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公开(公告)号：US20100200546A1
公开(公告)日：2010-08-12
申请号：US12704167
申请日：2010-02-11
IPC分类号： B44C1/22
CPC分类号： H01L21/67069 , G03F1/72 , G03F1/74 , H01L21/32135
摘要： We disclose a method of electron-beam induced of etching the surface of a specimen in a charged-particle beam instrument, where the charged-particle beam instrument has first and second laser beams, an electron beam, and a gas-injection system for applying etchant gas to the surface. Etching is accomplished by applying a photolytic pulse from the first laser to the surface; applying a pyrolytic pulse from the second laser to the surface; and, applying an etchant gas to the surface at least during the pyrolytic pulse. Two or more alternating pyrolytic laser pulses and photolytic laser pulses may be applied to the surface. The stage supporting the specimen may be tilted relative to the axis of the electron beam before applying the electron beam to the surface of the specimen. The electron beam is applied to the surface of the specimen during the time the etchant gas is present at the surface.
摘要翻译： 我们公开了一种在带电粒子束仪器中蚀刻样品表面的电子束的方法，其中带电粒子束仪器具有第一和第二激光束，电子束和用于施加的气体注入系统 蚀刻气体到表面。 通过将第一激光器的光解脉冲施加到表面来实现蚀刻; 将来自第二激光器的热解脉冲施加到表面; 以及至少在热解脉冲期间将蚀刻剂气体施加到表面。 可以将两个或更多个交替的热解激光脉冲和光解激光脉冲施加到表面。 在将电子束施加到试样的表面之前，支撑试样的载物台可相对于电子束的轴线倾斜。 在蚀刻剂气体存在于表面的时间内，电子束被施加到样品的表面。
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2.发明申请METHODS FOR ELECTRON-BEAM INDUCED DEPOSITION OF MATERIAL INSIDE ENERGETIC-BEAM MICROSCOPES 审中-公开电子束诱导材料在能量束微结构中的沉积方法公开(公告)号：US20100068408A1
公开(公告)日：2010-03-18
申请号：US12211638
申请日：2008-09-16
CPC分类号： C23C16/487 , C23C16/0227 , C23C16/48 , C23C16/483
摘要： We disclose method for materials deposition on a surface inside an energetic-beam instrument, where the energetic beam instrument is provided with a laser beam, an electron beam, and a source of precursor gas. The electron beam is focused on the surface, and the laser beam is focused to a focal point that is at a distance above the surface of about 5 microns to one mm, preferably from 5 to 50 microns. The focal point of the laser beam will thus be within the stream of precursor gas injected at the sample surface, so that the laser beam will facilitate reactions in this gas cloud with less heating of the surface. A second laser may be used for cleaning the surface.
摘要翻译： 我们公开了在能量束仪器内的表面上沉积材料的方法，其中能量束仪器设置有激光束，电子束和前体气体源。 电子束聚焦在表面上，并且激光束被聚焦到距离大约5微米至1毫米，优选5至50微米的表面之上的焦点。 因此，激光束的焦点将在样品表面注入的前体气体流中，使得激光束将有助于在该气体云中的反应较少，而表面的加热较少。 可以使用第二激光器来清洁表面。
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3.发明授权公开(公告)号：US07961397B2
公开(公告)日：2011-06-14
申请号：US12201447
申请日：2008-08-29
IPC分类号： G02B27/10
CPC分类号： H01J37/226 , H01J37/3045 , H01J2237/2482 , H01J2237/317 , H01J2237/31749
摘要： A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation and illumination radiation. The processing radiation and the illumination radiation are combined in a single optical path and directed to a sample surface inside the energetic-beam instrument through a self-focusing rod lens. The self-focusing rod lens thus has a working distance from the sample surface that will not interfere with typical arrangements of ion beams and electron beams in such instruments. A combination of polarizers and beam splitters allows separation of the combined incident radiation and the combined radiation reflected from the sample surface and returned through the same optical channel, so that the reflected radiation may be directed to an optical detector, such as a camera or spectrometer. In other embodiments, additional illumination of the sample surface is provided at an angle to the central axis of the self-focusing rod lens.
摘要翻译： 用于能量束仪器的单通道光学处理系统具有用于处理辐射和照射辐射的单独源。 处理辐射和照射辐射在单个光学路径中组合并通过自聚焦棒透镜指向能量束仪器内部的样品表面。 因此，自聚焦棒透镜具有与样品表面的工作距离，其不会干扰这些仪器中的离子束和电子束的典型布置。 偏振器和分束器的组合允许组合的入射辐射和从样品表面反射的组合辐射分离并通过相同的光学通道返回，使得反射的辐射可以被引导到诸如相机或光谱仪的光学检测器 。 在其他实施例中，样品表面的附加照明以与自聚焦棒透镜的中心轴成一定角度设置。
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4.发明申请公开(公告)号：US20100051802A1
公开(公告)日：2010-03-04
申请号：US12201447
申请日：2008-08-29
IPC分类号： G01N23/00
CPC分类号： H01J37/226 , H01J37/3045 , H01J2237/2482 , H01J2237/317 , H01J2237/31749
摘要： A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation and illumination radiation. The processing radiation and the illumination radiation are combined in a single optical path and directed to a sample surface inside the energetic-beam instrument through a self-focusing rod lens. The self-focusing rod lens thus has a working distance from the sample surface that will not interfere with typical arrangements of ion beams and electron beams in such instruments. A combination of polarizers and beam splitters allows separation of the combined incident radiation and the combined radiation reflected from the sample surface and returned through the same optical channel, so that the reflected radiation may be directed to an optical detector, such as a camera or spectrometer. In other embodiments, additional illumination of the sample surface is provided at an angle to the central axis of the self-focusing rod lens.
摘要翻译： 用于能量束仪器的单通道光学处理系统具有用于处理辐射和照射辐射的单独源。 处理辐射和照射辐射在单个光学路径中组合并通过自聚焦棒透镜指向能量束仪器内部的样品表面。 因此，自聚焦棒透镜具有与样品表面的工作距离，其不会干扰这些仪器中的离子束和电子束的典型布置。 偏振器和分束器的组合允许组合的入射辐射和从样品表面反射的组合辐射分离并通过相同的光学通道返回，使得反射的辐射可以被引导到诸如相机或光谱仪的光学检测器 。 在其他实施例中，样品表面的附加照明以与自聚焦棒透镜的中心轴成一定角度设置。
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公开(公告)号：US08054558B2
公开(公告)日：2011-11-08
申请号：US12701071
申请日：2010-02-05
CPC分类号： H01L21/67069 , G03F1/72 , G03F1/74 , H01L21/32135
摘要： A multiple magnification optical system has a single objective focused upon a specimen at a given working distance. A graded-index lens receives light passing through the objective from the specimen. A beam splitter splits the light exiting the gradient-index lens into a first optical axis and a second optical axis. A first lens is aligned in the first optical axis between the beam splitter and a first camera to focus a magnified image at the first camera. A second camera is situated along the second optical axis from the rear principal plane of the objective so as to obtain unity magnification when the working distance of the objective is set at twice its focal length. Multiple magnifications can be obtained with a single objective by moving the optical system axially to set different working distances from a specimen, and by using multiple beam splitters, or combinations thereof.
摘要翻译： 多重放大光学系统具有在给定工作距离下聚焦在样本上的单个目标。 渐变折射率透镜从样本接收通过物镜的光。 分束器将离开渐变折射率透镜的光分成第一光轴和第二光轴。 第一透镜在分束器和第一相机之间的第一光轴上对准，以将第一相机上的放大图像聚焦。 第二摄像机沿着第二光轴从物镜的后主平面定位，以便当物镜的工作距离设定为焦距的两倍时获得单位倍率。 通过使光学系统轴向移动以设置与样本的不同工作距离，并且通过使用多个分束器或其组合，可以通过单个物镜获得多个放大率。
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6.发明申请METHOD AND APPARATUS FOR FABRICATING OR ALTERING MICROSTRUCTURES USING LOCAL CHEMICAL ALTERATIONS 审中-公开使用当地化学改性来制备或改变微结构的方法和装置公开(公告)号：US20080236745A1
公开(公告)日：2008-10-02
申请号：US11931230
申请日：2007-10-31
CPC分类号： H01L21/76892 , H01L21/31111 , H01L21/31116 , H01L21/32134 , H01L21/32135 , H01L29/66742 , H01L29/78684 , Y10S977/855 , Y10S977/857 , Y10S977/89 , Y10S977/891 , Y10S977/892
摘要： A method and apparatus for fabricating or altering a microstructure use means for heating to facilitate a local chemical reaction that forms or alters the submicrostructure.
摘要翻译： 一种用于制造或改变微结构的方法和装置，用于加热以促进形成或改变亚微结构的局部化学反应。
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公开(公告)号：US5394500A
公开(公告)日：1995-02-28
申请号：US173285
申请日：1993-12-22
申请人： Herschel M. Marchman
发明人： Herschel M. Marchman
CPC分类号： G02B6/245 , B82Y35/00 , Y10S385/902 , Y10S977/849 , Y10S977/86 , Y10S977/868 , Y10S977/875
摘要： A fiber probe device includes a fiber segment that has at least three sections. An uppermost section has the largest diameter; an intermediate section has an intermediate diameter, and a lowest section (tip) has the smallest diameter. The presence of the intermediate section enables control over the stiffness of the section located immediately above the tip as well as control over the mechanical resonance characteristic of the probe device when it scans a sample surface to be measured.
摘要翻译： 纤维探针装置包括具有至少三个部分的纤维段。 最上部的直径最大; 中间部分具有中间直径，并且最低部分（尖端）具有最小的直径。 中间部分的存在使得能够控制位于尖端正上方的部分的刚度，以及当扫描待测量的样品表面时控制探针装置的机械共振特性。
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8.发明授权Method and apparatus for fabricating or altering microstructures using local chemical alterations 有权使用局部化学改变制造或改变微结构的方法和装置公开(公告)号：US08181594B2
公开(公告)日：2012-05-22
申请号：US11931242
申请日：2007-10-31
IPC分类号： B05C11/00
CPC分类号： H01L21/76892 , H01L21/31111 , H01L21/31116 , H01L21/32134 , H01L21/32135 , H01L29/66742 , H01L29/78684 , Y10S977/855 , Y10S977/857 , Y10S977/89 , Y10S977/891 , Y10S977/892
摘要： A method and apparatus for fabricating or altering a microstructure use means for heating to facilitate a local chemical reaction that forms or alters the submicrostructure.
摘要翻译： 一种用于制造或改变微结构的方法和装置，用于加热以促进形成或改变亚微结构的局部化学反应。
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9.发明授权High-resolution optical channel for non-destructive navigation and processing of integrated circuits 有权用于集成电路非破坏性导航和处理的高分辨率光通道公开(公告)号：US07351966B1
公开(公告)日：2008-04-01
申请号：US11419811
申请日：2006-05-23
IPC分类号： H01J37/244
CPC分类号： H01J37/28 , H01J37/226 , H01J37/3056 , H01J2237/2446 , H01J2237/24578 , H01J2237/31749
摘要： An optical-fiber based light channel system is included in an ion/electron beam tool for imaging and/or processing integrated circuits. The optical channel system includes an image collection portion, an optical fiber image transmission portion and a detector portion. The image collection portion includes micro-optical components and has submillimeter dimensions, so that it is easily accommodated within the working distance of the ion/electron beam tool. The entire system is sufficiently compact and lightweight so that it may easily be mounted on a translation stage inside the sample chamber, which permits the optical channel to be mechanically extended and retracted to avoid blocking the primary ion or electron beam. The system may be mounted to a translation stage or to a gas injector assembly, which may itself be mounted to a flange plate on the chamber wall with feed-through ports for electrical and optical signals.
摘要翻译： 用于成像和/或处理集成电路的离子/电子束工具中包括基于光纤的光通道系统。 光通道系统包括图像采集部分，光纤图像传输部分和检测器部分。 图像采集部分包括微光学部件并且具有亚毫米尺寸，使得其容易地容纳在离子/电子束工具的工作距离内。 整个系统足够紧凑和重量轻，使得其可以容易地安装在样品室内的平移台上，这允许光学通道机械地延伸和缩回以避免阻挡主离子或电子束。 该系统可以安装到平移台或气体喷射器组件，气体喷射器组件本身可以通过用于电和光信号的馈通端口安装在腔壁上的凸缘板上。
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公开(公告)号：US5480046A
公开(公告)日：1996-01-02
申请号：US247164
申请日：1994-05-20
摘要： A probe device is fabricated from a glass fiber segment by first isotropically etching only a portion of the diameter of only a bottom region thereof. Next, the bottom region is cleaved, to produce a cleaved bottom endface. Then the cleaved endface and a height of the sidewalls of the bottom region that is less than its total height are coated with a protective masking layer. The fiber segment is immersed in an isotropic etching solution, whereby its diameter is reduced. Finally, the masking layer is stripped off, and the bottom region is etched again until the (maximum) diameter of the cleaved endface is reduced to a desired value.
摘要翻译： 通过首先各向同性蚀刻只有其底部区域的直径的一部分，由玻璃纤维段制造探针装置。 接下来，底部区域被切割，以产生裂开的底部端面。 然后，将切割的端面和底部区域的侧壁的小于其总高度的高度涂覆有保护性掩蔽层。 将纤维段浸入各向同性蚀刻溶液中，从而减小其直径。 最后，剥离掩模层，并再次蚀刻底部区域，直到切割的端面的（最大）直径减小到期望值。
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