公开(公告)号：US06792023B1

公开(公告)日：2004-09-14

申请号：US10112660

申请日：2002-03-28

申请人： Juergen Kleinschmidt ,  Peter Lokai ,  Konstantin Aab

发明人： Juergen Kleinschmidt ,  Peter Lokai ,  Konstantin Aab

IPC分类号： H01S306

CPC分类号： H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

摘要： An excimer or molecular fluorine laser system includes a laser chamber filled with a gas mixture at least including a halogen-containing species and a buffer gas, multiple electrodes, including a pair of main discharge electrodes and at least one preionization electrode, within the laser chamber and connected to a discharge circuit for energizing the gas mixture, and a resonator including a line-narrowing and/or selection module for generating a laser beam at high spectral purity. The line-narrowing module includes one or more line-narrowing and/or selection optics within a sealed module coupled to vacuum equipment through a vacuum port for reducing the pressure within the module,

摘要翻译： 准分子或分子氟激光系统包括填充有至少包含含卤物质和缓冲气体的气体混合物的激光室，在激光室内包括一对主放电电极和至少一个预电离电极的多个电极 并连接到用于激励气体混合物的放电电路，以及包括用于产生高光谱纯度的激光束的线狭窄和/或选择模块的谐振器。 线路变窄模块包括在密封模块内的一个或多个线狭窄和/或选择光学器件，该密封模块通过真空端口耦合到真空设备，用于减小模块内的压力，

公开(公告)号：US06856638B2

公开(公告)日：2005-02-15

申请号：US10035351

申请日：2001-10-19

申请人： Konstantin Aab ,  Juergen Kleinschmidt ,  Peter Lokai ,  Matthias Ulrich

发明人： Konstantin Aab ,  Juergen Kleinschmidt ,  Peter Lokai ,  Matthias Ulrich

IPC分类号： H01S3/081 ,  H01S3/106 ,  H01S3/13 ,  H01S3/134 ,  H01S3/136 ,  H01S3/137 ,  H01S3/223 ,  H01S3/225 ,  H01S3/22

CPC分类号： H01S3/0811 ,  H01S3/106 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/136 ,  H01S3/137 ,  H01S3/223 ,  H01S3/225

摘要： A line-narrowed excimer or molecular fluorine laser system includes a discharge chamber filled with a gas mixture at least including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber connected to a discharge circuit for energizing the gas mixture, a resonator including a pair of resonator reflecting surfaces disposed on either side of the discharge chamber for generating a laser beam, and a line-narrowing/selection unit within the resonator for narrowing the bandwidth of the laser beam. The resonator further includes a third reflecting surface which is deformable and disposed between the pair of resonator reflecting surfaces. The line-narrowing/selection unit preferably includes a beam expander and a dispersive element, wherein the deformable third reflecting surface is disposed between the beam expander and the dispersive element.

摘要翻译： 线狭窄的准分子或分子氟激光系统包括填充有至少包括分子氟和缓冲气体的气体混合物的放电室，放电室内的多个电极连接到用于激励气体混合物的放电电路，包括 一对谐振器反射表面，设置在用于产生激光束的放电室的任一侧上;以及在谐振器内的线窄选择单元，用于使激光束的带宽变窄。 谐振器还包括可变形并设置在该对谐振器反射表面之间的第三反射表面。 线条变窄/选择单元优选地包括光束扩展器和分散元件，其中可变形的第三反射表面设置在光束扩展器和色散元件之间。

公开(公告)号：US20050002427A1

公开(公告)日：2005-01-06

申请号：US10833455

申请日：2004-04-28

申请人： Igor Bragin ,  Vadim Berger ,  Ulrich Rebhan ,  Norbert Niemoller ,  Konstantin Aab

发明人： Igor Bragin ,  Vadim Berger ,  Ulrich Rebhan ,  Norbert Niemoller ,  Konstantin Aab

IPC分类号： H01S3/038 ,  H01S3/04 ,  H01S3/041 ,  H01S3/22 ,  H01S3/223 ,  H01S3/225

CPC分类号： H01S3/0385 ,  H01S3/041 ,  H01S3/225

摘要： The consumption and/or erosion of electrodes in high repetition rate gas discharge lasers, such as excimer or molecular fluorine lasers, can be reduced using any of a number of temperature regulation approaches described herein. A flow of a cooling medium can be used to remove heat from the electrodes during laser operation, in order to reduce the rate of consumption and/or erosion. The rate of erosion can be controlled by adjusting the rate and/or temperature of the cooling medium flowing through the electrodes, or in bodies in good thermal contact with those electrodes. The cooled electrodes also can function to remove heat from the laser gas, and can have finned surfaces to facilitate such heat removal. Regulating the temperature of the electrodes and laser gas also can function to minimize resonance effects in the laser gas due to the presence of temperature gradients.

摘要翻译： 高重复率气体放电激光器（例如准分子或分子氟激光器）中的电极的消耗和/或腐蚀可以使用本文所述的多种温度调节方法中的任何一种来减少。 为了降低消耗和/或侵蚀的速度，可以使用冷却介质的流动来在激光操作期间从电极去除热量。 可以通过调节流过电极的冷却介质的速率和/或温度，或与这些电极良好的热接触的体内来控制侵蚀速率。 冷却的电极还可以用于从激光气体中除去热量，并且可以具有翅片表面以促进这种除热。 由于温度梯度的存在，调节电极和激光气体的温度也可以使激光气体中的谐振效应最小化。

公开(公告)号：US08511918B2

公开(公告)日：2013-08-20

申请号：US13147852

申请日：2010-02-02

申请人： Konstantin Aab

发明人： Konstantin Aab

IPC分类号： G03B9/20

CPC分类号： G03B9/08 ,  G03B9/22

摘要： A central shutter for camera objectives, said central shutter having a ring-shaped leaf carrier (1) surrounding the shutter aperture (2), on which leaf carrier at least two studs (13) are disposed arranged in a circularly symmetrical manner in relation to each other, on which studs sickle-shaped shutter leaves (14) are pivotably mounted, and having an electric motor drive pivoting the shutter leaves (14) over the shutter aperture (2), is distinguished in that the drive includes a motorized rotatable winding ring (3) which is realized as a flat ring disk and rests on the leaf carrier (1), a cam ring (7) realized as a flat ring disk is rotatably mounted in the winding ring (3), sawtooth-shaped cams (17) being provided on a ring surface thereof, wherein the winding ring (3) and the cam ring (7) are coupled to each other by means of at least one tension spring (9) that can be tensioned in the direction of rotation of the winding ring (3) and the pivoting movement of the shutter leaves (14) can be controlled by coupling to the cam ring (7).

摘要翻译： 一种用于相机物镜的中央快门，所述中央快门具有围绕快门孔（2）的环形叶片托架（1），叶片托架至少布置成两个螺柱（13），以圆形对称的方式相对于 彼此在其上枢转地安装有镰刀形快门叶片（14）的螺柱，并且具有将快门叶片（14）枢转在快门孔（2）上方的电动机驱动器的特征在于，驱动器包括电动可旋转绕组 圆环（3）实现为扁平环形盘并搁置在叶片托架（1）上，实现为扁平环形盘的凸轮环（7）可旋转地安装在卷绕环（3）中，锯齿形凸轮 17）设置在其环表面上，其中，所述卷绕环（3）和所述凸轮环（7）通过至少一个拉伸弹簧（9）彼此联接，所述拉伸弹簧可以沿着 卷绕环（3）和快门叶片（14）的枢转运动， 可以通过联接到凸轮环（7）来控制。

公开(公告)号：US08678682B2

公开(公告)日：2014-03-25

申请号：US13575184

申请日：2011-01-18

申请人： Konstantin Aab ,  Stefan Uwe Best

发明人： Konstantin Aab ,  Stefan Uwe Best

IPC分类号： G03B9/18

CPC分类号： G03B9/22 ,  G03B9/62

摘要： A device for controlling a central shutter, in which a plurality of shutter leaves (3) are mounted on a circularly annular leaf carrier (1) such that they can be pivoted on a pivoting arm (4), and in which, as actuating device for the pivoting movement of the shutter leaves (3), an annular cam plate (5) is mounted on the leaf carrier (1) concentrically with respect to the shutter opening (2), such that it can be rotated continuously in one direction, it being possible for the rotation of the cam plate (5) to be blocked by mechanical engagement into a cam trough (8) in front of an actuating flank (6) of a cam, is distinguished by the fact that, for mechanical blocking purposes, there is a push rod (9, 10) of a solenoid, which push rod (9, 10) can be moved perpendicularly with respect to the plane of the cam plate (5).

摘要翻译： 一种用于控制中央快门的装置，其中多个快门叶片（3）安装在环形叶片托架（1）上，使得它们可以在枢转臂（4）上枢转，并且其中，作为致动装置 为了使快门叶片（3）的枢转运动，环形凸轮板（5）相对于快门开口（2）同心地安装在叶片托架（1）上，使得其可沿一个方向连续旋转， 通过与凸轮的致动侧面（6）前面的凸轮槽（8）的机械接合可以使凸轮板（5）的旋转被阻止，其特征在于，为了机械阻塞目的 有一个螺线管的推杆（9,10），推杆（9,10）可以相对于凸轮板（5）的平面垂直移动。

公开(公告)号：US20120288270A1

公开(公告)日：2012-11-15

申请号：US13574691

申请日：2011-01-18

申请人： Konstantin Aab

发明人： Konstantin Aab

IPC分类号： G03B9/10

CPC分类号： G03B9/22

摘要： A device for synchronizing shutter blades, which are each fastened to a swivel arm which is mounted rotatably on a swivel pin on a circular-ring-shaped blade carrier, is distinguished in that a synchronizing ring disc (1) is arranged concentrically with respect to the blade carrier within a circle connecting the swivel pins (5) and is coupled in a form-fitting manner to each of the swivel arms (3).

摘要翻译： 用于同步快门叶片的装置，其各自紧固到可旋转地安装在环形叶片载体上的旋转销上的旋转臂，其特征在于同步环盘（1）相对于 连接旋转销（5）的圆周内的叶片承载件以形状配合方式联接到每个旋转臂（3）。

公开(公告)号：US20110293263A1

公开(公告)日：2011-12-01

申请号：US13147852

申请日：2010-02-02

申请人： Konstantin Aab

发明人： Konstantin Aab

IPC分类号： G03B9/18

CPC分类号： G03B9/08 ,  G03B9/22

摘要： A central shutter for camera objectives, said central shutter having a ring-shaped leaf carrier (1) surrounding the shutter aperture (2), on which leaf carrier at least two studs (13) are disposed arranged in a circularly symmetrical manner in relation to each other, on which studs sickle-shaped shutter leaves (14) are pivotably mounted, and having an electric motor drive pivoting the shutter leaves (14) over the shutter aperture (2), is distinguished in that the drive includes a motorized rotatable winding ring (3) which is realized as a flat ring disk and rests on the leaf carrier (1), a cam ring (7) realized as a flat ring disk is rotatably mounted in the winding ring (3), sawtooth-shaped cams (17) being provided on a ring surface thereof, wherein the winding ring (3) and the cam ring (7) are coupled to each other by means of at least one tension spring (9) that can be tensioned in the direction of rotation of the winding ring (3) and the pivoting movement of the shutter leaves (14) can be controlled by coupling to the cam ring (7).

摘要翻译： 一种用于相机物镜的中央快门，所述中央快门具有围绕快门孔（2）的环形叶片托架（1），叶片托架至少布置成两个螺柱（13），以圆形对称的方式相对于 彼此在其上枢转地安装有镰刀形快门叶片（14）的螺柱，并且具有将快门叶片（14）枢转在快门孔（2）上方的电动机驱动器的特征在于，驱动器包括电动可旋转绕组 圆环（3）实现为扁平环形盘并搁置在叶片托架（1）上，实现为扁平环形盘的凸轮环（7）可旋转地安装在卷绕环（3）中，锯齿形凸轮 17）设置在其环表面上，其中，所述卷绕环（3）和所述凸轮环（7）通过至少一个拉伸弹簧（9）彼此联接，所述拉伸弹簧可以沿着 卷绕环（3）和快门叶片（14）的枢转运动， 可以通过联接到凸轮环（7）来控制。

公开(公告)号：US07079565B2

公开(公告)日：2006-07-18

申请号：US10727718

申请日：2003-12-04

申请人： Igor Bragin ,  Vadim Berger ,  Oleg Melnikov ,  Konstantin Aab ,  Juergen Baumler

发明人： Igor Bragin ,  Vadim Berger ,  Oleg Melnikov ,  Konstantin Aab ,  Juergen Baumler

IPC分类号： H01S3/097

CPC分类号： H01S3/038 ,  H01S3/09713 ,  H01S3/225

摘要： Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoiler can reduce the effective area over which arcing can occur, and can reduce the likelihood of arcing by improving the flow of gas between the electrodes, such as by allowing for design flexibility and reducing the necessary height of a nose portion used to control the discharge area of the electrode. An improved blower design, which can utilize improved bearings and a dry film lubricant, can help to circulate the laser gas between the electrode structures, such as at a speed of at least 30 m/s in order to operate the laser at repetition rates of 4 kHz or higher.

摘要翻译： 通过利用改进的电极结构，在准分子或分子氟激光系统的放电室中可以使电弧最小化。 电极结构可以包括位于电极的放电区附近的至少一个陶瓷扰流板。 绝缘陶瓷扰流板可以减少可能发生电弧的有效面积，并且可以通过改善电极之间的气体流动来减少电弧的可能性，例如通过允许设计灵活性并减少用于 控制电极的放电面积。 可以使用改进的轴承和干膜润滑剂的改进的鼓风机设计可以帮助在电极结构之间循环激光气体，例如以至少30m / s的速度循环，以便以重复的速率操作激光 4 kHz或更高。

公开(公告)号：US08534935B2

公开(公告)日：2013-09-17

申请号：US13574691

申请日：2011-01-18

申请人： Konstantin Aab

发明人： Konstantin Aab

IPC分类号： G03B9/10

CPC分类号： G03B9/22

摘要： A device for synchronizing shutter blades, which are each fastened to a swivel arm which is mounted rotatably on a swivel pin on a circular-ring-shaped blade carrier, is distinguished in that a synchronizing ring disc (1) is arranged concentrically with respect to the blade carrier within a circle connecting the swivel pins (5) and is coupled in a form-fitting manner to each of the swivel arms (3).

摘要翻译： 用于同步快门叶片的装置，其各自紧固到可旋转地安装在环形叶片载体上的旋转销上的旋转臂，其特征在于同步环盘（1）相对于 连接旋转销（5）的圆周内的叶片承载件以形状配合方式联接到每个旋转臂（3）。

公开(公告)号：US20120292151A1

公开(公告)日：2012-11-22

申请号：US13575184

申请日：2011-01-18

申请人： Konstantin Aab ,  Stefan Uwe Best

发明人： Konstantin Aab ,  Stefan Uwe Best

IPC分类号： F16D41/12

CPC分类号： G03B9/22 ,  G03B9/62

摘要： A device for controlling a central shutter, in which a plurality of shutter leaves (3) are mounted on a circularly annular leaf carrier (1) such that they can be pivoted on a pivoting arm (4), and in which, as actuating device for the pivoting movement of the shutter leaves (3), an annular cam plate (5) is mounted on the leaf carrier (1) concentrically with respect to the shutter opening (2), such that it can be rotated continuously in one direction, it being possible for the rotation of the cam plate (5) to be blocked by mechanical engagement into a cam trough (8) in front of an actuating flank (6) of a cam, is distinguished by the fact that, for mechanical blocking purposes, there is a push rod (9, 10) of a solenoid, which push rod (9, 10) can be moved perpendicularly with respect to the plane of the cam plate (5).

摘要翻译： 一种用于控制中央快门的装置，其中多个快门叶片（3）安装在环形叶片托架（1）上，使得它们可以在枢转臂（4）上枢转，并且其中，作为致动装置 为了使快门叶片（3）的枢转运动，环形凸轮板（5）相对于快门开口（2）同心地安装在叶片托架（1）上，使得其可沿一个方向连续旋转， 通过与凸轮的致动侧面（6）前面的凸轮槽（8）的机械接合可以使凸轮板（5）的旋转被阻止，其特征在于，为了机械阻塞目的 有一个螺线管的推杆（9,10），推杆（9,10）可以相对于凸轮板（5）的平面垂直移动。