摘要:
A photoresist coating for use in microlithography comprises a polymer of a monomer of the formula ##STR1## wherein X and Y are strong electron withdrawing groups and R.sup.4 is H or, providing that X and Y are both --CN, R.sup.4 may be aliphatic hydrocarbyl, aryl or alkaryl. Preferred monomers are of the formula ##STR2## wherein R.sup.7 is a C.sub.1 -C.sub.5 alkyl or C.sub.2 -C.sub.5 alkenyl group, more particularly ethyl 2-cyanopenta-2,4-dienoate or allyl 2-cyanopenta-2,4-dienoate.Methods for applying a resist coating by vapor deposition of these monomers and exposure to radiation are described. A positive or negative tone image can be produced, depending upon the imaging method employed.
摘要:
Cationically polymerizable styryloxy resins having urethane linkages, represented by the formula III ##STR1## wherein R.sup.1 and R.sup.2 are H, or one of R.sup.1 and R.sup.2 is H and the other is methyl;R.sup.3 and R.sup.4 (which may be the same or different) are H, lower alkyl, or alkoxy if R.sup.2 is not methyl;R.sup.5 is a divalent hydrocarbon radical;G.sup.1 is an n-valent hydrocarbon radical free of amino, aliphatic thiol, aliphatic hydroxyl or other groups which interfere with cationic polymerization;and n is an integer of 2 or more.G.sup.1 is a hydrocarbon backbone which is not interrupted by a hetero atom. Preferably G.sup.1 is a residue of a diene homopolymer or copolymer, in which case the resins produce flexible polymers. The resins are polymerized with a cationic polymerization initiator or latent acid catalyst. The resins have utility in the field of electronics.
摘要:
Anionically polymerizable monomers containing at least one silicon or titanium atom form polymeric photoresists having good dry etch resistance for use in microlithography. The monomers are of the formula ##STR1## wherein A is --H or --CH.dbd.CH.sub.2 ; X is a strong electron withdrawing group;Y is a strong electron withdrawing group containing at least one silicon or titanium atom.Preferably Y is ##STR2## wherein n is 1-5 and R.sup.2, R.sup.3 and R.sup.4 are C.sub.1 -C.sub.10 alkyl. A particularly preferred monomer is 3-trimethylsilylpropyl 2-cyanoacrylate.Methods for applying a resist coating by vapor deposition of these monomers and exposure to radiation are described. A positive or negative tone image can be produced, depending upon the imaging method employed. The imaging layer may be applied over a planarizing layer to form a multilayer photoresist.
摘要:
The present invention relates to dual curing compositions, which cure with moisture and photo radiation, such as UV light, and methods for preparing and using same. In particular, the compositions of the present invention contain a polyether or polyester backbone, photocurable portion(s) and moisture curable portion(s). The photo curable portion is a urethane or carbamate linkage terminated with a (meth)acryloxyalkyl group. The moisture curable portion is either: (1) a portion terminated with a polyalkoxysilyl group; or (2) a portion having a urea linkage terminated with an alkylpolyalkoxysilyl group.
摘要:
The subject invention provides a work support apparatus (20) including a spring pin assembly (32) for biasing a work piece (22) against a work stop (24), which includes a table (26) having a recess (30) with the spring pin assembly (32) disposed therein. The spring pin assembly (32) includes a housing having a side wall (48) and a top wall (50) having a circular opening (52) therethrough and a domed inner surface (54) extending upwardly from the side wall (48). A retaining pin (40) having a flat bottom surface (56) and a semi-spherical bottom portion (58) is urged against the domed inner surface (54) by a compression spring (42). A spring cup (44) transmits forces between the compression spring (42) and the flat bottom surface (56) of the retaining pin (40). A tool receiving device receives a tool for operating a holding mechanism (34) for securing the spring pin assembly (32) in the recess (30) such that the spring pin assembly (32) is removable from the top surface (28) of the table (26).
摘要:
A method, computer program product, and computer system for processing video frames. A current frame is divided into M blocks that include at least two differently sized blocks. M is at least 9. Each block in the current frame is classified as being a motion block or an I-BLOCK. Overlapped block motion compensation (OBMC) is performed on each block of the M blocks according to a predetermined scan order. The block on which OBMC is being performed is denoted as a self block. The OBMC is performed on the self block with respect to its neighbor blocks. The neighbor blocks consist of nearest neighbor blocks of the self block. Performing OBMC on the self block includes generating a weighting window for the self block and for each of its neighbor blocks.
摘要:
A bowl for supplying drinking water to a pet. The inventive device includes a fluid reservoir having an open bowl projecting therefrom. A shared wall extends between the reservoir and the bowl and includes a fluid aperture directed therethrough. A valve assembly is mounted to the reservoir and can be manually operated to open and close the fluid aperture so as to permit transferring of fluid between the reservoir and the bowl.
摘要:
An anaerobic adhesive composition activatable by ultraviolet or visible radiation is disclosed which forms strong bonds with lapped surfaces and which is comprised of (a) an anaerobically polymerizable acrylate ester monomer, (b) a compound which decomposes upon exposure to ultraviolet or visible light radiation to release a strong acid, (c) a peroxy free radical initiator capable of initiating the polymerization of the monomer upon substantial exclusion of oxygen and (d) an activator of anaerobic polymerization which, in the presence of a strong acid, reacts with the peroxide initiator to produce free radicals to catalyze the anaerobic polymerization of the monomer.
摘要:
A flexible adhesive tape comprising a thermoplastic support film etched on one side with a suitable etchant or etching method, said etched side being coated with a polyvinylformal pre-coat, and further coated with a photo-sensitive adhesive composition comprising,(i) at least one polymerizable acrylate ester monomer;(ii) a photo-initiator;(iii) optionally a film former;and the other side of said thermoplastic support film being coated with a release agent.These tape are useful as protective coatings, and adhere to a variety of surfaces, particularly high surface energy materials.
摘要:
An interactive television system and method for generating advertising combined with triggers and then, in turn, for viewing that advertising as the triggers present information associated with the triggers. When triggered by the viewer, the request will retrieve information at the request processing system based on the generated request; and present the retrieved information that is based on the request at a user computer system.