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公开(公告)号：US5229607A
公开(公告)日：1993-07-20
申请号：US714018
申请日：1991-06-12
申请人： Hironobu Matsui , Mikio Ichihashi , Sumio Hosaka , Yoshinori Nakayama , Satoshi Haraichi , Fumikazu Itoh , Akira Shimase , Yoshimasa Kondo , Shigeyuki Hosoki , Masakazu Ichikawa , Yukio Honda , Tsuyoshi Hasegawa , Shiji Okazaki , Shunji Maeda , Hitoshi Kubota
发明人： Hironobu Matsui , Mikio Ichihashi , Sumio Hosaka , Yoshinori Nakayama , Satoshi Haraichi , Fumikazu Itoh , Akira Shimase , Yoshimasa Kondo , Shigeyuki Hosoki , Masakazu Ichikawa , Yukio Honda , Tsuyoshi Hasegawa , Shiji Okazaki , Shunji Maeda , Hitoshi Kubota
CPC分类号： H01J37/28 , B82Y35/00 , G01Q30/02 , H01J37/252 , H01J37/3056
摘要： A combination apparatus having a scanning electron microscope includes equipment for performing any of observing, measuring and processing operations on a sample placed in a sample chamber. The sample chamber contains a focused electron beam irradiating unit apart from the components for performing the observing, measuring and processing operations. The focused electron beam irradiating unit irradiates a finely focused electron beam onto the surface of the sample for electron microscopic observation in scanning fashion. This setup allows the observing, measuring or processing equipment to combine with the scanning electron microscope without appreciably enlarging the construction of the combination apparatus.
摘要翻译： 具有扫描电子显微镜的组合装置包括用于对放置在样品室中的样品进行观察，测量和处理操作的任何设备。 样品室包含聚焦电子束照射单元，与用于进行观察，测量和处理操作的部件分开。 聚焦电子束照射单元以扫描方式将精细聚焦的电子束照射到用于电子显微镜观察的样品表面上。 该设置允许观察，测量或处理设备与扫描电子显微镜组合，而不会明显地扩大组合装置的结构。
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公开(公告)号：US5144128A
公开(公告)日：1992-09-01
申请号：US649898
申请日：1991-02-01
IPC分类号： G01N23/00 , G01N27/00 , G01Q10/06 , G01Q20/00 , G01Q30/02 , G01Q30/16 , G01Q60/00 , G01Q70/02 , H01J37/252
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q20/00 , G01Q30/16 , G01Q70/02 , Y10S977/852 , Y10S977/86 , Y10S977/861 , Y10S977/863 , Y10S977/873
摘要： An atomic force microscope is provided for sensing displacement of a cantilever based on scanning tunneling microscopy. The atomic force microscope includes a cantilever moving system which allows the cantilever to be moved or slipped between an STM tip and a sample. This results in the microscope being able to carry out atomic force microscopy and tunneling microscopy without changing a single STM tip and to control the very small force between the sample and the tip to be constant.
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公开(公告)号：US5436448A
公开(公告)日：1995-07-25
申请号：US1250
申请日：1993-01-06
申请人： Sumio Hosaka , Atsushi Kikugawa , Yukio Honda , Hajime Koyanagi , Shigeyuki Hosoki , Tsuyoshi Hasegawa
发明人： Sumio Hosaka , Atsushi Kikugawa , Yukio Honda , Hajime Koyanagi , Shigeyuki Hosoki , Tsuyoshi Hasegawa
IPC分类号： G01B7/34 , G01Q10/00 , G01Q20/02 , G01Q60/02 , G01Q60/08 , G01Q60/24 , G01Q60/26 , G01Q60/32 , G11B5/00 , G11B11/00 , H01J37/00
CPC分类号： G01Q20/02 , B82Y10/00 , B82Y35/00 , G01Q60/02 , G01Q60/08 , G01Q60/26 , G01Q60/32 , G11B11/007 , G11B5/00 , G11B9/1409 , G11B2005/0002 , G11B2005/0005 , Y10S977/849 , Y10S977/851 , Y10S977/852 , Y10S977/873 , Y10S977/953
摘要： A surface observing apparatus for obtaining information of a specimen comprises a probe disposed in the close vicinity of the specimen, a deformable cantilever for holding the probe, a scanning mechanism for scanning a surface of the specimen with the probe and a detector for detecting displacements of the cantilever to thereby allow information of the specimen to be derived on the basis of the displacement of the cantilever. The apparatus further comprises a first detector for detecting a force acting on the probe from the displacement of the cantilever, and a second detector for measuring a change in the force acting on the probe on the basis of the displacement of the cantilever.
摘要翻译： 用于获取样本信息的表面观察装置包括设置在样本附近的探针，用于保持探针的可变形悬臂，用于用探针扫描样本表面的扫描机构和用于检测位移的检测器 悬臂，从而允许基于悬臂的位移导出样本的信息。 该装置还包括第一检测器，用于根据悬臂的位移检测作用在探针上的力;以及第二检测器，用于根据悬臂的位移来测量作用在探针上的力的变化。
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4.发明授权
公开(公告)号：US5162653A
公开(公告)日：1992-11-10
申请号：US796813
申请日：1991-11-25
IPC分类号： H01J37/28 , G01B7/34 , G01N27/00 , G01N37/00 , G01Q10/02 , G01Q30/10 , G01Q60/10 , G01Q90/00 , G11B9/14
CPC分类号： G01Q60/04 , B82Y35/00 , G01B7/34 , Y10S977/851
摘要： In a surface topographic observation method using a scanning tunneling microscope, a probe is moved away from the surface of a sample and is moved on a plane to successively move it to points of measurement on the surface of the sample in order to obtain texture information of the sample. That is, the probe is moved on a plane completely preventing the probe tip from colliding with the surface of the sample and enabling the probe to effect scanning at high speeds.
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公开(公告)号：US5036196A
公开(公告)日：1991-07-30
申请号：US533341
申请日：1990-06-05
IPC分类号： G01B7/34 , G01B7/00 , G01D21/02 , G01N27/00 , G01N27/02 , G01N37/00 , G01Q30/04 , G01Q60/04 , G01Q60/10 , G01Q60/24 , G01R31/302 , H01J37/00 , H01J37/28
CPC分类号： G01Q30/04 , B82Y35/00 , G01Q60/12 , Y10S977/852 , Y10S977/861
摘要： A surface microscope includes a device which brings a probe close to a surface of a sample to scan it therewith for producing a tunnel current between the probe and the sample to measure the superficial shape of the sample by detecting the tunnel current. A device for varying a gap between the probe and the sample, a system for detecting a variable component of the tunnel current varying, accompanied by variations in the gap by the device for varying same, a divider for calculating the ratio of the variable component of the tunnel current to the tunnel current, and a calculator for calculating tunnel barrier information, based on the quotient obtained by the divider, are combined with a display for displaying the measured superficial shape of the sample and the tunnel barrier information thus calculated.
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公开(公告)号：US5746826A
公开(公告)日：1998-05-05
申请号：US347416
申请日：1994-12-02
申请人： Tsuyoshi Hasegawa , Shigeyuki Hosoki , Makiko Kohno , Masakazu Ichikawa , Hitoshi Nakahara , Toshiyuki Usagawa
发明人： Tsuyoshi Hasegawa , Shigeyuki Hosoki , Makiko Kohno , Masakazu Ichikawa , Hitoshi Nakahara , Toshiyuki Usagawa
IPC分类号： G01Q60/10 , G01Q60/58 , G01Q80/00 , H01L21/205 , C30B25/04
CPC分类号： B82Y30/00 , B82Y40/00 , H01L21/0237 , H01L21/02381 , H01L21/0243 , H01L21/02433 , H01L21/0245 , H01L21/02491 , H01L21/02532 , H01L21/0262 , Y10S117/913 , Y10S977/855
摘要： Utilizing rugged pattern of atomic size present on a crystalline substrate of a semiconductor such as silicon or selenium or the like, a microstructure body is produced on the substrate by forming a layer of a first element of one monolayer or less by arranging at the position of the substrate most stable in energy formed by ruggedness the atoms of the first element such as gold, silver, copper, nickel, palladium, platinum or an element of group IV and then depositing successively atoms of at least one second element of group III, group IV and group V on only at a part of the surface of the substrate on which said layer of one monolayer or less by vapor deposition, sputtering or the like.
摘要翻译： PCT No.PCT / JP94 / 00561 Sec。 371日期1994年12月2日第 102（e）1994年12月2日PCT PCT 1994年4月5日PCT公布。 公开号WO94 / 23445 日期1994年10月13日利用存在于诸如硅或硒等半导体的晶体衬底上的原子尺寸的粗糙图案，通过以下方式在基板上形成微结构体：通过形成一层单层或更小的第一元素层， 布置在基底最稳定的能量位置上，该能量由第一元素的原子如金，银，铜，镍，钯，铂或IV族元素的粗糙度形成，然后连续沉积至少一个第二元素的原子 仅在通过气相沉积，溅射等在其上存在一层或更少层的一层以上的基板表面的一部分上的III族，IV族和V族。
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公开(公告)号：US5585722A
公开(公告)日：1996-12-17
申请号：US317737
申请日：1994-10-04
CPC分类号： G01Q60/30 , B82Y35/00 , G01Q60/04 , G01Q60/08 , G01Q60/14 , G01R33/56 , Y10S977/838 , Y10S977/849 , Y10S977/863 , Y10S977/865 , Y10S977/96
摘要： An apparatus for measuring physical properties of micro area which has an object to measure physical properties from a micro area on an atomic scale on the surface of a test sample such as electron spin, nuclear magnetic moment, and nuclear quadrupole moment in high sensitivity, allows the probe 2 of the atomic force microscope to approach the surface of the test sample 1, applies a magnetic field to the test sample 1 by the magnetic field generation coil 27 and the magnetic paths 22 to 26 and furthermore a high frequency electromagnetic field to the test sample 1 by the coils 16 and 17 respectively, and detects a signal from atoms existing on the surface of the test sample 1 which are resonant with the high frequency electromagnetic field by the probe 2.
摘要翻译： 用于测量微区物理性质的装置，其具有以高灵敏度测量诸如电子自旋，核磁矩和核四极矩的测试样品表面上的原子尺度上的微区域的物理特性，允许 原子力显微镜的探针2接近测试样品1的表面，通过磁场产生线圈27和磁路22至26向测试样品1施加磁场，此外还将高频电磁场施加到 分别由线圈16和17测试样品1，并且通过探针2检测来自存在于测试样品1的表面上的原子与高频电磁场共振的信号。
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公开(公告)号：US5698798A
公开(公告)日：1997-12-16
申请号：US411316
申请日：1995-03-28
CPC分类号： G01Q60/12 , B82Y35/00 , Y10S977/852
摘要： In a measuring method and a measuring apparatus which are suited for observing a dynamic physical phenomenon particularly in a microdevice, a signal for generating a physical phenomenon in a specimen is inputted to the specimen, and a signal which is caused by this dynamic physical phenomenon is detected by a probe which is close to or in contact with the specimen surface in correspondence with a signal input to the specimen on the basis of the specific time. The measuring apparatus has a scanning probe microscope with a probe (tip) which is close to or in contact with the specimen surface, a pulse voltage application control unit for applying respective pulse voltages to the specimen and probe, and a signal measuring unit for measuring a signal from the specimen detected by the probe. The measuring apparatus causes a dynamic physical phenomenon in the specimen by applying the pulse voltage to the specimen, applies a bias voltage between the probe and specimen by applying the pulse voltage to the probe, and detects the signal caused by the dynamic physical phenomenon in the specimen. Pulse voltage application to the probe is executed by the pulse voltage application control unit in correspondence with pulse voltage application to the specimen on the basis of the specific time. A dynamic physical phenomenon in a microarea of a specimen which is caused by the particle property or wave property of electrons can thus be observed.
摘要翻译： 在适于观察动态物理现象的测量方法和测量装置中，特别是在微型装置中，用于产生样本中的物理现象的信号被输入到样本，并且由该动态物理现象引起的信号是 通过与基于特定时间输入到样本的信号相对应的与探针接近或接触的探针来检测。 测量装置具有扫描探针显微镜，其具有与试样表面接近或接触的探针（尖端），用于向样本和探针施加相应脉冲电压的脉冲电压施加控制单元，以及用于测量 由探针检测到的样本的信号。 测量装置通过向样本施加脉冲电压来引起样品中的动态物理现象，通过向探针施加脉冲电压在探针和样品之间施加偏置电压，并且检测由于动态物理现象引起的信号 标本。 脉冲电压施加到探针由脉冲电压施加控制单元根据具体时间对标本施加脉冲电压进行。 因此可以观察到由电子的粒子特性或波特性引起的样品的微区域中的动态物理现象。
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9.发明申请公开(公告)号：US20050242283A1
公开(公告)日：2005-11-03
申请号：US10503701
申请日：2003-02-05
IPC分类号： G01B21/30 , G01Q10/04 , G01Q10/06 , G01Q20/02 , G01Q60/24 , G01Q60/32 , G01Q60/38 , G01Q70/12 , G01N23/00
摘要： A digital probing type atomic force microscope (AFM) for measuring high aspect structures with high precision. A probe 21 is vibrated while moved to the vicinity of an atomic force region on a specimen surface. The position of the probe is measured when a specified atomic force is detected in the atomic force region. The probe is then moved away from the specimen surface. A servo system for maintaining a gap between the probe and specimen surface is stopped. The probe is moved to a measurement point along the specimen surface while kept away from the specimen. The vibration frequency is a frequency slightly offset from the cantilever resonance point. The atomic force is detected based on the vibration amplitude of the cantilever.
摘要翻译： 数字探测型原子力显微镜（AFM），用于高精度测量高端面结构。 探针21在移动到试样表面的原子力区域附近时振动。 当在原子力区域中检测到指定的原子力时，测量探针的位置。 然后将探头从样品表面移开。 停止用于保持探针和试样表面之间的间隙的伺服系统。 探头沿着试样表面移动到测量点，同时远离试样。 振动频率是与悬臂共振点稍微偏移的频率。 基于悬臂振动幅度检测原子力。
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10.发明授权公开(公告)号：US07241994B2
公开(公告)日：2007-07-10
申请号：US10503701
申请日：2003-02-05
摘要： A digital probing type atomic force microscope (AFM) for measuring high aspect structures with high precision. A probe 21 is vibrated while moved to the vicinity of an atomic force region on a specimen surface. The position of the probe is measured when a specified atomic force is detected in the atomic force region. The probe is then moved away from the specimen surface. A servo system for maintaining a gap between the probe and specimen surface is stopped. The probe is moved to a measurement point along the specimen surface while kept away from the specimen. The vibration frequency is a frequency slightly offset from the cantilever resonance point. The atomic force is detected based on the vibration amplitude of the cantilever.
摘要翻译： 数字探测型原子力显微镜（AFM），用于高精度测量高端面结构。 探针21在移动到试样表面的原子力区域附近时振动。 当在原子力区域中检测到指定的原子力时，测量探针的位置。 然后将探头从样品表面移开。 停止用于保持探针和试样表面之间的间隙的伺服系统。 探头沿着试样表面移动到测量点，同时远离试样。 振动频率是与悬臂共振点稍微偏移的频率。 基于悬臂振动幅度检测原子力。
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