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    Electromechanical conversion element, liquid drop ejection head, liquid drop ejection device, and image forming apparatus
    4.
    发明授权
    Electromechanical conversion element, liquid drop ejection head, liquid drop ejection device, and image forming apparatus 有权
    机电转换元件，液滴喷射头，液滴喷射装置和图像形成装置

    公开(公告)号：US08733906B2

    公开(公告)日：2014-05-27

    申请号：US13615399

    申请日：2012-09-13

    申请人： Satoshi Mizukami ,  Masaru Shinkai ,  Masahiro Ishimori ,  Yoshikazu Akiyama

    发明人： Satoshi Mizukami ,  Masaru Shinkai ,  Masahiro Ishimori ,  Yoshikazu Akiyama

    IPC分类号： B41J2/015

    CPC分类号： H01L41/0478 ,  B41J2/14233 ,  B41J2002/14491 ,  H01L41/081 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319

    摘要： Disclosed is an electromechanical conversion element, including an electromechanical conversion film including a PZT, an upper electrode formed on a top of the electromechanical conversion film and including a first strontium ruthenium oxide, and a lower electrode formed on a bottom of the electromechanical conversion film and including a second strontium ruthenium oxide, wherein Sr-pzt/Sr-sr≦0.01, wherein Sr-pzt is a SIMS intensity for a secondary ion of strontium of the PZT at a position of ½ of a thickness of the electromechanical conversion film and Sr-sr is a SIMS intensity for a secondary ion of strontium of the second strontium ruthenium oxide at a position of ½ of a thickness of the lower electrode.

    摘要翻译： 公开了一种机电转换元件，包括机电转换膜，其包括PZT，形成在机电转换膜的顶部上并包括第一锶氧化钌的上电极和形成在机电转换膜的底部的下电极， 包括第二锶氧化钌，其中Sr-pzt / Sr-Sr＆nlE; 0.01，其中Sr-pzt是在机电转换膜的厚度的1/2的位置处的PZT的锶的二次离子的SIMS强度，Sr -Sr是在下电极的厚度的1/2的位置处的第二锶氧化钌的锶的二次离子的SIMS强度。

    Electromechanical transducer element, droplet discharge head, and droplet discharge device
    8.
    发明授权
    Electromechanical transducer element, droplet discharge head, and droplet discharge device 有权
    机电换能器元件，液滴喷头和液滴喷射装置

    公开(公告)号：US08727505B2

    公开(公告)日：2014-05-20

    申请号：US13529304

    申请日：2012-06-21

    申请人： Satoshi Mizukami ,  Yoshikazu Akiyama ,  Masaru Shinkai ,  Keiji Ueda ,  Kanshi Abe ,  Takakazu Kihira ,  Naoya Kondo

    发明人： Satoshi Mizukami ,  Yoshikazu Akiyama ,  Masaru Shinkai ,  Keiji Ueda ,  Kanshi Abe ,  Takakazu Kihira ,  Naoya Kondo

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2002/14258 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/318

    摘要： Disclosed is an electromechanical transducer element that includes an electromechanical transducer film formed of a complex oxide (PZT) including lead (Pb), zirconium (Zr), and titanium (Ti). The electromechanical transducer film is formed by laminating plural PZT thin films until a thickness of the formed electromechanical transducer film becomes a predetermined thickness. When an atomic weight ratio (Pb/(Zr+Ti)) of average Pb included in the formed electromechanical transducer film is denoted by Pb(avg) and an atomic weight ratio (Pb/(Zr+Ti)) of Pb in any one of laminate interfaces of the plural PZT thin films is denoted by Pb(interface), the Pb(avg) is greater than or equal to 100 atomic percentage (at %) and less than or equal to 110 atomic percentage (at %), and a fluctuation ratio ΔPb=Pb(avg)−Pb(interface) of Pb in the laminate interface is less than or equal to 20 percent.

    摘要翻译： 公开了一种机电换能器元件，其包括由包括铅（Pb），锆（Zr）和钛（Ti）的复合氧化物（PZT）形成的机电换能器膜。 机电换能器膜通过层压多个PZT薄膜而形成，直到所形成的机电换能器膜的厚度成为预定厚度。 当在所形成的机电换能器膜中包含的平均Pb的原子重量比（Pb /（Zr + Ti））由Pb（avg）和Pb中的任何一种的原子量（Pb /（Zr + Ti）） 多个PZT薄膜的层叠界面由Pb（界面）表示，Pb（avg）大于或等于100原子百分比（at％）和小于或等于110原子百分比（at％），以及 层压界面中Pb的波动比＆Dgr; Pb = Pb（avg）-Pb（界面）小于或等于20％。