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公开(公告)号：US08690830B2
公开(公告)日：2014-04-08
申请号：US12801162
申请日：2010-05-26
CPC分类号： F04B43/043
摘要： A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.
摘要翻译： 在基板表面上形成微机械泵送系统。 泵送系统使用泵送元件，该元件通过在基本上平行于衬底表面的平面中移动的阀来泵送流体。 也可以在基板的表面上制造电磁致动机构。 线圈围绕可渗透芯体产生的磁通可以耦合到固定到泵送元件的可渗透构件。 可渗透构件和泵送元件可以构造成在平行于衬底的平面中移动。 电磁致动机构使泵送系统产生大的冲击力和相当大的力，使得由泵送系统泵送的流体可以泵送通过透皮插管，以将治疗物质递送到患者皮肤下方的组织。
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公开(公告)号：US20110130721A1
公开(公告)日：2011-06-02
申请号：US12929257
申请日：2011-01-11
CPC分类号： H01H59/0009 , B81B2201/018 , B81B2207/015 , B81B2207/053 , B81C1/0023 , B81C2203/075 , H02J7/0024 , Y10T29/49105 , Y10T307/696
摘要： Systems and methods for forming a configurable power supply uses a plurality of dual substrate MEMS switches to couple a plurality of power cells to provide a selectable, or variable, output voltage. The same circuit may output two different voltages to power two different circuits of the device, or may distribute the load evenly amongst the cells. Thus, the configurable power supply may extend the lifetime and improve the reliability of the device, or decrease its weight, size and cost.
摘要翻译： 用于形成可配置电源的系统和方法使用多个双衬底MEMS开关来耦合多个功率单元以提供可选择的或可变的输出电压。 相同的电路可以输出两个不同的电压来为装置的两个不同电路供电，或者可以在电池之间均匀地分配负载。 因此，可配置电源可延长使用寿命并提高设备的可靠性，或降低其重量，尺寸和成本。
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公开(公告)号：US20080191303A1
公开(公告)日：2008-08-14
申请号：US11705739
申请日：2007-02-14
IPC分类号： H01L31/058 , H01L21/00
CPC分类号： H01H1/0036 , H01H61/04 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
摘要翻译： 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。
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公开(公告)号：US5631081A
公开(公告)日：1997-05-20
申请号：US341856
申请日：1994-11-18
CPC分类号： G11B5/725 , G11B5/8408 , Y10S428/90 , Y10T428/26 , Y10T428/265 , Y10T428/30 , Y10T428/3154
摘要： The present invention is a method for bonding a lubricant onto the surface of rotating storage media. In particular, the method bonds reactive and non-reactive lubricants onto the carbon based protective coating of a magnetic storage disk. The lubricant is first applied onto the disk surface through conventional coating techniques, such as dipping, spinning, spraying, or vapor deposition. The thickness of the applied coating is thicker than the final bonded thickness of the lubricant. Typically, the applied thickness of the film is approximately 30 Angstroms. The lubricant coated disk surface is then exposed to low energy electron irradiation. The energy level of the accelerated electrons is below 100 eV. The lubricated film is exposed to a dosage level of approximately 1000 microcoulombs per square centimeter. This dosage level bonds approximately 15 Angstroms of lubricant to the disk surface. The non-bonded or excess lubricant is then rinsed off in a liquid freon or other suitable rinse.
摘要翻译： 本发明是将润滑剂粘合到旋转存储介质的表面上的方法。 特别地，该方法将反应性和非反应性润滑剂粘合到磁存储盘的碳基保护涂层上。 润滑剂首先通过常规的涂覆技术（例如浸渍，纺丝，喷涂或气相沉积）施加到盘表面上。 施加的涂层的厚度比润滑剂的最终粘合厚度厚。 通常，膜的施加厚度为约30埃。 然后将润滑剂涂覆的盘表面暴露于低能量电子辐射。 加速电子的能级低于100eV。 润滑膜暴露于每平方厘米约1000微库仑的剂量水平。 该剂量水平将大约15埃的润滑剂粘合到盘表面。 然后将非粘合或多余的润滑剂在液体氟利昂或其他合适的冲洗液中冲洗掉。
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公开(公告)号：US20090181488A1
公开(公告)日：2009-07-16
申请号：US12382142
申请日：2009-03-10
IPC分类号： H01L21/306
CPC分类号： H01H1/0036 , H01H61/04 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
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公开(公告)号：US08736081B2
公开(公告)日：2014-05-27
申请号：US13573201
申请日：2012-08-30
申请人： John S. Foster , Christopher S. Gudeman , Alok Paranjpye , Jaquelin K. Spong , Douglas L. Thompson
发明人： John S. Foster , Christopher S. Gudeman , Alok Paranjpye , Jaquelin K. Spong , Douglas L. Thompson
IPC分类号： H01L23/28
CPC分类号： H01L23/10 , B81C1/00269 , B81C2203/0118 , B81C2203/019 , H01L21/50 , H01L2924/01079 , H01L2924/16235 , H01L2924/163
摘要： Systems and methods for forming an encapsulated device include a hermetic seal which seals an insulating environment between two substrates, one of which supports the device. The hermetic seal is formed by an alloy of two metal layers, one deposited on a first substrate and the other deposited on the second substrate. At least one of the substrates may include a raised feature formed under at least one of the metal layers. The two metals may for an alloy of a predefined stoichiometry in at least two locations on either side of the midpoint of the raised feature. This alloy may have advantageous features in terms of density, mechanical, electrical or physical properties that may improve the hermeticity of the seal, for example.
摘要翻译： 用于形成封装装置的系统和方法包括密封两个基板之间的绝缘环境的气密密封件，其中之一支撑该装置。 气密密封由两个金属层的合金形成，一个沉积在第一基板上，另一个沉积在第二基板上。 衬底中的至少一个可以包括形成在至少一个金属层下面的凸起特征。 两种金属可以在凸起特征的中点的任一侧上的至少两个位置中具有预定化学计量的合金。 例如，该合金在密度，机械，电学或物理性质方面可能具有有利的特征，这可以改善密封的气密性。
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公开(公告)号：US08466760B2
公开(公告)日：2013-06-18
申请号：US12929257
申请日：2011-01-11
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , B81B2201/018 , B81B2207/015 , B81B2207/053 , B81C1/0023 , B81C2203/075 , H02J7/0024 , Y10T29/49105 , Y10T307/696
摘要： Systems and methods for forming a configurable power supply uses a plurality of dual substrate MEMS switches to couple a plurality of power cells to provide a selectable, or variable, output voltage. The same circuit may output two different voltages to power two different circuits of the device, or may distribute the load evenly amongst the cells. Thus, the configurable power supply may extend the lifetime and improve the reliability of the device, or decrease its weight, size and cost.
摘要翻译： 用于形成可配置电源的系统和方法使用多个双衬底MEMS开关来耦合多个功率单元以提供可选择的或可变的输出电压。 相同的电路可以输出两个不同的电压来为装置的两个不同电路供电，或者可以在电池之间均匀地分配负载。 因此，可配置电源可延长使用寿命并提高设备的可靠性，或降低其重量，尺寸和成本。
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公开(公告)号：US20120319303A1
公开(公告)日：2012-12-20
申请号：US13573201
申请日：2012-08-30
申请人： John S. Foster , Alok Paranjpye , Douglas L. Thompson , Christopher S. Gudeman , Jaquelin K. Spong
发明人： John S. Foster , Alok Paranjpye , Douglas L. Thompson , Christopher S. Gudeman , Jaquelin K. Spong
CPC分类号： H01L23/10 , B81C1/00269 , B81C2203/0118 , B81C2203/019 , H01L21/50 , H01L2924/01079 , H01L2924/16235 , H01L2924/163
摘要： Systems and methods for forming an encapsulated device include a hermetic seal which seals an insulating environment between two substrates, one of which supports the device. The hermetic seal is formed by an alloy of two metal layers, one deposited on a first substrate and the other deposited on the second substrate. At least one of the substrates may include a raised feature formed under at least one of the metal layers. The two metals may for an alloy of a predefined stoichiometry in at least two locations on either side of the midpoint of the raised feature. This alloy may have advantageous features in terms of density, mechanical, electrical or physical properties that may improve the hermeticity of the seal, for example.
摘要翻译： 用于形成封装装置的系统和方法包括密封两个基板之间的绝缘环境的气密密封件，其中之一支撑该装置。 气密密封由两个金属层的合金形成，一个沉积在第一基板上，另一个沉积在第二基板上。 衬底中的至少一个可以包括形成在至少一个金属层下面的凸起特征。 两种金属可以在凸起特征的中点的任一侧上的至少两个位置中具有预定化学计量的合金。 例如，该合金在密度，机械，电学或物理性质方面可能具有有利的特征，这可以改善密封的气密性。
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公开(公告)号：US07622783B2
公开(公告)日：2009-11-24
申请号：US11705739
申请日：2007-02-14
IPC分类号： H01L29/82
CPC分类号： H01H1/0036 , H01H61/04 , H01H2001/0047 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
摘要翻译： 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。
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公开(公告)号：US5545478A
公开(公告)日：1996-08-13
申请号：US255307
申请日：1994-06-06
CPC分类号： G11B5/725 , G11B5/8408 , Y10S428/90 , Y10T428/26 , Y10T428/265 , Y10T428/30 , Y10T428/3154
摘要： The present invention is a method for bonding a lubricant onto the surface of rotating storage media. In particular, the method bonds reactive and non-reactive lubricants onto the carbon based protective coating of a magnetic storage disk. The lubricant is first applied onto the disk surface through conventional coating techniques, such as dipping, spinning, spraying, or vapor deposition. The thickness of the applied coating is thicker than the final bonded thickness of the lubricant. Typically, the applied thickness of the film is approximately 30 Angstroms. The lubricant coated disk surface is then exposed to low energy electron irradiation. The energy level of the accelerated electrons is below 100 eV. The lubricated film is exposed to a dosage level of approximately 1000 microcoulombs per square centimeter. This dosage level bonds approximately 15 Angstroms of lubricant to the disk surface. The non-bonded or excess lubricant is then rinsed off in a liquid freon or other suitable rinse.
摘要翻译： 本发明是一种将润滑剂粘合到旋转存储介质的表面上的方法。 特别地，该方法将反应性和非反应性润滑剂粘合到磁性存储盘的碳基保护涂层上。 润滑剂首先通过常规的涂覆技术（例如浸渍，纺丝，喷涂或气相沉积）施加到盘表面上。 施加的涂层的厚度比润滑剂的最终粘合厚度厚。 通常，膜的施加厚度为约30埃。 然后将润滑剂涂覆的盘表面暴露于低能量电子辐射。 加速电子的能级低于100eV。 润滑膜暴露于每平方厘米约1000微库仑的剂量水平。 该剂量水平将大约15埃的润滑剂粘合到盘表面。 然后将非粘合或多余的润滑剂在液体氟利昂或其他合适的冲洗液中冲洗掉。
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