公开(公告)号：US06821712B2

公开(公告)日：2004-11-23

申请号：US10041214

申请日：2002-01-07

申请人： Kenji Sakaguchi ,  Toshiyuki Fuyutsume ,  Yoshihiro Koshido

发明人： Kenji Sakaguchi ,  Toshiyuki Fuyutsume ,  Yoshihiro Koshido

IPC分类号： G03F700

CPC分类号： G03F7/092 ,  G03F7/091 ,  Y10S430/151

摘要： Methods of forming a resist pattern, of forming an electrode pattern, and of manufacturing a surface acoustic wave device are provided. The resist-pattern- and the electrode-pattern-forming methods each comprise a step of forming an antireflection film for preventing ultraviolet light from diffusely reflecting to a transparent substrate. The antireflection film is formed with a semiconductor having a band gap energy of 3.4 eV or less. The reflectance is expressed by (n1−n2)2/(n1+n2)2 is 0.15 or less, wherein n1 and n2 is the refractive indexes of the substrate and the antireflection film, respectively. The resist-pattern- and the electrode-pattern-forming methods with simple processes can achieve high-quality, reliable resist patterns and electrode patterns.

摘要翻译： 提供形成抗蚀剂图案，形成电极图案和制造表面声波装置的方法。 抗蚀剂图案和电极图案形成方法各自包括形成用于防止紫外光漫反射到透明基板的防反射膜的步骤。 抗反射膜由带隙能量为3.4eV以下的半导体形成。 反射率由（n1-n2）<2> /（n1 + n2）<2>表示为0.15以下，其中n1和n2分别是基板和抗反射膜的折射率。 具有简单工艺的抗蚀剂图案和电极图案形成方法可以实现高质量，可靠的抗蚀剂图案和电极图案。

公开(公告)号：US06760960B2

公开(公告)日：2004-07-13

申请号：US10246624

申请日：2002-09-19

申请人： Kenji Sakaguchi ,  Toshiyuki Fuyutsume

发明人： Kenji Sakaguchi ,  Toshiyuki Fuyutsume

IPC分类号： H04R1700

CPC分类号： H03H3/08 ,  G03F7/091 ,  Y10T29/42 ,  Y10T29/49401

摘要： A method of forming an electrode pattern of a surface acoustic wave device easily and reliably prevents the occurrence of an abnormality in the shape of a resist pattern. In the electrode pattern forming method, a resist layer is formed on a top surface of a piezoelectric substrate, and then exposed to ultraviolet rays through a photomask provided above the top surface of the piezoelectric substrate to form a resist pattern on the surface of the piezoelectric substrate. Furthermore, a conductor film is formed on the top surface of the piezoelectric substrate, and the resist pattern is removed by a liftoff method to form an electrode pattern of the surface acoustic wave device. Exposure is performed using ultraviolet rays having a wavelength which is completely absorbed into the piezoelectric substrate without reaching the bottom surface of the piezoelectric substrate.

摘要翻译： 形成表面声波装置的电极图案的方法容易且可靠地防止抗蚀剂图案的形状发生异常。 在电极图案形成方法中，在压电基板的上表面上形成抗蚀剂层，然后通过设置在压电基板的顶表面上方的光掩模进行紫外线曝光，以在压电基板的表面上形成抗蚀剂图案 基质。 此外，在压电基板的顶面上形成导体膜，通过剥离法除去抗蚀剂图案，形成表面声波装置的电极图案。 使用具有完全吸收到压电基板中的波长的紫外线进行曝光，而不到达压电基板的底面。

公开(公告)号：US06368551B1

公开(公告)日：2002-04-09

申请号：US09641136

申请日：2000-08-16

申请人： Shigenobu Sekine ,  Yuko Kawasaki ,  Yoshiki Kuwabara ,  Hiroji Sato ,  Minoru Narita ,  Kazushi Suzuki ,  Koichi Tono ,  Keiji Okada ,  Kenji Sakaguchi ,  Mitsuhisa Hirata

发明人： Shigenobu Sekine ,  Yuko Kawasaki ,  Yoshiki Kuwabara ,  Hiroji Sato ,  Minoru Narita ,  Kazushi Suzuki ,  Koichi Tono ,  Keiji Okada ,  Kenji Sakaguchi ,  Mitsuhisa Hirata

IPC分类号： B22F312

CPC分类号： H01F1/0577

摘要： The method for preparation of sintered permanent magnets according to the present invention comprises the steps of: mixing fully fine powder of a crystalline mother alloy for permanent magnet containing a rare-earth element, Fe and B as the essential components with fine powder of zinc oxide, compaction molding the resulted mixture in the presence of a magnetic field, sintering the compacted mixture in vacuum to cause generation of oxygen and metallic zinc by thermal decomposition of the zinc oxide; segregation of a part of metallic component in the mother alloy at the boundary and inside of the mother alloy crystal; formation of amorphous metallic oxide by forced oxidation of the segregated metal with the generated oxygen; crystallization of the amorphous metallic oxide; formation of an epitaxial junction between the crystallized metallic oxide and the mother alloy crystal; and evaporation of the metallic zinc into the vacuum, and quenching the sintered compact.

摘要翻译： 根据本发明的烧结永磁体的制备方法包括以下步骤：将含有稀土元素，Fe和B的永磁体的结晶母合金的完全细粉末作为必要成分与氧化锌的细粉末混合 在磁场存在下压制成型所得到的混合物，在真空中烧结压实的混合物，以通过氧化锌的热分解产生氧和金属锌; 在母合金晶体的边界和内侧，母合金中的金属成分的一部分偏析; 通过用生成的氧强制氧化分离的金属形成非晶金属氧化物; 无定形金属氧化物的结晶; 在结晶的金属氧化物和母体合金晶体之间形成外延结; 并将金属锌蒸发到真空中，并淬火烧结体。

公开(公告)号：US4894500A

公开(公告)日：1990-01-16

申请号：US127506

申请日：1987-12-01

申请人： Atsuo Yamazaki ,  Toshiaki Kaba ,  Kenji Sakaguchi

发明人： Atsuo Yamazaki ,  Toshiaki Kaba ,  Kenji Sakaguchi

IPC分类号： H01H11/00 ,  H01H19/11 ,  H01H19/58

CPC分类号： H01H11/0056 ,  H01H19/11 ,  H01H19/58

摘要： A rotary selector switch having a wiper which is arranged on a rotor rotatably held in a cavity formed by a housing and case and is slidingly rotated on the housing base on which are disposed fixed contact elements, thereby to connect electrically at least one of the fixed contact elements to one of the remaining fixed contact elements, in which vertical walls of dovetail portions constituting a ridge projecting from the rotor base are arranged to abut in turn against side walls of ridges extended from an annular ledge arranged at an inner side of the housing corresponding to the rotation of the rotor whereby the rotation of the rotor is stopped; a slot defined in one of the dovetail portions of the ridge arranged on the rotor base is engaged in turn with one of the projections arranged on the housing base corresponding to the rotation of the rotor whereby an audible click may be caught; a slit defined in the housing base between the fixed contact elements disposed thereon aids to cut off a chain of undesirable powder bridging the fixed contact elements one of which is electrically connected to one of the remaining contact elements via the wiper.

摘要翻译： 一种旋转选择器开关，其具有擦拭器，该擦拭器布置在可旋转地保持在由壳体和壳体形成的空腔中的转子上，并且在其上设置有固定接触元件的壳体基座上滑动旋转，从而电连接固定 接触元件连接到剩余的固定接触元件之一，其中构成从转子基部突出的脊的燕尾部分的垂直壁布置成抵靠从布置在壳体的内侧的环形凸缘延伸的脊的侧壁 对应于转子的旋转，由此停止转子的旋转; 限定在设置在转子基座上的脊部的一个燕尾部分中的槽口依次接合，其中一个突起布置在壳体基座上，对应于转子的旋转，由此可能卡住可听见的咔嗒声; 限定在壳体基部中的在设置在其之间的固定接触元件之间的狭缝有助于切断桥接固定接触元件的不期望的粉末链，其中一个固定接触元件经由擦拭器与其中一个接触元件电连接。

公开(公告)号：US07154207B2

公开(公告)日：2006-12-26

申请号：US10922032

申请日：2004-08-19

申请人： Kenji Sakaguchi ,  Kenji Akiyama

发明人： Kenji Sakaguchi ,  Kenji Akiyama

IPC分类号： H03H9/25

CPC分类号： H03H9/059

摘要： A surface acoustic wave device includes a piezoelectric substrate, an interdigital transducer (IDT) electrode, and a connecting portion that is electrically connected with the IDT electrode. The surface acoustic wave device further includes a wiring portion, a portion of which is disposed on the connecting portion, and a bump disposed on the wiring portion. The connecting portion includes a comb-shaped portion at an end of the connecting portion on which the wiring portion is disposed.

摘要翻译： 表面声波装置包括压电基板，叉指式换能器（IDT）电极和与IDT电极电连接的连接部。 表面声波装置还包括布置在连接部分上的布线部分和布置在布线部分上的凸块。 连接部分包括在布置有布线部分的连接部分的端部处的梳状部分。

公开(公告)号：US06911762B2

公开(公告)日：2005-06-28

申请号：US10205986

申请日：2002-07-26

申请人： Kenji Sakaguchi ,  Masanobu Watanabe ,  Mitsushi Takatori

发明人： Kenji Sakaguchi ,  Masanobu Watanabe ,  Mitsushi Takatori

IPC分类号： H03H9/25 ,  H01L21/60 ,  H01L41/08 ,  H03H3/08 ,  H03H9/145

CPC分类号： H03H9/059 ,  H01L2224/05001 ,  H01L2224/05023 ,  H01L2224/0508 ,  H01L2224/05568 ,  H01L2224/16 ,  H01L2224/45144 ,  H01L2924/01004 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/15787 ,  H01L2924/16195 ,  H03H9/1071 ,  H01L2924/00

摘要： A surface acoustic wave device includes a surface acoustic wave element, a packaging case, and a packaging electrode. The surface acoustic wave element has a piezoelectric substrate, an interdigital transducer, an electrode pad, an intermediate electrode, an upper electrode, and a bump electrode. The intermediate electrode is preferably made of NiCr including about 15 to about 30 weight percent of Cr. The electrode pad and upper electrode are made of Al. The bump electrode is press-bonded to the packaging electrode with an ultrasonic wave or heat applied to the bump electrode. The resulting surface acoustic wave device has excellent characteristics and the surface acoustic wave element is not removed or peeled from the packaging case during a drop test.

摘要翻译： 表面声波装置包括表面声波元件，包装盒和包装电极。 表面声波元件具有压电基板，叉指式换能器，电极焊盘，中间电极，上电极和凸块电极。 中间电极优选由包括约15至约30重量％的Cr的NiCr制成。 电极焊盘和上电极由Al制成。 凸起电极用超声波或加热到凸块电极的热压接在包装电极上。 所得到的声表面波器件具有优异的特性，并且在跌落试验期间表面声波元件不从包装盒中去除或剥离。

公开(公告)号：US06710514B2

公开(公告)日：2004-03-23

申请号：US10269569

申请日：2002-10-10

申请人： Katsuhiro Ikada ,  Kenji Sakaguchi

发明人： Katsuhiro Ikada ,  Kenji Sakaguchi

IPC分类号： H03H925

CPC分类号： H03H3/10 ,  H03H3/08 ,  H03H9/145 ,  H03H9/14538 ,  H03H9/25 ,  Y10T29/42 ,  Y10T29/49004 ,  Y10T29/49016 ,  Y10T29/49156

摘要： A surface acoustic wave device includes a piezoelectric substrate, a first surface acoustic wave element having at least one interdigital transducer on the piezoelectric substrate, a second surface acoustic wave element having at least one interdigital transducer which is provided on the piezoelectric substrate. The at least one interdigital transducer of the second surface acoustic wave element has a thickness that is different from the interdigital transducer of the first surface acoustic wave element, and the second surface acoustic wave element has a frequency characteristic that is different from that of the first surface acoustic wave element. An insulating film is applied to the first and second surface acoustic wave elements. A thickness of the insulating film at a region on the first surface acoustic wave element is different from the thickness of a region on the second surface acoustic wave.

摘要翻译： 表面声波装置包括压电基片，在压电基片上具有至少一个叉指式换能器的第一弹性表面波元件，具有设置在压电基片上的至少一个叉指换能器的第二弹性表面波元件。 第二表面声波元件的至少一个叉指式换能器具有与第一声表面波元件的叉指换能器不同的厚度，并且第二声表面波元件具有与第一声表面波元件的频率特性不同的频率特性 表面声波元件。 绝缘膜被施加到第一和第二表面声波元件。 第一声​​表面波元件的区域的绝缘膜的厚度与第二弹性表面波的区域的厚度不同。

公开(公告)号：US06516503B1

公开(公告)日：2003-02-11

申请号：US09574794

申请日：2000-05-19

申请人： Katsuhiro Ikada ,  Kenji Sakaguchi

发明人： Katsuhiro Ikada ,  Kenji Sakaguchi

IPC分类号： H04R1700

CPC分类号： H03H3/10 ,  H03H3/08 ,  H03H9/145 ,  H03H9/14538 ,  H03H9/25 ,  Y10T29/42 ,  Y10T29/49004 ,  Y10T29/49016 ,  Y10T29/49156

摘要： A method of making surface acoustic wave device includes a piezoelectric substrate, a first surface acoustic wave element having at least one interdigital transducer on the piezoelectric substrate, a second surface acoustic wave element having at least one interdigital transducer which is provided on the piezoelectric substrate. The at least one interdigital transducer of the second surface acoustic wave element has a thickness that is different from the interdigital transducer of the first surface acoustic wave element, and the second surface acoustic wave element has a frequency characteristic that is different from that of the first surface acoustic wave element. An insulating film is applied to the first and second surface acoustic wave elements. A thickness of the insulating film at a region on the first surface acoustic wave element is different from the thickness of a region on the second surface acoustic wave.

摘要翻译： 制造声表面波装置的方法包括：压电基板，在压电基板上具有至少一个叉指换能器的第一弹性表面波元件，具有设置在压电基板上的至少一个叉指换能器的第二声表面波元件。 第二表面声波元件的至少一个叉指式换能器具有与第一声表面波元件的叉指换能器不同的厚度，并且第二声表面波元件具有与第一声表面波元件的频率特性不同的频率特性 表面声波元件。 绝缘膜被施加到第一和第二表面声波元件。 第一声​​表面波元件的区域的绝缘膜的厚度与第二弹性表面波的区域的厚度不同。

公开(公告)号：US20050046307A1

公开(公告)日：2005-03-03

申请号：US10922032

申请日：2004-08-19

申请人： Kenji Sakaguchi ,  Kenji Akiyama

发明人： Kenji Sakaguchi ,  Kenji Akiyama

IPC分类号： H03H9/25 ,  H03H3/08 ,  H03H9/05 ,  H03H9/145

CPC分类号： H03H9/059

摘要： A surface acoustic wave device includes a piezoelectric substrate, an interdigital transducer (IDT) electrode, and a connecting portion that is electrically connected with the IDT electrode. The surface acoustic wave device further includes a wiring portion, a portion of which is disposed on the connecting portion, and a bump disposed on the wiring portion. The connecting portion includes a comb-shaped portion at an end of the connecting portion on which the wiring portion is disposed.

摘要翻译： 表面声波装置包括压电基板，叉指式换能器（IDT）电极和与IDT电极电连接的连接部。 表面声波装置还包括布置在连接部分上的布线部分和布置在布线部分上的凸块。 连接部分包括在布置有布线部分的连接部分的端部处的梳状部分。

公开(公告)号：US06479324B2

公开(公告)日：2002-11-12

申请号：US09917994

申请日：2001-07-30

申请人： Kenji Sakaguchi

发明人： Kenji Sakaguchi

IPC分类号： H01L2144

CPC分类号： H03H3/08 ,  H01L41/0477 ,  H01L41/29 ,  H01L41/338

摘要： A method for efficiently and inexpensively manufacturing a piezoelectric element that contains highly corrosion resistant electrodes and has excellent and stable electric characteristics is performing such that dicing occurs without forming any protective film beforehand. According to the method, a wafer is formed to have an electrode including an Al alloy disposed on a piezoelectric substrate made of a piezoelectric material. The wafer is cut while being exposed to plasma using a halogen-containing gas while cooling the wafer with cutting water. The cutting water preferably includes a compound that reacts with Al to form a protective film on a surface of an electrode including an Al alloy.

摘要翻译： 高效廉价地制造含有高耐腐蚀电极并且具有优异和稳定的电特性的压电元件的方法是以预先形成任何保护膜而进行切割而进行的。 根据该方法，晶片形成为具有设置在由压电材料制成的压电基板上的Al合金的电极。 在使用含卤素气体暴露于等离子体的同时切割晶片，同时用切割水冷却晶片。 切割水优选包括与Al反应以在包括Al合金的电极的表面上形成保护膜的化合物。