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    RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE RESIST COMPOSITION
    3.
    发明申请
    RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE RESIST COMPOSITION 审中-公开
    耐蚀组合物和图案形成方法使用耐腐蚀组合物

    公开(公告)号：US20080305429A1

    公开(公告)日：2008-12-11

    申请号：US12135578

    申请日：2008-06-09

    申请人： Hiroshi SAEGUSA ,  Kenji WADA

    发明人： Hiroshi SAEGUSA ,  Kenji WADA

    IPC分类号： G03F7/20 ,  G03F7/004

    CPC分类号： G03F7/0397 ,  G03F7/0046 ,  G03F7/0758

    摘要： A resist composition, includes: (A) a resin of which solubility in an alkali developer increases under an action of an acid; (B) a compound capable of generating an acid upon irradiation with actinic rays or radiation; (C) a hydrophobic resin; and (D) a solvent, wherein a difference between a weight average molecular weight of the resin (A) and a weight average molecular weight of the hydrophobic resin (C) satisfies the following formula: weight average molecular weight of resin (A)−weight average molecular weight of hydrophobic resin (C)≧about 3,000; and a pattern forming method uses the resist composition.

    摘要翻译： 抗蚀剂组合物包括：（A）在酸的作用下在碱性显影剂中的溶解度增加的树脂; （B）能够在用光化射线或辐射照射时能够产生酸的化合物; （C）疏水性树脂; 和（D）溶剂，其中树脂（A）的重均分子量和疏水性树脂（C）的重均分子量之间的差异满足下式：树脂（A）的重均分子量 - 疏水性树脂的重均分子量（C）> =约3,000; 并且图案形成方法使用抗蚀剂组合物。

    Fluorine-Containing Polymerizable Monomer and Polymer Compound Using Same
    7.
    发明申请
    Fluorine-Containing Polymerizable Monomer and Polymer Compound Using Same 有权
    含氟的可聚合单体和使用其的高分子化合物

    公开(公告)号：US20100234556A1

    公开(公告)日：2010-09-16

    申请号：US12787894

    申请日：2010-05-26

    申请人： Hiroshi SAEGUSA ,  Satoru Narizuka ,  Kazuhiko Maeda

    发明人： Hiroshi SAEGUSA ,  Satoru Narizuka ,  Kazuhiko Maeda

    IPC分类号： C08G69/08 ,  C08G73/02

    CPC分类号： C07C215/68 ,  C08G69/26 ,  C08G73/06 ,  C08G73/1039

    摘要： Polymers made by polymerization or cyclization condensation of a fluorine-containing polymerizable monomer represented by the formula [1] wherein “a” represents an integer from 1 to 4. The monomer contains a plurality of polymerizable amines in the molecule and at the same time one or more hexafluoroisopropyl group(s). With this structure it can be used as an effective polymerizable monomer, which can exhibit water repellency, oil repellency, low water absorptive property, heat resistance, weather resistance, corrosion resistance, transparency, photosensitivity, low refractive index property, low dielectric property, etc., and it can be used for advanced polymer material fields.

    摘要翻译： 通过由式[1]表示的含氟可聚合单体的聚合或环化缩合制备的聚合物，其中“a”表示1至4的整数。该单体在分子中含有多个可聚合胺，同时一个 或更多的六氟异丙基。 具有这种结构，可以用作有效的可聚合单体，其具有防水性，拒油性，低吸水性，耐热性，耐候性，耐腐蚀性，透明性，光敏性，低折射率性，低介电性等。 ，可用于高级聚合物材料领域。

    POLYMERIZABLE COMPOUND, LACTONE-CONTAINING COMPOUND, METHOD FOR MANUFACTURING LACTONE-CONTAINING COMPOUND AND POLYMER COMPOUND OBTAINED BY POLYMERIZING THE POLYMERIZABLE COMPOUND
    8.
    发明申请
    POLYMERIZABLE COMPOUND, LACTONE-CONTAINING COMPOUND, METHOD FOR MANUFACTURING LACTONE-CONTAINING COMPOUND AND POLYMER COMPOUND OBTAINED BY POLYMERIZING THE POLYMERIZABLE COMPOUND 审中-公开
    可聚合化合物，含有LACTONE的化合物，制备含Lactone的化合物的方法和通过聚合可聚合化合物获得的聚合物化合物

    公开(公告)号：US20100152400A1

    公开(公告)日：2010-06-17

    申请号：US12636076

    申请日：2009-12-11

    申请人： Yusuke IIZUKA ,  Kaoru IWATO ,  Hiroshi SAEGUSA ,  Shuji HIRANO

    发明人： Yusuke IIZUKA ,  Kaoru IWATO ,  Hiroshi SAEGUSA ,  Shuji HIRANO

    IPC分类号： C08G63/08 ,  C07D307/77

    CPC分类号： C07D307/77 ,  C07D493/18 ,  C08F220/18 ,  C08F220/24 ,  C08F220/30 ,  C08F2220/1808

    摘要： A polymerizable compound having a lactone structure represented by formula (1) is provided: wherein A represents a polymerizable site; R2 represents a single bond or an alkylene group; R3 represents a hydrocarbon group in which hydrogen atoms are substituted with a fluorine atom; R4 represents a halogen atom, a cyano group, a hydroxy group, an amide group, an alkyl group, a cycloalkyl group, an alkoxy group, a phenyl group, an acyl group, an alkoxycarbonyl group, or a group represented by R—C(═O)— or R—C(═O)O—, wherein R represents an alkyl group or a cycloalkyl group; X represents an alkylene group, an oxygen atom or a sulfur atom; Z represents a single bond, an ether bond, an ester bond, an amide bond, a urethane bond or a urea bond; n represents an integer of from 0 to 5; and m represents an integer of from 0 to 7.

    摘要翻译： 提供具有由式（1）表示的内酯结构的可聚合化合物：其中A表示可聚合位点; R2表示单键或亚烷基; R3表示氢原子被氟原子取代的烃基; R 4表示卤素原子，氰基，羟基，酰胺基，烷基，环烷基，烷氧基，苯基，酰基，烷氧基羰基或由R-C （= O） - 或R-C（= O）O-，其中R表示烷基或环烷基; X表示亚烷基，氧原子或硫原子; Z表示单键，醚键，酯键，酰胺键，氨基甲酸酯键或脲键; n表示0〜5的整数， m表示0〜7的整数。