公开(公告)号：US5545988A

公开(公告)日：1996-08-13

申请号：US305368

申请日：1994-09-13

申请人： Masanori Sakai ,  Katsuhiko Tomita ,  Joichiro Ezaki ,  Kazuo Suzuki ,  Seiji Fukuda ,  Kouichi Hatakeyama

发明人： Masanori Sakai ,  Katsuhiko Tomita ,  Joichiro Ezaki ,  Kazuo Suzuki ,  Seiji Fukuda ,  Kouichi Hatakeyama

IPC分类号： G11B5/012 ,  G11B5/455 ,  G11B20/10 ,  G11B20/22 ,  G01R23/16 ,  G11B20/24

CPC分类号： G11B20/10009 ,  G11B20/22 ,  G11B5/012 ,  G11B5/455

摘要： To perform digital processing of cyclical waveform signals that include random noise with high accuracy and high reliability without being practically affected by the noise. This is a waveform signal processor into which cyclical waveform signals are input and which outputs corresponding signals. It samples a cyclical waveform signal a plurality of times and then, based upon the obtained sampling values, it performs a Fourier Transform for all the various cycles. Next, the phase angle of a pre-selected frequency component in the Fourier series is determined based upon the Fourier Transform. Then a sampling point at the same phase for all cycles is specified by using the phase angle as a reference. The average of the sampling values at the same phase is calculated and output.

摘要翻译： 对具有高精度和高可靠性的随机噪声的周期性波形信号进行数字处理，而不受噪声的影响。 这是波形信号处理器，其中输入循环波形信号并输出​​相应的信号。 它对多个循环波形信号进行采样，然后根据获得的采样值对所有各种周期进行傅里叶变换。 接下来，基于傅里叶变换来确定傅立叶级数中的预选频率分量的相位角。 然后通过使用相位角作为参考来指定所有周期的相位相位的采样点。 计算并输出相同相位的采样值的平均值。

公开(公告)号：US5072320A

公开(公告)日：1991-12-10

申请号：US316318

申请日：1989-02-27

申请人： Joichiro Ezaki ,  Kazumasa Fukuda ,  Masanori Sakai

发明人： Joichiro Ezaki ,  Kazumasa Fukuda ,  Masanori Sakai

IPC分类号： G11B5/012 ,  G11B5/72 ,  G11B5/73 ,  G11B5/82

CPC分类号： G11B5/7315 ,  G11B5/012 ,  G11B5/72 ,  G11B5/82

摘要： In a magnetic recording and reproducing apparatus of a type wherein a magnetic disk having a magnetic recording layer formed on a rigid substrate is rotated at a high speed and magnetic recording and reproduction are conducted by the magnetic head disposed on the surface of the disk, the magnetic recording and reproducing apparatus being characterized in that the magnetic recording layer constitutes an oxide layer, a nitride layer or an oxidized coating film at at least its surface layer, and the magnetic recording and reproducing are conducted by the magnetic head which is caused to be substantially in contact with the surface of magnetic disk at at least the innermost cylinder of the magnetic disk.

摘要翻译： 在其中具有形成在刚性基板上的磁记录层的磁盘以高速旋转并且通过设置在盘表面上的磁头进行磁记录和再现的类型的磁记录和再现装置中， 磁记录和再现装置的特征在于，磁记录层至少在其表面层上形成氧化物层，氮化物层或氧化涂膜，磁记录和再现由磁头进行 在磁盘的至少最内圆筒处基本上与磁盘表面接触。

公开(公告)号：US5268799A

公开(公告)日：1993-12-07

申请号：US17997

申请日：1993-02-16

申请人： Joichiro Ezaki ,  Kazumasa Fukuda ,  Masanori Sakai

发明人： Joichiro Ezaki ,  Kazumasa Fukuda ,  Masanori Sakai

IPC分类号： G11B5/012 ,  G11B5/54 ,  G11B5/58 ,  G11B5/60 ,  G11B5/82

CPC分类号： G11B5/6005 ,  G11B5/012 ,  G11B5/54 ,  G11B5/58

摘要： In a magnetic recording and reproducing apparatus of a type wherein a magnetic disk having a magnetic recording layer formed on a rigid substrate is rotated at a high speed and magnetic recording and reproduction are conducted by the magnetic head disposed on the surface of the disk, the magnetic recording and reproducing apparatus being characterized in that the magnetic recording and reproducing are conducted by the magnetic head which is caused to fly from the magnetic disk at at least an area of the outermost cylinder of the magnetic disk and is caused to be substantially in contact with the surface of magnetic disk at at least an innermost cylinder of the magnetic disk.

摘要翻译： 在其中具有形成在刚性基板上的磁记录层的磁盘以高速旋转并且通过设置在盘表面上的磁头进行磁记录和再现的类型的磁记录和再现装置中， 磁记录和再现装置的特征在于磁记录和再现是由在磁盘的最外圆柱体的至少一个区域处从磁盘飞出并被使其基本接触的磁头来进行的 其中磁盘的表面在磁盘的至少最内圆柱上。

公开(公告)号：US4918556A

公开(公告)日：1990-04-17

申请号：US233129

申请日：1988-08-17

申请人： Joichiro Ezaki ,  Kazumasa Fukuda ,  Masanori Sakai

发明人： Joichiro Ezaki ,  Kazumasa Fukuda ,  Masanori Sakai

IPC分类号： G11B5/02 ,  G11B5/012 ,  G11B5/60 ,  G11B5/62 ,  G11B5/64 ,  G11B5/65 ,  G11B5/73 ,  G11B5/82

CPC分类号： G11B5/6005 ,  G11B5/012 ,  G11B5/82

摘要： A magnetic recording and reproducing apparatus of a type wherein a magnetic disk having a magnetic recording layer formed on a rigid substrate is rotatable at a high speed and a magnetic head is disposed on the surface of the disk so that magnetic recording and reproduction are conducted by the head while rotating the disk at a high speed, wherein the surface roughness R.sub.max of the magnetic disk is adjusted at a level of at most 100 .ANG., and the flying height of the magnetic head at the initiation of flying is adjusted at a level within a range of from 0.01 to 0.04 .mu.m.

摘要翻译： 一种磁记录和再现装置，其中具有形成在刚性基板上的磁记录层的磁盘可高速旋转并且磁头设置在盘的表面上，使得磁记录和再现由 在高速旋转磁盘的同时，其中磁盘的表面粗糙度Rmax被调节到至多100安培的水平，并且在开始飞行时磁头的飞行高度被调整到 范围为0.01〜0.04μm。

公开(公告)号：US5847899A

公开(公告)日：1998-12-08

申请号：US779339

申请日：1997-01-06

申请人： Kazumasa Fukuda ,  Masanori Sakai ,  Mikio Matsuzaki ,  Joichiro Ezaki

发明人： Kazumasa Fukuda ,  Masanori Sakai ,  Mikio Matsuzaki ,  Joichiro Ezaki

IPC分类号： G11B5/02 ,  G11B5/012 ,  G11B5/11 ,  G11B5/31 ,  G11B5/39 ,  G11B5/40 ,  G11B5/64 ,  G11B5/65 ,  G11B5/72 ,  G11B5/73 ,  G11B5/82 ,  G11B33/14

CPC分类号： G11B5/012 ,  G11B33/1493 ,  G11B5/11 ,  G11B5/40 ,  G11B5/64 ,  G11B5/72

摘要： A thin film magnetic head includes a slider and thin film magnetic transducers, the slider supporting the thin film magnetic transducers. At least one of these thin film magnetic transducers is a magnetoresistive read element. The surface resistivity .rho. of the magnetic film of the magnetic disk is within the range of .rho..gtoreq.0.03.OMEGA..multidot.cm. Electric leak from the thin film magnetic head to the magnetic disk and electric discharge between these two are prevented.

摘要翻译： 薄膜磁头包括滑块和薄膜磁换能器，滑块支撑薄膜磁换能器。 这些薄膜磁换能器中的至少一个是磁阻读取元件。 磁盘的磁性膜的表面电阻率rho在r = 0.03 OMEGA×cm的范围内。 从薄膜磁头到磁盘的电泄漏和这两者之间的放电被防止。

公开(公告)号：US4939604A

公开(公告)日：1990-07-03

申请号：US327699

申请日：1989-03-23

申请人： Kazumasa Fukuda ,  Masanori Sakai ,  Joichiro Ezaki ,  Mikio Matsuzaki

发明人： Kazumasa Fukuda ,  Masanori Sakai ,  Joichiro Ezaki ,  Mikio Matsuzaki

IPC分类号： G11B5/00 ,  G11B5/73 ,  G11B5/82

CPC分类号： G11B5/7315 ,  G11B5/00 ,  G11B5/82

摘要： A magnetic head comprises a slider which holds recording/writing elements at its medium opposing surface constituting a lifting force generating part and the surface area of the medium opposing surface is at most 2 mm.sup.2.A magnetic recording and reproducing apparatus has such magnetic head which is disposed on a magnetic disk having a magnetic recording layer formed on a rigid substrate while the disk is rotated at a high speed so that magnetic recording and reproducing are conducted between the magnetic head and the magnetic disk, wherein the surface roughness R.sub.max of the magnetic disk is at most 100 .ANG..

摘要翻译： 磁头包括在构成提升力产生部件的介质相对表面处保持记录/写入元件的滑块，并且介质相对表面的表面积至多为2mm 2。 磁记录和再现装置具有这样的磁头，该磁头设置在具有形成在刚性基板上的磁记录层的磁盘上，同时盘以高速旋转，从而在磁头和磁头之间进行磁记录和再现 磁盘，其中磁盘的表面粗糙度Rmax为至多100安培。

公开(公告)号：US5721488A

公开(公告)日：1998-02-24

申请号：US656846

申请日：1996-05-30

申请人： Masanori Sakai ,  Katsuhiko Tomita ,  Yuzuru Iwai

发明人： Masanori Sakai ,  Katsuhiko Tomita ,  Yuzuru Iwai

IPC分类号： G11B5/39 ,  G11B5/455 ,  G01R33/12

CPC分类号： G11B5/455 ,  G11B5/3967 ,  Y10T29/49004

摘要： A method and apparatus for testing an integrated magnetic head assembly for normal operation. The head assembly includes an inductive write element and a MR read element. The method includes a step of applying an external alternating magnetic field to a plurality of magnetic head assemblies which are aligned on a head block and are not yet individually separated from the head block, in a direction perpendicular to an ABS of the head block, and also applying high frequency current to the inductive write element so that alternating leakage magnetic field from the inductive write element is applied to the MR read element, and a step of measuring varying resistance characteristics of the MR read element with respect to the variation of the external alternating magnetic field and to the variation of the alternating leakage magnetic field.

摘要翻译： 一种用于测试用于正常操作的集成磁头组件的方法和装置。 磁头组件包括电感写入元件和MR读取元件。 该方法包括将外部交变磁场施加到多个磁头组件的步骤，所述多个磁头组件沿着与头部块的ABS垂直的方向在头部块上排列并且还没有从头部块单独地分离;以及 还向感性写入元件施加高频电流，使得来自感应写入元件的交变泄漏磁场被施加到MR读取元件，以及测量MR读取元件相对于外部变化的变化的电阻特性的步骤 交变磁场和交变磁场的变化。

公开(公告)号：US08901011B2

公开(公告)日：2014-12-02

申请号：US13104626

申请日：2011-05-10

申请人： Masanori Sakai ,  Tomohiro Yoshimura

发明人： Masanori Sakai ,  Tomohiro Yoshimura

IPC分类号： H01L21/469 ,  C23C14/54 ,  C23C16/455 ,  C23C16/509 ,  H01L21/67 ,  C23C16/458 ,  C23C16/34

CPC分类号： H01L21/0228 ,  C23C16/345 ,  C23C16/45525 ,  C23C16/45544 ,  C23C16/45546 ,  C23C16/45563 ,  C23C16/4584 ,  C23C16/509 ,  C23C16/52 ,  H01L21/0217 ,  H01L21/67017 ,  H01L21/67109 ,  H01L21/67253

摘要： Disclosed is a substrate processing apparatus, including: a processing chamber for processing a substrate; a substrate rotating mechanism for rotating the substrate; a gas supply unit for supplying gas to the substrate, at least two kinds of gases A and B being alternately supplied a plurality of times to form a desired film on the substrate; and a controller for controlling a rotation period of the substrate or a gas supply period defined as a time period between an instant when the gas A is made to flow and an instant when the gas A is made to flow next time such that the rotation period and the gas supply period are not brought into synchronization with each other at least while the alternate gas supply is carried out predetermined times.

摘要翻译： 公开了一种基板处理装置，包括：处理基板的处理室; 用于旋转衬底的衬底旋转机构; 用于向基板供给气体的气体供给单元，至少两种气体A和B交替地供给多次以在基板上形成所需的膜; 以及控制器，用于控制衬底的旋转周期或气体供给周期，其被定义为当气体A被制造流动的时刻与下一次气体A流动的时刻之间的时间段，使得旋转周期 并且至少在交替气体供给被执行预定次数时，气体供给周期不彼此同步。

公开(公告)号：US08614147B2

公开(公告)日：2013-12-24

申请号：US12801127

申请日：2010-05-24

申请人： Masanori Sakai ,  Tatsuyuki Saito

发明人： Masanori Sakai ,  Tatsuyuki Saito

IPC分类号： H01L21/443

CPC分类号： H01L21/28556 ,  C23C16/34 ,  C23C16/45525 ,  C23C16/45546 ,  C23C16/56 ,  H01L21/28562 ,  H01L21/76862

摘要： A TiN film is formed by a first step of forming a TiN intermediate film on a wafer by supplying TiCl4 and NH3 reacting with TiCl4 to the wafer and controlling a processing condition for causing a bonding branch that has not undergone a substitution reaction to remain at a predetermined concentration at a part of TiCl4 and a second step of substituting the bonding branch contained in the TiN intermediate film by supplying H2 to the wafer, the first step and the second step being performed in this order.

摘要翻译： 通过向晶片供给TiCl4和NH3与TiCl4反应而形成TiN中间膜的第一步骤形成TiN膜，并且控制用于使没有经历取代反应的键合分支的处理条件保持在 在TiCl4的一部分处的预定浓度，以及通过向晶片供给H2来代替包含在TiN中间膜中的结合分支的第二步骤，第一步骤和第二步骤依次进行。

公开(公告)号：US08366868B2

公开(公告)日：2013-02-05

申请号：US13489018

申请日：2012-06-05

申请人： Kazuyuki Okuda ,  Toru Kagaya ,  Masanori Sakai

发明人： Kazuyuki Okuda ,  Toru Kagaya ,  Masanori Sakai

IPC分类号： C23F1/00 ,  H01L21/306 ,  C23C16/52 ,  C23C16/06 ,  C23C16/22

CPC分类号： B08B5/00 ,  C23C16/4405 ,  C23C16/4412 ,  H01L21/02057 ,  H01L21/67253

摘要： A substrate processing apparatus cleaning method that includes: containing a cleaning gas in a reaction tube without generating a gas flow of the cleaning gas in the reaction tube by supplying the cleaning gas into the reaction tube and by completely stopping exhaustion of the cleaning gas from the reaction tube or by exhausting the cleaning gas at an exhausting rate which substantially does not affect uniform diffusion of the cleaning gas in the reaction tube from at a point of time of a period from a predetermined point of time before the cleaning gas is supplied into the reaction tube to a point of time when several seconds are elapsed after starting of supply of the cleaning gas into the reaction tube; and thereafter exhausting the cleaning gas from the reaction tube.

摘要翻译： 一种基板处理装置的清洗方法，其特征在于，包括：在反应管内容纳清洗气体，在反应管内不产生清洗气体的气流，将清洗气体供给反应管， 反应管或通过以排气速率排出清洁气体，其排气速率基本上不影响清洁气体在反应管中的均匀扩散从在清洁气体被供给到预定时间之前的预定时间点的时间点 反应管到开始向反应管供给清洁气体后经过几秒钟的时间点; 然后从反应管中排出清洗气体。