公开(公告)号：US07079565B2

公开(公告)日：2006-07-18

申请号：US10727718

申请日：2003-12-04

申请人： Igor Bragin ,  Vadim Berger ,  Oleg Melnikov ,  Konstantin Aab ,  Juergen Baumler

发明人： Igor Bragin ,  Vadim Berger ,  Oleg Melnikov ,  Konstantin Aab ,  Juergen Baumler

IPC分类号： H01S3/097

CPC分类号： H01S3/038 ,  H01S3/09713 ,  H01S3/225

摘要： Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoiler can reduce the effective area over which arcing can occur, and can reduce the likelihood of arcing by improving the flow of gas between the electrodes, such as by allowing for design flexibility and reducing the necessary height of a nose portion used to control the discharge area of the electrode. An improved blower design, which can utilize improved bearings and a dry film lubricant, can help to circulate the laser gas between the electrode structures, such as at a speed of at least 30 m/s in order to operate the laser at repetition rates of 4 kHz or higher.

摘要翻译： 通过利用改进的电极结构，在准分子或分子氟激光系统的放电室中可以使电弧最小化。 电极结构可以包括位于电极的放电区附近的至少一个陶瓷扰流板。 绝缘陶瓷扰流板可以减少可能发生电弧的有效面积，并且可以通过改善电极之间的气体流动来减少电弧的可能性，例如通过允许设计灵活性并减少用于 控制电极的放电面积。 可以使用改进的轴承和干膜润滑剂的改进的鼓风机设计可以帮助在电极结构之间循环激光气体，例如以至少30m / s的速度循环，以便以重复的速率操作激光 4 kHz或更高。

公开(公告)号：US20050002427A1

公开(公告)日：2005-01-06

申请号：US10833455

申请日：2004-04-28

申请人： Igor Bragin ,  Vadim Berger ,  Ulrich Rebhan ,  Norbert Niemoller ,  Konstantin Aab

发明人： Igor Bragin ,  Vadim Berger ,  Ulrich Rebhan ,  Norbert Niemoller ,  Konstantin Aab

IPC分类号： H01S3/038 ,  H01S3/04 ,  H01S3/041 ,  H01S3/22 ,  H01S3/223 ,  H01S3/225

CPC分类号： H01S3/0385 ,  H01S3/041 ,  H01S3/225

摘要： The consumption and/or erosion of electrodes in high repetition rate gas discharge lasers, such as excimer or molecular fluorine lasers, can be reduced using any of a number of temperature regulation approaches described herein. A flow of a cooling medium can be used to remove heat from the electrodes during laser operation, in order to reduce the rate of consumption and/or erosion. The rate of erosion can be controlled by adjusting the rate and/or temperature of the cooling medium flowing through the electrodes, or in bodies in good thermal contact with those electrodes. The cooled electrodes also can function to remove heat from the laser gas, and can have finned surfaces to facilitate such heat removal. Regulating the temperature of the electrodes and laser gas also can function to minimize resonance effects in the laser gas due to the presence of temperature gradients.

摘要翻译： 高重复率气体放电激光器（例如准分子或分子氟激光器）中的电极的消耗和/或腐蚀可以使用本文所述的多种温度调节方法中的任何一种来减少。 为了降低消耗和/或侵蚀的速度，可以使用冷却介质的流动来在激光操作期间从电极去除热量。 可以通过调节流过电极的冷却介质的速率和/或温度，或与这些电极良好的热接触的体内来控制侵蚀速率。 冷却的电极还可以用于从激光气体中除去热量，并且可以具有翅片表面以促进这种除热。 由于温度梯度的存在，调节电极和激光气体的温度也可以使激光气体中的谐振效应最小化。

公开(公告)号：US07804879B2

公开(公告)日：2010-09-28

申请号：US11804795

申请日：2007-05-21

申请人： Igor Bragin ,  Vadim Berger

发明人： Igor Bragin ,  Vadim Berger

IPC分类号： H01S3/097

CPC分类号： H01S3/0385 ,  H01S3/225

摘要： A gas discharge laser includes elongated discharge electrodes having an active surface width that varies along the length of the resonator. In one example each of the electrodes is formed by a row of pins having a circular active surface. The pins are diametrically aligned with the active surfaces generally coplanar.

摘要翻译： 气体放电激光器包括具有沿谐振器的长度变化的有源表面宽度的细长放电电极。 在一个示例中，每个电极由具有圆形有源表面的一排销形成。 这些销与活动表面沿径向对齐，大致共面。

公开(公告)号：US06546036B1

公开(公告)日：2003-04-08

申请号：US09587996

申请日：2000-06-06

申请人： Igor Bragin ,  Vadim Berger

发明人： Igor Bragin ,  Vadim Berger

IPC分类号： H01S322

CPC分类号： H01S3/038 ,  H01S3/0384 ,  H01S3/0977

摘要： A method and devices for preionizing the main discharge gas volume of a gas discharge laser are described. The method and devices provide a preionizing discharge to the main gas discharge volume from above or below the main gas discharge volume. In combination with a shielding arrangement which reduces the spread of the preionization discharge other than to the main gas discharge volume, the exposure of other laser components and gas volumes to said preionization discharge is thereby minimized.

摘要翻译： 对气体放电激光器的主放电气体体积进行预处理的方法和装置进行说明。 所述方法和装置从主气体排出容积的上方或下方提供对主气体排出容积的预放电排放。 与除了主气体放电容积之外的减少预除电放电扩散的屏蔽装置相结合，其他激光成分的曝光和气体体积因此被最小化。

公开(公告)号：US20060056478A1

公开(公告)日：2006-03-16

申请号：US11263626

申请日：2005-10-31

申请人： Hans-Stephen Albrecht ,  Klaus Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

发明人： Hans-Stephen Albrecht ,  Klaus Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

IPC分类号： H01S3/22

CPC分类号： G03F7/70025 ,  G02B5/1814 ,  G02B5/1838 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/08045 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225

摘要： Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fluorine can increase the partial pressure of molecular fluorine by a selected amount. The injections can be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure. The amount per injection and/or the interval between injections can be varied, based on factors such as driving voltage and a calculated amount of molecular fluorine in the discharge chamber. The driving voltage can be in one of multiple driving voltage ranges that are adjusted based on system aging. Within each range, gas injections and gas replacements can be performed based on, for example, total applied electrical energy or time/pulse count.

摘要翻译： 气体放电激光器的输出光束参数通过使用气体供应单元和处理器将分子氟成分保持在预定的分压来稳定。 分子氟在放电室内会耗尽。 包括分子氟在内的气体注入可以将分子氟的分压提高一定量。 注射可以以选定的间隔进行，以使构成气体基本保持在初始分压。 基于诸如驱动电压和排放室中分子量的计算量的因素，可以改变每次注射的量和/或注射间隔。 驱动电压可以是根据系统老化进行调整的多个驱动电压范围之一。 在每个范围内，可以基于例如总施加的电能或时间/脉冲计数进行气体注入和气体替换。

公开(公告)号：US20050058172A1

公开(公告)日：2005-03-17

申请号：US10936084

申请日：2004-09-08

申请人： Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf ,  Vadim Berger ,  Rustem Osmanow

发明人： Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf ,  Vadim Berger ,  Rustem Osmanow

IPC分类号： H01S3/00 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/22

CPC分类号： H01S3/0971 ,  H01S3/038 ,  H01S3/09713

摘要： The stability of a gas discharge in an excimer or molecular fluorine laser system can be improved by generating multiple discharge pulses in the resonator chamber, instead of a single discharge pulse. Each of these discharges can be optimized in both energy transfer and efficient coupling to the gas. The timing of each discharge can be controlled using, for example, a common pulser component along with appropriate circuitry to provide energy pulses to each of a plurality of segmented main discharge electrodes. Applying the energy to the segmented electrodes rather than to a standard discharge electrode pair allows for an optimization of the temporal shape of the resulting superimposed laser pulse. The optimized shape and higher stability can allow the laser system to operate at higher repetition rates, while minimizing the damage to system and/or downstream optics.

摘要翻译： 可以通过在谐振器腔中产生多个放电脉冲而不是单个放电脉冲来改善准分子或分子氟激光系统中气体放电的稳定性。 这些放电中的每一个可以在能量传递和与气体的有效耦合的两者中进行优化。 可以使用例如公共脉冲发生器部件以及适当的电路来控制每个放电的定时，以向多个分段的主放电电极中的每一个提供能量脉冲。 将能量施加到分段电极而不是标准放电电极对允许优化所得叠加的激光脉冲的时间形状。 优化的形状和更高的稳定性可以允许激光系统以更高的重复率操作，同时最小化对系统和/或下游光学器件的损害。

公开(公告)号：US06834066B2

公开(公告)日：2004-12-21

申请号：US09838715

申请日：2001-04-18

申请人： Igor Bragin ,  Vadim Berger ,  Juergen Kleinschmidt

发明人： Igor Bragin ,  Vadim Berger ,  Juergen Kleinschmidt

IPC分类号： H01S300

CPC分类号： H01S3/0971 ,  H01S3/09705 ,  H01S3/0975 ,  H01S3/225

摘要： Method and system for providing stabilization techniques for high repetition rate gas discharge lasers with active loads provided in the discharge circuitry design which may include a resistance provided in the discharge circuitry.

摘要翻译： 用于为具有在放电电路设计中提供的有源负载的高重复率气体放电激光器提供稳定技术的方法和系统，其可以包括在放电电路中提供的电阻。

公开(公告)号：US06466599B1

公开(公告)日：2002-10-15

申请号：US09453670

申请日：1999-12-03

申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

IPC分类号： H01S3225

CPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

摘要： A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

公开(公告)号：US20070002918A1

公开(公告)日：2007-01-04

申请号：US11172266

申请日：2005-06-30

申请人： Norbert Niemoeller ,  Igor Bragin ,  Vadim Berger

发明人： Norbert Niemoeller ,  Igor Bragin ,  Vadim Berger

IPC分类号： H01S3/22 ,  H01S3/097

CPC分类号： H01S3/0388 ,  H01S3/032 ,  H01S3/036 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/0971 ,  H01S3/225

摘要： An excimer laser has a laser chamber containing a laser gas and including an electrode assembly for firing gas discharge pulses in the laser gas for pumping the laser. The electrode assembly includes two elongated electrodes, one or both of which is partially covered by a ceramic foam. The electrodes are arranged to provide a discharge gap between the electrodes. The ceramic foam on an electrode serves to damp acoustic disturbances and resulting refractive index disturbances in the gas that occur as a result of firing a gas discharge pulse in the discharge gap.

摘要翻译： 准分子激光器具有包含激光气体的激光室，并且包括用于激发激光器中的气体放电脉冲的电极组件，用于泵浦激光。 电极组件包括两个细长电极，其中一个或两个部分被陶瓷泡沫覆盖。 电极被布置成在电极之间提供放电间隙。 电极上的陶瓷泡沫用于抑制由于在放电间隙中发生气体放电脉冲而发生的气体中的声学干扰和由此产生的折射率干扰。

公开(公告)号：US06785316B1

公开(公告)日：2004-08-31

申请号：US09640595

申请日：2000-08-17

申请人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm

发明人： Igor Bragin ,  Vadim Berger ,  Uwe Stamm

IPC分类号： H01S3097

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  H01S3/0971 ,  H01S3/225

摘要： A final stage capacitance of a pulse compression circuit for an excimer or molecular fluorine lithography laser system is provided by a set of peaking capacitors connected through a first inductance to the electrodes and a set of sustaining capacitors connected to the electrodes through a second inductance substantially greater than the first inductance. Current pulses through the discharge are temporally extended relative to current pulses of a system having its final stage capacitance provided only by a set of peaking capacitors connected to the electrodes via the first inductance. An amplified spontaneous emission (ASE) level in the laser pulses is reduced thereby enhancing their spectral purity.

摘要翻译： 用于准分子或分子氟光刻激光系统的脉冲压缩电路的最终级电容由通过第一电感连接到电极的一组峰化电容器提供，并且一组维持电容器通过大体上更大的第二电感连接到电极 比第一个电感。 通过放电的电流脉冲相对于具有其最终级电容的系统的电流脉冲在时间上延长，该最终级电容仅由通过第一电感连接到电极的一组峰值电容器提供。 激光脉冲中的放大自发发射（ASE）水平降低，从而增强其光谱纯度。