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公开(公告)号：US08736081B2
公开(公告)日：2014-05-27
申请号：US13573201
申请日：2012-08-30
申请人： John S. Foster , Christopher S. Gudeman , Alok Paranjpye , Jaquelin K. Spong , Douglas L. Thompson
发明人： John S. Foster , Christopher S. Gudeman , Alok Paranjpye , Jaquelin K. Spong , Douglas L. Thompson
IPC分类号： H01L23/28
CPC分类号： H01L23/10 , B81C1/00269 , B81C2203/0118 , B81C2203/019 , H01L21/50 , H01L2924/01079 , H01L2924/16235 , H01L2924/163
摘要： Systems and methods for forming an encapsulated device include a hermetic seal which seals an insulating environment between two substrates, one of which supports the device. The hermetic seal is formed by an alloy of two metal layers, one deposited on a first substrate and the other deposited on the second substrate. At least one of the substrates may include a raised feature formed under at least one of the metal layers. The two metals may for an alloy of a predefined stoichiometry in at least two locations on either side of the midpoint of the raised feature. This alloy may have advantageous features in terms of density, mechanical, electrical or physical properties that may improve the hermeticity of the seal, for example.
摘要翻译： 用于形成封装装置的系统和方法包括密封两个基板之间的绝缘环境的气密密封件，其中之一支撑该装置。 气密密封由两个金属层的合金形成，一个沉积在第一基板上，另一个沉积在第二基板上。 衬底中的至少一个可以包括形成在至少一个金属层下面的凸起特征。 两种金属可以在凸起特征的中点的任一侧上的至少两个位置中具有预定化学计量的合金。 例如，该合金在密度，机械，电学或物理性质方面可能具有有利的特征，这可以改善密封的气密性。
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公开(公告)号：US20120319303A1
公开(公告)日：2012-12-20
申请号：US13573201
申请日：2012-08-30
申请人： John S. Foster , Alok Paranjpye , Douglas L. Thompson , Christopher S. Gudeman , Jaquelin K. Spong
发明人： John S. Foster , Alok Paranjpye , Douglas L. Thompson , Christopher S. Gudeman , Jaquelin K. Spong
CPC分类号： H01L23/10 , B81C1/00269 , B81C2203/0118 , B81C2203/019 , H01L21/50 , H01L2924/01079 , H01L2924/16235 , H01L2924/163
摘要： Systems and methods for forming an encapsulated device include a hermetic seal which seals an insulating environment between two substrates, one of which supports the device. The hermetic seal is formed by an alloy of two metal layers, one deposited on a first substrate and the other deposited on the second substrate. At least one of the substrates may include a raised feature formed under at least one of the metal layers. The two metals may for an alloy of a predefined stoichiometry in at least two locations on either side of the midpoint of the raised feature. This alloy may have advantageous features in terms of density, mechanical, electrical or physical properties that may improve the hermeticity of the seal, for example.
摘要翻译： 用于形成封装装置的系统和方法包括密封两个基板之间的绝缘环境的气密密封件，其中之一支撑该装置。 气密密封由两个金属层的合金形成，一个沉积在第一基板上，另一个沉积在第二基板上。 衬底中的至少一个可以包括形成在至少一个金属层下面的凸起特征。 两种金属可以在凸起特征的中点的任一侧上的至少两个位置中具有预定化学计量的合金。 例如，该合金在密度，机械，电学或物理性质方面可能具有有利的特征，这可以改善密封的气密性。
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公开(公告)号：US08993311B2
公开(公告)日：2015-03-31
申请号：US13506892
申请日：2012-05-23
申请人： John S. Foster , Daryl W. Grummitt , John C. Harley , James P. Linton , Jaquelin K. Spong , Douglas L. Thompson
发明人： John S. Foster , Daryl W. Grummitt , John C. Harley , James P. Linton , Jaquelin K. Spong , Douglas L. Thompson
CPC分类号： C12M47/04 , B01L3/502761 , B01L7/52 , B01L2200/0652 , B01L2300/0816 , B01L2400/043 , B01L2400/0439 , B01L2400/0478 , G01N2015/1081 , G01N2015/149
摘要： A disposable cartridge is described which is equipped with a plurality of microfabricated particle sorting structures. The disposable cartridge may include passageways which connect fluid reservoirs in the cartridge with corresponding microfluidic passageways on the particle sorting structure. A flexible gasket may prevent leakages and allow the fluid to cross the gasket barrier through a plurality of holes in the gasket, allowing fluid to be transferred from the reservoirs to the microfabricated particle sorting structures. The plurality of particle sorting structures may be arranged in the disposable cartridge in order to perform multiple separation operations, such as a sequential or parallel sorting operation.
摘要翻译： 描述了配备有多个微加工颗粒分选结构的一次性盒。 一次性药筒可以包括将药筒中的流体储存器与颗粒分选结构上的相应的微流体通道连接的通道。 柔性垫片可以防止泄漏并允许流体通过垫圈中的多个孔穿过垫圈屏障，允许流体从储存器转移到微加工颗粒分选结构。 多个颗粒分选结构可以布置在一次性盒中，以便执行多个分离操作，例如顺序或并行排序操作。
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公开(公告)号：US20120255373A1
公开(公告)日：2012-10-11
申请号：US13506892
申请日：2012-05-23
申请人： John S. Foster , Daryl W. Grummitt , John C. Harley , James P. Linton , Jaquelin K. Spong , Douglas L. Thompson
发明人： John S. Foster , Daryl W. Grummitt , John C. Harley , James P. Linton , Jaquelin K. Spong , Douglas L. Thompson
IPC分类号： G01N1/28
CPC分类号： C12M47/04 , B01L3/502761 , B01L7/52 , B01L2200/0652 , B01L2300/0816 , B01L2400/043 , B01L2400/0439 , B01L2400/0478 , G01N2015/1081 , G01N2015/149
摘要： A disposable cartridge is described which is equipped with a plurality of microfabricated particle sorting structures. The disposable cartridge may include passageways which connect fluid reservoirs in the cartridge with corresponding microfluidic passageways on the particle sorting structure. A flexible gasket may prevent leakages and allow the fluid to cross the gasket barrier through a plurality of holes in the gasket, allowing fluid to be transferred from the reservoirs to the microfabricated particle sorting structures. The plurality of particle sorting structures may be arranged in the disposable cartridge in order to perform multiple separation operations, such as a sequential or parallel sorting operation.
摘要翻译： 描述了配备有多个微加工颗粒分选结构的一次性盒。 一次性药筒可以包括将药筒中的流体储存器与颗粒分选结构上的相应的微流体通道连接的通道。 柔性垫片可以防止泄漏并允许流体通过垫圈中的多个孔穿过垫圈屏障，允许流体从储存器转移到微加工颗粒分选结构。 多个颗粒分选结构可以布置在一次性盒中，以便执行多个分离操作，例如顺序或并行排序操作。
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公开(公告)号：US20110024923A1
公开(公告)日：2011-02-03
申请号：US12923872
申请日：2010-10-13
CPC分类号： H01L23/10 , B81C1/00269 , B81C2203/0118 , B81C2203/019 , H01L2924/0002 , H01L2924/01079 , H01L2924/00
摘要： Systems and methods for forming an encapsulated device include a hermetic seal which seals an insulating environment between two substrates, one of which supports the device. The hermetic seal is formed by an alloy of two metal layers, one deposited on a first substrate and the other deposited on the second substrate. At least one of the substrates may include a raised feature formed under at least one of the metal layers. One of the metal layer may have a diffusion barrier layer and a “keeper” layer formed thereover, wherein the keeper layers keeps the metal confined to a particular area. By using such a “keeper” layer, the substrate components may be heated to clean their surfaces, without activating or spending the bonding mechanism.
摘要翻译： 用于形成封装装置的系统和方法包括密封两个基板之间的绝缘环境的气密密封件，其中之一支撑该装置。 气密密封由两个金属层的合金形成，一个沉积在第一基板上，另一个沉积在第二基板上。 衬底中的至少一个可以包括形成在至少一个金属层下面的凸起特征。 金属层中的一个可以具有扩散阻挡层和在其上形成的“保持器”层，其中保持层将金属限制在特定区域。 通过使用这种“保持器”层，可以加热衬底部件以清洁其表面，而不会激活或消耗粘合机构。
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6.发明申请公开(公告)号：US20080250785A1
公开(公告)日：2008-10-16
申请号：US11785119
申请日：2007-04-16
申请人： Gregory A. Carlson , Patrick E. Feierabend , John S. Foster , Daryl W. Grummit , Alok Paranjpye , Paul J. Rubel , Jeffery F. Summers , Douglas L. Thompson
发明人： Gregory A. Carlson , Patrick E. Feierabend , John S. Foster , Daryl W. Grummit , Alok Paranjpye , Paul J. Rubel , Jeffery F. Summers , Douglas L. Thompson
IPC分类号： F01B29/10
CPC分类号： H01H1/0036 , H01H1/023 , H01H1/04 , H01H2001/0052 , H01H2001/0078 , H01H2061/006 , H01H2061/008
摘要： A MEMS switch device is made using a gold alloy as the switch contact material. The increased mechanical hardness of the alloy compared to the pure gold prevents the contacts of the switch from welding together. A scrubbing action which occurs when the switch closes may allow the contact surfaces to come to rest where their surfaces are complementary, thus resulting in higher contact area and low contact resistance, despite the higher sheet resistance of the gold alloy material relative to the pure gold material.
摘要翻译： 使用金合金作为开关触点材料制造MEMS开关装置。 与纯金相比，合金的增加的机械硬度防止开关的接触焊接在一起。 当开关闭合时发生的擦洗动作可允许接触表面在其表面互补的情况下停止，因此导致更高的接触面积和低的接触电阻，尽管金合金材料相对于纯金的较高的薄层电阻 材料。
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公开(公告)号：US08288211B2
公开(公告)日：2012-10-16
申请号：US12923872
申请日：2010-10-13
IPC分类号： H01L21/00
CPC分类号： H01L23/10 , B81C1/00269 , B81C2203/0118 , B81C2203/019 , H01L2924/0002 , H01L2924/01079 , H01L2924/00
摘要： Systems and methods for forming an encapsulated device include a hermetic seal which seals an insulating environment between two substrates, one of which supports the device. The hermetic seal is formed by an alloy of two metal layers, one deposited on a first substrate and the other deposited on the second substrate. At least one of the substrates may include a raised feature formed under at least one of the metal layers. One of the metal layer may have a diffusion barrier layer and a “keeper” layer formed thereover, wherein the keeper layers keeps the metal confined to a particular area. By using such a “keeper” layer, the substrate components may be heated to clean their surfaces, without activating or spending the bonding mechanism.
摘要翻译： 用于形成封装装置的系统和方法包括密封两个基板之间的绝缘环境的气密密封件，其中之一支撑该装置。 气密密封由两个金属层的合金形成，一个沉积在第一基板上，另一个沉积在第二基板上。 衬底中的至少一个可以包括形成在至少一个金属层下面的凸起特征。 金属层中的一个可以具有扩散阻挡层和在其上形成的保持层，其中保持层将金属限制在特定区域上。 通过使用这种保持层，基板部件可以被加热以清洁它们的表面，而不激活或消耗粘合机构。
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公开(公告)号：US20080169521A1
公开(公告)日：2008-07-17
申请号：US11652631
申请日：2007-01-12
CPC分类号： B81B7/0064 , B81B7/0041 , H01L23/10 , H01L2924/0002 , H01L2924/01079 , H01L2924/09701 , H01L2924/00
摘要： A MEMS device is encapsulated in a carbon dioxide environment, which effectively insulates the MEMS device against arcing in high voltage applications. The carbon dioxide environment may have a pressure of between about 0.2 atm and about 4 atm. Carbon dioxide is shown to be more effective than other insulating gases such as sulfur hexafluoride in preventing arcing for applications having dimensions on the order of microns.
摘要翻译： MEMS器件被封装在二氧化碳环境中，这有效地使MEMS器件绝缘在高电压应用中防止电弧。 二氧化碳环境可具有介于约0.2atm至约4atm之间的压力。 显示出二氧化碳比其他绝缘气体如六氟化硫更有效地防止了具有微米数量级的应用的电弧。
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公开(公告)号：US20120190105A1
公开(公告)日：2012-07-26
申请号：US13374899
申请日：2012-01-23
CPC分类号： C12M47/04 , B01L3/502761 , B01L7/52 , B01L2200/0652 , B01L2300/0816 , B01L2400/043 , B01L2400/0439 , B01L2400/0478 , B01L2400/0481 , G01N15/1459 , G01N2015/149
摘要： A disposable cartridge is described which is compatible with a MEMS particle sorting device. The disposable cartridge may include passageways which connect fluid reservoirs in the cartridge with corresponding microfluidic passageways on the MEMS chip. A flexible gasket may prevent leakages and allow the fluid to cross the gasket barrier through a plurality of holes in the gasket. Vents and septums may also be included to allow air to escape and fluids to be inserted by hypodermic needle. A MEMS-based particle sorting system using the disposable cartridge is also described.
摘要翻译： 描述了与MEMS颗粒分选装置兼容的一次性盒。 一次性盒可以包括将盒中的流体储存器与MEMS芯片上的相应微流体通道连接的通道。 柔性垫片可以防止泄漏，并允许流体通过垫圈中的多个孔穿过垫圈屏障。 还可以包括通气孔和隔膜，以允许空气逸出，并由皮下注射针插入液体。 还描述了使用一次性盒的基于MEMS的颗粒分选系统。
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公开(公告)号：US08871500B2
公开(公告)日：2014-10-28
申请号：US13374898
申请日：2012-01-23
CPC分类号： G01N33/5005 , B01L3/502738 , B01L3/502761 , B01L2200/0652 , B01L2400/043 , B01L2400/0633 , C12M47/04
摘要： A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on one side of the axis of motion. The movable structure is actuated by a separate force-generating apparatus, which is entirely separate from the movable structure formed on its substrate. This allows the movable structure to be entirely submerged in the sample fluid.
摘要翻译： 描述了基于MEMS的系统和方法，用于将目标颗粒与流体流的其余部分分离。 该系统利用形成在基板上的独特的微加工可移动结构，其以旋转方式围绕一个或多个固定点移动，所述固定点都位于运动轴的一侧。 可移动结构由独立的力产生装置致动，该装置与其基板上形成的可移动结构完全分开。 这允许可移动结构完全浸没在样品流体中。
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