摘要:
A method of controlling the adhesion of fine particles to an object in a solution characterized in that the adhesion of fine particles in the solution is prevented or reduced by adding into the solution a material, which is capable of controlling the zeta potential (surface potential) of the fine particles, in the amount of 10.sup.-7 to 25% by volume.
摘要:
A highly clean fluid treatment system having a small system volume is provided by using a Bernoulli holder to accomplish stable holding of a specimen in a simple configuration. A holder having a specimen hold face formed almost the same as a specimen or having a Bernoulli effect producing region and a region surrounding the Bernoulli region made of a specific combination of materials is used and fluid supply sources are connected to the holder for supplying one or more fluids containing a treatment agent of a specimen. Since a force for inhibiting a position shift occurs on the end face of the specimen 10, stable specimen holding is enabled. The space between the specimen and the holder where treatment is executed is narrow and fluid always flows from the treatment space to the outside. Therefore, the fluid treatment system of a small volume producing high treatment efficiency and minimizing the chances of recontamination of the specimen can be provided.
摘要:
At a time of cleaning a plate-like part such as a wafer or the like while rotating, for the purpose of reducing a contamination, a damage and an unevenness of process of the plate-like part which are caused by an amount of charged electricity of the plate-like part, chuck pins (chuck members) 201 which chuck the plate-like part 1 such as the wafer or the like and upper and lower cleaning plates 101 and 121 which oppose to the plate-like part 1 are constituted by a resin material containing carbon powders, and a desired potential difference is applied to a portion between the plate-like part and the cleaning plates by a voltage control unit 601 which is provided in an outer portion.
摘要:
A piezoelectric ceramics having ceramic particles, wherein said ceramic particles comprises bismuth layer compound containing at least Sr, Ln (note that Ln is a lanthanoid element), Bi, Ti and O and including MIIBi4Ti4O15 type crystal (MII is an element composed of Sr and Ln) as a main component, and an oxide of Mn as a subcomponent; and an average particle diameter by the code length measuring method is 0.8 to 4.7 μm: by which it is possible to provide piezoelectric ceramics having a large Qmax in a third harmonic mode of thickness vertical vibration in a relatively high frequency band (for example, 16 to 65 MHz), a resonator an other piezoelectric element comprising the piezoelectric ceramics as a piezoelectric substance thereof.
摘要:
Provided is a piezoelectric ceramic which achieves a high density, good temperature characteristics and a high Curie temperature, which can fully prevent (a) a decrease in Qmax (Qmax refers to a tan.theta.max when the maximum value of phase angles of third harmonic is a .theta.max), (b) a decrease in q (dynamic range of resonance frequency), (c) an increase in a fundamental wave and (d) the occurrence of a spurious mode in the vicinity of third harmonic, caused by downsizing, and which can materialize a small-sized high-performance piezoelectric element, the piezoelectric ceramic having a composition of the general formula,(Pb.sub.a-k-y-z Sr.sub.x Ln.sub.y Bi.sub.z)(Ti.sub.1-b-c Mn.sub.b Me.sub.c)O.sub.3wherein Ln is at least one element selected from the group consisting of La, Ce and Pr, Me is at least one element selected from the group consisting of Nb, Sb and Ta, and x, y, z, a, b and c represent molar ratios, the composition satisfying 0.ltoreq.x.ltoreq.0.2, 0
摘要:
A resistor material having at least chromium, silicon and oxygen, Cr.SiO.sub.2, contained in electronic integrated circuits, particularly in the case of an aluminum layer being on the material, is etched with a liquid etchant composition containing 1.92 to 2.64 mol/l of hydrochloric acid, 0.26 to 0.77 mol/l of phosphoric acid, 5 to 10 mol/l hydrofluoric acid and 3.2 to 5.4 mol/l of ammonium fluoride.
摘要:
An industrial robot provided with at least six joints and adapted to have at least six degrees of freedom, wherein rotational joints rotatable around axes extending lengthwise of the arm and bending joints swingable around perpendicular axes extending perpendicularly to the lengthwise direction of the arm, thereby enabling the position and attitude control for a wrist at the arm and the obstacle avoiding control to change height of an elbow portion at the arm so as to avoid the obstacle.
摘要:
An electroless copper plating solution comprising cupric ions, complexing agents, a reducing agent, a pH adjustor, a polyoxyethylene series surface active agent, these being conventionally used, and (i) an inorganic compound containing at least Si or Ge, or (ii) a cationic surface active agent, or (iii) an inorganic compound containing at least Si, Ge or V and a cationic surface active agent, can give plated films with excellent mechanical properties even if operated for a long period of time with excellent stability of the plating solution.
摘要:
To determine what fine structure of the surface on which antiloading agents are applied performs the function of antiloading agents sufficiently. An abrasive material having an antiloading coating on an outermost surface thereof, in which the antiloading coating contains an antiloading agent and a binding resin, the binding resin is formed into a film with cracks, and a reticulate fine structure is formed on an entire surface of the antiloading coating by the cracks.
摘要:
Piezoelectric ceramics include a bismuth layer compound containing MII, Bi, Ti, Ln and O, wherein MII represents at least one element selected from the group consisting of Sr, Ba and Ca, and Ln represents at least one element selected from the group consisting of lanthanoids. The piezoelectric ceramics include MIIBi4Ti4O15 typed crystals, and a mole ratio of Ln/(Ln+MII) is 0