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1.发明申请METHODS FOR ELECTRON-BEAM INDUCED DEPOSITION OF MATERIAL INSIDE ENERGETIC-BEAM MICROSCOPES 审中-公开电子束诱导材料在能量束微结构中的沉积方法公开(公告)号：US20100068408A1
公开(公告)日：2010-03-18
申请号：US12211638
申请日：2008-09-16
CPC分类号： C23C16/487 , C23C16/0227 , C23C16/48 , C23C16/483
摘要： We disclose method for materials deposition on a surface inside an energetic-beam instrument, where the energetic beam instrument is provided with a laser beam, an electron beam, and a source of precursor gas. The electron beam is focused on the surface, and the laser beam is focused to a focal point that is at a distance above the surface of about 5 microns to one mm, preferably from 5 to 50 microns. The focal point of the laser beam will thus be within the stream of precursor gas injected at the sample surface, so that the laser beam will facilitate reactions in this gas cloud with less heating of the surface. A second laser may be used for cleaning the surface.
摘要翻译： 我们公开了在能量束仪器内的表面上沉积材料的方法，其中能量束仪器设置有激光束，电子束和前体气体源。 电子束聚焦在表面上，并且激光束被聚焦到距离大约5微米至1毫米，优选5至50微米的表面之上的焦点。 因此，激光束的焦点将在样品表面注入的前体气体流中，使得激光束将有助于在该气体云中的反应较少，而表面的加热较少。 可以使用第二激光器来清洁表面。
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公开(公告)号：US20100200546A1
公开(公告)日：2010-08-12
申请号：US12704167
申请日：2010-02-11
IPC分类号： B44C1/22
CPC分类号： H01L21/67069 , G03F1/72 , G03F1/74 , H01L21/32135
摘要： We disclose a method of electron-beam induced of etching the surface of a specimen in a charged-particle beam instrument, where the charged-particle beam instrument has first and second laser beams, an electron beam, and a gas-injection system for applying etchant gas to the surface. Etching is accomplished by applying a photolytic pulse from the first laser to the surface; applying a pyrolytic pulse from the second laser to the surface; and, applying an etchant gas to the surface at least during the pyrolytic pulse. Two or more alternating pyrolytic laser pulses and photolytic laser pulses may be applied to the surface. The stage supporting the specimen may be tilted relative to the axis of the electron beam before applying the electron beam to the surface of the specimen. The electron beam is applied to the surface of the specimen during the time the etchant gas is present at the surface.
摘要翻译： 我们公开了一种在带电粒子束仪器中蚀刻样品表面的电子束的方法，其中带电粒子束仪器具有第一和第二激光束，电子束和用于施加的气体注入系统 蚀刻气体到表面。 通过将第一激光器的光解脉冲施加到表面来实现蚀刻; 将来自第二激光器的热解脉冲施加到表面; 以及至少在热解脉冲期间将蚀刻剂气体施加到表面。 可以将两个或更多个交替的热解激光脉冲和光解激光脉冲施加到表面。 在将电子束施加到试样的表面之前，支撑试样的载物台可相对于电子束的轴线倾斜。 在蚀刻剂气体存在于表面的时间内，电子束被施加到样品的表面。
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3.发明授权公开(公告)号：US07961397B2
公开(公告)日：2011-06-14
申请号：US12201447
申请日：2008-08-29
IPC分类号： G02B27/10
CPC分类号： H01J37/226 , H01J37/3045 , H01J2237/2482 , H01J2237/317 , H01J2237/31749
摘要： A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation and illumination radiation. The processing radiation and the illumination radiation are combined in a single optical path and directed to a sample surface inside the energetic-beam instrument through a self-focusing rod lens. The self-focusing rod lens thus has a working distance from the sample surface that will not interfere with typical arrangements of ion beams and electron beams in such instruments. A combination of polarizers and beam splitters allows separation of the combined incident radiation and the combined radiation reflected from the sample surface and returned through the same optical channel, so that the reflected radiation may be directed to an optical detector, such as a camera or spectrometer. In other embodiments, additional illumination of the sample surface is provided at an angle to the central axis of the self-focusing rod lens.
摘要翻译： 用于能量束仪器的单通道光学处理系统具有用于处理辐射和照射辐射的单独源。 处理辐射和照射辐射在单个光学路径中组合并通过自聚焦棒透镜指向能量束仪器内部的样品表面。 因此，自聚焦棒透镜具有与样品表面的工作距离，其不会干扰这些仪器中的离子束和电子束的典型布置。 偏振器和分束器的组合允许组合的入射辐射和从样品表面反射的组合辐射分离并通过相同的光学通道返回，使得反射的辐射可以被引导到诸如相机或光谱仪的光学检测器 。 在其他实施例中，样品表面的附加照明以与自聚焦棒透镜的中心轴成一定角度设置。
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4.发明申请公开(公告)号：US20100051802A1
公开(公告)日：2010-03-04
申请号：US12201447
申请日：2008-08-29
IPC分类号： G01N23/00
CPC分类号： H01J37/226 , H01J37/3045 , H01J2237/2482 , H01J2237/317 , H01J2237/31749
摘要： A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation and illumination radiation. The processing radiation and the illumination radiation are combined in a single optical path and directed to a sample surface inside the energetic-beam instrument through a self-focusing rod lens. The self-focusing rod lens thus has a working distance from the sample surface that will not interfere with typical arrangements of ion beams and electron beams in such instruments. A combination of polarizers and beam splitters allows separation of the combined incident radiation and the combined radiation reflected from the sample surface and returned through the same optical channel, so that the reflected radiation may be directed to an optical detector, such as a camera or spectrometer. In other embodiments, additional illumination of the sample surface is provided at an angle to the central axis of the self-focusing rod lens.
摘要翻译： 用于能量束仪器的单通道光学处理系统具有用于处理辐射和照射辐射的单独源。 处理辐射和照射辐射在单个光学路径中组合并通过自聚焦棒透镜指向能量束仪器内部的样品表面。 因此，自聚焦棒透镜具有与样品表面的工作距离，其不会干扰这些仪器中的离子束和电子束的典型布置。 偏振器和分束器的组合允许组合的入射辐射和从样品表面反射的组合辐射分离并通过相同的光学通道返回，使得反射的辐射可以被引导到诸如相机或光谱仪的光学检测器 。 在其他实施例中，样品表面的附加照明以与自聚焦棒透镜的中心轴成一定角度设置。
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5.发明授权公开(公告)号：US07446542B2
公开(公告)日：2008-11-04
申请号：US11367562
申请日：2006-03-03
IPC分类号： G01R31/302 , G01R31/28
CPC分类号： G01R31/2881 , G01M7/08 , G01N3/00 , G01N3/307 , G01N3/313 , G01N2203/0044 , G01N2203/005 , G01N2203/0057 , G01N2203/0296 , G01N2203/0676 , G01R31/2868 , H01L21/67011
摘要： An apparatus for testing flip-chip packages has a programmed computer, a test-engine stage for applying an impact to at least one package under test, and a monitoring stage. The test-engine stage causes an impact on the package on the side opposite its ball-grid array. The test-engine stage has actuators connected to the test-engine stage and the computer, for moving and aligning the test-engine stage. The monitoring stage has a digital camera connected to the computer for transmitting digital images from the ball-grid array side of the package to the computer. A microscope is preferably connected to the digital camera. A sample stage located between the test-engine stage and the monitoring stage holds the package under test. The sample stage has an acoustic transducer capable of being removably connected to the package under test. The acoustic transducer is connected to the computer for transmitting signals from the acoustic transducer to the computer.
摘要翻译： 用于测试倒装芯片封装的装置具有编程的计算机，用于对至少一个待测试包进行冲击的测试引擎阶段和监视阶段。 测试引擎级在与球栅阵列相反的一侧对包装产生影响。 测试发动机级具有连接到测试发动机级和计算机的致动器，用于移动和对准测试引擎级。 监控级具有连接到计算机的数字照相机，用于将数字图像从包装的球栅阵列侧传输到计算机。 显微镜优选地连接到数码相机。 位于测试引擎级和监控级之间的样品台保持被测试的包装。 样品台具有能够可拆卸地连接到被测试包装的声学换能器。 声学换能器连接到计算机，用于将信号从声学传感器传输到计算机。
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公开(公告)号：US20080258056A1
公开(公告)日：2008-10-23
申请号：US12041217
申请日：2008-03-03
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
摘要翻译： 在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。 根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。 样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。 然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。
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公开(公告)号：US20110031397A1
公开(公告)日：2011-02-10
申请号：US12896281
申请日：2010-10-01
IPC分类号： H01J37/28
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
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公开(公告)号：US07414252B2
公开(公告)日：2008-08-19
申请号：US11265934
申请日：2005-11-03
IPC分类号： G21G5/00
CPC分类号： H01J37/302 , B82Y15/00 , G01N1/32 , H01J37/20 , H01J37/22 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/30411 , H01J2237/30472 , H01J2237/31745
摘要： An apparatus for performing automated in-situ lift-out of a sample from a specimen includes a computer having a memory with computer-readable instructions, a stage for a specimen and a nano-manipulator. The stage and the nano-manipulator are controlled by motion controllers connected to the computer. The nano-manipulator has a probe tip for attachment to samples excised from the specimen. The computer-readable instructions include instructions to cause the stage motion controllers and the nano-manipulator motion controllers, as well as an ion-beam source, to automatically perform in-situ lift-out of a sample from the specimen.
摘要翻译： 用于从样本进行样品的自动原位提取的装置包括具有具有计算机可读指令的存储器的计算机，用于样本的台和纳米操纵器。 舞台和纳米操纵器由连接到计算机的运动控制器控制。 纳米操纵器具有用于附着到从样品切除的样品的探针尖端。 计算机可读指令包括使载物台运动控制器和纳米操纵器运动控制器以及离子束源自动执行样品从样本的原位提取的指令。
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公开(公告)号：US07755372B2
公开(公告)日：2010-07-13
申请号：US12238906
申请日：2008-09-26
IPC分类号： G01R31/302
CPC分类号： G01R31/2881 , G01M7/08 , G01N3/00 , G01N3/307 , G01N3/313 , G01N2203/0044 , G01N2203/005 , G01N2203/0057 , G01N2203/0296 , G01N2203/0676 , G01R31/2868 , H01L21/67011
摘要： Methods for testing flip-chip packages includes aligning a microscope and a test engine. The package under test is placed between the microscope and the test engine, and an acoustic transducer is attached to the package under test. The test engine delivers an impact to the package under test on the side of the package opposite its ball-grid array. Acoustic information and image information from the package under test is recorded. In alternate embodiments, a sequence of packages may be automatically tested.
摘要翻译： 测试倒装芯片封装的方法包括对准显微镜和测试引擎。 被测试的包被放置在显微镜和测试引擎之间，并且声学换能器附着在被测试的包装上。 测试引擎在与球栅阵列相对的封装侧面对被测试的封装产生影响。 记录被测包装的声学信息和图像信息。 在替代实施例中，可以自动测试一系列包装。
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公开(公告)号：US20090015274A1
公开(公告)日：2009-01-15
申请号：US12238906
申请日：2008-09-26
IPC分类号： G01R31/302
CPC分类号： G01R31/2881 , G01M7/08 , G01N3/00 , G01N3/307 , G01N3/313 , G01N2203/0044 , G01N2203/005 , G01N2203/0057 , G01N2203/0296 , G01N2203/0676 , G01R31/2868 , H01L21/67011
摘要： Methods for testing flip-chip packages includes aligning a microscope and a test engine. The package under test is placed between the microscope and the test engine, and an acoustic transducer is attached to the package under test. The test engine delivers an impact to the package under test on the side of the package opposite its ball-grid array. Acoustic information and image information from the package under test is recorded. In alternate embodiments, a sequence of packages may be automatically tested.
摘要翻译： 测试倒装芯片封装的方法包括对准显微镜和测试引擎。 被测试的包被放置在显微镜和测试引擎之间，并且声学换能器附着在被测试的包装上。 测试引擎在与球栅阵列相对的封装侧面对被测试的封装产生影响。 记录被测包装的声学信息和图像信息。 在替代实施例中，可以自动测试一系列包装。
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