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公开(公告)号：US07193241B2
公开(公告)日：2007-03-20
申请号：US11057603
申请日：2005-02-15
CPC分类号： G01J1/429 , G01J2001/0276 , H01L31/028 , H01L31/09 , H01L31/1085 , H01L2224/45144 , H01L2224/48091 , H01L2924/10253 , H01L2924/12032 , Y02E10/547 , H01L2924/00014 , H01L2924/00
摘要： An ultraviolet sensor includes a substrate; a diamond layer, placed on the substrate, functioning as a detector; and at least one pair of surface electrodes arranged on the diamond layer. The diamond layer has a detecting region present at the surface thereof, the detecting region has at least one sub-region exposed from the surface electrodes, and the sub-region has a covering layer, made of oxide or fluoride, lying thereon. A method for manufacturing the ultraviolet sensor includes a step of forming a diamond layer, functioning as a detector, on a substrate; a step of forming at least one pair of surface electrodes on the diamond layer; and a step of forming a covering layer, made of oxide or fluoride, on at least one sub-region of a detecting region present at the surface of the diamond layer, the sub-region being exposed from the surface electrodes.
摘要翻译： 紫外线传感器包括基板; 金刚石层，放置在基板上，用作检测器; 以及布置在金刚石层上的至少一对表面电极。 金刚石层的表面存在检测区域，检测区域具有从表面电极露出的至少一个子区域，并且子区域具有由氧化物或氟化物构成的覆盖层。 紫外线传感器的制造方法包括在基板上形成用作检测器的金刚石层的工序; 在金刚石层上形成至少一对表面电极的步骤; 以及在存在于金刚石层的表面的检测区域的至少一个子区域上形成由氧化物或氟化物构成的覆盖层的步骤，该子区域从表面电极露出。
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公开(公告)号：US07067903B2
公开(公告)日：2006-06-27
申请号：US10701499
申请日：2003-11-06
申请人： Takeshi Tachibana , Kazushi Hayashi , Kenichi Inoue , Yoshihiro Yokota , Koji Kobashi , Nobuyuki Kawakami , Takashi Kobori
发明人： Takeshi Tachibana , Kazushi Hayashi , Kenichi Inoue , Yoshihiro Yokota , Koji Kobashi , Nobuyuki Kawakami , Takashi Kobori
IPC分类号： H01L29/06 , H01L23/495 , H01L23/06 , H01L23/10
CPC分类号： H01L23/3732 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： A semiconductor device and package has a heat spreader directly disposed on the reverse surface of the semiconductor device. This heat spreader includes a diamond layer or a layer containing diamond and ceramics such as silicon carbide and aluminum nitride. The heat spreader is directly formed on a substrate for the semiconductor device. In particular, the heat spreader is composed of a diamond layer and one or two metal or ceramic members, which are bonded to the diamond layer with one or two polymer adhesive layers. This diamond layer has a fiber structure across the thickness or a microcrystalline structure. Cilia are formed on a surface of the diamond layer facing the one or two metal or ceramic members.
摘要翻译： 半导体器件和封装具有直接设置在半导体器件的反面上的散热器。 该散热器包括金刚石层或含有金刚石和陶瓷的层，例如碳化硅和氮化铝。 散热器直接形成在用于半导体器件的衬底上。 特别地，散热器由金刚石层和一个或两个金属或陶瓷构件组成，其通过一个或两个聚合物粘合剂层结合到金刚石层。 该金刚石层具有穿过厚度或微晶结构的纤维结构。 在金刚石层的面向一个或两个金属或陶瓷构件的表面上形成纤毛。
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公开(公告)号：US20060001029A1
公开(公告)日：2006-01-05
申请号：US11168875
申请日：2005-06-29
IPC分类号： H01L29/15
CPC分类号： H01L31/028 , G01J1/429 , H01L31/09 , H01L31/1085 , Y02E10/547
摘要： A diamond element is mounted on an insulating base material having a thickness of not more than 3 mm provided with one pair of metal interconnects. In the diamond element, an insulating diamond layer to act as a detection layer is deposited on a substrate, and one pair of interdigitated electrodes are deposited on the surface of this insulating diamond layer. The interdegital electrodes of the diamond element are connected via wires to the metal interconnects deposited on the insulating base material. The insulating base material may transmit ultraviolet radiation to be detected. The diamond sensor is capable of stably detecting ultraviolet radiation even when the distance between a lamp and an irradiation object is short.
摘要翻译： 金刚石元件安装在具有一对金属互连件的厚度不大于3mm的绝缘基材上。 在金刚石元件中，作为检测层的绝缘金刚石层沉积在基板上，并且在绝缘金刚石层的表面上沉积一对交叉指向的电极。 金刚石元件的三角形电极通过导线连接到沉积在绝缘基材上的金属互连。 绝缘基材可以透射待检测的紫外线。 即使当灯和照射物体之间的距离短时，金刚石传感器也能够稳定地检测紫外线辐射。
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公开(公告)号：US20050127373A1
公开(公告)日：2005-06-16
申请号：US11003510
申请日：2004-12-06
IPC分类号： H01L27/12 , H01L21/336 , H01L29/16 , H01L29/78 , H01L29/786 , H01L29/15
CPC分类号： H01L29/1602 , H01L29/78
摘要： A diamond semiconductor device includes a substrate made of single crystal diamond; a first diamond layer, placed on the substrate, containing an impurity; a second diamond layer containing the impurity, the second diamond layer being placed on the substrate and spaced from the first diamond layer; and a third diamond layer which has a impurity content less than that of the first and second diamond layers, which acts as a channel region, and through which charges are transferred from the first diamond layer to the second diamond layer. The first and second diamond layers have a first and a second end portion, respectively, facing each other with a space located therebetween. The first and second end portions have slopes epitaxially formed depending on the orientation of the substrate. The third diamond layer lies over the slopes and a section of the substrate that is located under the space.
摘要翻译： 金刚石半导体器件包括由单晶金刚石制成的衬底; 第一金刚石层，放置在衬底上，含有杂质; 含有所述杂质的第二金刚石层，所述第二金刚石层被放置在所述基板上并与所述第一金刚石层间隔开; 以及第三金刚石层，其杂质含量小于作为沟道区的第一和第二金刚石层的杂质含量，并且电荷从第一金刚石层转移到第二金刚石层。 第一和第二金刚石层具有彼此面对的第一和第二端部，其间具有空间。 第一和第二端部具有取决于衬底的取向外延形成的斜面。 第三金刚石层位于斜坡上方，并且位于该空间下方的基底部分。
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公开(公告)号：US07064352B2
公开(公告)日：2006-06-20
申请号：US11003510
申请日：2004-12-06
IPC分类号： H01L31/312 , H01L21/00
CPC分类号： H01L29/1602 , H01L29/78
摘要： A diamond semiconductor device includes a substrate made of single crystal diamond; a first diamond layer, placed on the substrate, containing an impurity; a second diamond layer containing the impurity, the second diamond layer being placed on the substrate and spaced from the first diamond layer; and a third diamond layer which has a impurity content less than that of the first and second diamond layers, which acts as a channel region, and through which charges are transferred from the first diamond layer to the second diamond layer. The first and second diamond layers have a first and a second end portion, respectively, facing each other with a space located therebetween. The first and second end portions have slopes epitaxially formed depending on the orientation of the substrate. The third diamond layer lies over the slopes and a section of the substrate that is located under the space.
摘要翻译： 金刚石半导体器件包括由单晶金刚石制成的衬底; 第一金刚石层，放置在衬底上，含有杂质; 含有所述杂质的第二金刚石层，所述第二金刚石层被放置在所述基板上并与所述第一金刚石层间隔开; 以及第三金刚石层，其杂质含量小于作为沟道区的第一和第二金刚石层的杂质含量，并且电荷从第一金刚石层转移到第二金刚石层。 第一和第二金刚石层具有彼此面对的第一和第二端部，其间具有空间。 第一和第二端部具有取决于衬底的取向外延形成的斜面。 第三金刚石层位于斜坡上方，并且位于该空间下方的基底部分。
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公开(公告)号：US20050181122A1
公开(公告)日：2005-08-18
申请号：US11057603
申请日：2005-02-15
IPC分类号： H01L31/08 , G01J1/02 , G01J1/42 , H01L31/101 , C23C14/00
CPC分类号： G01J1/429 , G01J2001/0276 , H01L31/028 , H01L31/09 , H01L31/1085 , H01L2224/45144 , H01L2224/48091 , H01L2924/10253 , H01L2924/12032 , Y02E10/547 , H01L2924/00014 , H01L2924/00
摘要： An ultraviolet sensor includes a substrate; a diamond layer, placed on the substrate, functioning as a detector; and at least one pair of surface electrodes arranged on the diamond layer. The diamond layer has a detecting region present at the surface thereof, the detecting region has at least one sub-region exposed from the surface electrodes, and the sub-region has a covering layer, made of oxide or fluoride, lying thereon. A method for manufacturing the ultraviolet sensor includes a step of forming a diamond layer, functioning as a detector, on a substrate; a step of forming at least one pair of surface electrodes on the diamond layer; and a step of forming a covering layer, made of oxide or fluoride, on at least one sub-region of a detecting region present at the surface of the diamond layer, the sub-region being exposed from the surface electrodes.
摘要翻译： 紫外线传感器包括基板; 金刚石层，放置在基板上，用作检测器; 以及布置在金刚石层上的至少一对表面电极。 金刚石层的表面存在检测区域，检测区域具有从表面电极露出的至少一个子区域，并且子区域具有由氧化物或氟化物构成的覆盖层。 紫外线传感器的制造方法包括在基板上形成用作检测器的金刚石层的工序; 在金刚石层上形成至少一对表面电极的步骤; 以及在存在于金刚石层的表面的检测区域的至少一个子区域上形成由氧化物或氟化物构成的覆盖层的步骤，该子区域从表面电极露出。
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7.发明授权Highly-oriented diamond film, method for manufacturing the same, and electronic device having highly-oriented diamond film 有权高取向金刚石膜，其制造方法以及具有高取向金刚石膜的电子器件公开(公告)号：US07311977B2
公开(公告)日：2007-12-25
申请号：US11281607
申请日：2005-11-18
CPC分类号： C30B29/04 , C23C16/0272 , C23C16/274 , C23C16/277 , C23C16/279 , C30B25/105 , H01L29/045 , H01L29/1602 , Y10T428/30
摘要： A highly-oriented diamond film which has a flat surface but does not have non-oriented crystals in the surface can be provided by depositing a first diamond layer on a substrate by {111} sector growth of diamond crystals by a CVD method using a gaseous mixture of methane and hydrogen as material gas, and then depositing a second diamond layer on the first diamond layer by {100} sector growth of diamond crystals by a plasma CVD method using a gaseous mixture of methane, hydrogen, and oxygen as material gas under the conditions that the pressure of the material gas is 133 hPa or more; the material gas composition is determined such that ([C]−[O])/[CH3+H2+O2] is −0.2×10−2 or more and [O]/[C] is 1.2 or less; and the substrate temperature is between 750° C. and 1000° C.
摘要翻译： 具有平坦表面但不具有表面未取向晶体的高取向金刚石薄膜可以通过使用气相色谱法（CVD）在金刚石晶体的{111}扇形生长之后，在基底上沉积第一金刚石层来提供 甲烷和氢气的混合物作为材料气体，然后通过使用甲烷，氢气和氧气的气体混合物的等离子体CVD方法通过{100}金刚石晶体的扇形生长在第一金刚石层上沉积第二金刚石层作为原料气体 材料气体压力为133hPa以上的条件; 确定材料气体组成使得（[C] - [O]）/ [CH 3/3 + H 2 + O 2]是 -0.2×10 -2以上，[O] / [C]为1.2以下。 并且衬底温度在750℃和1000℃之间。
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公开(公告)号：US20100219350A1
公开(公告)日：2010-09-02
申请号：US12223074
申请日：2007-02-27
CPC分类号： G01T1/29 , C23C16/0254 , C23C16/274 , C23C16/277
摘要： A beam detector and a beam monitor using the same are provided, the beam detector being capable of precisely and stably detecting, for a long period of time, the position, the intensity distribution, and the change with time of radiation beams, soft x-ray beams, and the like and being manufactured at a low cost as compared to that of a conventional detection device.In a beam detector 2 for detecting the position and intensity of beams, a beam irradiation portion 6 to be irradiated with beams 7 is formed of a polycrystalline diamond (C) film 4 containing at least one element (X) selected from the group consisting of silicon (Si), nitrogen (N), lithium (Li), beryllium (Be), boron (B), phosphorus (P), sulfur (S), nickel (Ni), and vanadium (V) at an X/C of 0.1 to 1,000 ppm, and this polycrystalline diamond film 4 has a light emission function of performing light emissions 8 and 8a when it is irradiated with the beams 7. By the beam detector 2 as described above and light emission observation means 3 and 3a for observing the above light emission phenomenon, a beam monitor 1 is formed.
摘要翻译： 提供了一种使用其的光束检测器和光束监视器，该光束检测器能够长时间精确而稳定地检测位置，强度分布以及辐射束随时间的变化， 射线束等，并且与传统的检测装置相比以低成本制造。 在用于检测光束的位置和强度的光束检测器2中，用光束7照射的光束照射部分6由多晶金刚石（C）膜4形成，该多晶金刚石（C）膜4包含至少一种选自以下的元素（X）： 在X / C下，硅（Si），氮（N），锂（Li），铍（Be），硼（B），磷（P），硫（S），镍（Ni）和钒 为0.1〜1000ppm，并且该多晶金刚石膜4具有在用光束7照射时进行发光8和8a的发光功能。通过如上所述的光束检测器2和发光观察装置3和3a， 观察上述发光现象，形成光束监视器1。
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9.发明授权公开(公告)号：US07285479B2
公开(公告)日：2007-10-23
申请号：US11328162
申请日：2006-01-10
IPC分类号： H01L21/78 , H01L21/301 , H01L21/46
CPC分类号： H01L21/022 , C23C16/01 , C23C16/274 , C23C16/278 , C23C16/56 , H01L21/02115 , H01L21/02123 , H01L21/0405 , H01L21/3146 , H01L21/76256 , H01L2221/68363
摘要： A method for manufacturing a multilayered substrate for a semiconductor device, as well as a semiconductor device, is provided, the multilayered substrate exhibiting an excellent thermal conduction property and an excellent heat spreading effect without occurrence of warp and deformation. A diamond layer is formed through vapor phase deposition on one principal surface of a first silicon substrate by a CVD method. A SiO2 layer is formed on this diamond layer. A SiO2 layer is formed on a surface of a second silicon substrate by a thermal oxidation method. The diamond layer is bonded to the second silicon substrate with SiO2 layers disposed on both the diamond layer and the second silicon substrate therebetween. The first silicon substrate is removed by dissolution through etching to expose the surface of the diamond layer. A silicon layer serving as a semiconductor layer is formed on the diamond layer by a CVD method.
摘要翻译： 提供一种半导体装置用多层基板的制造方法以及半导体装置，该多层基板具有优异的导热性和优异的散热效果，而不发生翘曲变形。 通过CVD方法通过气相沉积在第一硅衬底的一个主表面上形成金刚石层。 在该金刚石层上形成SiO 2层。 通过热氧化法在第二硅衬底的表面上形成SiO 2层。 金刚石层与设置在金刚石层和第二硅衬底之间的SiO 2层结合到第二硅衬底。 通过蚀刻溶解去除第一硅衬底以暴露金刚石层的表面。 通过CVD法在金刚石层上形成用作半导体层的硅层。
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10.发明申请Highly-oriented diamond film, method for manufacturing the same, and electronic device having highly-oriented diamond film 有权高取向金刚石膜，其制造方法以及具有高取向金刚石膜的电子器件公开(公告)号：US20060112874A1
公开(公告)日：2006-06-01
申请号：US11281607
申请日：2005-11-18
CPC分类号： C30B29/04 , C23C16/0272 , C23C16/274 , C23C16/277 , C23C16/279 , C30B25/105 , H01L29/045 , H01L29/1602 , Y10T428/30
摘要： A highly-oriented diamond film which has a flat surface but does not have non-oriented crystals in the surface can be provided by depositing a first diamond layer on a substrate by {111} sector growth of diamond crystals by a CVD method using a gaseous mixture of methane and hydrogen as material gas, and then depositing a second diamond layer on the first diamond layer by {100} sector growth of diamond crystals by a plasma CVD method using a gaseous mixture of methane, hydrogen, and oxygen as material gas under the conditions that the pressure of the material gas is 133 hPa or more; the material gas composition is determined such that ([C]−[O])/[CH3+H2+O2] is −0.2×10−2 or more and [O]/[C] is 1.2 or less; and the substrate temperature is between 750° C. and 1000° C.
摘要翻译： 具有平坦表面但不具有表面未取向晶体的高取向金刚石薄膜可以通过使用气相色谱法（CVD）在金刚石晶体的{111}扇形生长之后，在基底上沉积第一金刚石层来提供 甲烷和氢气的混合物作为材料气体，然后通过使用甲烷，氢气和氧气的气体混合物的等离子体CVD方法通过{100}金刚石晶体的扇形生长在第一金刚石层上沉积第二金刚石层作为原料气体 材料气体压力为133hPa以上的条件; 确定材料气体组成使得（[C] - [O]）/ [CH 3/3 + H 2 + O 2]是 -0.2×10 -2以上，[O] / [C]为1.2以下。 并且衬底温度在750℃和1000℃之间。
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