公开(公告)号：US5179394A

公开(公告)日：1993-01-12

申请号：US616039

申请日：1990-11-20

申请人： Masaru Hoshino ,  Masanori Tanizaki ,  Tsutomu Nishiwaki

发明人： Masaru Hoshino ,  Masanori Tanizaki ,  Tsutomu Nishiwaki

IPC分类号： B41J2/215 ,  B41J2/045 ,  B41J2/055 ,  B41J2/065

CPC分类号： B41J2/065 ,  B41J2002/14322

摘要： In a nozzleless ink jet printer, a plate-shaped propagation element for propagating a surface acoustic wave is fixedly mounted on a substrate which is arranged along the platen and has an ink pooling groove, and the ink led to the edge of the propagation element from the ink pooling groove by surface tension is caused to jet in the form of ink mist by surface acoustic waves generated by excitation of comb-shaped interleaved electrodes so as to record images such as characters and patterns on a recording sheet.

公开(公告)号：US5363131A

公开(公告)日：1994-11-08

申请号：US770814

申请日：1991-10-04

申请人： Kaoru Momose ,  Tsutomu Nishiwaki ,  Masanori Tanizaki ,  Hajime Mizutani

发明人： Kaoru Momose ,  Tsutomu Nishiwaki ,  Masanori Tanizaki ,  Hajime Mizutani

IPC分类号： B41J2/045 ,  B41J2/14

CPC分类号： B41J2/0452 ,  B41J2/04525 ,  B41J2/04551 ,  B41J2/04581 ,  B41J2/04588 ,  B41J2/04593 ,  B41J2/14282 ,  B41J2002/14379

摘要： An ink jet recording head, in which a vibrating element includes electrodes disposed on both surfaces of at least one of its edge portions at a dot forming pitch. A gap forming member is disposed so as to form a gap suitable for producing ink mist on a surface confronting a vibrating surface of the vibrating element. Since the ink is retained in this gap by surface tension, upon application of an alternate voltage to the vibrating element to produce an edge-mode vibration, the vibration produced at a piezoelectric body substrate is transmitted to the ink, propagating through the ink. The vibration propagated up to an interface between the ink and the air is transformed into a surface wave, thereby misting the ink.The thus produced ink mist, having vibrational kinetic energy, splashes in the air and thus forms a dot on a recording sheet. Since the amount of ink adhering to the recording sheet is proportional to an ink mist producing time, the optical density of a dot can be adjusted by controlling the alternate voltage application time.

摘要翻译： 一种喷墨记录头，其中振动元件包括以点形间距设置在至少一个边缘部分的两个表面上的电极。 间隙形成构件被设置成形成适于在面对振动元件的振动表面的表面上产生墨雾的间隙。 由于油墨通过表面张力保持在该间隙中，所以当向振动元件施加交替电压以产生边缘模式振动时，在压电体基板处产生的振动被传递到油墨，通过油墨传播。 传播到油墨和空气之间的界面的振动被转化为表面波，从而使油墨雾化。 由此产生的具有振动动能的墨雾在空气中飞溅，从而在记录纸上形成点。 由于附着在记录纸上的油墨量与油墨雾产生时间成正比，可以通过控制交流电压施加时间来调节点的光密度。

公开(公告)号：US20120026250A1

公开(公告)日：2012-02-02

申请号：US13253896

申请日：2011-10-05

申请人： Shiro Yazaki ,  Setsuya Iwashita ,  Eiju Hirai ,  Tsutomu Nishiwaki

发明人： Shiro Yazaki ,  Setsuya Iwashita ,  Eiju Hirai ,  Tsutomu Nishiwaki

IPC分类号： B41J2/045 ,  B23P17/00

CPC分类号： B41J2/164 ,  B41J2/04 ,  B41J2/055 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49401

摘要： A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.

摘要翻译： 制造液体喷射头的方法包括在通道形成基板上沉积下电极膜并将下电极膜图案化成预定图案，在通道形成基板上形成压电层，在导电材料上形成中间膜 所述压电层在所述中间膜上形成保护膜，并且使用所述保护膜作为掩模，通过将所述压电层与所述中间膜一起蚀刻成预定图案，剥离所述保护膜并沉积上电极膜 在通道形成基板上并将上电极膜图案化成预定图案。

公开(公告)号：US20090213188A1

公开(公告)日：2009-08-27

申请号：US12370898

申请日：2009-02-13

申请人： Masato Shimada ,  Kazushige Hakeda ,  Tsutomu Nishiwaki ,  Eiju Hirai

发明人： Masato Shimada ,  Kazushige Hakeda ,  Tsutomu Nishiwaki ,  Eiju Hirai

IPC分类号： C23F1/02 ,  B41J2/045

CPC分类号： B41J2/161 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419

摘要： A method of manufacturing an actuator apparatus includes forming, on the base plate, a test pattern that is electrically discontinuous with the electrodes of the piezoelectric element and has the same layer as the lower electrode, the test pattern having the lower electrode with the upper electrode and the piezoelectric material layer removed by etching, and measuring electric resistance of the lower electrode of the test pattern to acquire the etch amount of the lower electrode when the piezoelectric element is formed.

摘要翻译： 一种制造致动器装置的方法包括在基板上形成与压电元件的电极不连续的测试图案，并且具有与下电极相同的层，测试图案具有具有上电极的下电极 并且通过蚀刻去除压电材料层，并且测量测试图案的下电极的电阻以获得当形成压电元件时下电极的蚀刻量。

公开(公告)号：US06639340B1

公开(公告)日：2003-10-28

申请号：US09549209

申请日：2000-04-13

申请人： Hong Qiu ,  Koji Sumi ,  Souichi Moriya ,  Masato Shimada ,  Tsutomu Nishiwaki

发明人： Hong Qiu ,  Koji Sumi ,  Souichi Moriya ,  Masato Shimada ,  Tsutomu Nishiwaki

IPC分类号： H01L4108

CPC分类号： H01L41/0805 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/318

摘要： Provided is a method for manufacturing a piezoelectric element that has excellent piezoelectric characteristics and can be made into a thicker film. A piezoelectric thin film is crystallized by a process in which piezoelectric precursor films 4021 through 4025 containing the metal elements of a piezoelectric ceramic are coated with a material, dried, pyrolyzed, and then heat-treated under prescribed conditions in a diffusion furnace. With this method, a piezoelectric thin film can be made into a thicker film without initiating cracking.

摘要翻译： 提供一种压电元件的制造方法，该压电元件具有优异的压电特性，并且可以制成较厚的膜。 压电薄膜通过将包含压电陶瓷的金属元素的压电前体膜4021至4025涂覆材料干燥，热解，然后在扩散炉中在规定条件下进行热处理的方法结晶化。 利用该方法，可以将压电薄膜制成较厚的膜而不引起开裂。

公开(公告)号：US06402304B1

公开(公告)日：2002-06-11

申请号：US09372990

申请日：1999-08-12

申请人： Hong Qiu ,  Koji Sumi ,  Masato Shimada ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhi Quiang Wei

发明人： Hong Qiu ,  Koji Sumi ,  Masato Shimada ,  Tsutomu Nishiwaki ,  Masanori Okuyama ,  Zhi Quiang Wei

IPC分类号： B41J2045

CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1645 ,  B41J2002/14387 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/317

摘要： A piezoelectric actuator, made of a substrate and a piezoelectric film layer resistant to erosion is provided. The area of the piezoelectric actuator can be enlarged, and has a flat top surface. The present invention further provides an ink jet printing head, a printer, a method for manufacturing a piezoelectric actuator, and a method for manufacturing an ink jet printing head. The piezoelectric actuator includes a piezoelectric film disposed between a lower electrode and an upper electrode. Columnar crystal grains of piezoelectric ceramic which compose the piezoelectric actuator are random-oriented in a film thickness direction, and have a mean diameter in the range of 100 nm to 15,000 nm. The method for manufacturing the actuator includes the step of forming precursor films, which are composed of metal and oxygen, over a lower electrode, providing a hydrothermal treatment by dipping the precursor films in an alkaline solution, which as 2 M[mol/l] or less, more preferably 0.1 M[mol/l] or less, concentration of a given alkaline solute, and promoting the crystallization under certain conditions.

摘要翻译： 提供了一种由基片制成的压电致动器和耐腐蚀的压电薄膜层。 压电致动器的面积可以扩大，并且具有平坦的顶表面。 本发明还提供一种喷墨打印头，打印机，压电致动器的制造方法以及喷墨打印头的制造方法。 压电致动器包括设置在下电极和上电极之间的压电膜。 构成压电致动器的压电陶瓷的柱状晶粒在膜厚度方向上是随机取向的，并且具有在100nm至15,000nm范围内的平均直径。 制造致动器的方法包括在下电极上形成由金属和氧构成的前体膜的步骤，通过将前体膜浸入碱溶液中进行水热处理，碱溶液为2M [mol / l] 或更低，更优选0.1M [mol / l]或更低，给定碱性溶质的浓度，并且在某些条件下促进结晶。

公开(公告)号：US06378996B1

公开(公告)日：2002-04-30

申请号：US09712842

申请日：2000-11-15

申请人： Masato Shimada ,  Akira Matsuzawa ,  Yoshinao Miyata ,  Tsutomu Nishiwaki

发明人： Masato Shimada ,  Akira Matsuzawa ,  Yoshinao Miyata ,  Tsutomu Nishiwaki

IPC分类号： B41J2045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/1437 ,  B41J2002/14419 ,  B41J2002/14491

摘要： Disclosed are an ink-jet recording head in which rigidity of a compartment wall is improved and pressure generating chambers are arranged in a high density, a manufacturing method and an ink-jet recording apparatus thereof. An ink-jet recording head includes: a passage-forming substrate 10 having at least silicon layer that consists of single crystal silicon and pressure generating chambers 12 defined thereon, which communicate with a nozzle orifice 21; and a piezoelectric element 300 for generating a pressure change in the pressure generating chamber 12, the piezoelectric element 300 being provided in a region opposite the pressure generating chamber 12 via a vibration plate, which constitutes a portion of the pressure generating chamber 12. The ink-jet recording head further includes a joining plate 20 joined to the passage-forming substrate 10 on the surface where the piezoelectric element 300 is formed, and the nozzle orifice 21 is provided on the joining plate 20.

摘要翻译： 公开了一种喷墨记录头，其中室壁的刚性得到改善，并且压力发生室以高密度排列，其制造方法和喷墨记录装置。喷墨记录头包括：通道 至少具有由限定在其上的单晶硅和压力发生室12构成的硅层的衬底10，其与喷嘴孔21连通; 以及用于在压力发生室12中产生压力变化的压电元件300，压电元件300经由构成压力产生室12的一部分的振动板设置在与压力产生室12相对的区域中。油墨 喷墨记录头还包括在形成压电元件300的表面上连接到通道形成基板10的接合板20，并且喷嘴孔21设置在接合板20上。

公开(公告)号：US06332672B1

公开(公告)日：2001-12-25

申请号：US09069991

申请日：1998-04-30

申请人： Shiro Yazaki ,  Shinri Sakai ,  Tsutomu Nishiwaki

发明人： Shiro Yazaki ,  Shinri Sakai ,  Tsutomu Nishiwaki

IPC分类号： B41J2045

CPC分类号： B41J2/14233 ,  B41J2002/14241 ,  B41J2002/1425 ,  B41J2002/14387

摘要： An ink jet recording head comprises: a passage form substrate having, a diaphragm forming a part of a pressure generating chamber communicating with a nozzle aperture and at least the upper surface of which acts as a lower electrode, and a piezoelectric vibrator including a piezoelectric material layer formed on the surface of the diaphragm, an upper electrode formed on the surface of the piezoelectric material layer and a piezoelectric active part formed in an area opposite to the pressure generating chamber; a cap member joined to the side of the piezoelectric material layer of the passage formed substrate for sealing space in a state in which space to extent that a movement is not prevented is secured; and a flexible portion for absorbing the change of pressure in the space of the cap member.

摘要翻译： 一种喷墨记录头，包括：通道形式基板，具有形成与喷嘴孔连通并且至少其上表面用作下电极的压力发生室的一部分的隔膜，以及包括压电材料的压电振动器 形成在所述隔膜的表面上的上层电极，形成在所述压电体层的表面上的上电极和与所述压力发生室相反的区域形成的压电有源部; 确保在没有防止移动的空间的状态下连接到通道形成基板的压电材料层侧的密封空间的盖构件; 以及用于吸收盖构件的空间中的压力变化的柔性部分。

公开(公告)号：US07992972B2

公开(公告)日：2011-08-09

申请号：US12405984

申请日：2009-03-17

申请人： Toshinao Shinbo ,  Kazushige Hakeda ,  Koji Sumi ,  Tsutomu Nishiwaki

发明人： Toshinao Shinbo ,  Kazushige Hakeda ,  Koji Sumi ,  Tsutomu Nishiwaki

IPC分类号： B41J2/045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  Y10T29/42 ,  Y10T29/49401

摘要： A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.

摘要翻译： 制造压电元件的方法包括：压电层形成工序，依次重复地进行热处理工序，在相对湿度为30〜50％Rh的范围内，将含有铅的压电材料涂布在下电极膜上， 进行热处理以形成压电前体膜和烧结压电前体膜以在下电极膜上形成压电膜的结晶步骤，从而形成压电层。

公开(公告)号：US07725996B2

公开(公告)日：2010-06-01

申请号：US11501032

申请日：2006-08-09

申请人： Xin-Shan Li ,  Tsutomu Nishiwaki

发明人： Xin-Shan Li ,  Tsutomu Nishiwaki

IPC分类号： H02N2/00 ,  H04R17/00 ,  H04R31/00

CPC分类号： H04R17/00 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  H04R31/00 ,  Y10T29/42 ,  Y10T29/49204 ,  Y10T29/49224 ,  Y10T29/49401

摘要： A method for producing an actuator device, comprising the steps of: forming a vibration plate on a substrate; and forming a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode on the vibration plate, wherein in the step of forming the piezoelectric element, the upper electrode is formed on the piezoelectric layer by sputtering, a temperature of 25 to 250 (° C.) and a pressure of 0.4 to 1.5 (Pa) are used during the sputtering, and upon the sputtering, the upper electrode having a thickness of 30 to 100 (nm), stress of 0.3 to 2.0 (GPa), and specific resistance of 2.0 (×10−7 Ω·m) or less is formed.

摘要翻译： 一种制造致动器装置的方法，包括以下步骤：在基板上形成振动板; 以及在振动板上形成由下电极，压电层和上电极组成的压电元件，其中在形成压电元件的步骤中，通过溅射在压电层上形成上电极，温度为25 在溅射期间使用至250（℃）和0.4至1.5（Pa）的压力，并且在溅射时，上电极的厚度为30至100（nm），应力为0.3至2.0（GPa） ，形成电阻2.0（×10-7＆OHgr·m）以下。