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    Methods and systems of transferring a substrate to minimize heat loss
    8.
    发明申请
    Methods and systems of transferring a substrate to minimize heat loss 有权
    转移衬底以最小化热损失的方法和系统

    公开(公告)号：US20100173439A1

    公开(公告)日：2010-07-08

    申请号：US12319223

    申请日：2009-01-03

    申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry WU ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry WU ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    IPC分类号： H01L21/677 ,  H01L31/18

    CPC分类号： H01L21/6719 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67207 ,  H01L21/67706 ,  H01L21/67748 ,  H01L21/67754 ,  Y10S414/135

    摘要： A method of transferring one or more substrates between process modules or load lock stations while minimizing heat loss is provided. In some embodiments the method comprising the steps of: identifying a destination location D1 for a substrate S1 present at an initial processing location P1; if the destination location D1 is occupied with a substrate S2, maintaining the substrate S1 at the initial processing location P1; and if the destination location D1 is available, transferring the substrate S1 to the destination location D1. In accordance with additional embodiments, the method is carried out on a system for processing substrates which includes two or more process modules, a substrate handling robot, a load lock chamber, and a transverse substrate handler. The transverse substrate handler includes mobile transverse chambers configured to convey substrates to process modules, wherein each mobile transverse chamber is configured to maintain a specified gas condition during the conveyance of the substrates. The transverse substrate handler further includes a rail for supporting the mobile transverse chambers, wherein the rail is positioned adjacent to entry of the process modules, and drive systems for moving the mobile transverse chambers on the rail.

    摘要翻译： 提供了一种在过程模块或加载锁定站之间传送一个或多个基板同时最小化热损失的方法。 在一些实施例中，该方法包括以下步骤：识别存在于初始处理位置P1的衬底S1的目的地位置D1; 如果目的地位置D1被基板S2占用，则将基板S1保持在初始处理位置P1; 并且如果目的地位置D1可用，则将基板S1传送到目的地位置D1。 根据另外的实施例，该方法在用于处理基板的系统上进行，该系统包括两个或更多个处理模块，基板处理机器人，负载锁定室和横向基板处理器。 横向基板处理器包括被配置为将基板输送到处理模块的移动横向室，其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 横向基板处理器还包括用于支撑移动横向室的轨道，其中轨道邻近进程模块的进入定位，以及用于将移动横向室移动到轨道上的驱动系统。

    Methods and systems of transferring a substrate to minimize heat loss
    9.
    发明授权
    Methods and systems of transferring a substrate to minimize heat loss 有权
    转移衬底以最小化热损失的方法和系统

    公开(公告)号：US08110511B2

    公开(公告)日：2012-02-07

    申请号：US12319223

    申请日：2009-01-03

    申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    IPC分类号： H01L21/00

    CPC分类号： H01L21/6719 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67207 ,  H01L21/67706 ,  H01L21/67748 ,  H01L21/67754 ,  Y10S414/135

    摘要： A method of transferring one or more substrates between process modules or load lock stations while minimizing heat loss is provided. In some embodiments the method comprising the steps of: identifying a destination location D1 for a substrate S1 present at an initial processing location P1; if the destination location D1 is occupied with a substrate S2, maintaining the substrate S1 at the initial processing location P1; and if the destination location D1 is available, transferring the substrate S1 to the destination location D1. In accordance with additional embodiments, the method is carried out on a system for processing substrates which includes two or more process modules, a substrate handling robot, a load lock chamber, and a transverse substrate handler. The transverse substrate handler includes mobile transverse chambers configured to convey substrates to process modules, wherein each mobile transverse chamber is configured to maintain a specified gas condition during the conveyance of the substrates. The transverse substrate handler further includes a rail for supporting the mobile transverse chambers, wherein the rail is positioned adjacent to entry of the process modules, and drive systems for moving the mobile transverse chambers on the rail.

    摘要翻译： 提供了一种在过程模块或加载锁定站之间传送一个或多个基板同时最小化热损失的方法。 在一些实施例中，该方法包括以下步骤：识别存在于初始处理位置P1的衬底S1的目的地位置D1; 如果目的地位置D1被基板S2占用，则将基板S1保持在初始处理位置P1; 并且如果目的地位置D1可用，则将基板S1传送到目的地位置D1。 根据另外的实施例，该方法在用于处理基板的系统上进行，该系统包括两个或更多个处理模块，基板处理机器人，负载锁定室和横向基板处理器。 横向基板处理器包括被配置为将基板输送到处理模块的移动横向室，其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 横向基板处理器还包括用于支撑移动横向室的轨道，其中轨道邻近进程模块的进入定位，以及用于将移动横向室移动到轨道上的驱动系统。

    Auto detection method and system for matching a communication protocol of a calling modem with a communication protocol of an answering modem
    10.
    发明授权
    Auto detection method and system for matching a communication protocol of a calling modem with a communication protocol of an answering modem 失效
    用于将呼叫调制解调器的通信协议与应答调制解调器的通信协议相匹配的自动检测方法和系统

    公开(公告)号：US07020159B1

    公开(公告)日：2006-03-28

    申请号：US10008925

    申请日：2001-12-06

    申请人： Joel D. Peshkin ,  Diep H. Le ,  Hiep Nguyen ,  Simon Zhu

    发明人： Joel D. Peshkin ,  Diep H. Le ,  Hiep Nguyen ,  Simon Zhu

    IPC分类号： H04J3/22 ,  H04B1/38

    CPC分类号： H04M11/066 ,  H04L69/18 ,  H04L69/24 ,  H04Q2213/13204 ,  H04Q2213/13209 ,  H04Q2213/13377

    摘要： Methods and systems for matching the communication protocol of a calling device with one of a plurality of communication protocols supported by an answering device are provided. Initially, a predetermined amount of data is received and buffered in a memory component. Following, an analysis is performed to match the received data with one of the communication protocols supported by the answering device. Communication protocols that can be detected and matched include, for example, the V.110, V.120 and ISDN protocols. During the buffering and analyzing steps, a predetermined data pattern such as mark idle can be transmitted to the calling device. Thereafter, the answering device is configured to answer the call according to the protocol matched in the analyzing step. A timer can be utilized to limit the period for matching to a predetermined length, after which time the answering device can be configured to answer the call in analog mode.

    摘要翻译： 提供了用于将呼叫设备的通信协议与由应答设备支持的多个通信协议中的一个进行匹配的方法和系统。 最初，预定量的数据被接收并缓存在存储器组件中。 接下来，执行分析以将接收的数据与应答设备支持的通信协议之一相匹配。 可以检测和匹配的通信协议包括例如V.110，V.120和ISDN协议。 在缓冲和分析步骤期间，诸如标记空闲的预定数据模式可以被发送到呼叫装置。 此后，应答装置被配置为根据在分析步骤中匹配的协议应答呼叫。 可以使用定时器来将匹配的周期限制为预定长度，之后应答设备可以被配置为以模拟模式应答呼叫。