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    METHODS FOR PROCESSING SUBSTRATES IN PROCESS SYSTEMS HAVING SHARED RESOURCES
    2.
    发明申请
    METHODS FOR PROCESSING SUBSTRATES IN PROCESS SYSTEMS HAVING SHARED RESOURCES 有权
    在具有共享资源的过程系统中处理基板的方法

    公开(公告)号：US20110265814A1

    公开(公告)日：2011-11-03

    申请号：US12915240

    申请日：2010-10-29

    Applicant: JAMES P. CRUSE ,  DERMOT CANTWELL ,  MING XU ,  CHARLES HARDY ,  BENJAMIN SCHWARZ ,  KENNETH S. COLLINS ,  ANDREW NGUYEN ,  ZHIFENG SUI ,  EVANS LEE

    Inventor： JAMES P. CRUSE ,  DERMOT CANTWELL ,  MING XU ,  CHARLES HARDY ,  BENJAMIN SCHWARZ ,  KENNETH S. COLLINS ,  ANDREW NGUYEN ,  ZHIFENG SUI ,  EVANS LEE

    IPC: B08B6/00

    CPC classification number: H01L21/6719 ,  H01J37/32899

    Abstract: Methods for processing substrates in twin chamber processing systems having first and second process chambers and shared processing resources are provided herein. In some embodiments, a method may include flowing a process gas from a shared gas panel to a processing volume of the first process chamber and to a processing volume of the second process chamber; forming a first plasma in the first processing volume to process the first substrate and a second plasma to process the second substrate; monitoring the first processing volume and the second processing volume to determine if a process endpoint is reached in either volume; and either terminating the first and second plasma simultaneously when a first endpoint is reached; or terminating the first plasma when a first endpoint is reached in the first processing volume while continuing to provide the second plasma in the second processing volume until a second endpoint is reached.

    Abstract translation: 本文提供了具有第一处理室和第二处理室以及共享处理资源的双室处理系统中处理基板的方法。 在一些实施例中，一种方法可以包括使处理气体从共用气体面板流动到第一处理室的处理容积和第二处理室的处理容积; 在所述第一处理体积中形成第一等离子体以处理所述第一基板和第二等离子体以处理所述第二基板; 监测第一处理量和第二处理量以确定任一体积中是否达到过程终点; 并且当达到第一端点时同时终止第一和第二等离子体; 或在第一处理容积中达到第一端点时终止第一等离子体，同时继续在第二处理容积中提供第二等离子体直到达到第二端点。

    TWIN CHAMBER PROCESSING SYSTEM WITH SHARED VACUUM PUMP
    3.
    发明申请
    TWIN CHAMBER PROCESSING SYSTEM WITH SHARED VACUUM PUMP 审中-公开
    具有共享真空泵的双腔加工系统

    公开(公告)号：US20110265884A1

    公开(公告)日：2011-11-03

    申请号：US12907952

    申请日：2010-10-19

    Applicant: MING XU ,  ANDREW NGUYEN ,  EVANS LEE

    Inventor： MING XU ,  ANDREW NGUYEN ,  EVANS LEE

    IPC: F15D1/00

    CPC classification number: H01L21/6719 ,  H01L21/67017 ,  Y10T137/0396 ,  Y10T137/86083

    Abstract: Methods and apparatus for twin chamber processing systems are disclosed, and, in some embodiments, may include a first process chamber having a first vacuum pump to maintain a first operating pressure in a first processing volume selectively isolatable by a first gate valve disposed between the first processing volume and the first vacuum pump; a second process chamber having a second vacuum pump for maintaining a second operating pressure in a second processing volume selectively isolatable by a second gate valve disposed between the second processing volume and the second vacuum pump; and a shared vacuum pump coupled to the first and second processing volumes to reduce a pressure in each processing volume below a critical pressure level, wherein the shared vacuum pump can be selectively isolated from any of the first or second process chambers or the first or second vacuum pumps.

    Abstract translation: 公开了用于双室处理系统的方法和装置，并且在一些实施例中，可以包括具有第一真空泵的第一处理室，以保持第一处理容积中的第一操作压力，所述第一处理容积可选择性地通过设置在第一 加工量和第一台真空泵; 具有第二真空泵的第二处理室，用于保持第二处理容积中的第二操作压力，所述第二处理容积可由设置在所述第二处理容积和所述第二真空泵之间的第二闸阀选择性分离; 以及耦合到所述第一和第二处理体积的共享真空泵，以将每个处理体积中的压力降低到临界压力水平以下，其中所述共享真空泵可以选择性地与所述第一或第二处理室中的任何一个或所述第一或第二处理室隔离 真空泵。

    METHODS AND APPARATUS FOR REDUCING FLOW SPLITTING ERRORS USING ORIFICE RATIO CONDUCTANCE CONTROL
    5.
    发明申请
    METHODS AND APPARATUS FOR REDUCING FLOW SPLITTING ERRORS USING ORIFICE RATIO CONDUCTANCE CONTROL 审中-公开
    减少流量分解误差的方法和装置

    公开(公告)号：US20110265883A1

    公开(公告)日：2011-11-03

    申请号：US12907942

    申请日：2010-10-19

    Applicant: JAMES P. CRUSE ,  EZRA ROBERT GOLD ,  JARED AHMAD LEE ,  MING XU ,  CORIE LYNN COBB ,  ANDREW NGUYEN ,  JOHN W. LANE

    Inventor： JAMES P. CRUSE ,  EZRA ROBERT GOLD ,  JARED AHMAD LEE ,  MING XU ,  CORIE LYNN COBB ,  ANDREW NGUYEN ,  JOHN W. LANE

    IPC: F17D3/00 ,  F16K7/00

    CPC classification number: H01J37/3244 ,  Y10T137/0357 ,  Y10T137/877

    Abstract: Methods and apparatus for gas delivery to a process chamber are provided herein. In some embodiments, an apparatus for processing substrates may include a mass flow controller to provide a desired total fluid flow; a first flow control manifold comprising a first inlet, a first outlet, and a first plurality of orifices selectably coupled therebetween, wherein the first inlet is coupled to the mass flow controller; and a second flow control manifold comprising a second inlet, a second outlet, and a second plurality of orifices selectably coupled therebetween, wherein the second inlet is coupled to the mass flow controller; wherein a desired flow ratio between the first outlet and the second outlet is selectably obtainable when causing the fluid to flow through one or more of the first plurality of orifices of the first manifold and one or more of the second plurality of orifices of the second manifold.

    Abstract translation: 本文提供了用于气体输送到处理室的方法和装置。 在一些实施例中，用于处理衬底的装置可以包括质量流量控制器以提供期望的总流体流量; 第一流量控制歧管，包括第一入口，第一出口和可选择地联接在其间的第一多个孔，其中所述第一入口联接到所述质量流量控制器; 以及第二流量控制歧管，包括第二入口，第二出口和可选择地联接在其间的第二多个孔，其中所述第二入口联接到所述质量流量控制器; 其中当所述流体流过所述第一歧管的所述第一多个孔中的一个或多个并且所述第二歧管的所述第二多个孔中的一个或多个时，可选择地获得所述第一出口和所述第二出口之间的期望流量比 。

    PROCESS CHAMBERS HAVING SHARED RESOURCES AND METHODS OF USE THEREOF
    6.
    发明申请
    PROCESS CHAMBERS HAVING SHARED RESOURCES AND METHODS OF USE THEREOF 审中-公开
    具有共享资源的过程池及其使用方法

    公开(公告)号：US20110269314A1

    公开(公告)日：2011-11-03

    申请号：US12905032

    申请日：2010-10-14

    Applicant: JARED AHMAD LEE ,  JAMES P. CRUSE ,  ANDREW NGUYEN ,  CORIE LYNN COBB ,  MING XU ,  MARTIN JEFF SALINAS ,  ANCHEL SHEYNER

    Inventor： JARED AHMAD LEE ,  JAMES P. CRUSE ,  ANDREW NGUYEN ,  CORIE LYNN COBB ,  MING XU ,  MARTIN JEFF SALINAS ,  ANCHEL SHEYNER

    IPC: H01L21/3065

    CPC classification number: H01L21/67109 ,  H01L21/6719

    Abstract: Process chambers having shared resources and methods of use are provided. In some embodiments, substrate processing systems may include a first process chamber having a first substrate support disposed within the first process chamber, wherein the first substrate support has a first heater and a first cooling plate to control a temperature of the first substrate support; a second process chamber having a second substrate support disposed within the second process chamber, wherein the second substrate support has a second heater and a second cooling plate to control a temperature of the second substrate support; and a shared heat transfer fluid source having an outlet to provide a heat transfer fluid to the first cooling plate and the second cooling plate and an inlet to receive the heat transfer fluid from the first cooling plate and the second cooling plate.

    Abstract translation: 提供了具有共享资源和使用方法的过程室。 在一些实施例中，衬底处理系统可以包括第一处理室，其具有设置在第一处理室内的第一衬底支撑件，其中第一衬底支撑件具有第一加热器和第一冷却板以控制第一衬底支撑件的温度; 第二处理室，具有设置在所述第二处理室内的第二基板支撑件，其中所述第二基板支撑件具有第二加热器和第二冷却板，以控制所述第二基板支撑件的温度; 以及共用传热流体源，其具有出口以向第一冷却板和第二冷却板提供传热流体，以及从第一冷却板和第二冷却板接收传热流体的入口。

    KOGATION RESISTANT INK COMPOSITION AND PROCESS
    7.
    发明申请
    KOGATION RESISTANT INK COMPOSITION AND PROCESS 有权

    公开(公告)号：US20250101244A1

    公开(公告)日：2025-03-27

    申请号：US18890274

    申请日：2024-09-19

    Applicant: MING XU

    Inventor： MING XU

    IPC: C09D11/328 ,  C09D11/322 ,  C09D11/38

    Abstract: Heat sensitive inks are disclosed that reduce kogation in the print heads of thermal ink jet printers. The ink incorporates heat sensitive colorants/sublimation dye solid particles that are larger in size but smaller in quantity than particles that are not heat sensitive at the operating temperature of the heating elements. The smaller particles do not contribute to kogation, whereas the larger colorant particles contribute to kogation if they contact the heating element of the print heads. The smaller particles move more rapidly toward the heating element as the thermally induced bubble collapses and provide a barrier between the heating element and the heat activated or heat sensitive colorants/sublimation dye solids (hereinafter heat sensitive colorants).

    COMPACT STARTER-GENERATOR WITH COMMON CORE FOR MAIN AND EXCITER WINDING
    8.
    发明申请
    COMPACT STARTER-GENERATOR WITH COMMON CORE FOR MAIN AND EXCITER WINDING 失效
    具有通用核心的紧凑型起动发电机，用于主和复合绕组

    公开(公告)号：US20110304224A1

    公开(公告)日：2011-12-15

    申请号：US12833265

    申请日：2010-07-09

    Applicant: CRISTIAN ANGHEL ,  PARSA MIRMOBIN ,  MING XU

    Inventor： CRISTIAN ANGHEL ,  PARSA MIRMOBIN ,  MING XU

    IPC: H02K37/02 ,  H02P6/08

    CPC classification number: H02K7/006 ,  F02N11/04 ,  H02K19/12 ,  H02K19/26 ,  H02K19/38 ,  H02P25/024

    Abstract: A power system for a vehicle may comprise an electric machine attached to an engine of the vehicle. The electric machine may comprise only one stator core; a stator main winding wound on the one stator core; a stator exciter winding wound on the one stator core. The stator main winding and the stator exciter winding may be magnetically independent from one another even though magnetic-field-isolation material is not interposed between the stator main winding and the stator exciter winding.

    Abstract translation: 用于车辆的动力系统可以包括附接到车辆的发动机的电机。 电机可以仅包括一个定子芯; 缠绕在一个定子芯上的定子主绕组; 缠绕在一个定子芯上的定子励磁绕组。 即使在定子主绕组和定子励磁绕组之间没有插入磁场隔离材料，定子主绕组和定子励磁绕组也可以彼此磁性地相互独立。

    MULTI-STAGE CONTROLLED FREQUENCY GENERATOR FOR DIRECT-DRIVE WIND POWER
    9.
    发明申请
    MULTI-STAGE CONTROLLED FREQUENCY GENERATOR FOR DIRECT-DRIVE WIND POWER 失效
    用于直接驱动风力的多级控制频率发生器

    公开(公告)号：US20110062710A1

    公开(公告)日：2011-03-17

    申请号：US12640340

    申请日：2009-12-17

    Applicant: CRISTIAN ANGHEL ,  MING XU ,  PARSA MIRMOBIN

    Inventor： CRISTIAN ANGHEL ,  MING XU ,  PARSA MIRMOBIN

    IPC: H02P9/04 ,  H02P9/14 ,  H02P9/48

    CPC classification number: H02J3/386 ,  F03D9/25 ,  F03D9/255 ,  F03D15/10 ,  Y02E10/725 ,  Y02E10/763

    Abstract: A multi-sage controlled frequency generator is described that has a low size, weight and cost. The new generator requires an electronic controller that requires only 25% of the total generated power (100%) when the generator shaft speed varies by +/−25% around its synchronous speed. The shaft driving the generator in the direct-drive controlled frequency generator may be moved at a variable speed. The output frequency of the generator may be controlled by electrically controlling the frequency of the first stator stage and by selecting the control frequency, the number of poles, and the number of stages, such that the output of the last stage will be maintained constant at the desired grid frequency.

    Abstract translation: 描述了具有低尺寸，重量和成本的多功能控制频率发生器。 当发电机轴转速在其同步速度附近变化+/- 25％时，新发电机需要一个电子控制器，只需要总发电功率的25％（100％）。 驱动直接驱动控制频率发生器中的发电机的轴可以以可变速度移动。 可以通过电控制第一定子级的频率并且通过选择控制频率，极数和级数来控制发电机的输出频率，使得最后级的输出将保持恒定在 所需的电网频率。

    SELF-EXCITED CONTROLLED FREQUENCY GENERATOR SYSTEM WITH BI-DIRECTIONAL CONVERTER
    10.
    发明申请
    SELF-EXCITED CONTROLLED FREQUENCY GENERATOR SYSTEM WITH BI-DIRECTIONAL CONVERTER 有权
    具有双向转换器的自激控制频率发生器系统

    公开(公告)号：US20090315522A1

    公开(公告)日：2009-12-24

    申请号：US12143011

    申请日：2008-06-20

    Applicant: CRISTIAN ANGHEL ,  MING XU ,  PARSA MIRMOBIN

    Inventor： CRISTIAN ANGHEL ,  MING XU ,  PARSA MIRMOBIN

    IPC: H02P9/14

    CPC classification number: H02P9/08 ,  H02P9/30 ,  H02P9/48 ,  H02P2101/30

    Abstract: A controlled frequency generating system (CFG) may be constructed with a main generator and an exciter driven by a common shaft. Excitation power may be provided from the common shaft; as distinct from prior-art systems which may require independent excitation power sources. While controlling the output voltage and frequency of the main generator, the bi-directional controller extracts power from a main generator output and may supply the extracted power to supplement excitation power when needed at certain rotational speeds. The controller may extract power from the exciter when, at other rotational speeds, the exciter produces excess power. The extracted excess power may be delivered to the output of the main generator to maintain a desired level of output power at a desired frequency, irrespective of speed of rotation of the CFG.

    Abstract translation: 受控频率发生系统（CFG）可以由主发电机和由公共轴驱动的励磁机构成。 可以从公共轴提供励磁功率; 与可能需要独立激励电源的现有技术系统不同。 在控制主发电机的输出电压和频率的同时，双向控制器从主发电机输出端提取电力，并且可以提供提取的功率以在特定转速下需要时补充激励功率。 当在其他转速下，激励器产生过量功率时，控制器可从激励器提取功率。 提取的过剩功率可以被传送到主发电机的输出端，以保持期望的输出功率水平处于期望的频率，而与CFG的转速无关。

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