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1.发明授权
公开(公告)号：US5422498A
公开(公告)日：1995-06-06
申请号：US227241
申请日：1994-04-13
IPC分类号： G01R31/28 , G01R31/311 , G01R31/00
CPC分类号： G01R31/311 , G01R31/2853
摘要： The invention provides an apparatus for diagnosing a void within a conductive material for interconnections of semiconductor integrated circuits. A laser beam irradiating section is provided for supplying a thermal wave to interconnections of the semiconductor integrated circuits to cause a rise of a temperature of the conductive material due to a thermal accumulation around a void within the conductive material, the thermal wave supplying section being able to move in a plane for accomplishment of a scanning operation of the thermal wave supply. A voltage applying section is connected to the interconnections. A current detecting section is connected to the interconnections for detecting an amount of an electrical current flowing through any part of the interconnections to sense a variation of the amount thereof on account of the rise of the temperature of the conductive material due to the thermal accumulation around the void within the conductive material so as to detect any void within the conductive material.
摘要翻译： 本发明提供一种用于诊断用于半导体集成电路的互连的导电材料内的空隙的装置。 提供激光束照射部分，用于将热波提供给半导体集成电路的互连，导致由导电材料内的空隙周围的热积聚引起的导电材料的温度升高，热波供应部能够 在飞机中移动以完成热波供应的扫描操作。 电压施加部连接到互连。 电流检测部分连接到互连件，用于检测流过互连部分的电流量，以便由于热累积导致的导电材料的温度升高而感测其量的变化 导电材料内的空隙，以便检测导电材料内的任何空隙。
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2.发明授权
公开(公告)号：US5521516A
公开(公告)日：1996-05-28
申请号：US354088
申请日：1994-12-06
IPC分类号： G01R31/302 , G01R31/307 , H01L21/66 , G01R1/04
CPC分类号： G01R31/307
摘要： A semiconductor integrated circuit fault analyzing apparatus includes an electron beam tester and controller. The electron beam tester includes an electron gun assembly for generating a primary electron beam and forms a voltage contrast image on the basis of a detection amount of secondary electrons obtained by irradiating the primary electron beam from the electron gun assembly onto a semiconductor integrated circuit serving as a target to be tested and supplied with a test pattern signal, thereby specifying a faulty circuit portion of the semiconductor integrated circuit using the formed voltage contrast image. The controller sets, immediately before the test pattern signal is supplied to the semiconductor integrated circuit, at least one of a power and a signal which are supplied to the semiconductor integrated circuit to be a voltage different from a voltage obtained in the presence of the test pattern signal to cause the electron beam tester to acquire a voltage contrast image free from charge-up phenomena in synchronism with the start of supplying the test pattern signal.
摘要翻译： 半导体集成电路故障分析装置包括电子束测试器和控制器。 该电子束测试器包括一个用于产生一次电子束的电子枪组件，并且基于通过将来自电子枪组件的一次电子束照射到半导体集成电路而获得的二次电子的检测量形成电压对比图像， 要测试并提供测试图案信号的目标，从而使用形成的电压对比图像指定半导体集成电路的故障电路部分。 控制器将紧接在测试图案信号提供给半导体集成电路之前，将提供给半导体集成电路的功率和信号中的至少一个设置为与存在测试时获得的电压不同的电压 模式信号使电子束测试仪与开始提供测试图案信号同步地获取没有充电现象的电压对比图像。
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3.发明授权
公开(公告)号：US5703492A
公开(公告)日：1997-12-30
申请号：US370888
申请日：1995-01-10
IPC分类号： G01R31/302 , G01R31/319 , H01L21/66 , G01R31/00
CPC分类号： G01R31/31912
摘要： In a fault analysis of large-scale integrated (LSI) circuits, a potential distribution image of a non-defective product and another potential distribution image of a defective product are displayed alternately and continuously in time, so that it is possible to acquire in real time an image of any location within a whole surface of the LSI chip. As a result, it can be viewed as if the potential distribution image of the non-defective product and the potential distribution image of the defective product are overlapped or superimposed with over time. Accordingly, a different portion between the non-defective and defective potential distribution images can be seen distinguishably from a coincident portion between the non-defective and defective potential distribution images, so that it is possible to trace the different portion in real time.
摘要翻译： 在大规模集成（LSI）电路的故障分析中，无缺陷产品的潜在分布图像和缺陷产品的另一个潜在分布图像被及时地交替地和连续地显示，使得可以实际获取 时间是LSI芯片整个表面内的任何位置的图像。 结果，可以看出，无缺陷产品的潜在分布图像和缺陷产品的潜在分布图像随时间重叠或叠加。 因此，可以从无缺陷和缺陷电位分布图像之间的重合部分区分出不缺陷和缺陷电位分布图像之间的不同部分，从而可以实时追踪不同部分。
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4.发明授权Dynamic fault imaging system using electron beam and method of analyzing fault 失效使用电子束的动态故障成像系统和故障分析方法
公开(公告)号：US5548211A
公开(公告)日：1996-08-20
申请号：US400199
申请日：1995-03-03
申请人： Tohru Tujide , Toyokazu Nakamura , Kiyoshi Nikawa
发明人： Tohru Tujide , Toyokazu Nakamura , Kiyoshi Nikawa
IPC分类号： G01R31/305 , G01R31/28
CPC分类号： G01R31/305
摘要： A dynamic fault analyzing system discontinuously radiates an electron beam onto a semiconductor integrated circuit device applied with a test pattern for monitoring a secondary electron beam produced in the semiconductor integrated circuit device, and the intensity of the secondary electron beam is varied depending upon combination of voltage level and topography of a wiring pattern incorporated in the semiconductor integrated circuit device, wherein a fault is detectable from discrepancy between variation of the secondary electron beam produced in a defective product and variation of the secondary electron beam produced in an excellent product; however, the variation of the secondary electron beam contains topographic information, and the failure origin is easily specified on an image produced on the basis of the topographic information.
摘要翻译： 动态故障分析系统不连续地将电子束辐射到应用了用于监测在半导体集成电路器件中产生的二次电子束的测试图案的半导体集成电路器件上，并且二次电子束的强度根据电压的组合而变化 包含在半导体集成电路器件中的布线图形的电平和形状，其中可以从在不良产品中产生的二次电子束的变化和在优异的产品中产生的二次电子束的变化之间的差异来检测故障; 然而，二次电子束的变化包含地形信息，并且容易地根据地形信息产生的图像指定故障起点。
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5.发明授权Apparatus method for testing opening state for hole in semiconductor device 失效用于测试半导体器件中的孔的开启状态的装置方法公开(公告)号：US06177681B1
公开(公告)日：2001-01-23
申请号：US09236332
申请日：1999-01-25
申请人： Toyokazu Nakamura
发明人： Toyokazu Nakamura
IPC分类号： G01N2186
CPC分类号： G01N21/9501
摘要： A testing apparatus for an opening state of a hole in a semiconductor device includes a laser light radiating system. The semiconductor device has the conductive layer and the insulating layer formed on the conductive layer, and the hole is formed in the insulating layer at aim to reach the conductive layer. The laser light radiating system radiates to a hole, a laser light having a wave length determined based on a work function of a material of a conductive layer and a work function of a material of an insulating layer. A detector detects photoelectrons emitted through a portion of the hole to which the laser light is irradiated. A charge supplementing mechanism supplies electrons to the conductive layer.
摘要翻译： 用于半导体器件中的孔的打开状态的测试装置包括激光辐射系统。 半导体器件具有形成在导电层上的导电层和绝缘层，并且在绝缘层中形成孔以达到导电层。 激光辐射系统辐射到孔，具有基于导电层的材料的功函数和绝缘层的材料的功函数确定的波长的激光。 检测器检测通过激光照射的孔的一部分发射的光电子。 电荷补充机构向导电层提供电子。
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公开(公告)号：US07204355B2
公开(公告)日：2007-04-17
申请号：US10059325
申请日：2002-01-31
IPC分类号： F16F7/12
摘要： A shock absorbing structure of a two-wheeled vehicle capable of sufficiently absorbing shock and desirably maintain the steerability of the two-wheeled vehicle. The structure includes a shock absorbing member projecting from a front wheel, wherein the shock absorbing member is crashed when the vehicle collides with an obstacle so as to absorb shock. A ceiling wall of the shock absorbing member is located at such a position that the ceiling wall does not block a forward viewing area for a driver. A center of a leading end contact surface of the shock absorbing member is located at a position higher than a vertical position of a center of gravity G of both a motorcycle and the driver, and right and left side surfaces of the shock absorbing member are offset to a center of a vehicular body from right and left side surfaces of the motorcycle.
摘要翻译： 一种能够充分吸收冲击并期望地保持两轮车辆的操纵性的两轮车辆的减震结构。 该结构包括从前轮突出的减震构件，其中当车辆与障碍物碰撞时，减震构件坠毁，以便吸收冲击。 冲击吸收构件的顶壁位于这样的位置，即顶壁不阻挡驾驶员的向前观察区域。 减震构件的前端接触面的中心位于高于摩托车和驾驶员的重心G的垂直位置的位置，并且减震构件的左右侧面偏移 从摩托车的右侧和左侧表面到车身的中心。
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公开(公告)号：US07168732B2
公开(公告)日：2007-01-30
申请号：US10374040
申请日：2003-02-27
CPC分类号： B62J27/00 , B60R21/16 , B60R2021/0088
摘要： In a compact vehicle in which a vehicular component engaged with an inflated and extended air bag is arranged in the inflated and extended range of the air bag that can constrain a rider on a seat provided to the rear of a body frame from a forward direction, even if there is the vehicular component engaged with the air bag in an inflated and extended state, space for the air bag to be fully inflated and extended is secured and in addition, the inflated and extended air bag is securely supported. A vehicular component can be turned between an inactuated position in which an air bag is folded and an actuated position in which the vehicular component is displaced from the inactuated position, being engaged with and supporting a part of the inflated and extended air bag and is supported by fixed supporting means.
摘要翻译： 在紧凑型车辆中，其中与膨胀和延伸的气囊接合的车辆部件布置在气囊的膨胀和延伸的范围内，该气囊可以从向前的方向限制设置在车架的后部的座椅上， 即使在充气膨胀状态下与气囊接合的车辆部件被固定，也能够确保充气膨胀空间的充气膨胀空间。 车辆部件可以在其中折叠气囊的失效位置和车辆部件从失效位置移动的致动位置之间转动，与膨胀和延伸的气囊的一部分接合并支撑，并被支撑 通过固定支持手段。
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公开(公告)号：US5105129A
公开(公告)日：1992-04-14
申请号：US644652
申请日：1991-01-23
IPC分类号： B60S1/08
CPC分类号： B60S1/0818 , B60S1/0859 , Y10S15/15 , Y10S318/02
摘要： A raindrop detection wiper is provided with a raindrop detector for detecting a raindrop, a wiper motor for actuating a wiper blade, an automatic stop mechanism for stopping the wiper blade at a predetermined position, a control mechanism comprising a current detector, a memory and the like for operating intermittently or stopping the wiper motor in accordance with a signal from the raindrop detector and memory data stored by the memory. According to this invention, it is possible to wipe the wiping surface automatically by detecting the raindrop and drive current of the wiper motor even in a very light rain.
摘要翻译： 雨滴检测刮水器具有用于检测雨滴的雨滴检测器，用于致动刮水片的刮水器马达，用于将刮水片停止在预定位置的自动停止机构，包括电流检测器，存储器和 类似于间歇地操作或根据来自雨滴检测器的信号和由存储器存储的存储器数据来停止刮水器马达。 根据本发明，即使在很小的雨中也能够通过检测雨刮器电动机的雨滴和驱动电流来自动擦拭擦拭面。
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9.发明授权Method of generating two-wheeled vehicle dummy model and apparatus for performing a collision simulation of a two-wheeled vehicle 失效生成用于执行两轮车辆的碰撞模拟的两轮车辆虚拟模型和装置的方法公开(公告)号：US08612191B2
公开(公告)日：2013-12-17
申请号：US11811492
申请日：2007-06-11
申请人： Hideo Namiki , Toyokazu Nakamura
发明人： Hideo Namiki , Toyokazu Nakamura
CPC分类号： G06F17/5018 , G06F17/5095 , G09B23/28 , G09B23/32 , Y02T10/82
摘要： A method of and an apparatus for performing a collision simulation on a two-wheeled vehicle using a virtual model of a dummy developed for use on four-wheeled vehicles.
摘要翻译： 一种使用虚拟开发的用于四轮车辆的虚拟虚拟模型对两轮车辆进行碰撞模拟的方法和装置。
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公开(公告)号：US06764099B2
公开(公告)日：2004-07-20
申请号：US10091560
申请日：2002-03-07
IPC分类号： B60R1922
CPC分类号： B62J27/00 , B62D21/152
摘要： In order to have an external force heading from the front toward the occupant received, a bumper member extending substantially along the length of the vehicle is disposed under or by the sides of the cabin (riding space). The shock absorbing members are connected at the rear ends of the bumper member. Even in the case of the vehicle in which it is difficult to dispose the shock absorbing member at the front portion of the vehicle within the range of the length of the vehicle for example, when an impact load is exerted to such a vehicle, the impact load may be efficiently absorbed. As a consequent the riding space for an occupant can be maintained. The shock absorbing body may be constructed of an upper shock absorbing member and a lower shock absorbing member. The upper and lower shock absorbing members may be formed of two types of members having different crushing features. Accordingly, since the shock absorbing body is constructed by combining two members having different crushing features, the crushing extent of the shock absorbing body may preferably be determined corresponding to the two-wheel vehicle.
摘要翻译： 为了具有从前方朝向乘员接收的外力，基本上沿着车辆长度延伸的保险杠构件设置在车厢的侧面（乘坐空间）的下方或由车厢的侧面（乘坐空间））。 减震构件在保险杠构件的后端连接。 即使在车辆的前部难以将车辆的前部部分设置在车辆的长度范围内的车辆的情况下，当对车辆施加冲击载荷时，也会产生冲击 负载可能被有效地吸收。 因此，可以保持乘客的乘坐空间。 冲击吸收体可以由上部减震构件和下部减震构件构成。 上下冲击吸收构件可以由具有不同破碎特征的两种类型的构件形成。 因此，由于通过组合具有不同破碎特征的两个构件来构造冲击吸收体，因此优选地可以相应于两轮车来确定减震体的破碎范围。
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