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179 条记录 (耗时 0.031 秒)

    Capacitance type sensor device
    1.
    发明授权
    Capacitance type sensor device 失效
    电容式传感器装置

    公开(公告)号：US5659254A

    公开(公告)日：1997-08-19

    申请号：US455712

    申请日：1995-05-31

    申请人： Masahiro Matsumoto ,  Seiko Suzuki ,  Masayuki Miki ,  Masayoshi Suzuki ,  Keiji Hanzawa ,  Takao Sasayama

    发明人： Masahiro Matsumoto ,  Seiko Suzuki ,  Masayuki Miki ,  Masayoshi Suzuki ,  Keiji Hanzawa ,  Takao Sasayama

    IPC分类号： F24F5/00 ,  G01D5/241 ,  G01L9/12 ,  G01P15/125 ,  G01P21/00 ,  G01R11/52

    CPC分类号： G01P15/125 ,  G01D5/2417 ,  G01L9/12 ,  G01P21/00

    摘要： A capacitance detector comprises switches for charging and discharging a sensing part, an integrator constituted by a condenser and an operational amplifier for integrating a charging current or a discharging current which is generated according to the charging and discharging the sensing part, a switch for charging an output voltage of the operational amplifier and for feedbacking an electric charge to the integrator, and a condenser. The capacitance detector can be provided by the operational amplifier having a low response performance and a small output current and no hold sample circuit, thereby a circuit scale of the capacitance type sensor can be made small.

    摘要翻译： 电容检测器包括用于对感测部分进行充电和放电的开关，由电容器构成的积分器和用于对根据充电和放电感测部分产生的充电电流或放电电流进行积分的运算放大器， 运算放大器的输出电压和用于将电荷反馈到积分器，以及冷凝器。 电容检测器可以由具有低响应性能和小输出电流的运算放大器提供，并且没有保持采样电路，从而可以使电容式传感器的电路规模小。

    Semiconductor acceleration sensor and vehicle control system using the same
    2.
    发明授权
    Semiconductor acceleration sensor and vehicle control system using the same 失效
    半导体加速度传感器和车辆控制系统使用相同

    公开(公告)号：US5417312A

    公开(公告)日：1995-05-23

    申请号：US147083

    申请日：1993-11-03

    申请人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Tomoyuki Tanaka ,  Masayuki Miki ,  Masahiro Matsumoto ,  Norio Ichikawa ,  Hiromichi Ebine ,  Yukiko Sugisawa ,  Kanemasa Sato ,  Sadayasu Ueno ,  Yasuhiro Asano ,  Masanori Kubota ,  Masayoshi Suzuki

    发明人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Tomoyuki Tanaka ,  Masayuki Miki ,  Masahiro Matsumoto ,  Norio Ichikawa ,  Hiromichi Ebine ,  Yukiko Sugisawa ,  Kanemasa Sato ,  Sadayasu Ueno ,  Yasuhiro Asano ,  Masanori Kubota ,  Masayoshi Suzuki

    IPC分类号： G01P1/00 ,  G01P15/125 ,  G01P15/13 ,  B60T8/58 ,  B60T8/72 ,  G01P15/08

    CPC分类号： G01P15/125 ,  G01P1/003 ,  G01P15/131 ,  G01P2015/0828

    摘要： A semiconductor acceleration sensor is formed by a cantilever having a conductive movable electrode of predetermined mass at one end, at least one pair of fixed conductive electrodes which are stationary with respect to the movable electrode located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate to which the fixed electrodes are mounted, a lower melting point material is firstly coated on the substrates. A sensor detector unit processing circuit has the output characteristic of the circuit digitally adjusted by suitable switching of a plurality of resistors, and the sensor chip and the detector unit integrated circuit may be located on a common base and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40.degree. C. or lower is, advantageously, charged into the hermetically sealed chamber.

    摘要翻译： 半导体加速度传感器由具有在一端具有预定质量的导电可移动电极的悬臂形成，相对于位于可动电极的相对侧上的可动电极固定的至少一对固定导电电极和提供的间隙 在可动电极和固定电极之间。 为了防止可动电极与被接触的固定电极熔合，在本发明的第一方面中，在可动电极和固定电极之间设置绝缘层，该层位于可动电极上或固定电极上， 第二方面，可动电极或优选固定电极由高熔点材料形成。 在这样的第二方面，为了提高高熔点材料与安装有固定电极的基板之间的粘附性，首先在基板上涂覆较低熔点的材料。 传感器检测器单元处理电路具有通过多个电阻器的合适切换数字调节的电路的输出特性，并且传感器芯片和检测器单元集成电路可以位于公共基座上并且安装在气密密封的室中以防止 影响传感器和检测器单元组件运行的不利环境影响。 露点为-40℃或更低的气体有利地被装入密封的气室中。

    System and method for diagnosing characteristics of acceleration sensor
    3.
    发明授权
    System and method for diagnosing characteristics of acceleration sensor 失效
    用于诊断加速度传感器特性的系统和方法

    公开(公告)号：US5506454A

    公开(公告)日：1996-04-09

    申请号：US059069

    申请日：1993-05-10

    申请人： Keiji Hanzawa ,  Tetsuo Matsukura ,  Hirokazu Fujita ,  Masayoshi Suzuki ,  Masahiro Matsumoto

    发明人： Keiji Hanzawa ,  Tetsuo Matsukura ,  Hirokazu Fujita ,  Masayoshi Suzuki ,  Masahiro Matsumoto

    IPC分类号： B60R21/01 ,  G01P15/04 ,  G01P15/125 ,  G01P21/00 ,  G01R31/00 ,  B60R21/08

    CPC分类号： B60R21/0173 ,  B60R21/01 ,  G01P15/04 ,  G01P15/125 ,  G01P21/00 ,  G01R31/007 ,  G01P2015/0828

    摘要： An apparatus for diagnosing the characteristic of an acceleration sensor and a method for diagnosis thereof are disclosed. The acceleration sensor includes a movable electrode (or mass part) displaced in accordance with an acceleration and a fixed electrode disposed opposite to the movable electrode. In a diagnosis mode, a signal for diagnosis is applied to the fixed electrode so that an electrostatic force as a force corresponding to a predetermined acceleration is generated between the fixed electrode and the movable electrode. In the case where the acceleration sensor is sound, the movable electrode or mass part is normally displaced. A failure of the acceleration sensor, the deterioration thereof in performance, a change in characteristic thereof caused from the lapse of time, or the like is self-diagnosed by detecting a change in capacitance between the movable electrode and the fixed electrode upon generation of the diagnosis signal. The force corresponding to the predetermined acceleration may be an electromagnetic force or a mechanical oscillation based on a piezoelectric element.

    摘要翻译： 公开了一种用于诊断加速度传感器的特性的装置及其诊断方法。 加速度传感器包括根据加速度移位的可移动电极（或质量部分）和与可动电极相对设置的固定电极。 在诊断模式中，用于诊断的信号被施加到固定电极，使得在固定电极和可动电极之间产生作为与预定加速度相对应的力的静电力。 在加速度传感器是声音的情况下，可移动电极或质量部分通常位移。 通过检测可动电极和固定电极之间的电容变化，可以自诊断加速度传感器的故障，其性能的劣化，由于时间的流失引起的特性变化等 诊断信号。 对应于预定加速度的力可以是基于压电元件的电磁力或机械振荡。

    Capacitance type accelerometer
    5.
    发明授权
    Capacitance type accelerometer 失效
    电容式加速度计

    公开(公告)号：US5392651A

    公开(公告)日：1995-02-28

    申请号：US161456

    申请日：1993-12-06

    申请人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    发明人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    IPC分类号： G01L9/00 ,  G01L9/12 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  H01L29/84 ,  H01L21/283

    CPC分类号： B81C1/00301 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  B81B2201/0235 ,  B81B2207/095 ,  B81B2207/096 ,  G01P2015/0828

    摘要： A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate formed a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are sticked to the both side of the silicon plate except the movable electrode and leading wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates respectively deriving. These capacitance type accelerometers are made by processing and cutting a wafer by dicing saw without coming into the accelerometer of cutting chips or cutting water.

    摘要翻译： 一种电容式加速度计，其具有形成根据加速度移动的可动电极的第一硅板，分隔设置在第一硅板两侧的两个第二硅板和分别设置的热氧化膜 在除了可移动电极之外的第一硅板和两个第二硅板之间的第一硅板之间，并将除可移动电极之外的第一硅板和两个第二硅板粘合在一起。 此外，电容型加速度计具有形成有根据加速度移动的可移动电极的硅板，分别在其上分别安装与硅板相对的导电层的玻璃板，并且粘附到两者上 除了可移动电极之外的硅板的侧面以及分别通过形成在硅板和玻璃板之间的槽分别连接到导电层的导线。 这些电容式加速度计是通过切割锯切割晶片而不进入切割芯片或切割水的加速度计来制造的。

    Capacitive type semiconductor accelerometer
    6.
    发明授权
    Capacitive type semiconductor accelerometer 失效
    电容式半导体加速度计

    公开(公告)号：US5243861A

    公开(公告)日：1993-09-14

    申请号：US755838

    申请日：1991-09-06

    申请人： Benjamin Kloeck ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto ,  Kazuo Sato ,  Akira Koide ,  Norio Ichikawa ,  Yukiko Kawai ,  Hiromichi Ebine

    发明人： Benjamin Kloeck ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto ,  Kazuo Sato ,  Akira Koide ,  Norio Ichikawa ,  Yukiko Kawai ,  Hiromichi Ebine

    IPC分类号： B81B3/00 ,  B81B7/00 ,  G01P15/08 ,  G01P15/125

    CPC分类号： B81B7/007 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828 ,  H01L2224/45144 ,  H01L2224/48463

    摘要： A capacitive type semiconductor accelerometer has an intermediate silicon plate of n type conductivity including a movable electrode constituting a pendulum mass formed within the intermediate silicon plate and supported thereby via a beam so as to permit movement in a direction perpendicular to its plane. A first conductive island is formed within the intermediate plate and is immovably supported thereby via a first insulating leg so as to be isolated therefrom, and an upper glass plate is anodic bonded to the intermediate silicon plate. A first stationary electrode is formed on the upper glass plate at the position facing one face of the movable electrode with a predetermined gap. A lower glass plate is anodic bonded to the intermediate silicon plate and a second stationary electrode is formed on the lower glass plate at the position facing the other face of the movable electrode with a predetermined gap. First, second and third pads are disposed in common on the lower glass plate at the outside of the intermediate silicon plate, the first pad being electrically connected to the first stationary electrode via a first thin film lead formed on the lower glass plate and the first conductive island, the second pad being electrically connected to the movable electrode via a second thin film lead formed on the lower glass plate and the intermediate silicon plate and the third pad being electrically connected to the second stationary electrode via a third thin film lead formed on the lower glass plate.

    摘要翻译： 电容式半导体加速度计具有n型导电性的中间硅板，其包括形成在中间硅板内的摆锤块的可动电极，并通过光束被支撑，以允许沿垂直于其平面的方向移动。 第一导电岛形成在中间板内，并通过第一绝缘腿不可移动地支撑，以便与之隔离，并且上玻璃板阳极接合到中间硅板。 第一固定电极形成在上玻璃板上，以与预定间隙相对的可移动电极的一个面的位置。 下玻璃板阳极接合到中间硅板上，并且在与可移动电极的另一面相对的位置处以预定间隙形成在下玻璃板上的第二固定电极。 首先，第二和第三焊盘共同设置在中间硅板的外侧的下玻璃板上，第一焊盘通过形成在下玻璃板上的第一薄膜引线和第一焊盘电连接到第一固定电极 所述第二焊盘通过形成在所述下玻璃板上的第二薄膜引线电连接到所述可动电极，并且所述中间硅板和所述第三焊盘通过形成在所述导电岛上的第三薄膜引线电连接到所述第二固定电极， 下玻璃板。

    Capacitance type accelerometer
    10.
    发明授权
    Capacitance type accelerometer 失效
    电容式加速度计

    公开(公告)号：US5559290A

    公开(公告)日：1996-09-24

    申请号：US457491

    申请日：1995-06-01

    申请人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    发明人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    IPC分类号： G01L9/00 ,  G01L9/12 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  H01L29/84 ,  H01L21/283

    CPC分类号： B81C1/00301 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  B81B2201/0235 ,  B81B2207/095 ,  B81B2207/096 ,  G01P2015/0828

    摘要： A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate formed a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are sticked to the both side of the silicon plate except the movable electrode and leeding wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates respectively deriving. These capacitance type accelerometers are made by processing and cutting a wafer by dicing saw without coming into the accelerometer of cutting chips or cutting water.

    摘要翻译： 一种电容式加速度计，其具有形成根据加速度移动的可动电极的第一硅板，分隔设置在第一硅板两侧的两个第二硅板和分别设置的热氧化膜 在除了可移动电极之外的第一硅板和两个第二硅板之间的第一硅板之间，并将除可移动电极之外的第一硅板和两个第二硅板粘合在一起。 此外，电容型加速度计具有形成有根据加速度移动的可移动电极的硅板，分别在其上分别安装与硅板相对的导电层的玻璃板，并且粘附到两者上 除了可移动电极之外的硅板的侧面以及分别通过形成在硅板和玻璃板之间的凹槽连接到导电层的引线。 这些电容式加速度计是通过切割锯切割晶片而不进入切割芯片或切割水的加速度计来制造的。