Microwave plasma processing apparatus
    1.
    发明授权
    Microwave plasma processing apparatus 失效
    微波等离子体处理装置

    公开(公告)号:US5243259A

    公开(公告)日:1993-09-07

    申请号:US798901

    申请日:1991-11-27

    摘要: The present invention relates to a microwave plasma processing apparatus for processing such as thin film formation, etching, sputtering, and plasma oxidation, etc., on a surface of a processing object by utilizing a high density plasma generated by electron cyclotron resonance. A vacuum vessel of the apparatus, in which a microwave transmitted by a microwave guide is utilized for converting gas supplied to the vacuum vessel to plasma for the plasma processing of the processing object placed in the vacuum vessel, is formed in, such manner that the interior space of the vacuum vessel extends beyond the outer periphery of magnetic field generating coils, and the extended portion of the vessel is provided with a gas outlet for connection with an evacuation apparatus to evacuate the interior of the vacuum vessel to a desired vacuum degree. Accordingly, preferable evacuating characteristics can be obtained even in a case when a large amount of the reaction gas is supplied to the vacuum vessel in order to process a large size processing object, because the vacuum vessel in which the processing object is placed can be connected with the evacuation apparatus through a space and the same effect as if the evacuation apparatus is directly connected with the vacuum vessel is realized.

    摘要翻译: 微波等离子体处理装置技术领域本发明涉及利用电子回旋共振产生的高密度等离子体,在加工对象的表面上进行薄膜形成,蚀刻,溅射,等离子体氧化等处理的微波等离子体处理装置。 该装置的真空容器用微波导流器传输的微波用于将供给真空容器的气体转化为等离子体,用于放置在真空容器中的处理物体的等离子体处理,使得 真空容器的内部空间延伸超过磁场产生线圈的外周,并且容器的延伸部分设置有气体出口,用于与排气装置连接以将真空容器的内部抽空至期望的真空度。 因此,即使在将大量的反应气体供给到真空容器中以处理大型加工对象的情况下也可以获得优选的排气特性,因为可以连接处理对象物的真空容器 通过空间排出装置,实现与抽真空装置直接与真空容器连接的效果相同的效果。

    Microwave plasma processing apparatus
    2.
    发明授权
    Microwave plasma processing apparatus 失效
    微波等离子体处理装置

    公开(公告)号:US5449411A

    公开(公告)日:1995-09-12

    申请号:US137974

    申请日:1993-10-19

    摘要: A microwave plasma processing apparatus is provided with a vacuum chamber, a substrate holder for mounting a substrate to be processed, a reactive gas feed port, a cleaning gas feed port, a plasma generation device for generating a processing plasma from the reactive gas and a cleaning plasma from the cleaning gas, and a high-frequency electric field application device for applying an electric field having a frequency that allows ions in the cleaning plasma to follow changes in the electric field. The high-frequency electric field application device is activated to apply the electric field to the cleaning plasma so as to remove substances that have been deposited on the surfaces of the vacuum chamber and substrate holder due to the processing of the substrate by the processing plasma, thereby cleaning up the vacuum chamber and substrate holder.

    摘要翻译: 微波等离子体处理装置设置有真空室,用于安装待处理基板的基板保持器,反应气体供给口,清洁气体供给口,用于从反应性气体产生处理等离子体的等离子体产生装置,以及 从清洁气体中清洗等离子体;以及高频电场施加装置,用于施加具有允许清洗等离子体中的离子跟随电场变化的频率的电场。 高频电场施加装置被激活以将电场施加到清洁等离子体,以便通过处理等离子体处理基板来除去沉积在真空室和基板保持器的表面上的物质, 从而清洁真空室和基板保持器。

    Oscillation frequency adjusting apparatus, oscillation frequency adjusting method, and wireless communication apparatus
    4.
    发明授权
    Oscillation frequency adjusting apparatus, oscillation frequency adjusting method, and wireless communication apparatus 有权
    振荡频率调整装置,振荡频率调整方法以及无线通信装置

    公开(公告)号:US08975973B2

    公开(公告)日:2015-03-10

    申请号:US13816288

    申请日:2012-02-09

    申请人: Junji Sato

    发明人: Junji Sato

    摘要: A voltage controlled oscillation circuit oscillates at an oscillation frequency corresponding to a control voltage. Injection locked oscillation circuits oscillate at an oscillation frequency corresponding to an output signal from the voltage controlled oscillation circuit. A mixer circuit performs a frequency conversion based on output signals from the injection locked oscillation circuits. A synchronization determiner determines the synchronous status between the injection locked oscillation circuits in accordance with an output signal from the mixer circuit. The injection locked oscillation circuits synchronize with each other at a frequency that is an integral multiple of the oscillation frequency of the voltage controlled oscillation circuit.

    摘要翻译: 压控振荡电路以对应于控制电压的振荡频率振荡。 注入锁定振荡电路以对应于来自压控振荡电路的输出信号的振荡频率振荡。 混频器电路基于来自注入锁定振荡电路的输出信号进行频率转换。 同步确定器根据来自混频器电路的输出信号确定注入锁定振荡电路之间的同步状态。 注入锁定振荡电路以与压控振荡电路的振荡频率的整数倍的频率彼此同步。

    RADIO COMMUNICATION DEVICE AND RADIO COMMUNICATION METHOD
    5.
    发明申请
    RADIO COMMUNICATION DEVICE AND RADIO COMMUNICATION METHOD 有权
    无线电通信设备和无线电通信方法

    公开(公告)号:US20120052819A1

    公开(公告)日:2012-03-01

    申请号:US13318416

    申请日:2011-02-23

    IPC分类号: H04B1/44

    摘要: It is provided a radio communication apparatus and radio communication method that, in the radio communication apparatus having a normal transmitting/receiving mode and a distortion correction mode, communicates successfully without influencing circuit characteristic in a normal transmitting/receiving mode, sends back a transmitting signal from the receiving system, extracts a distortion component due to narrowband characteristics or non-linear characteristics of a circuit, and corrects distortion in a distortion correction mode. In radio communication apparatus (100), distortion detecting section (111) extracts a distortion component using a transmitting baseband signal and a receiving baseband signal, coupling degree adjustment circuit (180) adjusts the degree of coupling between transmitting antenna (130) and receiving antenna (140), and coupling degree control section (170) switches the degree of coupling depending on a normal transmitting/receiving mode or a distortion correction mode.

    摘要翻译: 提供了一种无线电通信装置和无线电通信方法,在具有正常发送/接收模式和失真校正模式的无线电通信装置中,在正常的发送/接收模式下成功通信而不影响电路特性,发送回发送信号 从接收系统,由于电路的窄带特性或非线性特性而提取失真分量,并且在失真校正模式中校正失真。 在无线通信装置(100)中,失真检测部(111)使用发送基带信号和接收基带信号来提取失真成分,耦合度调整电路(180)调整发送天线(130)与接收天线 (140)和耦合度控制部分(170)根据正常发送/接收模式或失真校正模式切换耦合度。

    Image printing system, image printing apparatus, and image printing method
    6.
    发明授权
    Image printing system, image printing apparatus, and image printing method 有权
    图像打印系统,图像打印装置和图像打印方法

    公开(公告)号:US07969590B2

    公开(公告)日:2011-06-28

    申请号:US12268242

    申请日:2008-11-10

    CPC分类号: G06K15/02 G06K15/1859

    摘要: According to this invention, there is provided an image printing system which causes a plurality of image printing apparatuses to share and concurrently process an image printing job for outputting a plurality of prints based on image printing conditions and image information supplied from an information processing apparatus. In the image printing system of the invention, each of the image printing apparatuses interactively connected to each other has a proof/wait selection function of selecting a proof mode of outputting a single print or a wait mode of displaying image printing conditions and waiting. A master machine to which image printing conditions and image information are supplied from an information processing apparatus executes image printing operation in the proof mode or wait mode, and transfers the image printing conditions and image information to another image printing apparatus.

    摘要翻译: 根据本发明,提供了一种图像打印系统,其使得多个图像打印装置基于从信息处理装置提供的图像打印条件和图像信息共享并同时处理用于输出多个打印的图像打印作业。 在本发明的图像打印系统中,以交互方式相互连接的每个图像打印装置具有选择输出单张打印的证明模式或显示图像打印条件等待模式等待的证明/等待选择功能。 从信息处理装置向其提供图像打印条件和图像信息的主机以证明模式或等待模式执行图像打印操作,并将图像打印条件和图像信息传送到另一图像打印装置。

    INFORMATION PROCESSING APPARATUS THAT REGISTERS INFORMATION ON IMAGE PROCESSING JOB IN DATA SERVER, METHOD OF CONTROLLING THE SAME, AND STORAGE MEDIUM
    7.
    发明申请
    INFORMATION PROCESSING APPARATUS THAT REGISTERS INFORMATION ON IMAGE PROCESSING JOB IN DATA SERVER, METHOD OF CONTROLLING THE SAME, AND STORAGE MEDIUM 有权
    信息处理装置,记录数据服务器中的图像处理工作的信息,控制它们的方法和存储介质

    公开(公告)号:US20100332636A1

    公开(公告)日:2010-12-30

    申请号:US12818499

    申请日:2010-06-18

    IPC分类号: G06F15/16 G06F9/46

    摘要: An information processing apparatus which enables reduction of the capacity of a data server. An intermediate server receives audit information concerning a job executed by an MFP or PC. The intermediate server registers at least one of attribute information and content information contained in the received audit information, in the data server. A registration processing determination section of the intermediate server determines a type of the job which the received audit information concerns. The section causes a job information and content information registration section to register the attribute information and the content information contained in the received audit information in the data server, or a content information registration section to register the content information in the data server without registering the attribute information therein.

    摘要翻译: 一种能够降低数据服务器容量的信息处理装置。 中间服务器接收有关由MFP或PC执行的作业的审核信息。 中间服务器在数据服务器中注册接收到的审核信息中包含的属性信息和内容信息中的至少一个。 中间服务器的注册处理确定部分确定接收到的审计信息涉及的作业的类型。 该部分使作业信息和内容信息注册部分将数据服务器中接收到的审核信息中包含的属性信息和内容信息注册到内容信息注册部分,以便在不注册属性的情况下将内容信息注册到数据服务器中 其中的信息。

    Image forming system, image forming apparatus and program
    8.
    发明授权
    Image forming system, image forming apparatus and program 有权
    图像形成系统,图像形成装置和程序

    公开(公告)号:US07826788B2

    公开(公告)日:2010-11-02

    申请号:US12401519

    申请日:2009-03-10

    IPC分类号: G03G15/00

    摘要: Based on the image size and folding setting, a recording medium storing device is selected among a plurality of the recording medium storing devices, an image is formed on a recording medium in the selected recording medium storing device based on image information, and the recording medium on which the images is formed is folded by a folding device.

    摘要翻译: 基于图像尺寸和折叠设置,在多个记录介质存储装置中选择记录介质存储装置,基于图像信息在所选择的记录介质存储装置中的记录介质上形成图像,并且记录介质 通过折叠装置折叠形成图像的图像。

    SIGNAL MODULATOR
    9.
    发明申请
    SIGNAL MODULATOR 有权
    信号调节器

    公开(公告)号:US20100271148A1

    公开(公告)日:2010-10-28

    申请号:US12810361

    申请日:2008-12-25

    IPC分类号: H03K7/00 H03C3/00

    摘要: A signal modulator that can control transmission power if level adjustment of a continuous signal from an oscillator is executed is provided. A pulse generator of one example of a signal modulator includes an oscillator, a control signal generator, a multiplier, a filter, and a control section. The oscillator and the multiplier are active circuits formed of active elements. A continuous signal is output from the oscillator and is input to the multiplier and the multiplier intermittently operates by a control signal output from the control signal generator, whereby a pulse signal is generated and the power level is easily adjusted by a signal from the control section.

    摘要翻译: 提供了如果执行来自振荡器的连续信号的电平调整,则可以控制发送功率的信号调制器。 信号调制器的一个示例的脉冲发生器包括振荡器,控制信号发生器,乘法器,滤波器和控制部分。 振荡器和乘法器是由有源元件形成的有源电路。 从振荡器输出连续信号并输入到乘法器,并且乘法器通过从控制信号发生器输出的控制信号间歇地操作,从而产生脉冲信号,并且通过来自控制部分的信号容易地调整功率电平 。