公开(公告)号：US20070062802A1

公开(公告)日：2007-03-22

申请号：US11516773

申请日：2006-09-07

申请人： Katsuyuki Sekine ,  Shinji Mori ,  Takashi Shimizu

发明人： Katsuyuki Sekine ,  Shinji Mori ,  Takashi Shimizu

IPC分类号： H05F3/00 ,  C23C14/00 ,  C25B11/00 ,  C25B13/00 ,  C25B9/00

CPC分类号： H01J37/32183 ,  H01J37/32935

摘要： A system for managing a plasma processing apparatus includes an impedance matching tool for matching impedance in a transmission line feeding a high frequency wave generating a plasma into a processing chamber; a collection unit collecting time series data of an adjustment parameter of the impedance matching tool; a reference creation module creating management reference data by reference time series data of the adjustment parameter, the reference time series data collected from a reference plasma process against a reference substrate; an initialization module initializing the adjustment parameter for a target plasma process against a target substrate; a recording module recording target time series data of the adjustment parameter adjusted so as to minimize a reflection wave of the high frequency wave in the target plasma process; and a determination module determining an abnormality of the target plasma process by comparing the target time series data with the management reference data.

摘要翻译： 用于管理等离子体处理装置的系统包括阻抗匹配工具，用于将产生等离子体的高频波馈送到处理室的传输线中的阻抗匹配; 收集单元，收集阻抗匹配工具的调整参数的时间序列数据; 参考创建模块，通过调整参数的参考时间序列数据创建管理参考数据，从参考等离子体处理相对于参考基板收集的参考时间序列数据; 初始化模块将目标等离子体处理的调整参数初始化为目标衬底; 记录模块记录调整参数的目标时间序列数据，以便在目标等离子体处理中使高频波的反射波最小化; 以及确定模块，通过将目标时间序列数据与管理参考数据进行比较来确定目标等离子体处理的异常。

公开(公告)号：US20070026149A1

公开(公告)日：2007-02-01

申请号：US11494735

申请日：2006-07-28

申请人： Takashi Shimizu ,  Kazuo Saki ,  Kazuhiro Nishiki ,  Akihito Yamamoto ,  Shinji Mori

发明人： Takashi Shimizu ,  Kazuo Saki ,  Kazuhiro Nishiki ,  Akihito Yamamoto ,  Shinji Mori

IPC分类号： C23C16/00

CPC分类号： H01L21/31662 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/02337 ,  H01L21/3144 ,  H01L22/20

摘要： In a process of annealing an insulating film such as a silicon oxide film (SiO2) or a silicon oxynitride film (SiON) provided in a processing chamber 6 within an atmosphere of an inert gas 2 guided from a first mass flow controller 3 via a gas inlet 7, an amount of SiO sublimated from the surface of the insulating film in the processing chamber 6 is measured by a mass spectrometer 10, and an amount of oxygen gas 4 guided to the processing chamber 6 from a second mass flow controller 5 is controlled by a controller 1 so that the SiO concentration does not exceed a predetermined level, thereby effectively controlling the SiO sublimation. As a result, the film deterioration caused by the SiO sublimation is prevented and an insulating film having a high reliability and good characteristics can be formed in a controllable manner.

摘要翻译： 在将惰性气体2的气氛2中引导的处理室6中设置的氧化硅膜（SiO 2/2）或氧氮化硅膜（SiON）等绝缘膜退火的工序中， 通过气体入口7的第一质量流量控制器3，通过质谱仪10测量从处理室6中的绝缘膜的表面升华的SiO的量，并且从处理室6中引导到处理室6的量的氧气 第二质量流量控制器5由控制器1控制，使得SiO浓度不超过预定水平，从而有效地控制SiO升华。 结果，防止了由SiO升华引起的膜劣化，并且可以以可控的方式形成具有高可靠性和良好特性的绝缘膜。

公开(公告)号：US20050202686A1

公开(公告)日：2005-09-15

申请号：US10884987

申请日：2004-07-07

申请人： Kazuo Saki ,  Shinji Mori ,  Takashi Shimizu

发明人： Kazuo Saki ,  Shinji Mori ,  Takashi Shimizu

IPC分类号： H01L21/76 ,  H01L21/302 ,  H01L21/31 ,  H01L21/318 ,  H01L21/3205 ,  H01L21/322 ,  H01L21/336 ,  H01L29/78

CPC分类号： H01L29/78 ,  H01L21/0214 ,  H01L21/02164 ,  H01L21/02332 ,  H01L21/02337 ,  H01L21/2254 ,  H01L21/28176 ,  H01L21/3105 ,  H01L21/823418 ,  H01L21/823462 ,  H01L21/823481

摘要： A method of manufacturing a semiconductor device according to an embodiment of the present invention comprises forming a semiconductor element on a semiconductor substrate, forming a silicon oxide film containing nitrogen on the semiconductor element and injecting heavy hydrogen into the silicon oxide film containing nitrogen.

摘要翻译： 根据本发明实施例的制造半导体器件的方法包括在半导体衬底上形成半导体元件，在半导体元件上形成含有氮的氧化硅膜，并将重氢注入到含氮的氧化硅膜中。

公开(公告)号：US09174368B2

公开(公告)日：2015-11-03

申请号：US12725581

申请日：2010-03-17

申请人： Toshiyuki Iida ,  Takahiro Nakai ,  Takashi Shimizu ,  Tsutomu Hani

发明人： Toshiyuki Iida ,  Takahiro Nakai ,  Takashi Shimizu ,  Tsutomu Hani

IPC分类号： C09K19/00 ,  B29C41/28 ,  B29C55/04 ,  C09D163/10 ,  G02B5/30 ,  G02F1/13363 ,  B29C35/08 ,  B29K33/00 ,  B29K63/00

CPC分类号： B29C41/28 ,  B29C35/0805 ,  B29C55/04 ,  B29C2035/0827 ,  B29K2033/08 ,  B29K2063/00 ,  B29K2995/0034 ,  C09D163/10 ,  G02B5/3083 ,  G02F1/13363 ,  Y10T428/1036

摘要： The retardation film of the present invention contains at least one of an epoxy resin cured product and an epoxy (meth)acrylate resin cured product. In the retardation film of the present invention, in-plane birefringence index thereof at a wavelength of 590 nm is preferably 0.001 or more and a birefringence index in a thickness direction thereof at a wavelength of 590 nm is preferably 0.001 or more.

摘要翻译： 本发明的延迟膜含有环氧树脂固化物和环氧（甲基）丙烯酸酯树脂固化物中的至少一种。 在本发明的相位差膜中，波长590nm的面内双折射率优选为0.001以上，波长590nm的双折射率优选为0.001以上。

公开(公告)号：US09141084B2

公开(公告)日：2015-09-22

申请号：US14141863

申请日：2013-12-27

申请人： Takashi Shimizu

发明人： Takashi Shimizu

IPC分类号： G03G15/00 ,  G03G21/18

CPC分类号： G03G21/1839 ,  G03G21/1817 ,  G03G21/1875 ,  G03G21/1896 ,  G03G2221/1892

摘要： A cartridge mountable in an image forming apparatus includes a first unit that stores developer and a second unit that accommodates the first unit. The first unit includes a first detected part configured to be displaced irreversibly from a first-unit new-product position to a first-unit used position upon receipt of a driving force from the image forming apparatus, the first detected part contacting a detector provided in the image forming apparatus while being displaced from the first-unit new-product position to the first-unit used position to be detected by the detector. The second unit includes a second detected part configured to be displaced irreversibly from a second-unit new-product position to a second-unit used position upon receipt of a driving force from the image forming apparatus, the second detected part contacting the detector while being displaced from the second-unit new-product position to the second-unit used position to be detected by the detector.

摘要翻译： 可安装在图像形成装置中的盒式存储器包括存储显影剂的第一单元和容纳第一单元的第二单元。 第一单元包括第一检测部件，其被配置为在接收到来自图像形成装置的驱动力时从第一单元新产品位置不可逆地移位到第一单元使用位置，第一检测部件接触设置在 图像形成装置从第一单元新产品位置移动到由检测器检测的第一单元使用位置。 第二单元包括被接收来自图像形成装置的驱动力而不可逆地从第二单元新产品位置移动到第二单元使用位置的第二检测部件，第二检测部件与第二检测部件接触检测器，同时 从第二单元新产品位置移动到由检测器检测到的第二单元使用位置。

公开(公告)号：US08768212B2

公开(公告)日：2014-07-01

申请号：US13305926

申请日：2011-11-29

申请人： Junichi Hashimoto ,  Takashi Shimizu

发明人： Junichi Hashimoto ,  Takashi Shimizu

IPC分类号： G03G15/04 ,  G03G15/08

CPC分类号： G03G15/0813 ,  G03G21/1821 ,  G03G2215/0636

摘要： A process unit includes an image bearing member, a first frame, a developing unit, a pressing assembly, and a pressing-force adjusting assembly. The first frame supports the image bearing member. The developing unit includes a developing roller and a second frame supporting the developing roller. The pressing assembly generates a first pressing force acting on the developing unit such that the developing roller is in pressure contact with the image bearing member. The pressing-force adjusting assembly contacts one of the first frame and the developing unit and generates a second pressing force acting on the developing unit against the first pressing force. The second pressing force is smaller than the first pressing force.

摘要翻译： 处理单元包括图像承载部件，第一框架，显影单元，按压组件和按压力调节组件。 第一框架支撑图像承载构件。 显影单元包括显影辊和支撑显影辊的第二框架。 按压组件产生作用在显影单元上的第一按压力，使得显影辊与图像承载部件压力接触。 按压力调节组件接触第一框架和显影单元中的一个，并产生抵抗第一按压力作用在显影单元上的第二按压力。 第二按压力小于第一按压力。

公开(公告)号：US20140135158A1

公开(公告)日：2014-05-15

申请号：US14131728

申请日：2011-07-11

申请人： Naoki Tamura ,  Takashi Shimizu

发明人： Naoki Tamura ,  Takashi Shimizu

IPC分类号： F16H57/03

CPC分类号： F16H57/03 ,  F16H9/18 ,  F16H57/028 ,  F16H57/035

摘要： A power transmission system for a vehicle includes a bowl-shaped peripheral wall for housing a power transmission member and a structure is provided to inhibit a circular standing wave mode that is generated in the bowl-shaped peripheral wall during power transmission. A resonance frequency [f] is increased in a surface of a bowl-shaped peripheral wall that is provided with a rib while the resonance frequency [f] is reduced in a surface of the bowl-shaped peripheral wall that is provided with a mass. It is possible to inhibit excitation of the circular standing wave mode generated in the bowl-shaped peripheral wall by changing the resonance frequency [f] between a peripheral wall surface of the housing that is provided with the rib and a peripheral wall surface thereof that is provided with the mass.

摘要翻译： 一种用于车辆的动力传递系统包括用于容纳动力传递构件的碗状周壁，并且设置用于抑制在动力传递期间在碗状周壁中产生的圆形驻波模式的结构。 在设置有肋的碗状周壁的表面中，在设置有质量的碗状周壁的表面中的共振频率[f]减小时，共振频率[f]增加。 可以通过改变设置有肋的壳体的周壁面与其周壁面之间的共振频率[f]来抑制在碗形周壁中产生的圆形驻波模式的激发， 提供与群众。

公开(公告)号：US08659560B2

公开(公告)日：2014-02-25

申请号：US12892600

申请日：2010-09-28

申请人： Yasunari Nagata ,  Takashi Shimizu ,  Natsuko Yamagata ,  Akinori Satou ,  Takashi Minami ,  Yoshio Miyazaki

发明人： Yasunari Nagata ,  Takashi Shimizu ,  Natsuko Yamagata ,  Akinori Satou ,  Takashi Minami ,  Yoshio Miyazaki

IPC分类号： G06F3/041

CPC分类号： G06F3/044 ,  G06F2203/04111

摘要： An input device includes a substrate including a first principal surface and a second principal surface opposite the first principal surface; a plurality of first detecting electrodes disposed on the second principal surface of the substrate; a plurality of second detecting electrodes disposed on the second principal surface of the substrate; at least one first connecting electrode disposed on the second principal surface of the substrate, the first connecting electrode being configured to connect adjacent first detecting electrodes to each other; at least one second connecting electrode including an intersection that is spaced from the second principal surface of the substrate and crosses the first connecting electrode, the second connecting electrode being configured to connect adjacent second detecting electrodes to each other; and a light diffusing member disposed at least in an area corresponding to the intersection.

摘要翻译： 输入装置包括：基板，包括第一主表面和与第一主表面相对的第二主表面; 设置在所述基板的所述第二主面上的多个第一检测电极; 多个第二检测电极，设置在基板的第二主表面上; 至少一个第一连接电极，设置在所述基板的第二主表面上，所述第一连接电极被配置为将相邻的第一检测电极彼此连接; 至少一个第二连接电极，包括与所述基板的所述第二主表面间隔开并与所述第一连接电极相交的交点，所述第二连接电极被配置为将相邻的第二检测电极彼此连接; 以及至少设置在与交叉点对应的区域中的光漫射构件。

公开(公告)号：US08457506B2

公开(公告)日：2013-06-04

申请号：US13010430

申请日：2011-01-20

申请人： Koji Abe ,  Takashi Shimizu ,  Haruyo Endo ,  Yoshiki Mori ,  Jun Hatta ,  Shinji Ogawa ,  Mitsuyoshi Matsuda

发明人： Koji Abe ,  Takashi Shimizu ,  Haruyo Endo ,  Yoshiki Mori ,  Jun Hatta ,  Shinji Ogawa ,  Mitsuyoshi Matsuda

IPC分类号： G03G15/04

CPC分类号： G03G21/0005 ,  G03G2221/0042

摘要： An image-forming device includes a main casing, a drum unit, an image-forming unit, and a transfer unit. The drum unit is detachable from the main casing and includes a photosensitive drum having a rotational axis extending in an axis direction. The drum unit is formed with a plurality of symbols juxtaposed along the axis direction. The image-forming unit forms an image on the photosensitive drum in an image-forming mode. The transfer unit transfers the first developer image onto the photosensitive drum onto a sheet. The image-forming unit forms a first developer image on the photosensitive drum in a maintenance mode. The first developer image transferred onto the sheet divides the sheet into a plurality of regions along the axis direction, the plurality of regions corresponding to the plurality of symbols, respectively.

摘要翻译： 图像形成装置包括主壳体，鼓单元，图像形成单元和转印单元。 鼓单元可从主壳体拆卸并且包括具有沿轴向延伸的旋转轴线的感光鼓。 鼓单元形成有沿着轴线方向并置的多个符号。 图像形成单元以图像形成模式在感光鼓上形成图像。 转印单元将第一显影剂图像转印到感光鼓上。 图像形成单元在维护模式下在感光鼓上形成第一显影剂图像。 转印到纸张上的第一显影剂图像将纸张沿着轴线方向分成与多个符号相对应的多个区域的多个区域。

公开(公告)号：US08454333B2

公开(公告)日：2013-06-04

申请号：US12680288

申请日：2008-09-26

申请人： Takazou Sotojima ,  Yoshitaka Shibamoto ,  Takashi Shimizu

发明人： Takazou Sotojima ,  Yoshitaka Shibamoto ,  Takashi Shimizu

IPC分类号： F03C2/00 ,  F04C18/00 ,  F04C2/00

CPC分类号： F04C18/32 ,  F01C21/0818 ,  F04C18/0276 ,  F04C18/045 ,  F04C18/356 ,  F04C23/001 ,  F04C23/008

摘要： A rotary fluid machine includes a cylinder with an annular cylinder chamber, an annular piston and a blade. The annular piston is disposed in the cylinder chamber so as to be eccentric to the cylinder. The annular piston divides the cylinder chamber into an outer cylinder chamber and an inner cylinder chamber. The blade is arranged in the cylinder chambers to divide each of the outer and inner cylinder chambers into a high-pressure chamber and a low-pressure chamber. The cylinder and the piston are arranged to eccentrically move relative to each other. A height of the outer cylinder chamber is different from a height of the inner cylinder chamber as measured in a direction of a rotational axis of the rotary fluid machine.

摘要翻译： 旋转流体机械包括具有环形气缸室的气缸，环形活塞和叶片。 环形活塞设置在气缸室中，以便与气缸偏心。 环形活塞将气缸室分为外汽缸室和内汽缸室。 叶片布置在气缸室中以将每个外缸室和内汽缸室分成高压室和低压室。 气缸和活塞被布置为相对于彼此偏心移动。 外缸室的高度不同于沿着旋转流体机械的旋转轴线的方向测量的内筒室的高度。