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1.发明授权
公开(公告)号：US5898106A
公开(公告)日：1999-04-27
申请号：US937494
申请日：1997-09-25
IPC分类号： G01B11/30 , G01B5/28 , G01B7/34 , G01B21/30 , G01Q10/06 , G01Q30/04 , G01Q30/06 , G01Q60/00 , G01Q70/08
CPC分类号： G01Q10/06 , B82Y35/00 , G01B7/34 , G01Q30/04 , Y10S977/852
摘要： A probe-based surface characterization or metrology instrument such as a scanning probe microscope (SPM) or a profilometer is controlled to account for errors in the vertical positioning of its probe and errors in detecting the vertical position of its probe while scanning over relatively large lateral distances. Accounting for these errors significantly improves the measurement of vertical dimensions. These errors are accounted for by subtracting reference scan data acquired from the scanned sample from measurement scan data. The measurement scan data is obtained from an area that includes the feature of interest as well as a portion of a reference area which is preferably located near to the feature of interest and which is preferably featureless. The reference scan data is obtained from an area that includes the reference area and that preferably excludes the features of interest. Subtracting the reference such data from the measurement scan data obtains corrected measurement scan data that accounts for scanning errors and for errors in detecting the probe idiosyncrasies. In order to facilitate process automation, the features of interest can be identified automatically or semi-automatically by operating the instrument in a feature-locating mode to identify distinguishing characteristics of the features of interest such as differences in magnetic or electrical properties between the features of interest and the adjacent features. This procedure is particularly wellsuited for measuring pole tip recession in a magnetic head.
摘要翻译： 控制探针的表面表征或计量仪器，例如扫描探针显微镜（SPM）或轮廓仪，以考虑其探针的垂直定位误差和检测其探针的垂直位置时的误差，同时扫描较大的侧向 距离 考虑到这些错误显着提高了垂直尺寸的测量。 通过从测量扫描数据减去从扫描样本获得的参考扫描数据来解释这些误差。 测量扫描数据从包括感兴趣特征的区域以及优选位于感兴趣特征附近并且优选无特征的参考区域的一部分获得。 参考扫描数据从包括参考区域的区域获得，并且优选排除感兴趣的特征。 从测量扫描数据中减去参考这些数据获得校正的扫描误差的测量扫描数据和检测探针特性的误差。 为了便于过程自动化，可以通过在特征定位模式中操作仪器来自动或半自动地识别感兴趣的特征，以识别感兴趣的特征的区别特征，例如磁性或电特性之间的差异 兴趣和相邻功能。 该过程特别适用于测量磁头中的极尖衰退。
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公开(公告)号：US5204531A
公开(公告)日：1993-04-20
申请号：US835577
申请日：1992-02-14
申请人： Virgil B. Elings , John A. Gurley
发明人： Virgil B. Elings , John A. Gurley
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q10/06 , G02B21/002 , Y10S977/851
摘要： A method of adjusting the scan size of an instrument having piezoelectric scanners, such as a scanning probe microscope, including operating the instrument at a first scan size and adjusting the scan size of the instrument to a second scan size. The instrument is then precycled by scanning in each of x and y directions over substantially maximum excursions in each direction for a number of scan lines less than a complete scan of an area of the second scan size. The precycling settles the sensitivities of the piezoelectric scanners. The instrument is then operated at the second scan size to obtain data indicative of the surface of a scanned object.
摘要翻译： 一种调整具有压电扫描器的仪器的扫描尺寸的方法，例如扫描探针显微镜，包括以第一扫描尺寸操作仪器并将仪器的扫描尺寸调整到第二扫描尺寸。 然后通过在小于第二扫描尺寸的区域的完全扫描的多条扫描线上，在每个方向上的基本上最大偏移上扫描x和y方向中的每一个来对仪器进行预循环。 预循环稳定了压电扫描仪的灵敏度。 然后以第二扫描尺寸操作仪器以获得指示扫描对象的表面的数据。
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公开(公告)号：US5066858A
公开(公告)日：1991-11-19
申请号：US510612
申请日：1990-04-18
申请人： Virgil B. Elings , John A. Gurley
发明人： Virgil B. Elings , John A. Gurley
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/06 , G01Q70/04 , Y10S977/85
摘要： A scanning tunneling microscope is corrected in real time for coupling effects from the scanning electrodes or bias voltage circuit of the microscope on the tunneling current. In an automatic embodiment, a test voltage waveform is applied to the scanning electrodes or bias voltage circuit, the system determines the correction required and corrects the tunneling current signal. A method enables the operator to verify the correction. In other embodiments, predetermined values of the parameters of the coupling effects are entered by the operator; the system determines the correction required from these values and corrects the tunneling current signal with this correction; the correction is verified, and the operator enters an adjustment of the values, if the corrections did not sufficiently correct for the coupling effects.
摘要翻译： 扫描隧道显微镜实时校正显微镜的扫描电极或偏压电路对隧道电流的耦合效应。 在自动实施例中，将测试电压波形施加到扫描电极或偏置电压电路，系统确定所需的校正并校正隧道电流信号。 一种方法使操作员能够验证校正。 在其他实施例中，耦合效应的参数的预定值由操作者输入; 系统从这些值确定所需的校正值，并用该校正来校正隧道电流信号; 验证校正，并且如果校正对于耦合效应没有充分校正，则操作者输入值的调整。
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公开(公告)号：USRE36488E
公开(公告)日：2000-01-11
申请号：US82320
申请日：1998-05-21
申请人： Virgil B. Elings , John A. Gurley
发明人： Virgil B. Elings , John A. Gurley
摘要： An atomic force microscope in which a probe tip is oscillated at a resonant frequency and at amplitude setpoint and scanned across the surface of a sample, which may include an adsorbed water layer on its surface, at constant amplitude in intermittent contact with the sample and changes in phase or in resonant frequency of the oscillating are measured to determine adhesion between the probe tip and the sample. The setpoint amplitude of oscillation of the probe is greater than 10 nm to assure that the energy in the lever arm is much higher than that lost in each cycle by striking the sample surface, thereby to avoid sticking of the probe tip to the sample surface. In one embodiment the probe tip is coated with an antibody or an antigen to locate corresponding antigens or antibodies on the sample as a function of detected variation in phase or frequency. In another embodiment, the frequency of oscillation of the probe tip is modulated and relative changes in phase of the oscillating probe tip observed in order to measure the damping of the oscillation due to the intermittent or constant tapping of the surface by the tip. In a further embodiment, the slope of the phase versus frequency curve is determined and outputted during translating of the oscillating probe. Force dependent sample characteristics are determined by obtaining data at different tapping amplitude setpoints and comparing the data obtained at the different tapping amplitude setpoints.
摘要翻译： 原子力显微镜，其中探针尖端以共振频率和幅度设定点振荡，并扫描横跨样品的表面，其可以包括在其表面上的吸附水层，以恒定的振幅与样品间歇接触并改变 测量振荡的同相或谐振频率以确定探针尖端和样品之间的粘附。 探头的振荡设定值振幅大于10nm，以确保杠杆臂中的能量比通过撞击样品表面在每个周期中损失的能量高得多，从而避免探针尖端粘附到样品表面。 在一个实施方案中，探针尖端被抗体或抗原包被，以根据检测到的相位或频率的变化来确定样品上相应的抗原或抗体。 在另一个实施例中，调节探针尖端的振荡频率并观察振荡探针尖端的相位的相对变化，以便测量由于尖端间断或不断地敲击表面而引起的振荡的阻尼。 在另一个实施例中，在摆动探针的平移期间确定并输出相位与频率曲线的斜率。 通过在不同的敲击振幅设定点获得数据并比较在不同的敲击振幅设定点处获得的数据来确定力依赖样本特征。
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公开(公告)号：US5224376A
公开(公告)日：1993-07-06
申请号：US831876
申请日：1992-02-06
申请人： Virgil B. Elings , John A. Gurley , Peter Maivald
发明人： Virgil B. Elings , John A. Gurley , Peter Maivald
CPC分类号： G01Q10/065 , B82Y35/00 , G01Q60/363 , Y10S977/851
摘要： This invention is an atomic force microscope having a digitally calculated feedback system which can perform force spectroscopy on a sample in order to map out the local stiffness of the sample in addition to providing the topography of the sample. It consists of a three-dimensional piezoelectric scanner, scanning either the sample or a force sensor. The force sensor is a contact type with a tip mounted on a cantilever and a sensor to detect the deflection of the lever at the tip. The signal from the sensor goes to an A-D convertor and is then processed by high-speed digital electronics to control the vertical motion of the sample or sensor. In operation, the digital electronics raise and lower the piezoelectric scanner during the scan to increase and decrease the force of the tip on the sample and to use the sensor signal to indicate the change in height of the tip to measure the which is the spring constant of the sample. This constant can be determined with nanometer spatial resolution. At the same time, the instrument can determine the topography of the sample with nanometer resolution. In an alternate embodiment, the lever is connected to a separate piezoelectric driver to vary the force on the tip. This improved AFM can also be used to periodically reset the force at which the tip contacts the sample and quickly replace the tip on the sample in the event that the tip loses contact with the surface.
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公开(公告)号：US5189906A
公开(公告)日：1993-03-02
申请号：US687684
申请日：1991-04-19
申请人： Virgil B. Elings , John A. Gurley , Dror Sarid
发明人： Virgil B. Elings , John A. Gurley , Dror Sarid
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/02 , G01Q70/02 , Y10S977/87
摘要： This is an atomic force microscope in which the sensor can be built as a very small integrated structure. The sensor utilizes optical interference and can be operated in either the contact mode for high resolution or in the non-contact mode to measure electric and magnetic fields. One configuration of this microscope is a stand-alone configuration in which the microscope can be placed on or be suspended above large samples for scanning of small local areas thereof. The sensor is built into a scanner so that the sensor can be scanned over a stationary sample.
摘要翻译： 这是一种原子力显微镜，其中传感器可以构建为非常小的集成结构。 传感器利用光学干涉，可以以高分辨率的接触模式或非接触模式来操作，以测量电场和磁场。 该显微镜的一个结构是独立的构造，其中显微镜可以放置在大样本上或悬挂在大样本上以扫描其小局部区域。 传感器内置在扫描仪中，以便传感器可以扫描在静止的样品上。
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公开(公告)号：US4871938A
公开(公告)日：1989-10-03
申请号：US206091
申请日：1988-06-13
申请人： Virgil B. Elings , John A. Gurley
发明人： Virgil B. Elings , John A. Gurley
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q10/04 , H01L41/0906 , Y10S977/872
摘要： A piezoelectric positioning device for controlling the three dimensional horizontal and vertical movement of a tip relative to the sample in a scanning tunneling microscope. A thin walled cone or cylinder shaped member formed of piezoelectric material having an outer surface and an inner surface. A tip member positioned at the bottom of the cone or cylindrical member. A plurality of substantially similar electrode members positioned around one of the surfaces of the cone or cylinder shaped member to form opposite pairs of electrodes to control the horizontal movement of the tip in two of the three dimensions in accordance with voltages applied to the pairs of electrodes. A unitary member positioned around the other of the surfaces of the cone or cylinder shaped member to form a unitary electrode to control the vertical movement of the tip in the third dimension in accordance with voltage applied to the unitary electrode.
摘要翻译： 一种用于在扫描隧道显微镜中控制尖端相对于样品的三维水平和垂直运动的压电定位装置。 由具有外表面和内表面的压电材料形成的薄壁锥体或圆柱形构件。 定位在锥体或圆柱形构件的底部的尖端构件。 多个基本相似的电极构件，其定位在锥体或圆柱形构件的一个表面周围，以形成相对的电极对，以根据施加到电极对的电压来控制尖端在三维中的两个中的水平移动 。 围绕锥体或圆柱形构件的另一个表面定位的整体构件以形成整体电极，以根据施加到单一电极的电压来控制尖端在第三维度中的垂直运动。
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公开(公告)号：USRE37203E1
公开(公告)日：2001-06-05
申请号：US09034175
申请日：1998-03-04
申请人： Virgil B. Elings , John A. Gurley
发明人： Virgil B. Elings , John A. Gurley
IPC分类号： H01J3726
CPC分类号： G01Q10/065 , G01Q60/16
摘要： A feedback control system for enhancing the feedback loop characteristics of a vertical axis control in a scanning tunneling microscope or the like, including a tip member for positioning relative to a surface for measuring the topography of the surface. A horizontal control coupled to the tip for providing a plurality of adjacent horizontal scans across the surface. A vertical control coupled to the tip for providing a vertical control of the tip during the plurality of adjacent horizontal scans. A local error signal produced in accordance with the vertical position of the tip relative to the surface in real time during the plurality of adjacent horizontal scans. A storage member responsive to the local error signal for storing the local error signal for producing a delayed error signal representing the vertical position of the tip relative to the surface at an earlier time, and a vertical tip control signal coupled to the vertical control and formed by combining the local error signal and the delayed error signal for enhancing the control of the vertical position of the tip.
摘要翻译： 一种用于增强扫描隧道显微镜等中的垂直轴控制的反馈环路特性的反馈控制系统，包括用于相对于用于测量表面的形貌的表面定位的尖端构件。 耦合到尖端的水平控制，用于跨越表面提供多个相邻的水平扫描。 耦合到尖端的垂直控制，用于在多个相邻水平扫描期间提供尖端的垂直控制。 在多个相邻水平扫描期间实时地根据尖端相对于表面的垂直位置产生的局部误差信号。 响应于本地误差信号的存储构件，用于存储局部误差信号，用于产生代表尖端相对于表面在较早时间的垂直位置的延迟误差信号，以及垂直尖端控制信号，其耦合到垂直控制并形成 通过组合局部误差信号和延迟误差信号来增强对尖端的垂直位置的控制。
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公开(公告)号：US5306919A
公开(公告)日：1994-04-26
申请号：US947831
申请日：1992-09-21
申请人： Virgil B. Elings , John A. Gurley
发明人： Virgil B. Elings , John A. Gurley
CPC分类号： G01Q10/04 , B82Y35/00 , G02B21/002 , G02B21/26 , Y10S977/872
摘要： A two dimensional piezoelectric positioning device of the type including a thin walled cylindrical shaped member of piezoelectric material. A plurality of substantially rectangular shaped members are positioned around one surface of the cylindrical shaped member to form opposite pairs of electrodes to control the two dimensional movement in accordance with voltages applied to the pairs of electrodes. Each rectangular shaped member is split into at least two electrode portions and with particular polarity voltages applied to the individual electrode portions to maintain a substantially constant length for the cylindrical shaped member during the two dimensional movement.
摘要翻译： 一种二维压电定位装置，其类型包括压电材料的薄壁圆柱形构件。 多个基本矩形的构件围绕圆柱形构件的一个表面定位，以形成相对的电极对，以根据施加到电极对的电压来控制二维运动。 每个矩形构件被分成至少两个电极部分，并且具有特定的极性电压施加到各个电极部分，以在两维运动期间保持圆柱形构件的基本上恒定的长度。
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公开(公告)号：US5266801A
公开(公告)日：1993-11-30
申请号：US009076
申请日：1993-01-26
申请人： Virgil B. Elings , John A. Gurley
发明人： Virgil B. Elings , John A. Gurley
CPC分类号： G01Q20/04 , B82Y35/00 , G01Q20/02 , G01Q60/16 , G01Q60/34 , Y10S977/849 , Y10S977/851 , Y10S977/86 , Y10S977/861 , Y10S977/862 , Y10S977/863 , Y10S977/869 , Y10S977/873 , Y10S977/875
摘要： A microscope of the scanning probe variety. This device circumvents one of the serious problems of prior art scanning probe microscopes, i.e. that the probe is always near or on the surface of the object being scanned, creating the danger of damaging the probe on the surface especially on large scans or at high scan speeds. The microscope of this invention jumps the probe over the surface, causing the probe to be near or on the surface during only a very limited portion of the scan and therefore able to scan quickly over rough surfaces without undue damage to the probe or surface. Both scanning tunneling microscopes and atomic force microscopes employing the invention are disclosed. The scanning tunneling microscope is shown with both digital and analog control of the movement of the probe.
摘要翻译： 扫描探头品种的显微镜。 该装置避免了现有技术的扫描探针显微镜的严重问题之一，即探头总是靠近被扫描物体或表面上，造成了损伤表面的探针的危险，特别是在大扫描或高扫描时 速度。 本发明的显微镜将探针跳过表面，使得探针仅在扫描的非常有限的部分期间靠近或在表面上，因此能够在粗糙表面上快速扫描，而不会对探针或表面造成过度损伤。 公开了采用本发明的扫描隧道显微镜和原子力显微镜。 扫描隧道显微镜显示了数字和模拟控制探头的运动。
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