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    Method of making an electronic device cooling system
    1.
    发明申请
    Method of making an electronic device cooling system 失效
    制造电子设备冷却系统的方法

    公开(公告)号：US20070131645A1

    公开(公告)日：2007-06-14

    申请号：US11297868

    申请日：2005-12-09

    申请人： Kevin Matthew Durocher ,  Stacey Goodwin ,  Ernest Balch ,  Christopher Kapusta

    发明人： Kevin Matthew Durocher ,  Stacey Goodwin ,  Ernest Balch ,  Christopher Kapusta

    IPC分类号： C23F1/00 ,  H01L21/302

    CPC分类号： H01L23/473 ,  F28F3/12 ,  H01L2924/0002 ,  H05K3/108 ,  H01L2924/00

    摘要： A method is provided. The method includes forming a conductive layer on an inner surface of a substrate and providing a sacrificial layer over the conductive layer. The method includes forming a plurality of channels in the sacrificial layer and plating the sacrificial layer to substantially fill the plurality of channels with a plating material comprising conducting material. The method also includes etching the sacrificial layer to form a conducting structure having fins where conducting material remains separated by microchannels where the sacrificial layer is etched.

    摘要翻译： 提供了一种方法。 该方法包括在衬底的内表面上形成导电层并在导电层上提供牺牲层。 该方法包括在牺牲层中形成多个通道，并且使牺牲层电镀以使包含导电材料的镀覆材料基本上填充多个通道。 该方法还包括蚀刻牺牲层以形成具有翅片的导电结构，其中导电材料保持由其中蚀刻牺牲层的微通道分离。

    Method and apparatus for fabricating waveguides and waveguides fabricated therefrom
    5.
    发明申请
    Method and apparatus for fabricating waveguides and waveguides fabricated therefrom 失效
    用于制造由其制造的波导和波导的方法和装置

    公开(公告)号：US20060002676A1

    公开(公告)日：2006-01-05

    申请号：US11178657

    申请日：2005-07-08

    申请人： Ernest Balch ,  Leonard Douglas ,  Min-Yi Shih

    发明人： Ernest Balch ,  Leonard Douglas ,  Min-Yi Shih

    IPC分类号： G02B6/10

    CPC分类号： G02B6/1228 ,  G02B6/12004 ,  G02B6/138 ,  G02B6/4228 ,  G02B6/43

    摘要： A method for adaptively fabricating a waveguide comprises: measuring misplacement of a photonic device relative to a substrate; generating computer readable instructions for using a plurality of graphics primitives to form the waveguide; and photocomposing the waveguide on the substrate in accordance with the computer readable instructions. A reticle comprises a plurality of graphics primitives with at least one of the plurality of graphics primitives comprising a tapered end. A waveguide comprises a plurality of waveguide segments with each of the plurality of waveguide segments comprising a tapered end and being adjacent to at least one other of the plurality of waveguide segments.

    摘要翻译： 用于自适应地制造波导的方法包括：测量光子器件相对于衬底的错位; 生成用于使用多个图形基元形成所述波导的计算机可读指令; 并根据计算机可读指令将基片上的波导照相。 标线板包括多个图形基元，其中所述多个图形基元中的至少一个包括渐缩端。 波导包括多个波导段，其中多个波导段中的每一个包括锥形端并与多个波导区段中的至少另一个相邻。

    METHOD FOR PROTECTING THE DIAPHRAGM AND EXTENDING THE LIFE OF SIC AND/OR SI MEMS MICROVALVES
    6.
    发明申请
    METHOD FOR PROTECTING THE DIAPHRAGM AND EXTENDING THE LIFE OF SIC AND/OR SI MEMS MICROVALVES 有权
    保护膜片并延长SIC和/或SI MEMS微孔的寿命的方法

    公开(公告)号：US20050098749A1

    公开(公告)日：2005-05-12

    申请号：US10876072

    申请日：2004-06-24

    申请人： Glenn Claydon ,  Ernest Balch

    发明人： Glenn Claydon ,  Ernest Balch

    IPC分类号： B81C1/00 ,  F15C5/00 ,  F16K99/00 ,  F16K31/12

    CPC分类号： B81C1/00492 ,  F15C5/00 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0046 ,  F16K99/0048 ,  F16K2099/0074 ,  F16K2099/008

    摘要： A microvalve and a method of forming a diaphragm stop for a microvalve. The microvalve includes a first layer and a diaphragm member to control the flow of fluid through the microvalve. The method comprises the step of forming a contoured shaped recess extending inward from a surface of the layer by using a laser to remove material in a series of areas, at successively greater depths extending inward from said surface. Preferably, the recess has a dome shape, and may be formed by a direct-write laser operated via a computer aided drawing program running on a computer. For example, CAD artwork files, comprising a set of concentric polygons approximating circles, may be generated to create the dome structure. The laser ablation depth can be controlled by modifying the offset step distance of the polygons and equating certain line widths to an equivalent laser tool definition. Preferably, the laser tool definition is combined with the CAD artwork, which defines a laser path such that the resulting geometry has no sharp edges that could cause the diaphragm of the valve to tear or rupture.

    摘要翻译： 微型阀和形成用于微型阀的隔膜止动件的方法。 微型阀包括第一层和隔膜构件，以控制通过微型阀的流体流动。 该方法包括以下步骤：在从所述表面向内延伸的连续更大的深度处，通过使用激光来形成从层的表面向内延伸的轮廓形状的凹槽，以移除一系列区域中的材料。 优选地，凹部具有圆顶形状，并且可以通过在计算机上运行的计算机辅助绘图程序来操作的直写激光器形成。 例如，可以生成包括近似圆的一组同心多边形的CAD图形文件，以创建圆顶结构。 可以通过修改多边形的偏移步距并将某些线宽等同于等效的激光工具定义来控制激光烧蚀深度。 优选地，激光工具定义与CAD图形组合，其限定激光路径，使得所得到的几何形状没有尖锐边缘，其可能导致阀的隔膜撕裂或破裂。