公开(公告)号：US4780781A

公开(公告)日：1988-10-25

申请号：US779469

申请日：1985-09-24

申请人： Masaaki Sano ,  Katsuya Mitsuoka ,  Makoto Morijiri ,  Shinji Narishige ,  Masanobu Hanazono ,  Toshihiro Yoshida

发明人： Masaaki Sano ,  Katsuya Mitsuoka ,  Makoto Morijiri ,  Shinji Narishige ,  Masanobu Hanazono ,  Toshihiro Yoshida

IPC分类号： C22C19/07 ,  C25D3/56 ,  C25D7/00 ,  G11B5/31 ,  H01F10/16 ,  H01F41/26 ,  G11B5/147

CPC分类号： G11B5/31

摘要： A thin film magnetic head comprising a lower magnetic film, an upper magnetic film which is formed over the lower magnetic film and in which one end is come into contact with one end of the lower magnetic film and the other end faces the other end of the lower magnetic film through a magnetic gap and thereby forming a magnetic circuit which has a magnetic gap in a part thereof, together with the lower magnetic film, and a conductor coil forming a coil of a predetermined number of turns and passing between the upper and lower magnetic films and crossing the magnetic circuit. Each of the upper and lower magnetic films is formed of a Co-Ni-Fe ternary alloy having a face-centered cubic crystal structure. Also, uniaxial anisotropy is alternately and perpendicularly given in every layer of a predetermined thickness stacked in the direction of thickness of the film.

摘要翻译： 一种薄膜磁头，包括下部磁性膜，上部磁性膜，形成在下部磁性膜的上方，并且一端与下部磁性膜的一端接触，另一端面向下部磁性膜的另一端 通过磁隙下降磁性膜，从而形成与下部磁性膜一起形成有磁性间隙的磁路，以及形成规定圈数的线圈的导体线圈，并且通过上下 磁性膜并穿过磁路。 上下磁性膜由具有面心立方晶体结构的Co-Ni-Fe三元合金形成。 另外，在膜的厚度方向堆叠的规定厚度的各层中交替地，垂直地赋予单轴各向异性。

公开(公告)号：US4592801A

公开(公告)日：1986-06-03

申请号：US639012

申请日：1984-08-09

申请人： Shinichi Hara ,  Shinji Narishige ,  Tsuneo Yoshinari ,  Mistuo Sato ,  Katsuya Mitsuoka ,  Makoto Morijiri ,  Masanobu Hanazono ,  Tetsuo Kobayashi

发明人： Shinichi Hara ,  Shinji Narishige ,  Tsuneo Yoshinari ,  Mistuo Sato ,  Katsuya Mitsuoka ,  Makoto Morijiri ,  Masanobu Hanazono ,  Tetsuo Kobayashi

IPC分类号： G11B5/31 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/311 ,  B44C1/22 ,  C03C15/00 ,  C03C25/06 ,  C23F1/02

CPC分类号： H01L21/31116 ,  H01L21/302 ,  G11B5/3116 ,  G11B5/3163

摘要： A method of patterning a thin film by dry etching is disclosed in which, in order for a thin alumina film to have a predetermined pattern, the thin alumina film is selectively removed by carrying out the ion beam etching which uses a carbon fluoride gas, while using a photoresist film as a mask.

摘要翻译： 公开了一种通过干蚀刻图案化薄膜的方法，其中为了使氧化铝薄膜具有预定图案，通过进行使用氟化碳气体的离子束蚀刻来选择性地除去薄氧化铝膜，同时 使用光致抗蚀剂膜作为掩模。

公开(公告)号：US4623439A

公开(公告)日：1986-11-18

申请号：US658161

申请日：1984-10-05

申请人： Katsuya Mitsuoka ,  Shinji Narishige ,  Akira Kumagai ,  Masaaki Sano ,  Shinichi Hara ,  Masanobu Hanazono

发明人： Katsuya Mitsuoka ,  Shinji Narishige ,  Akira Kumagai ,  Masaaki Sano ,  Shinichi Hara ,  Masanobu Hanazono

IPC分类号： C22C19/00 ,  C23C14/14 ,  C23C14/24 ,  G11B5/31 ,  H01F10/16 ,  H01F41/14 ,  C23C14/00

CPC分类号： C23C14/24 ,  C23C14/14 ,  H01F41/14

摘要： A magnetic thin film of Ni-Co-Fe ternary alloy containing at most 75% by weight of Ni, 10 to 90% by weight of Co, and at most 15% by weight of Fe, which shows the magnetostriction constant between +2.times.10.sup.-6 to -2.times.10.sup.-6 and shows a uniaxial magnetic anisotropy of at most 10 Oe.The film is formed through the vacuum evaporation of the alloy during which two orthogonal external magnetic fields, directions x and y, are alternately applied over the deposition surface of a substrate.The film is suitable for a core material of a thin film magnetic head with a higher recording density.

摘要翻译： Ni-Co-Fe三元合金的磁性薄膜含有至多75重量％的Ni，10至90重量％的Co和至多15重量％的Fe，其显示出±2×10 -3摩尔的磁致伸缩常数， 6〜-2×10 -6，显示出至多10Oe的单轴磁各向异性。 通过合金的真空蒸发形成膜，在该过程中两个正交的外部磁场方向x和y交替施加在基板的沉积表面上。 该膜适用于具有较高记录密度的薄膜磁头的芯材。

公开(公告)号：US4939610A

公开(公告)日：1990-07-03

申请号：US252603

申请日：1988-10-03

申请人： Shinji Narishige ,  Masaaki Sano ,  Kouichi Nishioka ,  Takao Imagawa ,  Masanobu Hanazono ,  Tetsuo Kobayashi ,  Toshihiro Yoshida

发明人： Shinji Narishige ,  Masaaki Sano ,  Kouichi Nishioka ,  Takao Imagawa ,  Masanobu Hanazono ,  Tetsuo Kobayashi ,  Toshihiro Yoshida

IPC分类号： G11B5/31 ,  H01F41/18

CPC分类号： H01F41/18 ,  G11B5/31

摘要： A thin film magnetic head is disclosed which includes a substrate, a first magnetic core disposed on the substrate, a second magnetic core forming a magnetic path in conjunction with the first magnetic core, a conductor coil wound in the magnetic path and a gap formed between ends of the first magnetic core and the second magnetic core. At least one of the first magnetic core and the second magnetic core includes a thin film of a cobalt alloy. The cobalt alloy includes 20-70 atomic percent of cobalt, 20-60 atomic percent of nickel, 12-30 atomic percent of iron and 5-32 atomic percent of palladium.

摘要翻译： 公开了一种薄膜磁头，其包括基板，设置在基板上的第一磁芯，与第一磁芯一起形成磁路的第二磁芯，缠绕在磁路中的导体线圈和形成在磁路之间的间隙 第一磁芯和第二磁芯的端部。 第一磁芯和第二磁芯中的至少一个包括钴合金薄膜。 钴合金包括20-70原子％的钴，20-60原子％的镍，12-30原子％的铁和5-32原子百分比的钯。

公开(公告)号：US4943883A

公开(公告)日：1990-07-24

申请号：US266080

申请日：1988-11-02

申请人： Masaaki Sano ,  Takao Imagawa ,  Kouichi Nishioka ,  Shinji Narishige ,  Masanobu Hanazono ,  Takashi Onishi ,  Toshihiro Yoshida

发明人： Masaaki Sano ,  Takao Imagawa ,  Kouichi Nishioka ,  Shinji Narishige ,  Masanobu Hanazono ,  Takashi Onishi ,  Toshihiro Yoshida

IPC分类号： G11B5/31

CPC分类号： G11B5/3109

摘要： A thin film magnetic head provided with a first and a second thin film made of a magnetic material, disposed so as to form a closed magnetic circuit; and an intermediate film made of a non-magnetic material, disposed between the first and the second thin films so as to form a magnetic gap at a part of the magnetic circuit; wherein at least one of the first and the second thin films is made of a quaternary amorphous magnetic alloy, whose principal component is cobalt and which contains hafnium, tantalum and palladium.

摘要翻译： 一种薄膜磁头，其设置有由磁性材料制成的第一和第二薄膜，被设置成形成闭合磁路; 以及由非磁性材料制成的中间膜，设置在第一和第二薄膜之间，以在磁路的一部分形成磁隙; 其中所述第一和第二薄膜中的至少一个薄膜由主要成分为钴并含有铪，钽和钯的四元非晶磁性合金制成。

公开(公告)号：US5051856A

公开(公告)日：1991-09-24

申请号：US420478

申请日：1989-10-12

申请人： Shinji Narishige ,  Katsuya Mitsuoka ,  Takao Imagawa ,  Kouichi Nishioka ,  Akira Kumagai ,  Masaaki Sano ,  Yutaka Sugita ,  Reiko Arai ,  Tetsuo Kobayashi ,  Toshihiro Yoshida ,  Yokuo Saitoh ,  Yoshikazu Tsuji ,  Masaaki Hayashi

发明人： Shinji Narishige ,  Katsuya Mitsuoka ,  Takao Imagawa ,  Kouichi Nishioka ,  Akira Kumagai ,  Masaaki Sano ,  Yutaka Sugita ,  Reiko Arai ,  Tetsuo Kobayashi ,  Toshihiro Yoshida ,  Yokuo Saitoh ,  Yoshikazu Tsuji ,  Masaaki Hayashi

IPC分类号： G11B5/31 ,  H01F10/32

CPC分类号： B82Y25/00 ,  G11B5/31 ,  H01F10/32

摘要： A thin film magnetic head has magnetic films, at least one of which is composed of a material containing major components of nickel and iron and one or more element from nitrogen, oxygen and carbon and has two of face-centered cubic system and body-centered tetragonal system, whereby thin film magnetic heads having a high permeability and low coercive force can be provided.

摘要翻译： 薄膜磁头具有磁性膜，其中至少一个由含有镍和铁的主要成分的材料和来自氮，氧和碳的一种或多种元素组成，并且具有两个面心立方体系和以身体为中心 可以提供具有高磁导率和低矫顽力的薄膜磁头。

公开(公告)号：US4971896A

公开(公告)日：1990-11-20

申请号：US280828

申请日：1988-12-07

申请人： Takashi Kawabe ,  Ataru Kobayashi ,  Moriaki Fuyama ,  Makoto Morijiri ,  Eiji Ashida ,  Masatoshi Tsuchiya ,  Tetsuya Okai ,  Masanobu Hanazono ,  Shinichi Hara ,  Shinji Narishige ,  Hiroshi Ikeda

发明人： Takashi Kawabe ,  Ataru Kobayashi ,  Moriaki Fuyama ,  Makoto Morijiri ,  Eiji Ashida ,  Masatoshi Tsuchiya ,  Tetsuya Okai ,  Masanobu Hanazono ,  Shinichi Hara ,  Shinji Narishige ,  Hiroshi Ikeda

IPC分类号： G03F7/00 ,  G11B5/31

CPC分类号： G11B5/3163 ,  G03F7/0035 ,  Y10S430/165

摘要： A method of forming a thin film pattern on a base having a step portion. This method comprises a first step of forming a thin film of given material on the base, a second step of forming a predetermined pattern of a first photoresist film on said thin film at one of a first portion including a lower part of the step portion and a second portion including an upper part of the step portion, a third step of forming a predetermined pattern of a second photoresist film on said thin film at the other of the first and second portions and a fourth step of applying ion-milling to said thin film of given material using masks said first and second photoresist film patterns formed on said thin film at the first and second portions.

摘要翻译： 在具有台阶部的基底上形成薄膜图案的方法。 该方法包括在基底上形成给定材料的薄膜的第一步骤，第二步骤，在包括台阶部分的下部的第一部分中的一个上形成在所述薄膜上的第一光致抗蚀剂膜的预定图案，以及 第二部分，包括台阶部分的上部;第三步骤，在所述第一和第二部分中的另一个上在所述薄膜上形成第二光致抗蚀剂膜的预定图案;以及第四步骤，将所述薄片 给定材料的膜使用掩模，所述第一和第二部分形成在所述薄膜上形成的第一和第二光致抗蚀剂图案。

公开(公告)号：US5214840A

公开(公告)日：1993-06-01

申请号：US550698

申请日：1990-07-10

申请人： Takao Imagawa ,  Masaaki Sano ,  Katsuya Mitsuoka ,  Kouichi Nishioka ,  Shinji Narishige ,  Tetsuo Kobayashi

发明人： Takao Imagawa ,  Masaaki Sano ,  Katsuya Mitsuoka ,  Kouichi Nishioka ,  Shinji Narishige ,  Tetsuo Kobayashi

IPC分类号： G11B5/31

CPC分类号： G11B5/3163 ,  G11B5/3113 ,  Y10T29/49034

摘要： A method of fabricating a thin film magnetic head including a bottom magnetic core formed on a substrate, a top magnetic core laminated through an insulation layer, with one end of the top and bottom magnetic cores being joined and another end forming a magnetic gap, and a conductor coil layer which winds around the joined section for a plurality of number of turns. At least one of the top and bottom magnetic cores has its magnetization easy axis oriented substantially orthogonal to the magnetic path direction of the magnetic head by the magnetic annealing process, so that the magnetic head has an increased output and an enhanced write ability.

摘要翻译： 一种制造薄膜磁头的方法，该薄膜磁头包括形成在基板上的底部磁芯，通过绝缘层层压的顶部磁芯，顶部和底部磁芯的一端接合，另一端形成磁隙， 导体线圈层绕着连接部分缠绕多个匝数。 顶部和底部磁芯中的至少一个通过磁性退火处理使其磁化容易轴定向为基本上垂直于磁头的磁路方向，从而磁头具有增加的输出和增强的写入能力。

公开(公告)号：US4626947A

公开(公告)日：1986-12-02

申请号：US460658

申请日：1983-01-24

申请人： Shinji Narishige ,  Tsuneo Yoshinari ,  Mituo Sato ,  Masayuki Takagi ,  Sadanori Nagaike ,  Toshihiro Yoshida ,  Katsuya Mitsuoka

发明人： Shinji Narishige ,  Tsuneo Yoshinari ,  Mituo Sato ,  Masayuki Takagi ,  Sadanori Nagaike ,  Toshihiro Yoshida ,  Katsuya Mitsuoka

IPC分类号： G11B5/31 ,  G11B5/147 ,  G11B5/127 ,  G11B5/187

CPC分类号： G11B5/3113

摘要： A thin film magnetic head comprises a lower magnetic member and an upper magnetic film which constitute a magnetic circuit having a magnetic gap at a predetermined location, and a conductor film forming a coil which intersects the magnetic circuit. At least the upper magnetic film has a magnetostriction constant which is not greater than 6.times.10.sup.-7 in the absolute value.

摘要翻译： 薄膜磁头包括构成在预定位置具有磁隙的磁路的下磁性构件和上磁性膜，以及形成与磁路交叉的线圈的导体膜。 至少上部磁性膜具有绝对值不大于6×10-7的磁致伸缩常数。

公开(公告)号：US4698273A

公开(公告)日：1987-10-06

申请号：US918333

申请日：1986-10-14

申请人： Matahiro Komuro ,  Yuzo Kozono ,  Takeshi Yasuda ,  Shinji Narishige ,  Masanobu Hanazono ,  Tetsuro Kuroda

发明人： Matahiro Komuro ,  Yuzo Kozono ,  Takeshi Yasuda ,  Shinji Narishige ,  Masanobu Hanazono ,  Tetsuro Kuroda

IPC分类号： H01F10/10 ,  B32B15/01 ,  C23C14/06 ,  F16L39/00 ,  G11B5/66 ,  H01F10/18 ,  H01F10/30 ,  H01F10/32 ,  H01F41/14 ,  H01F41/18 ,  C23C14/14

CPC分类号： B82Y25/00 ,  B32B15/01 ,  F16L39/00 ,  G11B5/66 ,  H01F10/18 ,  H01F10/32 ,  Y10S428/928 ,  Y10T428/12632 ,  Y10T428/12958

摘要： The film is composed of an alternate lamination of unit iron layers and unit layers of ferromagnetic iron compound such as Fe.sub.3 Al, Fe.sub.3 Si, Fe.sub.3 Ge and Fe.sub.3 Ga. The thickness of the both unit layers is less than 70 .ANG.. The film has a high saturation magnetization more than 230 emu/g and a high thermal stability so that the film is particularly applicable to a magnetic head core.

摘要翻译： 该膜由铁铁层和Fe3Al，Fe3Si，Fe3Ge和Fe3Ga等铁磁性铁化合物的单位层的交替叠层构成。 两个单元层的厚度小于70安培。 该膜具有高于230emu / g的高饱和磁化强度和高热稳定性，因此该膜特别适用于磁头芯。