EMR sensor and transistor formed on the same substrate
    1.
    发明授权
    EMR sensor and transistor formed on the same substrate 有权
    EMR传感器和晶体管形成在同一基板上

    公开(公告)号:US08059373B2

    公开(公告)日:2011-11-15

    申请号:US11549879

    申请日:2006-10-16

    IPC分类号: G11B5/33

    CPC分类号: G11B5/3993

    摘要: Magnetic sensing chips and methods of fabricating the magnetic sensing chips are disclosed. A magnetic sensing chip as described herein includes an EMR sensor formed on a substrate from multiple semiconductor layers. One or more of the semiconductor layers form a quantum well comprising a two-dimensional electron gas (2DEG) or hole gas (2DHG). The magnetic sensing chip also includes one or more transistors formed on the substrate from the multiple semiconductor layers. The transistor(s) likewise include a quantum well comprising a 2DEG or 2DHG. The EMR sensor and the transistor(s) are connected by one or more connections so that the transistor(s) amplifies data signals from the EMR sensor.

    摘要翻译: 公开了磁感测芯片和制造磁感测芯片的方法。 如本文所述的磁传感芯片包括形成在来自多个半导体层的衬底上的EMR传感器。 一个或多个半导体层形成包含二维电子气(2DEG)或空穴气体(2DHG)的量子阱。 磁感测芯片还包括从多个半导体层形成在衬底上的一个或多个晶体管。 晶体管同样包括包含2DEG或2DHG的量子阱。 EMR传感器和晶体管通过一个或多个连接连接,使得晶体管放大来自EMR传感器的数据信号。

    EMR SENSOR AND TRANSISTOR FORMED ON THE SAME SUBSTRATE
    2.
    发明申请
    EMR SENSOR AND TRANSISTOR FORMED ON THE SAME SUBSTRATE 有权
    EMR传感器和晶体管在相同的基板上形成

    公开(公告)号:US20080088982A1

    公开(公告)日:2008-04-17

    申请号:US11549879

    申请日:2006-10-16

    IPC分类号: G11B5/33

    CPC分类号: G11B5/3993

    摘要: Magnetic sensing chips and methods of fabricating the magnetic sensing chips are disclosed. A magnetic sensing chip as described herein includes an EMR sensor formed on a substrate from multiple semiconductor layers. One or more of the semiconductor layers form a quantum well comprising a two-dimensional electron gas (2DEG) or hole gas (2DHG). The magnetic sensing chip also includes one or more transistors formed on the substrate from the multiple semiconductor layers. The transistor(s) likewise include a quantum well comprising a 2DEG or 2DHG. The EMR sensor and the transistor(s) are connected by one or more connections so that the transistor(s) amplifies data signals from the EMR sensor.

    摘要翻译: 公开了磁感测芯片和制造磁感测芯片的方法。 如本文所述的磁传感芯片包括形成在来自多个半导体层的衬底上的EMR传感器。 一个或多个半导体层形成包含二维电子气(2DEG)或空穴气体(2DHG)的量子阱。 磁感测芯片还包括从多个半导体层形成在衬底上的一个或多个晶体管。 晶体管同样包括包含2DEG或2DHG的量子阱。 EMR传感器和晶体管通过一个或多个连接连接,使得晶体管放大来自EMR传感器的数据信号。

    Planar extraordinary magnetoresistance sensor
    3.
    发明授权
    Planar extraordinary magnetoresistance sensor 有权
    平面非凡磁阻传感器

    公开(公告)号:US07203036B2

    公开(公告)日:2007-04-10

    申请号:US10909122

    申请日:2004-07-30

    IPC分类号: G11B5/39 G01R33/02 G01R27/08

    摘要: An extraordinary magnetoresistance (EMR) sensor has a planar shunt and planar leads formed on top of the sensor and extending downward into the semiconductor active region, resulting. Electrically conductive material, such as Au or AuGe, is first deposited into lithographically defined windows on top of the sensor. After liftoff of the photoresist a rapid thermal annealing process causes the conductive material to diffuse downward into the semiconductor material and make electrical contact with the active region. The outline of the sensor is defined by reactive etching or other suitable etching techniques. Insulating backfilling material such as Al-oxide is deposited to protect the EMR sensor and the edges of the active region. Chemical mechanical polishing of the structure results in a planar sensor that does not have exposed active region edges.

    摘要翻译: 非常大的磁阻(EMR)传感器具有平面分流和平面引线,形成在传感器的顶部并向下延伸到半导体有源区域中。 诸如Au或AuGe的导电材料首先沉积在传感器顶部的光刻定义的窗口中。 在光致抗蚀剂剥离之后,快速热退火工艺使得导电材料向下扩散到半导体材料中并与活性区电接触。 传感器的轮廓由反应性蚀刻或其他合适的蚀刻技术限定。 沉积诸如Al氧化物的回填材料的绝缘以保护EMR传感器和有源区域的边缘。 结构的化学机械抛光导致没有暴露的有源区边缘的平面传感器。

    EMR structure with bias control and enhanced linearity of signal
    4.
    发明授权
    EMR structure with bias control and enhanced linearity of signal 失效
    EMR结构具有偏置控制和增强的信号线性度

    公开(公告)号:US07466521B2

    公开(公告)日:2008-12-16

    申请号:US11411606

    申请日:2006-04-25

    IPC分类号: G11B5/39

    摘要: An extraordinary magnetoresistive device EMR having a discontinuous shunt structure. The discontinuous shunt structure improves the linearity of response of the EMR device. The EMR device includes a EMR heterostructure that includes an EMR active layer. The heterostructure can include first, second and third semiconductor layers, with the second layer being sandwiched between the first and third layers. The middle, or second semiconductor layer provides a two dimensional electron gas. The heterostructure has first and second opposed sides, with a pair of voltage leads and a pair of current leads connected with the first side of the structure. The discontinuous shunt structure is connected with the second side of the structure and may be in the form of a series of discontinuous, electrically conductive elements, such as semi-spherical gold elements.

    摘要翻译: 具有不连续分流结构的非凡磁阻器件EMR。 不连续的分流结构提高了EMR器件的响应线性。 EMR器件包括EMR异质结构,其包括EMR有源层。 异质结构可以包括第一,第二和第三半导体层,第二层夹在第一和第三层之间。 中间或第二半导体层提供二维电子气。 异质结构具有第一和第二相对侧,一对电压引线和一对与结构的第一侧连接的电流引线。 不连续的分流结构与结构的第二侧连接,并且可以是一系列不连续的导电元件,例如半球状金元素的形式。

    Novel EMR structure with bias control and enhanced linearity of signal
    5.
    发明申请
    Novel EMR structure with bias control and enhanced linearity of signal 失效
    具有偏置控制和增强信号线性度的新型EMR结构

    公开(公告)号:US20070247763A1

    公开(公告)日:2007-10-25

    申请号:US11411606

    申请日:2006-04-25

    IPC分类号: G11B5/33

    摘要: An extraordinary magnetoresistive device EMR having a discontinuous shunt structure. The discontinuous shunt structure improves the linearity of response of the EMR device. The EMR device includes a EMR heterostructure that includes an EMR active layer. The heterostructure can include first, second and third semiconductor layers, with the second layer being sandwiched between the first and third layers. The middle, or second semiconductor layer provides a two dimensional electron gas. The heterostructure has first and second opposed sides, with a pair of voltage leads and a pair of current leads connected with the first side of the structure. The discontinuous shunt structure is connected with the second side of the structure and may be in the form of a series of discontinuous, electrically conductive elements, such as semi-spherical gold elements.

    摘要翻译: 具有不连续分流结构的非凡磁阻器件EMR。 不连续的分流结构提高了EMR器件的响应线性。 EMR器件包括EMR异质结构,其包括EMR有源层。 异质结构可以包括第一,第二和第三半导体层,第二层夹在第一和第三层之间。 中间或第二半导体层提供二维电子气。 异质结构具有第一和第二相对侧,一对电压引线和一对与结构的第一侧连接的电流引线。 不连续的分流结构与结构的第二侧连接,并且可以是一系列不连续的导电元件,例如半球状金元素的形式。

    Lead contact structure for EMR elements
    6.
    发明授权
    Lead contact structure for EMR elements 失效
    EMR元件的引线接触结构

    公开(公告)号:US07633718B2

    公开(公告)日:2009-12-15

    申请号:US11168070

    申请日:2005-06-27

    CPC分类号: H01L43/08 G11C11/14 H01L43/12

    摘要: EMR elements and methods of fabricating the EMR elements are disclosed. The EMR structure includes one or more layers that form an active region, such as a two-dimensional electron gas (2DEG). The EMR structure has a first side surface, having a plurality of lead protrusions that extend outwardly from the main body of the EMR structure, and an opposing second side surface. The lead protrusions are used to form the current and voltage leads for the EMR element. The active region extends through each lead protrusion and is accessible along a perimeter of each of the lead protrusions. Conductive material is formed along the perimeter of each lead protrusion and contacts the active region of the EMR structure along the perimeter. The lead protrusion and the corresponding conductive material contacting the active region of each lead protrusion form leads for the EMR element, such as current leads and voltage leads.

    摘要翻译: 公开了EMR元件和制造EMR元件的方法。 EMR结构包括形成有源区的一个或多个层,例如二维电子气(2DEG)。 EMR结构具有第一侧表面,具有从EMR结构的主体向外延伸的多个引线突起和相对的第二侧表面。 引线突起用于形成EMR元件的电流和电压引线。 有源区域延伸穿过每个引线突起,并且可沿着每个引线突起的周边被接近。 沿着每个引线突起的周边形成导电材料,并沿周边与EMR结构的有源区接触。 引线突起和与每个引线突起的有源区接触的相应的导电材料形成用于EMR元件的引线,例如电流引线和电压引线。

    Memory array having memory cells formed from metallic material
    8.
    发明授权
    Memory array having memory cells formed from metallic material 有权
    具有由金属材料形成的存储单元的存储器阵列

    公开(公告)号:US07615771B2

    公开(公告)日:2009-11-10

    申请号:US11380498

    申请日:2006-04-27

    IPC分类号: H01L27/20

    CPC分类号: G11C11/16 G11C11/1675

    摘要: Solid-state memories are disclosed that are comprised of cross-point memory arrays. The cross-point memory arrays include a first plurality of electrically conductive lines and a second plurality of electrically conductive lines that cross over the first plurality of electrically conductive lines. The memory arrays also include a plurality of memory cells located between the first and second conductive lines. The memory cells are formed from a metallic material, such as FeRh, having the characteristic of a first order phase transition due to a change in temperature. The first order phase transition causes a corresponding change in resistivity of the metallic material.

    摘要翻译: 公开了由交叉点存储器阵列组成的固态存储器。 交叉点存储器阵列包括跨越第一多个导电线的第一多个导电线和第二多个导电线。 存储器阵列还包括位于第一和第二导线之间的多个存储单元。 存储单元由诸如FeRh的金属材料形成,具有由温度变化引起的一阶相变的特性。 一阶相变导致金属材料的电阻率的相应变化。

    Current-perpendicular-to-plane magnetoresistive sensor with free layer stabilized by in-stack orthogonal magnetic coupling
    10.
    发明授权
    Current-perpendicular-to-plane magnetoresistive sensor with free layer stabilized by in-stack orthogonal magnetic coupling 有权
    电流垂直于平面的磁阻传感器,具有通过堆叠内正交磁耦合稳定的自由层

    公开(公告)号:US07199984B2

    公开(公告)日:2007-04-03

    申请号:US10802639

    申请日:2004-03-16

    IPC分类号: G11B5/39 G11B5/33 G11B5/127

    摘要: A magnetically-coupled structure has two ferromagnetic layers with their in-plane magnetization directions coupled orthogonally across an electrically-conducting spacer layer that induces the direct orthogonal magnetic coupling. The structure has application for in-stack biasing in a current-perpendicular-to-the-plane (CPP) magnetoresistive sensor. One of the ferromagnetic layers of the structure is a biasing ferromagnetic layer and the other ferromagnetic layer is the sensor free layer. An antiferromagnetic layer exchange-couples the biasing layer to fix its moment parallel to the moment of the sensor pinned layer. This allows a single annealing step to be used to set the magnetization direction of the biasing and pinned layers. The electrically-conducting spacer layer, the biasing layer and the antiferromagnetic layer that exchange-couples the biasing layer may all extend beyond the edges of the sensor stack.

    摘要翻译: 磁耦合结构具有两个铁磁层,它们的面内磁化方向正交地耦合在导电直接磁耦合的导电间隔层上。 该结构具有在电流垂直于平面(CPP)磁阻传感器中的堆叠偏置的应用。 该结构的铁磁层之一是偏置铁磁层,另一个铁磁层是传感器自由层。 反铁磁层将偏置层交换耦合以固定其平行于传感器固定层的力矩的力矩。 这允许使用单个退火步骤来设定偏置和钉扎层的磁化方向。 交换耦合偏置层的导电间隔层,偏置层和反铁磁层可以全部延伸超出传感器堆叠的边缘。