Liquid composition for forming ferroelectric thin film and process for producing ferroelectric thin film
    1.
    发明申请
    Liquid composition for forming ferroelectric thin film and process for producing ferroelectric thin film 审中-公开
    用于形成铁电薄膜的液体组合物和用于制备铁电薄膜的方法

    公开(公告)号:US20060124890A1

    公开(公告)日:2006-06-15

    申请号:US11340548

    申请日:2006-01-27

    IPC分类号: H01L41/18

    摘要: The present invention provides a liquid composition for forming a thin film, with which a ferroelectric thin film having excellent characteristics can be prepared even by baking at a low temperature, and a process for producing a ferroelectric thin film using it. A liquid composition for forming a ferroelectric thin film is used, which is characterized by comprising a liquid medium, crystalline ferroelectric oxide particles represented by the formula (Bi2O2)2+(Bim-1TimO3.5m-0.5)2− (wherein m is an integer of from 1 to 5) or (Bi2O2)2+(Am-1TimO3.5m-0.5)2− (wherein A is Bi3+ or La3+, the La3+/Bi3+ ratio is from 0.05 to 0.5, and m is an integer of from 1 to 5) and having an average primary particle diameter of at most 100 nm, dispersed in the liquid medium, and a soluble metal compound capable of forming a ferroelectric oxide by heating, dissolved in the liquid medium.

    摘要翻译: 本发明提供了一种用于形成薄膜的液体组合物,即使通过低温烘烤也可制备出具有优异特性的铁电薄膜,以及使用该薄膜制造铁电薄膜的方法。 使用用于形成铁电薄膜的液体组合物,其特征在于包括液体介质,由式(Bi 2 O 2 O 2)表示的结晶铁电氧化物颗粒, (2-m-1)Ti 3 O 3 3.5m-0.5 3)2 - / SUP >(其中m是1至5的整数)或(Bi 2 O 2 O 2)2 +(A m- 1 3 3 (其中A是Bi 3+ 或La 3+,La 3+ / Bi 3+比为0.05至0.5,m为1至 5),分散在液体介质中的平均一次粒径为100nm以下,溶解在液体介质中的能够通过加热形成铁电氧化物的可溶性金属化合物。

    Process for producing fine particles of bismuth titanate
    2.
    发明申请
    Process for producing fine particles of bismuth titanate 有权
    生产钛酸铋微粒的方法

    公开(公告)号:US20060008928A1

    公开(公告)日:2006-01-12

    申请号:US11223984

    申请日:2005-09-13

    IPC分类号: H01L21/00

    摘要: It is an object to provide fine particles of bismuth titanate having excellent dielectric characteristics, high crystallinity and a small particle diameter, and a process for their production. The object is accomplished by a process which comprises a step of obtaining a melt comprising, as represented by mol % based on oxides, from 23 to 72% of Bi2O3, from 4 to 64% of TiO2 and from 6 to 50% of B2O3, a step of quickly quenching this melt to obtain an amorphous material, a step of crystallization of bismuth titanate crystals from the above amorphous material, and a step of separating the bismuth titanate crystals from the obtained crystallized material, in this order.

    摘要翻译: 本发明的目的是提供具有优异的介电特性,高结晶度和小粒径的钛酸铋微粒及其生产方法。 该目的通过一种方法来实现,该方法包括获得熔体的步骤,其包含以氧化物计的摩尔%表示的23%至72%的Bi 2 O 3 ,4〜64%的TiO 2和6〜50%的B 2 O 3 3,将该熔体迅速骤冷至 获得无定形材料,从上述无定形材料中结晶钛酸铋晶体的步骤,以及从获得的结晶材料中依次分离钛酸铋晶体的步骤。

    Liquid composition for forming ferroelectric thin film and process for producing ferroelectric thin film
    3.
    发明申请
    Liquid composition for forming ferroelectric thin film and process for producing ferroelectric thin film 失效
    用于形成铁电薄膜的液体组合物和用于制备铁电薄膜的方法

    公开(公告)号:US20060046320A1

    公开(公告)日:2006-03-02

    申请号:US11260209

    申请日:2005-10-28

    IPC分类号: H01L21/00

    摘要: It is an object to provide a liquid composition for forming a thin film, with which a ferroelectric thin film having excellent characteristics can be prepared even by baking at a low temperature, and a process for producing a ferroelectric thin film using it. The above object is achieved by use of a liquid composition for forming a ferroelectric thin film, characterized in that in a liquid medium, ferroelectric oxide particles being plate or needle crystals, which are represented by the formula ABO3 (wherein A is at least one member selected from the group consisting of Ba2+, Sr2+, Ca2+, Pb2+, La2+, K+ and Na+, and B is at least one member selected from the group consisting of Ti4+, Zr4+, Nb5+, Ta5+ and Fe3+) and have a Perovskite structure and which have an average primary particle size of at most 100 nm and an aspect ratio of at least 2, are dispersed, and a soluble metal compound which forms a ferroelectric oxide by heating, is dissolved.

    摘要翻译: 本发明的目的是提供一种用于形成薄膜的液体组合物,即使通过低温烘烤也可制备出具有优异特性的铁电薄膜,以及使用该薄膜制造铁电薄膜的工艺。 上述目的通过使用用于形成铁电薄膜的液体组合物来实现,其特征在于,在液体介质中,由式ABO 3 3表示的板状或针状晶体的铁电氧化物颗粒 (其中A是选自Ba 2+,Sr 2+,Ca 2+,Pb 2+中的至少一种。 > 2 + ,La 2+,K + +和Na + +,B是选自以下的至少一种: 由Ti 4+,Zr 4+,Nb 5+,Ta 5+和Fe 4+组成, 3 +),并且具有钙钛矿结构,其平均初级粒径为至多100nm,纵横比为2以上,通过加热形成铁电氧化物的可溶性金属化合物, 溶解

    Composition for forming dielectric layer, MIM capacitor and process for its production
    4.
    发明申请
    Composition for forming dielectric layer, MIM capacitor and process for its production 失效
    用于形成介电层的组合物,MIM电容器及其制造方法

    公开(公告)号:US20060001069A1

    公开(公告)日:2006-01-05

    申请号:US11150231

    申请日:2005-06-13

    IPC分类号: H01L21/8242 H01L27/108

    摘要: To provide a composition for forming a dielectric layer excellent in dielectric constant and withstand voltage properties, a MIM capacitor and a process for its production. A composition for forming a dielectric layer, which comprises fine particles of perovskite type dielectric crystal, glass frit, and a hydrolysable silicon compound or its oligomer, and a MIM capacitor comprising a substrate, and a bottom electrode layer, a dielectric layer having a structure such that fine particles of perovskite type dielectric crystal are dispersed in a silicon oxide matrix containing glass-forming ions and a top electrode, formed on the substrate in this order.

    摘要翻译: 为了提供用于形成介电常数和耐电压性能优异的介电层的组合物,MIM电容器及其制造方法。 一种用于形成电介质层的组合物,其包含钙钛矿型电介质晶体的微细颗粒,玻璃料和可水解硅化合物或其低聚物,以及包含基底的MIM电容器和底部电极层,具有结构 使得细小颗粒的钙钛矿型电介质晶体分散在含有玻璃形成离子的氧化硅基体和顶部电极中,所述氧化硅基体依次形成在基板上。

    Process for producing fine particles of bismuth titanate
    5.
    发明授权
    Process for producing fine particles of bismuth titanate 有权
    生产钛酸铋微粒的方法

    公开(公告)号:US07300806B2

    公开(公告)日:2007-11-27

    申请号:US11223984

    申请日:2005-09-13

    IPC分类号: H01L21/00

    摘要: It is an object to provide fine particles of bismuth titanate having excellent dielectric characteristics, high crystallinity and a small particle diameter, and a process for their production. The object is accomplished by a process which comprises a step of obtaining a melt comprising, as represented by mol % based on oxides, from 23 to 72% of Bi2O3, from 4 to 64% of TiO2 and from 6 to 50% of B2O3, a step of quickly quenching this melt to obtain an amorphous material, a step of crystallization of bismuth titanate crystals from the above amorphous material, and a step of separating the bismuth titanate crystals from the obtained crystallized material, in this order.

    摘要翻译: 本发明的目的是提供具有优异的介电特性,高结晶度和小粒径的钛酸铋微粒及其生产方法。 该目的通过一种方法来实现,该方法包括获得熔体的步骤,其包含以氧化物计的摩尔%表示的23%至72%的Bi 2 O 3 ,4〜64%的TiO 2和6〜50%的B 2 O 3 3,将该熔体迅速骤冷至 获得无定形材料,从上述无定形材料中结晶钛酸铋晶体的步骤,以及从获得的结晶材料中依次分离钛酸铋晶体的步骤。

    Liquid composition for forming ferroelectric thin film and process for producing ferroelectric thin film
    7.
    发明授权
    Liquid composition for forming ferroelectric thin film and process for producing ferroelectric thin film 失效
    用于形成铁电薄膜的液体组合物和用于制备铁电薄膜的方法

    公开(公告)号:US07208324B2

    公开(公告)日:2007-04-24

    申请号:US11260209

    申请日:2005-10-28

    IPC分类号: H01L21/00 C01G49/00

    摘要: It is an object to provide a liquid composition for forming a thin film, with which a ferroelectric thin film having excellent characteristics can be prepared even by baking at a low temperature, and a process for producing a ferroelectric thin film using it. The above object is achieved by use of a liquid composition for forming a ferroelectric thin film, characterized in that in a liquid medium, ferroelectric oxide particles being plate or needle crystals, which are represented by the formula ABO3 (wherein A is at least one member selected from the group consisting of Ba2+, Sr2+, Ca2+, Pb2+, La3+, K+ and Na+, and B is at least one member selected from the group consisting of Ti4+, Zr4+, Nb5+, Ta5+ and Fe3+) and have a Perovskite structure and which have an average primary particle size of at most 100 nm and an aspect ratio of at least 2, are dispersed, and a soluble metal compound which forms a ferroelectric oxide by heating, is dissolved.

    摘要翻译: 本发明的目的是提供一种用于形成薄膜的液体组合物,即使通过低温烘烤也可制备出具有优异特性的铁电薄膜,以及使用该薄膜制造铁电薄膜的工艺。 上述目的通过使用用于形成铁电薄膜的液体组合物来实现,其特征在于,在液体介质中,由式ABO 3表示的铁电氧化物颗粒为平板或针状晶体(其中A为至少一个成员 选自Ba 2+,Sr 2+,Ca 2+,Pb 2+,Pb 2+, La 3+,K +和/或Na +,B是至少一种选自Ti 4+ Zr 4+,Nb 5+,Ta 5+和Fe 3+)和 具有平均一次粒径为100nm以上,长径比为2以上的钙钛矿结构,并且通过加热溶解形成铁电氧化物的可溶性金属化合物。

    PROCESS FOR PRODUCING CEO2 FINE PARTICLES AND POLISHING SLURRY CONTAINING SUCH FINE PARTICLES
    8.
    发明申请
    PROCESS FOR PRODUCING CEO2 FINE PARTICLES AND POLISHING SLURRY CONTAINING SUCH FINE PARTICLES 失效
    生产含有这种细颗粒的CEO2微粒和抛光浆的方法

    公开(公告)号:US20070204519A1

    公开(公告)日:2007-09-06

    申请号:US11745024

    申请日:2007-05-07

    IPC分类号: B24D3/02 C01F17/00

    摘要: To provide a process for producing CeO2 fine particles having high crystallinity, being excellent in uniformity of composition and particle size and having a small particle size, and a polishing slurry containing such fine particles. A process for producing CeO2 fine particles, which comprises a step of obtaining a melt containing, as represented by mol % based on oxides, from 5 to 50% of CeO2, from 10 to 50% of RO (wherein R is at least one member selected from the group consisting of Mg, Ca, Sr and Ba) and from 30 to 75% of B2O3, a step of quenching the melt to obtain an amorphous material, a step of precipitating CeO2 crystals from the amorphous material, and a step of separating the CeO2 crystals from the obtained crystallized product, in this order. A polishing slurry containing from 0.1 to 20 mass % of such fine particles.

    摘要翻译: 为了提供一种制备具有高结晶度的CeO 2 细小颗粒的方法,组合物的均匀性和粒径均匀性以及粒径小的抛光浆料和含有这种细颗粒的研磨浆料。 一种制备CeO 2 细颗粒的方法,其包括以下步骤:获得含有以氧化物的摩尔%表示的含有5至50%CeO 2的熔体的熔体, ,RO为10〜50%(其中R为选自Mg,Ca,Sr和Ba中的至少1种)和30〜75%的B 2 O 2, 3,淬火熔体以获得无定形材料的步骤,从无定形材料中沉淀CeO 2结晶的步骤,以及分离CeO 2 / 从得到的结晶产物中按此顺序。 含有0.1〜20质量%的这种微粒的研磨浆料。

    Process for producing CeO2 fine particles and polishing slurry containing such fine particles
    10.
    发明授权
    Process for producing CeO2 fine particles and polishing slurry containing such fine particles 失效
    用于制备CeO 2微粒和含有这种细颗粒的抛光浆料的方法

    公开(公告)号:US07381232B2

    公开(公告)日:2008-06-03

    申请号:US11745024

    申请日:2007-05-07

    IPC分类号: B24D3/02 C09C1/68 C09K3/14

    摘要: To provide a process for producing CeO2 fine particles having high crystallinity, being excellent in uniformity of composition and particle size and having a small particle size, and a polishing slurry containing such fine particles.A process for producing CeO2 fine particles, which comprises a step of obtaining a melt containing, as represented by mol % based on oxides, from 5 to 50% of CeO2, from 10 to 50% of RO (wherein R is at least one member selected from the group consisting of Mg, Ca, Sr and Ba) and from 30 to 75% of B2O3, a step of quenching the melt to obtain an amorphous material, a step of precipitating CeO2 crystals from the amorphous material, and a step of separating the CeO2 crystals from the obtained crystallized product, in this order. A polishing slurry containing from 0.1 to 20 mass % of such fine particles.

    摘要翻译: 为了提供一种制备具有高结晶度的CeO 2 细小颗粒的方法,组合物的均匀性和粒径均匀性以及粒径小的抛光浆料和含有这种细颗粒的研磨浆料。 一种制备CeO 2 细颗粒的方法,其包括以下步骤:获得含有以氧化物的摩尔%表示的含有5至50%CeO 2的熔体的熔体, ,RO为10〜50%(其中R为选自Mg,Ca,Sr和Ba中的至少1种)和30〜75%的B 2 O 2, 3,淬火熔体以获得无定形材料的步骤,从无定形材料中沉淀CeO 2结晶的步骤,以及分离CeO 2 / 从得到的结晶产物中按此顺序。 含有0.1〜20质量%的这种微粒的研磨浆料。