公开(公告)号：US08779183B2

公开(公告)日：2014-07-15

申请号：US12214429

申请日：2008-06-19

申请人： Jung-Hoon Oh ,  Dong-Cheol Seo ,  Hyun-Sang Joo ,  Chang-Soo Lee

发明人： Jung-Hoon Oh ,  Dong-Cheol Seo ,  Hyun-Sang Joo ,  Chang-Soo Lee

IPC分类号： C07C309/17

CPC分类号： C07C309/12 ,  C07C25/18 ,  C07C43/225 ,  C07C69/712 ,  C07C309/08 ,  C07C381/12 ,  C07C2601/08 ,  C07C2601/14 ,  C07C2602/28 ,  C07C2602/42 ,  C07C2603/74 ,  C07C2603/86 ,  C07D333/46

摘要： An acid generating agent used for chemically amplified resist compositions is provided, which agent is represented by the following formula (1): wherein X represents a monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms, and having at least one hydrogen atom on the ring substituted by an alkyl or alkoxy group which may be unsubstituted or substituted with a group selected from an ether group, an ester group, a carbonyl group, an acetal group, an epoxy group, a nitrile group and an aldehyde group, or by a perfluoroalkyl group, a hydroxyalkyl group, or a cyano group; R6 is an alkyl group, an alkoxy group, or a heteroatom selected from the group consisting of N, S and F; m is an integer from 0 to 2; and A+ is an organic counterion.

摘要翻译： 提供了用于化学放大抗蚀剂组合物的酸产生剂，该试剂由下式（1）表示：其中X表示具有3至30个碳原子的单环或多环烃基，并且其上具有至少一个氢原子 可被未取代的或被选自醚基，酯基，羰基，缩醛基，环氧基，腈基和醛基中的基团取代的烷基或烷氧基取代的环，或由 全氟烷基，羟烷基或氰基; R6是烷基，烷氧基或选自N，S和F的杂原子; m为0〜2的整数; 而A +是一种有机的抗衡离子。

公开(公告)号：US20090234155A1

公开(公告)日：2009-09-17

申请号：US12214429

申请日：2008-06-19

申请人： Jung-Hoon Oh ,  Dong-Cheol Seo ,  Hyun-Sang Joo ,  Chang-Soo Lee

发明人： Jung-Hoon Oh ,  Dong-Cheol Seo ,  Hyun-Sang Joo ,  Chang-Soo Lee

IPC分类号： C07C309/19 ,  C07C309/02 ,  C07C309/24

CPC分类号： C07C309/12 ,  C07C25/18 ,  C07C43/225 ,  C07C69/712 ,  C07C309/08 ,  C07C381/12 ,  C07C2601/08 ,  C07C2601/14 ,  C07C2602/28 ,  C07C2602/42 ,  C07C2603/74 ,  C07C2603/86 ,  C07D333/46

摘要： An acid generating agent used for chemically amplified resist compositions is provided, which agent is represented by the following formula (1): wherein X represents a monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms, and having at least one hydrogen atom on the ring substituted by an alkyl or alkoxy group which and may be unsubstituted or substituted with a group selected from an ether group, an ester group, a carbonyl group, an acetal group, an epoxy group, a nitrile group and an aldehyde group, or by a perfluoroalkyl group, a hydroxyalkyl group, or a cyano group; R6 is an alkyl group, an alkoxy group, or a heteroatom selected from the group consisting of N, S and F; m is an integer from 0 to 2; and A+ is an organic counterion.

摘要翻译： 提供了用于化学放大抗蚀剂组合物的酸产生剂，该试剂由下式（1）表示：其中X表示具有3至30个碳原子的单环或多环烃基，并且其上具有至少一个氢原子 可被未取代的或被选自醚基，酯基，羰基，缩醛基，环氧基，腈基和醛基中的基团取代的烷基或烷氧基取代的环，或由 全氟烷基，羟烷基或氰基; R6是烷基，烷氧基或选自N，S和F的杂原子; m为0〜2的整数; 而A +是一种有机的抗衡离子。

公开(公告)号：US08026390B2

公开(公告)日：2011-09-27

申请号：US12384191

申请日：2009-04-01

申请人： Jung-Hoon Oh ,  Dong-Cheol Seo ,  Jin-Bong Shin

发明人： Jung-Hoon Oh ,  Dong-Cheol Seo ,  Jin-Bong Shin

IPC分类号： C07C309/00

CPC分类号： C07C25/18 ,  C07C309/08 ,  C07C309/12 ,  C07C313/04 ,  C07C323/52 ,  C07C381/12 ,  C07C2601/08 ,  C07C2603/08 ,  C07C2603/18 ,  C07C2603/24 ,  C07C2603/26 ,  C07D311/84 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397

摘要： An acid generator represented by the following formula (1) is provided: wherein X represents an alkylene group having 1 to 10 carbon atoms, —X1—O—X2—, or a heteroatom selected from the group consisting of nitrogen, sulfur and fluorine; X1 and X2 each independently represent an alkylene group having 1 to 10 carbon atoms; Y represents a cyclic hydrocarbon group having 5 to 30 carbon atoms and containing one or more aromatic rings, while one or more hydrogen atoms on the ring of the cyclic hydrocarbon group may be substituted by one or more members selected from the group consisting of —O—Y1, —CO—Y2, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, a perfluoroalkoxy group having 1 to 4 carbon atoms, a hydroxyalkyl group having 1 to 6 carbon atoms, a halogen atom, a hydroxyl group and a cyano group; Y1 and Y2 each independently represent an alkyl group having 1 to 6 carbon atoms; n represents an integer of 0 or 5; and A+ represents an organic counterion.

摘要翻译： 提供由下式（1）表示的酸发生剂：其中X表示碳原子数1〜10的亚烷基，-X 1 -O-X 2 - 或选自氮，硫和氟的杂原子; X1和X2各自独立地表示碳原子数1〜10的亚烷基。 Y表示碳原子数为5〜30的环状烃基，含有一个以上的芳香环，环状烃基的环上的一个以上的氢原子可以被选自-O〜 -Y1，-CO-Y2，碳原子数1〜6的烷基，碳原子数1〜6的烷氧基，碳原子数1〜4的全氟烷基，碳原子数1〜4的全氟烷氧基， 具有1至6个碳原子的基团，卤素原子，羟基和氰基; Y1和Y2各自独立地表示碳原子数1〜6的烷基。 n表示0或5的整数; A +代表有机抗衡离子。

公开(公告)号：US20100113818A1

公开(公告)日：2010-05-06

申请号：US12384191

申请日：2009-04-01

申请人： Jung-Hoon Oh ,  Dong-Cheol Seo ,  Jin-Bong Shin

发明人： Jung-Hoon Oh ,  Dong-Cheol Seo ,  Jin-Bong Shin

IPC分类号： C07C69/76

CPC分类号： C07C25/18 ,  C07C309/08 ,  C07C309/12 ,  C07C313/04 ,  C07C323/52 ,  C07C381/12 ,  C07C2601/08 ,  C07C2603/08 ,  C07C2603/18 ,  C07C2603/24 ,  C07C2603/26 ,  C07D311/84 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397

摘要： An acid generator represented by the following formula (1) is provided: wherein X represents an alkylene group having 1 to 10 carbon atoms, —X1—O—X2—, or a heteroatom selected from the group consisting of nitrogen, sulfur and fluorine; X1 and X2 each independently represent an alkylene group having 1 to 10 carbon atoms; Y represents a cyclic hydrocarbon group having 5 to 30 carbon atoms and containing one or more aromatic rings, while one or more hydrogen atoms on the ring of the cyclic hydrocarbon group may be substituted by one or more members selected from the group consisting of —O—Y1, —CO—Y2, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, a perfluoroalkoxy group having 1 to 4 carbon atoms, a hydroxyalkyl group having 1 to 6 carbon atoms, a halogen atom, a hydroxyl group and a cyano group; Y1 and Y2 each independently represent an alkyl group having 1 to 6 carbon atoms; n represents an integer of 0 or 5; and A+ represents an organic counterion.

摘要翻译： 提供由下式（1）表示的酸发生剂：其中X表示碳原子数1〜10的亚烷基，-X 1 -O-X 2 - 或选自氮，硫和氟的杂原子; X1和X2各自独立地表示碳原子数1〜10的亚烷基。 Y表示碳原子数为5〜30的环状烃基，含有一个以上的芳香环，环状烃基的环上的一个以上的氢原子可以被选自-O〜 -Y1，-CO-Y2，碳原子数1〜6的烷基，碳原子数1〜6的烷氧基，碳原子数1〜4的全氟烷基，碳原子数1〜4的全氟烷氧基， 具有1至6个碳原子的基团，卤素原子，羟基和氰基; Y1和Y2各自独立地表示碳原子数1〜6的烷基。 n表示0或5的整数; A +代表有机抗衡离子。

公开(公告)号：US20100075256A1

公开(公告)日：2010-03-25

申请号：US12321111

申请日：2009-01-15

申请人： Hyun-Sang Joo ,  Joo-Hyeon Park ,  Jung-Hoon Oh ,  Dae-Hyeon Shin

发明人： Hyun-Sang Joo ,  Joo-Hyeon Park ,  Jung-Hoon Oh ,  Dae-Hyeon Shin

IPC分类号： G03F7/004 ,  C07C69/52 ,  C07D333/02 ,  C08F14/18 ,  G03F7/20

CPC分类号： C07C381/12 ,  C07C309/12 ,  C08F20/38 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  Y10S430/106 ,  Y10S430/111

摘要： A compound represented by the following formula (1) is provided: wherein R1 represents a hydrogen atom, a trifluoromethyl group, an alkyl group, or an alkoxy group; and A represents a group represented by the following formula (2) or formula (3): wherein R2, R3, R4, R5 and R6 each independently represent a substituted or unsubstituted alkyl group, a substituted or unsubstituted allyl group, a substituted or unsubstituted perfluoroalkyl group, a substituted or unsubstituted benzyl group, or a substituted or unsubstituted aryl group; and two or more of R2, R3 and R4 may be linked to each other to form a saturated or unsaturated carbon ring or a saturated or unsaturated heterocyclic ring.The chemically amplified resist composition comprising a polymer compound which is produced from the compound of formula 1 according to the present invention provides a chemically amplified resist sensitive to far-ultraviolet radiation, which is represented by KrF excimer laser or ArF excimer laser.

摘要翻译： 提供由下式（1）表示的化合物：其中R1表示氢原子，三氟甲基，烷基或烷氧基; A表示由下式（2）或式（3）表示的基团：其中R 2，R 3，R 4，R 5和R 6各自独立地表示取代或未取代的烷基，取代或未取代的烯丙基，取代或未取代的 取代或未取代的苄基或取代或未取代的芳基; R2，R3和R4中的两个或多个可以彼此连接形成饱和或不饱和的碳环或饱和或不饱和的杂环。 包含由根据本发明的式1化合物制备的高分子化合物的化学放大抗蚀剂组合物提供对由KrF准分子激光器或ArF准分子激光器表示的远紫外辐射敏感的化学放大抗蚀剂。

公开(公告)号：US08158327B2

公开(公告)日：2012-04-17

申请号：US12321111

申请日：2009-01-15

申请人： Hyun-Sang Joo ,  Joo-Hyeon Park ,  Jung-Hoon Oh ,  Dae-Hyeon Shin

发明人： Hyun-Sang Joo ,  Joo-Hyeon Park ,  Jung-Hoon Oh ,  Dae-Hyeon Shin

IPC分类号： G03F7/004 ,  G03F7/30 ,  C08F228/02

CPC分类号： C07C381/12 ,  C07C309/12 ,  C08F20/38 ,  G03F7/0045 ,  G03F7/0046 ,  G03F7/0397 ,  Y10S430/106 ,  Y10S430/111

摘要： A compound represented by the following formula (1) is provided: wherein R1 represents a hydrogen atom, a trifluoromethyl group, an alkyl group, or an alkoxy group; and A represents a group represented by the following formula (2) or formula (3): wherein R2, R3, R4, R5 and R6 each independently represent a substituted or unsubstituted alkyl group, a substituted or unsubstituted allyl group, a substituted or unsubstituted perfluoroalkyl group, a substituted or unsubstituted benzyl group, or a substituted or unsubstituted aryl group; and two or more of R2, R3 and R4 may be linked to each other to form a saturated or unsaturated carbon ring or a saturated or unsaturated heterocyclic ring. The chemically amplified resist composition comprising a polymer compound which is produced from the compound of formula 1 according to the present invention provides a chemically amplified resist sensitive to far-ultraviolet radiation, which is represented by KrF excimer laser or ArF excimer laser.

摘要翻译： 提供由下式（1）表示的化合物：其中R1表示氢原子，三氟甲基，烷基或烷氧基; A表示由下式（2）或式（3）表示的基团：其中R 2，R 3，R 4，R 5和R 6各自独立地表示取代或未取代的烷基，取代或未取代的烯丙基，取代或未取代的 取代或未取代的苄基或取代或未取代的芳基; R2，R3和R4中的两个或多个可以彼此连接形成饱和或不饱和的碳环或饱和或不饱和的杂环。 包含由根据本发明的式1化合物制备的高分子化合物的化学放大抗蚀剂组合物提供对由KrF准分子激光器或ArF准分子激光器表示的远紫外辐射敏感的化学放大抗蚀剂。

公开(公告)号：US08853345B2

公开(公告)日：2014-10-07

申请号：US13330971

申请日：2011-12-20

申请人： Jung-Hoon Oh ,  Joon Hee Han ,  Tae Gon Kim ,  Hyun Sang Joo

发明人： Jung-Hoon Oh ,  Joon Hee Han ,  Tae Gon Kim ,  Hyun Sang Joo

IPC分类号： C08G63/668 ,  G03F7/20 ,  G03F7/039

CPC分类号： C08G63/668 ,  G03F7/0392 ,  G03F7/0395 ,  G03F7/2039

摘要： Provided is a copolymer. The copolymer, when incorporated into a resist composition, can provide a satisfactory resist pattern with high sensitivity, high resolution, high etching resistance and a reduced amount of outgas.

摘要翻译： 提供了一种共聚物。 当共聚物掺入抗蚀剂组合物中时，可以提供令人满意的抗敏剂图案，具有高灵敏度，高分辨率，高耐腐蚀性和减少的排气量。

公开(公告)号：US08200274B2

公开(公告)日：2012-06-12

申请号：US12513273

申请日：2007-10-31

申请人： Yong-Su Lee ,  Jung-Hoon Oh ,  Young-Il Kim

发明人： Yong-Su Lee ,  Jung-Hoon Oh ,  Young-Il Kim

IPC分类号： H04B7/00

CPC分类号： H04W52/146 ,  H04B7/15528 ,  H04W52/241 ,  H04W52/362 ,  H04W52/46 ,  H04W52/50

摘要： Provided are a method of controlling power of an access uplink using a relay station (RS) and a system thereof. When a base station (BS) decides that the subject of power control of the access uplink is itself, the BS generates a message for power control of the access uplink based on channel quality measurement information reported from the RS and transmits the power control message to a subscriber station (SS), and when the BS decides that the subject of power control of the access uplink is the RS, the RS generates a message for power control of the access uplink based on channel quality measurement information and transmits the power control message to the SS. Thus, fast power control of the access uplink can be performed.

摘要翻译： 提供一种使用中继站（RS）及其系统来控制接入上行链路的功率的方法。 当基站（BS）确定接入上行链路的功率控制的对象本身时，BS基于从RS报告的信道质量测量信息生成用于接入上行链路的功率控制的消息，并将功率控制消息发送到 用户站（SS），并且当BS决定接入上行链路的功率控制对象为RS时，RS基于信道质量测量信息生成用于接入上行链路的功率控制的消息，并且发送功率控制消息 到SS。 因此，可以执行接入上行链路的快速功率控制。

公开(公告)号：US20110063026A1

公开(公告)日：2011-03-17

申请号：US12883580

申请日：2010-09-16

申请人： Jae-Ho JUNG ,  Gweon-Do Jo ,  Young-Hoon Kim ,  Jung-Hoon Oh ,  Kwang-Chun Lee

发明人： Jae-Ho JUNG ,  Gweon-Do Jo ,  Young-Hoon Kim ,  Jung-Hoon Oh ,  Kwang-Chun Lee

IPC分类号： H03F1/26

CPC分类号： H03F1/3247 ,  H03F1/0266 ,  H03F3/189 ,  H03F3/24 ,  H03F2201/3233

摘要： A pre-distortion apparatus of a power amplifier includes: a pre-distortion unit configured to generate a pre-distorted signal of an input signal by calculating a magnitude of the input signal and outputting a complex correction coefficient corresponding to the calculated magnitude of the input signal, and provide the generated pre-distorted signal as an input of the power amplifier; and a complex correct coefficient update unit configured to generate an error signal by comparing an output signal of the power amplifier with the input signal and updating the complex correction coefficient to minimize a magnitude of the generated error signal, wherein the pre-distortion unit provides a constant bias value corresponding to the magnitude of the input signal as a bias of the power amplifier while updating the complex correction coefficient.

摘要翻译： 功率放大器的预失真装置包括：预失真单元，被配置为通过计算输入信号的幅度来产生输入信号的预失真信号，并输出与所计算的输入的幅度相对应的复数校正系数 信号，并且将生成的预失真信号提供给功率放大器的输入; 以及复数正确系数更新单元，其被配置为通过将所述功率放大器的输出信号与所述输入信号进行比较来生成误差信号，并更新所述复数校正系数以最小化所生成的误差信号的幅度，其中所述预失真单元提供 对应于作为功率放大器的偏置的输入信号的大小的恒定偏置值，同时更新复数校正系数。

公开(公告)号：US20070285132A1

公开(公告)日：2007-12-13

申请号：US11789330

申请日：2007-04-24

申请人： Jung-Hoon Oh

发明人： Jung-Hoon Oh

IPC分类号： G01R25/00

CPC分类号： H03L7/089 ,  H03D13/004 ,  H03L7/087 ,  H03L7/0898 ,  H03L7/095 ,  H03L7/107 ,  H03L7/18

摘要： A fast locking phase locked loop includes a first phase frequency detector (PFD), a second PFD, a lock detector, an up-signal output unit, a down-signal output unit, a selective charge pump, a loop filter, and a voltage-controlled oscillator (VCO). The first PFD outputs a first up-signal and a first down-signal. The second PFD outputs a second up-signal and a second down-signal. The lock detector outputs an inverted lock signal. The selective charge pump outputs a pumping current. The loop filter generates a control voltage in response to the pumping current. The VCO generates the external clock signal having a frequency determined in accordance with the control voltage. The PLL has a faster locking time because the PFDs included in the PLL are capable of detecting a phase difference in a missing edge.

摘要翻译： 快速锁定锁相环包括第一相位频率检测器（PFD），第二PFD，锁定检测器，上行信号输出单元，降低信号输出单元，选择性电荷泵，环路滤波器和电压 控制振荡器（VCO）。 第一PFD输出第一上升信号和第一下降信号。 第二PFD输出第二上升信号和第二下降信号。 锁定检测器输出反向锁定信号。 选择性电荷泵输出泵浦电流。 环路滤波器响应于泵浦电流产生控制电压。 VCO产生具有根据控制电压确定的频率的外部时钟信号。 PLL具有更快的锁定时间，因为PLL中包含的PFD能够检测到缺失边缘的相位差。