便输送到 燃料电池堆。 热交换系统还被配置为将冷却的流体流输送到能量消耗装置以进行冷却。 冷却的流体流可以通过氢气从氢存储装置的吸热解吸而产生或冷却。 在一些燃料电池系统中,热交换系统利用来自能量消耗装置的热量来加热储氢材料以从其中解吸氢气。

    Fuel cell systems and methods for providing power and cooling to an energy-consuming device
    6.
    发明授权
    Fuel cell systems and methods for providing power and cooling to an energy-consuming device 有权
    用于向耗能装置提供动力和冷却的燃料电池系统和方法

    公开(公告)号:US08492042B2

    公开(公告)日:2013-07-23

    申请号:US12629348

    申请日:2009-12-02

    IPC分类号: H01M8/06 H01M8/04

    摘要: Fuel cell systems and methods for providing power to an energy-consuming device and cooling of the energy-consuming device utilizing the endothermic process of desorbing hydrogen gas from a hydride bed. Fuel cell systems include a fuel cell stack, a hydrogen storage device having a volume of a hydrogen storage material, and a heat exchange system operatively connected to the hydrogen storage device and configured to heat the hydrogen storage material to desorb hydrogen gas therefrom for delivery to the fuel cell stack. The heat exchange system is further configured to deliver a cooled fluid stream to the energy-consuming device for cooling thereof. The cooled fluid stream may be produced, or cooled, by the endothermic desorption of hydrogen gas from the hydrogen storage device. In some fuel cell systems, the heat exchange system utilizes heat from the energy-consuming device to heat the hydrogen storage material for desorption of hydrogen gas therefrom.

    摘要翻译: 燃料电池系统和用于向能量消耗装置提供电力的方法以及利用从氢化物床解吸氢气的吸热过程来冷却能量消耗装置。 燃料电池系统包括燃料电池堆,具有一定体积的储氢材料的氢存储装置和可操作地连接到氢存储装置的热交换系统,并被配置为加热储氢材料以从其中解吸氢气以便输送到 燃料电池堆。 热交换系统还被配置为将冷却的流体流输送到能量消耗装置以进行冷却。 冷却的流体流可以通过氢气从氢存储装置的吸热解吸而产生或冷却。 在一些燃料电池系统中,热交换系统利用来自能量消耗装置的热量来加热储氢材料以从其中解吸氢气。

    Apparatus and method for thermal processing of semiconductor substrates
    8.
    发明授权
    Apparatus and method for thermal processing of semiconductor substrates 失效
    半导体衬底的热处理装置和方法

    公开(公告)号:US06342691B1

    公开(公告)日:2002-01-29

    申请号:US09439833

    申请日:1999-11-12

    IPC分类号: F27B514

    CPC分类号: H01L21/67115 C30B31/12

    摘要: A semiconductor substrate processing system and method of using a stable heating source with a large thermal mass relative to conventional lamp heating systems. The system dimensions and processing parameters are selected to provide a substantial heat flux to the substrate while reducing the potential of heat loss to the surrounding environment, particularly from the edges of the heat source and substrate. Aspects of the present invention include a dual resistive heater system comprising a base or primary heater, surrounded by a peripheral or edge heater. The impedance of the edge heater may be substantially matched to that of the primary heater such that a single power supply may be used to supply power to both heaters. Both resistive heaters deliver heat to a heated block, and the heaters and heated block are substantially enclosed within an insulated cavity. The walls of the insulated cavity may include multiple layers of insulation, and these layers may be substantially concentrically arranged. The innermost layers may comprise silicon carbide coated graphite; the outer layers may comprise opaque quartz. An embodiment of the invention includes a vacuum spool having a large conduction pathway for exhausting gases from the region of the chamber containing the resistive heaters, and a small conduction pathway for removing gases from other regions of the chamber. Temperature measurement sensors include thermocouples and optical pyrometers, with the advantage that a thermocouple may be used to calibrate an optical pyrometer in situ. An insulating shutter may be used to insulate the port through which substrates are inserted into the insulated and heated cavity. Support posts and gas injectors may include ports for optical pyrometers.

    摘要翻译: 相对于传统的灯加热系统,半导体衬底处理系统和使用具有大热质量的稳定的热源的方法。 选择系统尺寸和处理参数以向基板提供实质的热通量,同时减少对周围环境,特别是从热源和基板的边缘的热损失的潜力。 本发明的方面包括双电阻加热器系统,其包括被周边或边缘加热器包围的基座或主加热器。 边缘加热器的阻抗可以与初级加热器的阻抗基本匹配,使得单个电源可以用于向两个加热器供电。 两个电阻加热器将热量传递到加热块,并且加热器和加热块基本上封闭在绝缘腔内。 绝缘腔的壁可以包括多层绝缘体,并且这些层可以基本上同心地布置。 最内层可包括碳化硅涂覆的石墨; 外层可以包括不透明的石英。 本发明的实施例包括具有用于从包含电阻加热器的室的区域排出气体的大的传导路径的真空阀芯,以及用于从腔室的其它区域去除气体的小的传导路径。 温度测量传感器包括热电偶和光学高温计,其优点是热电偶可用于原位校准光学高温计。 可以使用绝缘快门来将通过哪个基板插入绝缘和加热腔的端口绝缘。 支撑柱和气体注入器可以包括用于光学高温计的端口。