摘要:
This invention relates to a method and an apparatus for forming a film, which are suitable for forming a film of a semiconductor, dielectric, metal, insulator, or organic substance. In order to form a film of high purity and quality at high speed, a particle beam such as an ion beam, an electron beam, or a plasma is applied to a sputtering target comprising a substance formed by bonding atoms or molecules with either van der Waals forces or hydrogen bonding forces, the particles are sputtered thereby from the target, fly in the space in the vacuum chamber, reach the substrate on which they are deposited to form a desired film. To form an organic film free of pinholes, impurities, or disorder in the molecular composition and arrangement in a large area at high speed, a particle beam of about 10 eV or less is applied to the target comprising an organic compound disposed in a vacuum, the particle beam having a level of energy as high as can break the molecular crystalline bonds and not high enough to break the nonmolecular crystalline bonds, out of the molecular crystalline bonds by van der Waals forces connecting the atoms constituting the organic compound and the nonmolecular crystalline bonds by covalent bonds, for example, other than van der Waals forces, and the sputtered particles from the target are deposited on the substrate facing the target to form a desired film of an organic compound.
摘要:
An insulator film can be formed at a low temperature without any damage to a substrate to be treated by a plasma in a plasma treatment system which comprises a magnetron for generating a microwave, an isolator for isolating a wave guide from the magnetron, a discharge tube for generating a plasma, the wave guide for leading the microwave from the magnetron to the discharge tube, a vacuum chamber integrally formed together with the discharge tube, an evaporation source provided in the vacuum chamber, a substrate to be treated and provided at a position to sandwich a stream of the plasma between the substrate and the evaporation source, electromagnets provided around the discharge tube and the vacuum chamber, and a manipulator for manipulating the substrate, the electromagnets generating a magnetic field to confine the stream of the plasma.
摘要:
A cusp field is applied between a plasma source of a vacuum chamber of a plasma anodization system and a substance such as a semiconductor substrate or a metal plate to be oxidized so that the substance may not be adversely affected by the plasma. The temperature control can be conducted independently of the plasma generating condition because the substance to be treated is not adversely affected by the plasma in a direct manner.
摘要:
An endoscope apparatus comprises a scope main body which has an insertion section inserted into a specimen, a box body section which is used in combination with the scope main body, and an amplification device which is provided between the scope main body and the box body section and amplifies the normal function of at least one of the scope main body and the box body section.
摘要:
A vehicle height sensor includes switching circuits which are turned on and off in accordance with height of a vehicle. The vehicle height sensor is driven when a drive signal is outputted to the sensor. A preset voltage is fed to terminals of the respective switching circuits via resistors. Voltages at the terminals are outputted as vehicle height data having bits corresponding to the respective switching circuits. When the output of the drive signal is suspended, the vehicle height data are read as vehicle height sensor malfunction detecting data. The malfunction detecting data are compared to preset reference data. The vehicle height sensor is judged to be wrong when the malfunction detecting data differ from the preset reference data.
摘要:
A protective body packages an exterior of a capsule endoscope body of a capsule endoscope such that a field of vision of an objective lens system is not obstructed. As a result, even if the capsule endoscope collides against a wall surface inside an object being examined, a circular cylinder portion of the protective body is elastically deformed so that the protective body itself becomes a shock absorbing portion and protects each portion inside a case as well as actual LED covers and a lens cover. As a result, the capsule endoscope body can be recovered in an undamaged condition, and unnecessary costs can be reduced by reusing the capsule endoscope body.
摘要:
A highly corrosive-resistant metal having a high purity and a specific plane index is manufactured by ion beam deposition (IBD). A thin film having less defects and impurities is obtained. A magnetoresistant effect film for a magnetoresistant effect type magnetic head which is highly corrosion-resistant and exhibits excellent characteristics can be formed. In IBD according to the present invention, metal ions are provided with adjusted ion energy of 10 to 100 eV, and a metal having a particular mass number is selected by a mass separation electromagnet.
摘要:
A highly corrosive-resistant metal having a high purity and a specific plane index is manufactured by ion beam deposition (IBD). A thin film having less defects and impurities is obtained. A magnetoresistant effect film for a magnetoresistant effect type magnetic head which is highly corrosion-resistant and exhibits excellent characteristics can be formed. In IBD according to the present invention, metal ions are provided with adjusted ion energy of 10 to 100 eV, and a metal having a particular mass number is selected by a mass separation electromagnet.
摘要:
A vehicle height sensor includes a switching circuit which is turned on and off in accordance with a vehicle height. When a drive signal is outputted to the vehicle height sensor, the vehicle height sensor is activated. A connector is connected to an output side of the switching circuit. A digital vehicle height data signal is transmitted from the switching circuit via the connector. A preset signal is outputted from the vehicle height sensor to the connector when a check signal is generated. The preset signal represents preset check data. A data receives the preset signal via the connector and reads the check data from the preset signal. The read check data is compared with a predetermined reference data. The connector is judged to be wrong when the read check data differs from the reference data.
摘要:
An endoscope comprises an inserting unit main body, and a head unit that is freely detachably attached to the distal end of the inserting unit main body and that includes an image pickup device which picks up an image of an object and a light emitting element which irradiates illumination light to the object. A holding member holds the head unit such that distal extension of the holding member angles the head unit in a radial direction orthogonal to a longitudinal axis of the distal end of the inserting unit main body.