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1.发明授权
公开(公告)号：US5506454A
公开(公告)日：1996-04-09
申请号：US059069
申请日：1993-05-10
CPC分类号： B60R21/0173 , B60R21/01 , G01P15/04 , G01P15/125 , G01P21/00 , G01R31/007 , G01P2015/0828
摘要： An apparatus for diagnosing the characteristic of an acceleration sensor and a method for diagnosis thereof are disclosed. The acceleration sensor includes a movable electrode (or mass part) displaced in accordance with an acceleration and a fixed electrode disposed opposite to the movable electrode. In a diagnosis mode, a signal for diagnosis is applied to the fixed electrode so that an electrostatic force as a force corresponding to a predetermined acceleration is generated between the fixed electrode and the movable electrode. In the case where the acceleration sensor is sound, the movable electrode or mass part is normally displaced. A failure of the acceleration sensor, the deterioration thereof in performance, a change in characteristic thereof caused from the lapse of time, or the like is self-diagnosed by detecting a change in capacitance between the movable electrode and the fixed electrode upon generation of the diagnosis signal. The force corresponding to the predetermined acceleration may be an electromagnetic force or a mechanical oscillation based on a piezoelectric element.
摘要翻译： 公开了一种用于诊断加速度传感器的特性的装置及其诊断方法。 加速度传感器包括根据加速度移位的可移动电极（或质量部分）和与可动电极相对设置的固定电极。 在诊断模式中，用于诊断的信号被施加到固定电极，使得在固定电极和可动电极之间产生作为与预定加速度相对应的力的静电力。 在加速度传感器是声音的情况下，可移动电极或质量部分通常位移。 通过检测可动电极和固定电极之间的电容变化，可以自诊断加速度传感器的故障，其性能的劣化，由于时间的流失引起的特性变化等 诊断信号。 对应于预定加速度的力可以是基于压电元件的电磁力或机械振荡。
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公开(公告)号：US5659254A
公开(公告)日：1997-08-19
申请号：US455712
申请日：1995-05-31
申请人： Masahiro Matsumoto , Seiko Suzuki , Masayuki Miki , Masayoshi Suzuki , Keiji Hanzawa , Takao Sasayama
发明人： Masahiro Matsumoto , Seiko Suzuki , Masayuki Miki , Masayoshi Suzuki , Keiji Hanzawa , Takao Sasayama
CPC分类号： G01P15/125 , G01D5/2417 , G01L9/12 , G01P21/00
摘要： A capacitance detector comprises switches for charging and discharging a sensing part, an integrator constituted by a condenser and an operational amplifier for integrating a charging current or a discharging current which is generated according to the charging and discharging the sensing part, a switch for charging an output voltage of the operational amplifier and for feedbacking an electric charge to the integrator, and a condenser. The capacitance detector can be provided by the operational amplifier having a low response performance and a small output current and no hold sample circuit, thereby a circuit scale of the capacitance type sensor can be made small.
摘要翻译： 电容检测器包括用于对感测部分进行充电和放电的开关，由电容器构成的积分器和用于对根据充电和放电感测部分产生的充电电流或放电电流进行积分的运算放大器， 运算放大器的输出电压和用于将电荷反馈到积分器，以及冷凝器。 电容检测器可以由具有低响应性能和小输出电流的运算放大器提供，并且没有保持采样电路，从而可以使电容式传感器的电路规模小。
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公开(公告)号：US09188470B2
公开(公告)日：2015-11-17
申请号：US13813094
申请日：2011-07-28
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译： 本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。 根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及 使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。 加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧 要测量的流体相对于加热电阻器的流动。
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4.发明授权公开(公告)号：US08596113B2
公开(公告)日：2013-12-03
申请号：US13360923
申请日：2012-01-30
IPC分类号： G01M15/04
CPC分类号： G01K13/02 , G01F1/00 , G01F1/68 , G01F1/6888 , G01F5/00 , G01F15/185 , G01K1/20 , G01K7/42 , G01K2013/024 , G01K2205/02
摘要： An intake air temperature sensor capable of detecting an intake air temperature highly accurately and at high speed. The intake air temperature sensor of the present invention includes: a secondary passage 7 taking in an intake airflow; a flow rate detecting element 13 disposed in the secondary passage 7; an intake air temperature detecting element 4 provided outside the secondary passage; a temperature sensor 9 detecting a temperature of a fitting section of the intake air temperature detecting element 4; a circuit board 11 disposed in a casing; and an integrated circuit 10 applying a correction process to an output of the intake air temperature detecting element 4 on the basis of signals output from the temperature sensor 9 and a flow rate detecting element 13.
摘要翻译： 能够高精度地且高速地检测进气温度的进气温度传感器。 本发明的进气温度传感器包括：进入气流的二次通路7; 设置在次通道7中的流量检测元件13; 设置在次级通道外侧的进气温度检测元件4; 检测进气温度检测元件4的嵌合部的温度的温度传感器9; 布置在壳体中的电路板11; 以及基于从温度传感器9和流量检测元件13输出的信号将校正处理应用于进气温度检测元件4的输出的集成电路10。
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公开(公告)号：US08186213B2
公开(公告)日：2012-05-29
申请号：US12708387
申请日：2010-02-18
IPC分类号： G01F1/68
摘要： The present invention provides a highly-sensitive thermal-type flow-rate sensor with enhanced reliability. Provided is a thermal-type flow-rate sensor including: a passage into which a measurement-target fluid is introduced; and a sensor element which is provided in the passage and which measures the flow rate of the measurement-target fluid. The sensor element 1 includes: a semiconductor substrate; a hollow portion formed in the semiconductor substrate; and a heating resistor formed on an electric insulating film above the hollow portion. The sensor element measures the flow rate of the measurement-target fluid by radiating heat from the heating resistor to the measurement-target fluid. When Lh is the length of the heating resistor in a direction perpendicular to a flowing direction of the measurement-target fluid and Wd is the shortest distance to an upstream-side edge of the heating resistor from an edge of the hollow portion (an outer peripheral edge of a diaphragm) in the flowing direction of the measurement-target fluid, Wd≧0.4×Lh is satisfied in a relation between Lh and Wd.
摘要翻译： 本发明提供了一种具有增强的可靠性的高灵敏度热式流量传感器。 本发明提供一种热式流量传感器，包括：导入测定对象流体的通道; 以及传感器元件，其设置在通道内并测量测量对象流体的流量。 传感器元件1包括：半导体衬底; 形成在半导体衬底中的中空部分; 以及形成在中空部分上方的电绝缘膜上的加热电阻器。 传感器元件通过从加热电阻器向测量目标流体辐射热量来测量测量目标流体的流量。 当Lh是与测量对象流体的流动方向垂直的方向上的加热电阻器的长度，Wd是从中空部分的边缘到加热电阻器的上游侧边缘的最短距离（外周边 在测量目标流体的流动方向上，隔膜的边缘）在Lh和Wd之间的关系中满足Wd≥0.4×Lh。
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6.发明授权Thermal flowmeter in which relationship among length of heat resistor, heating temperature for the heat resistor, and power supplied to the heat resistor is prescribed 有权规定热电阻器的长度，热电阻的加热温度和供给到热电阻器的功率之间的关系的热流量计公开(公告)号：US07775104B2
公开(公告)日：2010-08-17
申请号：US12020025
申请日：2008-01-25
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/688
摘要： To reduce power consumption by a thermal flowmeter while good flow-rate detection sensitivity is maintained, it is only necessary to reduce power consumption by a heat resistor under predetermined conditions. Specifically, provided that a width Wh of the heat resistor is between 100 micrometers and 400 micrometers inclusive (100≦Wh≦400), it is only necessary that a relationship among the length Lh of the heat resistor, a temperature increase ΔTh for the heat resistor, and a maximum permissible power Phmax to be supplied to the heat resistor be set so as to satisfy a formula 1.4≦ΔTh·Lh/Ph max≦2.8 in order to maintain good flow-rate detection sensitivity. Accordingly, the length of the heat resistor and the temperature increase in the heat resistor are set so that the maximum power consumption can be reduced within a range in which the formula is satisfied.
摘要翻译： 为了在保持良好的流量检测灵敏度的同时通过热式流量计降低功耗，仅需要在预定条件下降低热电阻器的功耗。 具体而言，只要热电阻器的宽度Wh为100微米至400微米（100＆lt; 1; Wh＆nlE; 400），则仅需要将热电阻器的长度Lh，温度升高＆Dgr; Th之间的关系 为了保持良好的流量检测灵敏度，要设置供热电阻器的最大允许功率Phmax以满足公式1.4＆nlE;＆Dgr; Th·Lh / Ph max＆nlE; 2.8。 因此，热电阻器的长度和热电阻器的温度上升被设定为能够在满足公式的范围内降低最大功耗。
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公开(公告)号：US07721599B2
公开(公告)日：2010-05-25
申请号：US11814308
申请日：2006-02-20
申请人： Masahiro Matsumoto , Hiroshi Nakano , Masamichi Yamada , Keiji Hanzawa , Izumi Watanabe , Keiichi Nakada , Yasuhiro Kanamaru
发明人： Masahiro Matsumoto , Hiroshi Nakano , Masamichi Yamada , Keiji Hanzawa , Izumi Watanabe , Keiichi Nakada , Yasuhiro Kanamaru
IPC分类号： G01F1/68
CPC分类号： G01F15/006 , G01F1/6845 , G01F1/692
摘要： Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a material having good thermal conductivity, such as silicon or ceramic, with a thin-walled portion (diaphragm). On the surface of the thin-walled portion, the detection element comprises a heat element as a heater heated to a temperature being different to a predetermined extent from the temperature of the air flow to be measured, temperature-detecting resistors as temperature-detecting means on both sides of the heat element, wiring portions formed of electrical conductors that draw signal lines from the heat element and the temperature-detecting resistors and that have a melting point of 2000° C. or higher, and pads.
摘要翻译： 传统的热流测量装置在恶劣环境中缺乏汽车的考虑。 根据本发明的热流测量装置的检测元件通过提供由具有良好导热性的材料（例如硅或陶瓷）制成的具有薄壁部分（隔膜）的平面基板构成。 在薄壁部分的表面上，检测元件包括作为加热器的加热元件加热到与待测量的空气流的温度不同的温度，作为温度检测装置的温度检测电阻器 在加热元件的两侧，由从导热元件和温度检测电阻器吸引信号线并且具有2000℃或更高熔点的电导体形成的布线部分和焊盘。
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公开(公告)号：US20090241660A1
公开(公告)日：2009-10-01
申请号：US12339485
申请日：2008-12-19
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/688 , G01F1/692 , G01F1/696 , G01F5/00
摘要： In the thermal type flowmeter for measuring the flow rate by a measuring element with an exothermic resistor and a temperature measuring resistor being shaped in the side of the surface of a substrate, a facing wall facing the surface of the measuring element is arranged, cantilever plate parts protruding from the facing wall toward the measuring element side are arranged, a gap is provided between the tip of the cantilever plate parts and the measuring element, and the cantilever plate parts are extended from the upper stream to the down stream of the measuring element.
摘要翻译： 在用于测量具有放热电阻器的测量元件和在基板表面侧形成的温度测量电阻器的流量的热式流量计中，布置了面向测量元件表面的面向壁，悬臂板 布置有从面向壁向测量元件侧突出的部分，在悬臂板部分的顶端和测量元件之间设置有间隙，并且悬臂板部分从测量元件的上游向下游延伸 。
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公开(公告)号：US20080016958A1
公开(公告)日：2008-01-24
申请号：US11765736
申请日：2007-06-20
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/6986
摘要： The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent a drop in the response characteristics. A detection element of the thermal type flow rate measuring apparatus includes a planar substrate made of silicon, ceramic, or the like, in which a diaphragm is formed. On the surface of the diaphragm, there are disposed a heat-generating resistor as a heat-generating element that is heated to a predetermined temperature difference from the temperature of air flow to be measured, a heat-generating element temperature-detecting resistor for detecting the temperature of the heat-generating resistor, and temperature-detecting resistors disposed on both sides of the heat-generating resistor. The detection element also includes wiring portions which have connecting terminals electrically connected to the heat-generating resistor and a wiring pattern electrically connected with the surface of the planar substrate.
摘要翻译： 热式流量测量装置的布线部分的耦合电容减小，以防止响应特性的下降。 热式流量测量装置的检测元件包括其中形成有隔膜的由硅，陶瓷等制成的平面基板。 在隔膜的表面上设置有发热电阻器作为发热元件，其被加热到与要测量的空气流的温度的预定温度差，用于检测的发热元件温度检测电阻器 发热电阻器的温度和设置在发热电阻器两侧的温度检测电阻器。 检测元件还包括具有与发热电阻器电连接的连接端子的布线部分和与平面基板的表面电连接的布线图案。
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10.发明授权Thermal type flow measurement apparatus having asymmetrical passage for flow rate measurement 有权具有用于流量测量的不对称通道的热式流量测量装置公开(公告)号：US07287424B2
公开(公告)日：2007-10-30
申请号：US11210869
申请日：2005-08-25
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/6845
摘要： IN a thermal type flow measurement apparatus, a heating element is disposed in a fluid passage and generates heat by a passage of a current through itself. A first thermal sensitive element is disposed adjacent upstream of the heating element in a direction of fluid flow to be measured. A second thermal sensitive element is disposed adjacent downstream of the heating element in the direction of fluid flow to be measured. The fluid passage is provided with the heating element, the first thermal sensitive element, and the second thermal sensitive element. The fluid passage has an asymmetric structure with respect to the direction of fluid flow.Means for measuring a difference of temperatures is sensed by the first and the second thermal sensitive elements to produce a voltage according to a fluid flow rate. Heat control means for controlling the passage of the current through the heating element so that a sum with weights of respective temperatures sensed by the first and the second thermal sensitive elements reaches a preset value.
摘要翻译： 在热式流量测量装置中，加热元件设置在流体通道中，并且通过自身通过电流而产生热量。 第一热敏元件沿着待测量的流体流动的方向设置在加热元件的上游附近。 第二热敏元件沿着待测量的流体流动的方向设置在加热元件的下游附近。 流体通道设置有加热元件，第一热敏元件和第二热敏元件。 流体通道相对于流体流动的方向具有不对称结构。 通过第一和第二热敏元件检测用于测量温度差的装置，以根据流体流速产生电压。 用于控制通过加热元件的电流的热控制装置，使得由第一和第二热敏元件感测的相应温度的重量达到预设值。
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