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公开(公告)号:US20110210468A1
公开(公告)日:2011-09-01
申请号:US13015299
申请日:2011-01-27
申请人: Mark A. Shannon , Junghoon Yeom
发明人: Mark A. Shannon , Junghoon Yeom
IPC分类号: B32B38/10
CPC分类号: B32B38/10 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要: A method of forming a patterned layer of a material on a substrate includes forming a layer of the material on a stamp, and contacting the stamp with a first substrate comprising a pattern of protruding and recessed features to bring a first portion of the layer into conformal contact with the protruding features. The stamp is then removed from the first substrate. The first portion of the layer remains in conformal contact with the protruding features, and a second portion of the layer opposite the recessed features is removed with the stamp. Accordingly, a patterned layer is formed on the stamp inverse to the pattern on the first substrate. The method may further include transferring the patterned layer on the stamp to a second substrate.
摘要翻译: 在衬底上形成材料的图案化层的方法包括在印模上形成材料层,并且将印模与第一衬底接触,第一衬底包括突出和凹陷特征的图案,以使层的第一部分保形 接触突出的功能。 然后将印模从第一基板上移除。 层的第一部分保持与突出特征的保形接触,并且与凹陷特征相反的层的第二部分用印模去除。 因此,在与第一基板上的图案相反的印模上形成图案层。 该方法还可以包括将印模上的图案化层转移到第二基底。
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公开(公告)号:US20130276512A1
公开(公告)日:2013-10-24
申请号:US13801949
申请日:2013-03-13
申请人: Byunghoon Bae , Jihyung Kim , Mark A. Shannon , Taekyu Kang
发明人: Byunghoon Bae , Jihyung Kim , Mark A. Shannon , Taekyu Kang
IPC分类号: G01N30/02
CPC分类号: G01N30/02 , G01N30/68 , G01N2030/0095 , G01N30/6095
摘要: A portable gas analyzer comprising an integrated micro-flame ionization detector (micro-FID), a micro-gas chromatograph (micro-GC), an electrolyzer, and a flame-shaped electrode are provided. The components of the portable gas analyzer can be integrated into a single “lunchbox” sized housing with all the peripherals required to operate the micro-GC/FID without an external power and gas supply.
摘要翻译: 提供了一种携带式气体分析仪,其包括集成微火焰离子化检测器(micro-FID),微气相色谱仪(micro-GC),电解器和火焰形电极。 便携式气体分析仪的组件可以集成到单个“饭盒”尺寸的外壳中,而无需外部电源和气体供应即可操作微型GC / FID所需的所有外围设备。
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公开(公告)号:US20080149869A1
公开(公告)日:2008-06-26
申请号:US11797197
申请日:2007-05-01
申请人: Mark A. Shannon , Byunghoon Bae , Richard I. Masel
发明人: Mark A. Shannon , Byunghoon Bae , Richard I. Masel
IPC分类号: F16K31/02
CPC分类号: F16K99/0001 , B33Y80/00 , F16K31/02 , F16K99/0015 , F16K99/0051
摘要: A bi-directional electrostatic microvalve includes a membrane electrode that is controlled by application of voltage to fixed electrodes disposed on either side of the membrane electrode. Dielectric insulating layers separate the electrodes. One of the fixed electrodes defines a microcavity. Microfluidic channels formed into the electrodes provide fluid to the microcavity. A central pad defined in the microcavity places a portion of the second electrode close to the membrane electrode to provide a quick actuation while the microcavity reduces film squeezing pressure of the membrane electrode. In preferred embodiment microvalves, low surface energy and low surface charge trapping coatings, such as fluorocarbon films made from cross-linked carbon di-fluoride monomers or surface monolayers made from fluorocarbon terminated silanol compounds coatings coat the electrode low bulk charge trapping dielectric layers limit charge trapping and other problems and increase device lifetime operation.
摘要翻译: 双向静电微型阀包括通过向设置在膜电极的两侧的固定电极施加电压来控制的膜电极。 绝缘层将电极分开。 固定电极之一限定微腔。 形成在电极中的微流体通道为微腔提供流体。 限定在微腔中的中心衬垫使第二电极的一部分靠近膜电极,以提供快速致动,同时微腔降低膜电极的膜挤压压力。 在优选的实施方案中,微型阀,低表面能和低表面电荷捕获涂层,例如由交联的碳二氟化物单体制成的碳氟化合物膜或由氟碳封端的硅烷醇化合物涂层制成的表面单层涂覆电极,低体积电荷捕获电介质层限制电荷 捕捉等问题,增加设备的使用寿命。
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公开(公告)号:US20100132547A1
公开(公告)日:2010-06-03
申请号:US11539405
申请日:2006-10-06
申请人: Richard I. Masel , Zheng Ni , Mark A. Shannon
发明人: Richard I. Masel , Zheng Ni , Mark A. Shannon
IPC分类号: B01D53/02
CPC分类号: B01J20/22 , B01D15/00 , B01D2253/204 , B01D2257/70 , B01D2259/4583 , B01J20/226 , B01J20/3265 , B01J2220/54 , G01N1/405 , G01N2001/028
摘要: Novel metal organic framework (MOF) molecules and methods of synthesizing them are described. MOFs are organometallic crystalline structures that have high sorption capacity due to high surface area, tailorable selectivity, an inert nature, and thermal stability at high temperatures. MOFs may be used as sorbents in preconcentrators for analytical devices to provide orders of magnitude of improved sensitivity in analyte detection. MOFs are also useful as sorbents in new compact and portable micropreconcentrator designs such as a modified purge and trap system and a multi-valve microelectromechanical system (MEMS) to achieve high gain in analyte detection. Further, MOFs may be used as coatings for novel microstructure arrays in micropreconcentrators where the microstructures are designed to increase the surface area to volume ratio inside the micropreconcentrator while minimizing the pressure drop across the micropreconcentrator.
摘要翻译: 描述了新的金属有机骨架(MOF)分子及其合成方法。 MOFs是由于高表面积,可定制选择性,惰性和高温下的热稳定性而具有高吸附能力的有机金属结晶结构。 MOF可用作分析仪器预浓缩器中的吸附剂,以提供分析物检测中提高灵敏度的数量级。 MOFs还可用作新的紧凑型和便携式微型浓缩器设计中的吸附剂,例如改进的吹扫和捕集系统以及实现分析物检测的高增益的多阀微机电系统(MEMS)。 此外,MOFs可以用作微量浓缩器中的新型微结构阵列的涂层,其中微结构被设计成增加微浓缩器内部的表面积与体积比,同时最小化微量浓缩器上的压降。
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公开(公告)号:US06904966B2
公开(公告)日:2005-06-14
申请号:US10687504
申请日:2003-10-16
CPC分类号: F28F9/026 , F28F3/04 , F28F3/12 , F28F21/065 , F28F2260/02 , Y10S165/905 , Y10T29/4935 , Y10T29/49353
摘要: A flexible mesoscopic heat exchanger is provided by the invention. The heat exchanger of the invention includes uniform microchannels for fluid flow. Separate header and channel layers include microchannels for fluid flow and heat exchange. A layered structure with channels aligned in multiple orientations in the layers permits the use of a flexible material without channel sagging and provides uniform flows. In a preferred embodiment, layers are heat sealed, e.g., by a preferred lamination fabrication process.
摘要翻译: 本发明提供一种灵活的介观换热器。 本发明的热交换器包括用于流体流动的均匀微通道。 单独的头部和通道层包括用于流体流动和热交换的微通道。 具有在层中的多个取向对齐的通道的分层结构允许使用柔性材料而没有通道下垂并且提供均匀的流动。 在优选的实施方案中,层被热密封,例如通过优选的层压制造方法。
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公开(公告)号:US08123834B2
公开(公告)日:2012-02-28
申请号:US11539405
申请日:2006-10-06
申请人: Richard I. Masel , Zheng Ni , Mark A. Shannon
发明人: Richard I. Masel , Zheng Ni , Mark A. Shannon
IPC分类号: B01D53/02
CPC分类号: B01J20/22 , B01D15/00 , B01D2253/204 , B01D2257/70 , B01D2259/4583 , B01J20/226 , B01J20/3265 , B01J2220/54 , G01N1/405 , G01N2001/028
摘要: Novel metal organic framework (MOF) molecules and methods of synthesizing them are described. MOFs are organometallic crystalline structures that have high sorption capacity due to high surface area, tailorable selectivity, an inert nature, and thermal stability at high temperatures. MOFs may be used as sorbents in preconcentrators for analytical devices to provide orders of magnitude of improved sensitivity in analyte detection. MOFs are also useful as sorbents in new compact and portable micropreconcentrator designs such as a modified purge and trap system and a multi-valve microelectromechanical system (MEMS) to achieve high gain in analyte detection. Further, MOFs may be used as coatings for novel microstructure arrays in micropreconcentrators where the microstructures are designed to increase the surface area to volume ratio inside the micropreconcentrator while minimizing the pressure drop across the micropreconcentrator.
摘要翻译: 描述了新的金属有机骨架(MOF)分子及其合成方法。 MOFs是由于高表面积,可定制选择性,惰性和高温下的热稳定性而具有高吸附能力的有机金属结晶结构。 MOF可用作分析仪器预浓缩器中的吸附剂,以提供分析物检测中提高灵敏度的数量级。 MOFs还可用作新的紧凑型和便携式微型浓缩器设计中的吸附剂,例如改进的吹扫和捕集系统以及实现分析物检测的高增益的多阀微机电系统(MEMS)。 此外,MOFs可以用作微量浓缩器中的新型微结构阵列的涂层,其中微结构被设计成增加微浓缩器内部的表面积与体积比,同时最小化微量浓缩器上的压降。
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公开(公告)号:US07220345B2
公开(公告)日:2007-05-22
申请号:US10273935
申请日:2002-10-18
IPC分类号: B67D5/00
CPC分类号: B01D57/02 , B01J19/0093 , B01J2219/00783 , B01J2219/00907 , B01J2219/0093 , B01L3/502707 , B01L3/502761 , B01L2200/027 , B01L2300/0681 , B01L2300/0874 , B01L2300/0896 , B01L2400/0415 , B01L2400/06 , B01L2400/0627 , B82Y30/00 , G01N27/4473 , G01N27/44791
摘要: A fluid circuit includes a membrane having a first side, a second side opposite the first side, and a pore extending from the first side to the second side. The circuit also includes a first channel containing fluid extending along the first side of the membrane and a second channel containing fluid extending along the second side of the membrane and crossing the first channel. The circuit also includes an electrical source in electrical communication with at least one of the first fluid and second fluid for selectively developing an electrical potential between fluid in the first channel and fluid in the second channel. This causes at least one component of fluid to pass through the pore in the membrane from one of the first channel and the second channel to the other of the first channel and the second channel.
摘要翻译: 流体回路包括具有第一侧,与第一侧相对的第二侧和从第一侧向第二侧延伸的孔的膜。 电路还包括含有沿着膜的第一侧延伸的流体的第一通道和包含沿膜的第二侧延伸并与第一通道交叉的流体的第二通道。 电路还包括与第一流体和第二流体中的至少一个电连通的电源,用于选择性地在第一通道中的流体和第二通道中的流体之间形成电势。 这使得流体的至少一个成分从第一通道和第二通道中的一个通过膜中的孔到第一通道和第二通道中的另一个。
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公开(公告)号:US06749376B2
公开(公告)日:2004-06-15
申请号:US09734247
申请日:2000-12-11
申请人: William R Keefe , Randolf N. Johnson , Christopher M. Lodermeier , Peter J. Ness , Bradley E. Rowell , Mark A. Shannon , John Niethammer
发明人: William R Keefe , Randolf N. Johnson , Christopher M. Lodermeier , Peter J. Ness , Bradley E. Rowell , Mark A. Shannon , John Niethammer
IPC分类号: B23B2700
CPC分类号: B23B31/117 , B23B31/1179 , B23B2228/16 , B23B2228/56 , Y10T407/22 , Y10T407/27
摘要: A tool holder having two distinct phases, a first phase in which the tool is held in an interference fit with sufficient mechanical interaction between the two for the tool to be rotated at high speed and perform its intended purpose on a workpiece, and a second phase in which the tool is sufficiently released from the interference fit to be rapidly removed from the holder (as by an automated apparatus).
摘要翻译: 具有两个不同相位的工具架,第一阶段,其中工具被保持在过盈配合中,两者之间具有足够的机械相互作用,用于工具以高速旋转并在工件上执行其预期目的;第二阶段 其中工具从过盈配合中充分释放,以便从保持器快速移除(如通过自动化设备)。
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公开(公告)号:US06573734B2
公开(公告)日:2003-06-03
申请号:US09850719
申请日:2001-05-08
申请人: Dongming He , Mark A. Shannon
发明人: Dongming He , Mark A. Shannon
IPC分类号: G01R2708
摘要: A thin film integrated conductivity sensor is formed on a suitable surface for measuring the electrical conductivity of a liquid. The surface is preferably an insulator, but may be conducting, if the electrodes are on an insulating surface. A preferred embodiment insulates the electrodes by use of a dielectric layer that is deposited on top of a silicon wafer substrate. A sensor tip is integrated on the top surface of the substrate. In a preferred embodiment, the substrate is fabricated into a sensor shape with a small sharp tip at one end and an opposite larger end for accommodating electrode pads. The larger end might also be used for integration of measurement circuits or accommodating bonding pads. In a preferred embodiment, the tip also accommodates an integrated temperature sensor to enable local temperature measurements. The sensor is a thin-film resistor preferably enclosed within a layer of the sensor tip and having a serpentine shape to produce significant resistance (hundreds to thousands of Ohms) while consuming a small area of the sensor tip.
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公开(公告)号:US08628055B2
公开(公告)日:2014-01-14
申请号:US11797197
申请日:2007-05-01
申请人: Mark A. Shannon , Byunghoon Bae , Richard I. Masel
发明人: Mark A. Shannon , Byunghoon Bae , Richard I. Masel
IPC分类号: F16K31/02
CPC分类号: F16K99/0001 , B33Y80/00 , F16K31/02 , F16K99/0015 , F16K99/0051
摘要: A bi-directional electrostatic microvalve includes a membrane electrode that is controlled by application of voltage to fixed electrodes disposed on either side of the membrane electrode. Dielectric insulating layers separate the electrodes. One of the fixed electrodes defines a microcavity. Microfluidic channels formed into the electrodes provide fluid to the microcavity. A central pad defined in the microcavity places a portion of the second electrode close to the membrane electrode to provide a quick actuation while the microcavity reduces film squeezing pressure of the membrane electrode. In preferred embodiment microvalves, low surface energy and low surface charge trapping coatings, such as fluorocarbon films made from cross-linked carbon di-fluoride monomers or surface monolayers made from fluorocarbon terminated silanol compounds coatings coat the electrode low bulk charge trapping dielectric layers limit charge trapping and other problems and increase device lifetime operation.
摘要翻译: 双向静电微型阀包括通过向设置在膜电极的两侧的固定电极施加电压来控制的膜电极。 绝缘层将电极分开。 固定电极之一限定微腔。 形成在电极中的微流体通道为微腔提供流体。 限定在微腔中的中心衬垫使第二电极的一部分靠近膜电极,以提供快速致动,同时微腔降低膜电极的膜挤压压力。 在优选的实施方案中,微型阀,低表面能和低表面电荷捕获涂层,例如由交联的碳二氟化物单体制成的碳氟化合物膜或由氟碳封端的硅烷醇化合物涂层制成的表面单层涂覆电极,低体积电荷捕获电介质层限制电荷 捕捉等问题,增加设备的使用寿命。
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