摘要:
A method of manufacturing a semiconductor memory device of an embodiment includes: after forming a first interconnection layer and a memory cell layer above a semiconductor substrate, forming first lines by forming first grooves extending in first direction; forming a thin film on the side walls of the first grooves; forming a stack structure by filling an interlayer insulating film in the first grooves; forming a second interconnection layer above the stack structure; forming second lines by forming second grooves extending in second direction; removing the thin film exposed at bottom of the second grooves; and forming columnar memory cells by removing the memory cell layer exposed at bottom of the second grooves. The thin film has higher etching rate than the interlayer insulating film, and is removed prior to portions of the memory cell layer adjoining the thin film.
摘要:
A method for manufacturing a semiconductor device, comprises forming a first film above a pattern forming material, patterning the first film to form a core material pattern, forming a second film above the pattern forming material so as to cover a side surface and an upper surface of the core material pattern, forming a third film above the second film as a protective material for the second film, etching the second and third films so that side wall sections including the second film and the third film are formed on both sides of the core material pattern and the second film and the third film of an area other than the side wall sections are removed, removing the core material pattern between the side wall sections, and transferring patterns corresponding to the side wall sections on the pattern forming material by using the side wall sections as a mask.
摘要:
A method for manufacturing a semiconductor device, comprises forming a first film above a pattern forming material, patterning the first film to form a core material pattern, forming a second film above the pattern forming material so as to cover a side surface and an upper surface of the core material pattern, forming a third film above the second film as a protective material for the second film, etching the second and third films so that side wall sections including the second film and the third film are formed on both sides of the core material pattern and the second film and the third film of an area other than the side wall sections are removed, removing the core material pattern between the side wall sections, and transferring patterns corresponding to the side wall sections on the pattern forming material by using the side wall sections as a mask.
摘要:
A blank tube constituting a main frame for a two-wheeled vehicle, comprises a main tubular portion having thicker walls in the proximity of its ends subjected to the largest forces and tubular expanded portions extending from the ends of the tube for receiving a head tube and a seat tube without using separate parts such as lugs. The blank tube further comprises a gradually enlarged diameter portion adjacent to the tubular expanded portions to more improve the strength of the tube.The thicker walls, tubular expanded portions and gradually enlarged diameter portion are formed simultaneously in dies by bulging. Moreover, the dies are formed with recesses, so that the blank tube is formed with protrusions. The protrusions are formed with apertures for passing brake wires or electric wires through the tube. The main tubular portion of the blank tube is formed in a particular cross-section effectively increasing its strength by pressing by means of the dies including corresponding sectional cavities.
摘要:
A cyclonic vacuum cleaner which suppresses the flow of dust-laden airflow to the outside of a dust collection container, even if fine or comparatively light dust particles ascend together with a vortex flow. Fine dust particles mixed in the vortex flow are captured by a filter 23 of a first vent hole 21 provided at a lower end of a base 19 of a vortex flow generating member 18. If the filter 23 is clogged with such particles to some extent, yet the airflow inside a dust collection container 15 is allowed to pass through a second vent hole 22 formed on the side surface of the base 19 of the vortex flow generating member 18 into an intake hole 12. As a result, a constant amount of airflow is insured. Further, owing to a skirt portion 25 provided around the first vent hole 21, the travel of the dust particles toward the second vent hole 22 can be prevented even though the dust particles captured by the filter 23 are carried on the vortex flow toward the second vent hole 22.
摘要:
A trimmer capacitor includes anchor portions that are arranged to be stepped down from the surface of a fixed electrode and are embedded in a stator near the upper surface of the stator at the tip portions of the fixed electrode. Because the tip portion of the fixed electrode has a section that is exactly perpendicular or nearly perpendicular to the surface of the fixed electrode in the region from the surface of the fixed electrode to the anchor portions, even if the upper surface of the stator is polished in the process for forming the stator, neither the area of the fixed electrode nor the capacitance changes.
摘要:
A lighting apparatus which enables a shade to be easily attached, detached and rotated with a simple structure and an enhanced degree of freedom in design. Grooves 9,10 defining arc-shaped portions 15,16, respectively, are formed around an axis of a head 4, to which is mounted a fluorescent light bulb 7. A shade 8 which is formed with protrusions 17, 18 opposite to the grooves 9, 10 is mounted to the head 4 so as to cover the fluorescent light bulb 7. By pressing the protrusions 17, 18 of the shade 8 into the grooves 9, 10 of the head 4, the shade 8 can be very easily mounted to the head 4. By lifting up the shade 8 from the head 4, the shade 8 can be very easily removed from the head 4. In addition, the shade 8 can be rotated by allowing the protrusions 17, 18 formed on the shade 8 to slide along the arc-shaped portions 15, 16. As such shade 8 allows a simple integral structure, degree of freedom in designing a lighting apparatus can be enhanced.
摘要:
A method of manufacturing a semiconductor device comprises preparing a working film to be processed, forming an adhesion improving region on the working film for increasing an adhesion between the working film and a mask material containing carbon, forming the mask material on the working film, forming a resist pattern on the mask material, the mask material having a higher etching resistance for the working film than the resist pattern, transferring the pattern of the resist pattern onto the mask material, and etching the working film by using the mask material as a mask.
摘要:
A switch attachment structure for an electric appliance which is simple but is able to provide good assembling efficiency. A first outer shell (2a) which constructs a part of a main body or pillar (2) of the electric appliance is provided in a bottom with an attachment frame (8). The attachment frame (8) includes a through-hole (7) for attaching a tip-over switch (3) thereto and a cutout (9) formed in a part of the attachment frame (8). The cutout (9) has a width at least as large as the thickness of a lead wire (10), thus providing the communication of the through-hole (7) with the outside of the attachment frame (8). When combining the first outer shell (2a) and a second outer shell (2b) together, the cutout (9) is filled by the second outer shell (2b). Thus, it is possible to insert the lead wire (10) from the cutout (9) into the through-hole (7) with the switch (3), the lead wire (10) and the electrical element (11) being connected together beforehand, and then to insert the switch (3) into the through-hole (7) to thereby easily and efficiently attach the switch (3) to the attachment frame (8).