公开(公告)号：US4912351A

公开(公告)日：1990-03-27

申请号：US247648

申请日：1988-09-22

申请人： Keiji Takata ,  Shigeyuki Hosoki ,  Sumio Hosaka ,  Tsutomu Komoda

发明人： Keiji Takata ,  Shigeyuki Hosoki ,  Sumio Hosaka ,  Tsutomu Komoda

IPC分类号： H02N2/00 ,  H01L41/09 ,  H02N2/08 ,  H02N2/16

CPC分类号： H02N2/0045 ,  H02N2/0025 ,  H02N2/003 ,  H02N2/026 ,  H02N2/028 ,  H02N2/103

摘要： A piezoelectric motor is disclosed, which comprises a slider including a tabular vibrator in which a standing wave is excited, and a plurality of piezoelectric actuators securely mounted at the parts of the lower surface of the vibrator corresponding to the loop and node of the standing wave and adapted to be deformed in phase with the standing wave.

公开(公告)号：US4883959A

公开(公告)日：1989-11-28

申请号：US200979

申请日：1988-06-01

申请人： Shigeyuki Hosoki ,  Sumio Hosaka ,  Keiji Takata

发明人： Shigeyuki Hosoki ,  Sumio Hosaka ,  Keiji Takata

IPC分类号： G01B7/34 ,  G01Q10/00 ,  G01Q20/00 ,  G01Q30/02 ,  G01Q60/24 ,  G01Q60/50 ,  G01Q70/02 ,  H01J37/28

CPC分类号： G01Q60/38 ,  B82Y35/00 ,  G01Q10/06 ,  Y10S977/873

摘要： A scanning surface microscope is disclosed which includes a unit for moving a sample, and a micro-balance whose balance bar is provided with a probe-tip and an electrode at both ends thereof, to convert the irregularities of a sample surface facing the probe-tip into the displacement of the balance bar by utilizing a force generated between the probe-tip and the sample surface. The movement of the electrode indicative of the displacement of the balance bar is detected to obtain the topography of the sample surface.

摘要翻译： 公开了一种扫描表面显微镜，其包括用于移动样品的单元和其平衡杆在其两端设置有探针尖端和电极的微量天平，以转换面向探针头的样品表面的不规则性， 通过利用在探针尖端和样品表面之间产生的力而引导到平衡杆的位移。 检测指示平衡杆的位移的电极的运动，以获得样品表面的形貌。

公开(公告)号：US5162653A

公开(公告)日：1992-11-10

申请号：US796813

申请日：1991-11-25

申请人： Sumio Hosaka ,  Shigeyuki Hosoki ,  Keiji Takata ,  Tsuyoshi Hasegawa

发明人： Sumio Hosaka ,  Shigeyuki Hosoki ,  Keiji Takata ,  Tsuyoshi Hasegawa

IPC分类号： H01J37/28 ,  G01B7/34 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/02 ,  G01Q30/10 ,  G01Q60/10 ,  G01Q90/00 ,  G11B9/14

CPC分类号： G01Q60/04 ,  B82Y35/00 ,  G01B7/34 ,  Y10S977/851

摘要： In a surface topographic observation method using a scanning tunneling microscope, a probe is moved away from the surface of a sample and is moved on a plane to successively move it to points of measurement on the surface of the sample in order to obtain texture information of the sample. That is, the probe is moved on a plane completely preventing the probe tip from colliding with the surface of the sample and enabling the probe to effect scanning at high speeds.

公开(公告)号：US5001409A

公开(公告)日：1991-03-19

申请号：US368304

申请日：1989-06-07

申请人： Sumio Hosaka ,  Shigeyuki Hosoki ,  Keiji Takata ,  Masatoshi Ohtake ,  Hiroshi Tooyama ,  Hitoshi Kondou

发明人： Sumio Hosaka ,  Shigeyuki Hosoki ,  Keiji Takata ,  Masatoshi Ohtake ,  Hiroshi Tooyama ,  Hitoshi Kondou

IPC分类号： G01B7/34 ,  G01Q60/00 ,  G11B9/00 ,  G11B11/00

CPC分类号： G01Q10/02 ,  B82Y10/00 ,  B82Y35/00 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q30/06 ,  G01Q60/16 ,  G11B11/005 ,  G11B11/007 ,  G11B9/1436 ,  Y10S977/852

摘要： In an apparatus for measuring texture and characterization of the surface of a sample on the basis of the drive signal of a servo control circuit by allowing a probe-tip (1) to approach the sample (2) and subjecting the probe-tip (1) to servo control so that a current, which is generated by moving the probe-tip (1) on the sample surface and which flows between the probe-tip (1) and the sample (2), becomes constant, the present invention discloses a surface metrological apparatus comprising a circuit (11, 12) for correcting the texture and characterization of the sample by use of a current error of the measured value of the current described above from the set current value.

摘要翻译： PCT No.PCT / JP88 / 00967 Sec。 371日期1989年6月7日第 102（e）日期1989年6月7日PCT提交1988年9月22日PCT公布。 第WO89 / 03510号公报 日期：1989年4月20日。在根据伺服控制电路的驱动信号通过使探针尖端（1）接近样品（2）和/或 使探针尖端（1）进行伺服控制，使得通过在探针尖端（1）和样品（2）之间流动的样品表面上移动探针尖端（1）而产生的电流， 本发明公开了一种表面计量装置，其包括用于通过使用上述电流的测量值从设定电流值的电流误差来校正样品的纹理和表征的电路（11,12）。

公开(公告)号：US4786922A

公开(公告)日：1988-11-22

申请号：US13798

申请日：1987-02-12

申请人： Shigeyuki Hosoki ,  Keiji Takata ,  Toshiyuki Aida ,  Sumio Hosaka

发明人： Shigeyuki Hosoki ,  Keiji Takata ,  Toshiyuki Aida ,  Sumio Hosaka

IPC分类号： G11B9/00 ,  G11B9/10 ,  G11B9/14 ,  G11B11/03 ,  G11B11/08

CPC分类号： G11B9/10 ,  G11B11/03 ,  G11B11/08

摘要： An electron beam recording and reproducing apparatus which radiates the electron beam emitted from a needle cathode to a disc for recording and reproduction is disclosed. The needle cathode moves on the disc. A magnetic field is applied in the axial direction of the needle cathode in order to converge and radiate the electron beam emitted from the needle cathode to the disc.

摘要翻译： 公开了一种将从针状阴极发射的电子束辐射到用于记录和再现的盘的电子束记录和再现装置。 针状阴极在盘上移动。 在针状阴极的轴向上施加磁场，以使会聚和辐射从针状阴极发射到电子束的电子束。

公开(公告)号：US5222396A

公开(公告)日：1993-06-29

申请号：US833613

申请日：1992-02-13

申请人： Keiji Takata ,  Hiromichi Shimizu ,  Shigeyuki Hosoki ,  Sumio Hosaka

发明人： Keiji Takata ,  Hiromichi Shimizu ,  Shigeyuki Hosoki ,  Sumio Hosaka

IPC分类号： G01B7/34 ,  G01N27/00 ,  G01N27/02 ,  G01N29/06 ,  G01N29/24 ,  G01N37/00 ,  G01Q10/00 ,  G01Q60/00 ,  G01Q60/04 ,  G01Q60/10 ,  G01Q60/14 ,  G01Q70/10 ,  H01J37/28

CPC分类号： G01Q30/02 ,  B82Y35/00 ,  G01Q60/12 ,  G01Q60/16 ,  G01N2291/048 ,  Y10S977/851 ,  Y10S977/861

摘要： A scanning tunneling microscope, in which the gap between a tip having a keenly sharpened end and a sample is narrowed to let flow a tunneling current between them and thereby allow observation of the surface of the sample. A strain wave device is disposed on the sample or in the vicinity of the sample to detect strain waves generated within the sample. By modulating the value of the above described tunneling current, strain waves are generated within the sample. The strain waves are detected by the above described strain wave detecting device. On the basis of the amplitude information and phase information of detected strain waves, physical information regarding the inside of the sample is obtained.

摘要翻译： 扫描隧道显微镜，其中尖锐尖端与样品之间的间隙变窄，使得它们之间产生隧穿电流，从而允许观察样品的表面。 应变波装置设置在样品上或样品附近，以检测样品内产生的应变波。 通过调制上述隧穿电流的值，在样品内产生应变波。 应变波由上述应变波检测装置检测。 根据检测出的应变波的振幅信息和相位信息，获得关于样本内部的物理信息。

公开(公告)号：US5431055A

公开(公告)日：1995-07-11

申请号：US058231

申请日：1993-05-10

申请人： Keiji Takata ,  Hiromichi Shimizu ,  Shigeyuki Hosoki ,  Sumio Hosaka

发明人： Keiji Takata ,  Hiromichi Shimizu ,  Shigeyuki Hosoki ,  Sumio Hosaka

IPC分类号： G01B7/34 ,  G01N27/00 ,  G01N27/02 ,  G01N29/06 ,  G01N29/24 ,  G01N37/00 ,  G01Q10/00 ,  G01Q60/00 ,  G01Q60/04 ,  G01Q60/10 ,  G01Q60/14 ,  G01Q70/10 ,  H01J37/28

CPC分类号： G01Q30/02 ,  B82Y35/00 ,  G01Q60/12 ,  G01Q60/16 ,  G01N2291/048 ,  Y10S977/851 ,  Y10S977/861

摘要： A scanning tunneling microscope, in which the gap between a tip having a keenly sharpened end and a sample is narrowed to let flow a tunneling current between them and thereby allow observation of the surface of the sample, a strain wave detecting device is disposed on the sample or in the vicinity of the sample to detect strain waves generated within the sample. By modulating the value of the above described tunneling current, strain waves are generated within the sample. The strain waves are detected by the above described strain wave detecting device. On the basis of the amplitude information and phase information of detected strain waves, physical information regarding the inside of the sample is obtained.

摘要翻译： 扫描隧道显微镜，其中具有锐利尖端的尖端与样品之间的间隙变窄以使它们之间的隧道电流流动，从而允许观察样品的表面，将应变波检测装置设置在 样品或样品附近，以检测样品内产生的应变波。 通过调制上述隧穿电流的值，在样品内产生应变波。 应变波由上述应变波检测装置检测。 根据检测出的应变波的振幅信息和相位信息，获得关于样本内部的物理信息。

公开(公告)号：US5036196A

公开(公告)日：1991-07-30

申请号：US533341

申请日：1990-06-05

申请人： Sumio Hosaka ,  Shigeyuki Hosoki ,  Tsuyoshi Hasegawa

发明人： Sumio Hosaka ,  Shigeyuki Hosoki ,  Tsuyoshi Hasegawa

IPC分类号： G01B7/34 ,  G01B7/00 ,  G01D21/02 ,  G01N27/00 ,  G01N27/02 ,  G01N37/00 ,  G01Q30/04 ,  G01Q60/04 ,  G01Q60/10 ,  G01Q60/24 ,  G01R31/302 ,  H01J37/00 ,  H01J37/28

CPC分类号： G01Q30/04 ,  B82Y35/00 ,  G01Q60/12 ,  Y10S977/852 ,  Y10S977/861

摘要： A surface microscope includes a device which brings a probe close to a surface of a sample to scan it therewith for producing a tunnel current between the probe and the sample to measure the superficial shape of the sample by detecting the tunnel current. A device for varying a gap between the probe and the sample, a system for detecting a variable component of the tunnel current varying, accompanied by variations in the gap by the device for varying same, a divider for calculating the ratio of the variable component of the tunnel current to the tunnel current, and a calculator for calculating tunnel barrier information, based on the quotient obtained by the divider, are combined with a display for displaying the measured superficial shape of the sample and the tunnel barrier information thus calculated.

公开(公告)号：US5256876A

公开(公告)日：1993-10-26

申请号：US696787

申请日：1991-05-07

申请人： Eiichi Hazaki ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Shigeyuki Hosoki ,  Sumio Hosaka ,  Akira Hashimoto

发明人： Eiichi Hazaki ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Shigeyuki Hosoki ,  Sumio Hosaka ,  Akira Hashimoto

IPC分类号： G01B7/34 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/02 ,  G01Q60/10 ,  H01J37/20 ,  H01J37/28

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/02 ,  Y10S977/861

摘要： A scanning tunnel microscope comprising: a SEM stage provided in a specimen chamber of a SEM and having a mechanism for moving in a two dimensional manner along a surface perpendicular to an electron beam; a specimen stage provided on the SEM stage and provided with a mechanism for holding a specimen so that a surface of the specimen makes an angle of 45.degree. with the electron beam and for moving the specimen in a two dimensional manner in directions of the specimen surface; an STM scanning mechanism provided on the SEM stage and provided with a probe held perpendicularly to the specimen surface, a coarse movement mechanism for making the probe approach to a position at a desired distance from the specimen surface, and a probe fine movement mechanism for making the probe scan along the specimen surface; and a display unit for displaying an image by the SEM together with an image of the probe on the basis of signal obtained from a secondary electron detector provided in a specimen chamber and for displaying an image by the STM on the basis of signals from the probe fine movement mechanism.

公开(公告)号：US5229607A

公开(公告)日：1993-07-20

申请号：US714018

申请日：1991-06-12

申请人： Hironobu Matsui ,  Mikio Ichihashi ,  Sumio Hosaka ,  Yoshinori Nakayama ,  Satoshi Haraichi ,  Fumikazu Itoh ,  Akira Shimase ,  Yoshimasa Kondo ,  Shigeyuki Hosoki ,  Masakazu Ichikawa ,  Yukio Honda ,  Tsuyoshi Hasegawa ,  Shiji Okazaki ,  Shunji Maeda ,  Hitoshi Kubota

发明人： Hironobu Matsui ,  Mikio Ichihashi ,  Sumio Hosaka ,  Yoshinori Nakayama ,  Satoshi Haraichi ,  Fumikazu Itoh ,  Akira Shimase ,  Yoshimasa Kondo ,  Shigeyuki Hosoki ,  Masakazu Ichikawa ,  Yukio Honda ,  Tsuyoshi Hasegawa ,  Shiji Okazaki ,  Shunji Maeda ,  Hitoshi Kubota

IPC分类号： G01Q10/04 ,  G01Q30/02 ,  G01Q30/12 ,  G01Q30/18 ,  G01Q60/00 ,  H01J37/252 ,  H01J37/28

CPC分类号： H01J37/28 ,  B82Y35/00 ,  G01Q30/02 ,  H01J37/252 ,  H01J37/3056

摘要： A combination apparatus having a scanning electron microscope includes equipment for performing any of observing, measuring and processing operations on a sample placed in a sample chamber. The sample chamber contains a focused electron beam irradiating unit apart from the components for performing the observing, measuring and processing operations. The focused electron beam irradiating unit irradiates a finely focused electron beam onto the surface of the sample for electron microscopic observation in scanning fashion. This setup allows the observing, measuring or processing equipment to combine with the scanning electron microscope without appreciably enlarging the construction of the combination apparatus.

摘要翻译： 具有扫描电子显微镜的组合装置包括用于对放置在样品室中的样品进行观察，测量和处理操作的任何设备。 样品室包含聚焦电子束照射单元，与用于进行观察，测量和处理操作的部件分开。 聚焦电子束照射单元以扫描方式将精细聚焦的电子束照射到用于电子显微镜观察的样品表面上。 该设置允许观察，测量或处理设备与扫描电子显微镜组合，而不会明显地扩大组合装置的结构。